JP7210417B2 - 階段構造光学フィルタ - Google Patents

階段構造光学フィルタ Download PDF

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Publication number
JP7210417B2
JP7210417B2 JP2019199619A JP2019199619A JP7210417B2 JP 7210417 B2 JP7210417 B2 JP 7210417B2 JP 2019199619 A JP2019199619 A JP 2019199619A JP 2019199619 A JP2019199619 A JP 2019199619A JP 7210417 B2 JP7210417 B2 JP 7210417B2
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mirror
spacer
filter
stepped
medium
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English (en)
Japanese (ja)
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JP2020071488A5 (https=
JP2020071488A (ja
Inventor
ディー フック ウィリアム
サックス スティーブン
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Viavi Solutions Inc
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Viavi Solutions Inc
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Priority to JP2023002173A priority Critical patent/JP7822974B2/ja
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Priority to JP2024153647A priority patent/JP2024174959A/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/26—Reflecting filters
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8067—Reflectors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2019199619A 2018-11-02 2019-11-01 階段構造光学フィルタ Active JP7210417B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2023002173A JP7822974B2 (ja) 2018-11-02 2023-01-11 階段構造光学フィルタ
JP2024153647A JP2024174959A (ja) 2018-11-02 2024-09-06 階段構造光学フィルタ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/179,480 2018-11-02
US16/179,480 US10962694B2 (en) 2018-11-02 2018-11-02 Stepped structure optical filter

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023002173A Division JP7822974B2 (ja) 2018-11-02 2023-01-11 階段構造光学フィルタ

Publications (3)

Publication Number Publication Date
JP2020071488A JP2020071488A (ja) 2020-05-07
JP2020071488A5 JP2020071488A5 (https=) 2022-05-27
JP7210417B2 true JP7210417B2 (ja) 2023-01-23

Family

ID=68426196

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2019199619A Active JP7210417B2 (ja) 2018-11-02 2019-11-01 階段構造光学フィルタ
JP2023002173A Active JP7822974B2 (ja) 2018-11-02 2023-01-11 階段構造光学フィルタ
JP2024153647A Pending JP2024174959A (ja) 2018-11-02 2024-09-06 階段構造光学フィルタ

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2023002173A Active JP7822974B2 (ja) 2018-11-02 2023-01-11 階段構造光学フィルタ
JP2024153647A Pending JP2024174959A (ja) 2018-11-02 2024-09-06 階段構造光学フィルタ

Country Status (7)

Country Link
US (3) US10962694B2 (https=)
EP (1) EP3647839B1 (https=)
JP (3) JP7210417B2 (https=)
KR (2) KR102565869B1 (https=)
CN (2) CN111142179B (https=)
CA (1) CA3060740A1 (https=)
TW (2) TWI791917B (https=)

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US10962694B2 (en) 2018-11-02 2021-03-30 Viavi Solutions Inc. Stepped structure optical filter
US12392945B2 (en) * 2020-04-28 2025-08-19 Viavi Solutions Inc. Induced transmission filter with hydrogenated silicon, silver, and silicon dioxide
CN111579067B (zh) * 2020-05-22 2023-03-03 中国科学院上海技术物理研究所 一种具有超宽带外截止的集成窄带分光器件
WO2021237567A1 (zh) * 2020-05-28 2021-12-02 深圳市海谱纳米光学科技有限公司 一种可调光学滤波器件和光谱成像系统
EP3943988B1 (en) 2020-07-20 2023-12-27 Samsung Electronics Co., Ltd. Spectral filter, and image sensor and electronic device including the spectral filter
WO2022147920A1 (zh) * 2021-01-11 2022-07-14 苏州联讯仪器有限公司 用于光通信的光波长测量系统
CN113503978A (zh) * 2021-08-16 2021-10-15 苏州联讯仪器有限公司 光通信用光波长测量系统
WO2023027523A1 (ko) * 2021-08-27 2023-03-02 경북대학교 산학협력단 마이크로옵틱 마하젠더 간섭계의 파장대역 특성을 원하는 형상으로 제어하는 방법
KR102727382B1 (ko) * 2021-08-27 2024-11-07 경북대학교 산학협력단 마이크로옵틱 마하젠더 간섭계의 파장대역 특성을 원하는 형상으로 제어하는 방법
CN114236663B (zh) * 2021-12-15 2025-07-25 浙江大学 大面积单片集成的平坦化多通道滤光片阵列及制备方法
CN114551489A (zh) * 2022-02-11 2022-05-27 中国科学院上海技术物理研究所 一种分光与探测一体化的短波红外光谱探测器
CN115831041B (zh) * 2023-01-09 2023-04-18 北京数字光芯集成电路设计有限公司 一种阶梯式线阵MicroLED、扫描装置及扫描方法
CN119779483A (zh) * 2025-01-23 2025-04-08 星遥光宇(常州)科技有限公司 多光谱成像系统的焦面补偿方法、焦面补偿系统

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JP2009545150A (ja) 2006-07-25 2009-12-17 コミッサリヤ ア レネルジ アトミック 光フィルタリングマトリックス構造及び関連する画像センサ
US20120200852A1 (en) 2010-09-10 2012-08-09 Aerospace Missions Corporation Spectroscopy and spectral imaging methods and apparatus
JP2017126742A (ja) 2015-12-29 2017-07-20 ビアビ・ソリューションズ・インコーポレイテッドＶｉａｖｉ Ｓｏｌｕｔｉｏｎｓ Ｉｎｃ． 誘電体ミラーベースのマルチスペクトルフィルタアレイ
JP2018132760A (ja) 2017-02-13 2018-08-23 ヴァイアヴィ・ソリューションズ・インコーポレイテッドＶｉａｖｉ Ｓｏｌｕｔｉｏｎｓ Ｉｎｃ． 偏光フィルタ

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JP2009545150A (ja) 2006-07-25 2009-12-17 コミッサリヤ ア レネルジ アトミック 光フィルタリングマトリックス構造及び関連する画像センサ
US20120200852A1 (en) 2010-09-10 2012-08-09 Aerospace Missions Corporation Spectroscopy and spectral imaging methods and apparatus
JP2017126742A (ja) 2015-12-29 2017-07-20 ビアビ・ソリューションズ・インコーポレイテッドＶｉａｖｉ Ｓｏｌｕｔｉｏｎｓ Ｉｎｃ． 誘電体ミラーベースのマルチスペクトルフィルタアレイ
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Also Published As

Publication number Publication date
US12436328B2 (en) 2025-10-07
JP2024174959A (ja) 2024-12-17
TWI791917B (zh) 2023-02-11
US10962694B2 (en) 2021-03-30
US20200142111A1 (en) 2020-05-07
KR102951105B1 (ko) 2026-04-09
TW202024680A (zh) 2020-07-01
EP3647839A3 (en) 2020-07-29
KR20230118795A (ko) 2023-08-14
US20210199866A1 (en) 2021-07-01
CA3060740A1 (en) 2020-05-02
US11892664B2 (en) 2024-02-06
JP7822974B2 (ja) 2026-03-03
EP3647839A2 (en) 2020-05-06
KR102565869B1 (ko) 2023-08-10
KR20200050882A (ko) 2020-05-12
JP2020071488A (ja) 2020-05-07
CN117031607A (zh) 2023-11-10
EP3647839B1 (en) 2024-10-30
JP2023052306A (ja) 2023-04-11
TWI907760B (zh) 2025-12-11
CN111142179A (zh) 2020-05-12
US20240094450A1 (en) 2024-03-21
TW202316146A (zh) 2023-04-16
CN111142179B (zh) 2023-09-08

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