JP2020047723A - 絶縁ゲートバイポーラトランジスタ - Google Patents
絶縁ゲートバイポーラトランジスタ Download PDFInfo
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- 210000000746 body region Anatomy 0.000 claims abstract description 121
- 239000004065 semiconductor Substances 0.000 claims description 49
- 238000002955 isolation Methods 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 34
- 239000002344 surface layer Substances 0.000 claims description 19
- 239000011229 interlayer Substances 0.000 claims description 17
- 239000012535 impurity Substances 0.000 claims description 16
- 230000004888 barrier function Effects 0.000 description 20
- 238000000926 separation method Methods 0.000 description 12
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Abstract
Description
12 :矩形領域
20 :半導体基板
22 :エミッタ領域
22x :幅広部
22y :幅狭部
24 :ボディコンタクト領域
24x :第1部分
24y :第2部分
24z :第3部分
26 :表層ボディ領域
27 :分離ボディ領域
28 :ピラー領域
30 :バリア領域
32 :下部ボディ領域
34 :ドリフト領域
36 :コレクタ領域
50 :エミッタ電極
60 :コレクタ電極
78 :層間絶縁膜
79 :開口部
80 :ゲート電極
82 :ゲート絶縁膜
91 :トレンチ
Claims (3)
- 絶縁ゲートバイポーラトランジスタであって、
半導体基板と、
前記半導体基板の上面に配置されているエミッタ電極と、
前記半導体基板の下面に配置されているコレクタ電極と、
前記上面において矩形状に延びる矩形トレンチと、
前記矩形トレンチ内に配置されているゲート絶縁膜と、
前記矩形トレンチ内に配置されており、前記矩形トレンチに沿って矩形状に延びており、前記ゲート絶縁膜によって前記半導体基板から絶縁されているゲート電極と、
前記ゲート電極を前記エミッタ電極から絶縁している層間絶縁膜、
を備えており、
前記半導体基板が、
・前記矩形トレンチに囲まれた矩形領域内に配置されており、前記エミッタ電極に接しているn型のエミッタ領域と、
・前記矩形領域内に配置されており、前記エミッタ電極に接しているp型のボディコンタクト領域と、
・前記矩形領域内に配置されており、前記エミッタ電極に接しており、前記ボディコンタクト領域よりもp型不純物濃度が低いp型の表層ボディ領域と、
・前記エミッタ領域、前記ボディコンタクト領域及び前記表層ボディ領域に対して下側から接しており、前記矩形トレンチに接しており、前記ボディコンタクト領域よりもp型不純物濃度が低いp型の分離ボディ領域と、
・前記分離ボディ領域の下側に配置されており、前記分離ボディ領域によって前記エミッタ領域から分離されており、前記矩形トレンチの下端に接しているn型のドリフト領域と、
・前記ドリフト領域の下側に配置されており、前記ドリフト領域によって前記分離ボディ領域から分離されており、前記コレクタ電極に接しているp型のコレクタ領域、
を備えており、
前記矩形トレンチが、前記矩形トレンチの一辺を構成する直線トレンチを備えており、
前記エミッタ領域が、前記直線トレンチに接しており、
前記表層ボディ領域が、前記エミッタ領域に隣接する範囲において前記直線トレンチに接しており、
前記ボディコンタクト領域が、前記直線トレンチの反対側から前記エミッタ領域に接しており、
前記ボディコンタクト領域が、第1部分と、前記第1部分よりも前記エミッタ領域側に突出する第2部分を有しており、
前記第2部分と前記直線トレンチの間の前記エミッタ領域の幅が、前記第1部分と前記直線トレンチの間の前記エミッタ領域の幅よりも狭い、
絶縁ゲートバイポーラトランジスタ。 - 前記ボディコンタクト領域が、前記直線トレンチの反対側から前記表層ボディ領域に接する第3部分を有しており、
前記第3部分と前記直線トレンチの間の前記表層ボディ領域の幅が、前記第2部分と前記直線トレンチの間の前記エミッタ領域の幅よりも広い、
請求項1の絶縁ゲートバイポーラトランジスタ。 - 前記ボディコンタクト領域が、前記直線トレンチに接していない、請求項1または2の絶縁ゲートバイポーラトランジスタ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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JP2018174031A JP7139812B2 (ja) | 2018-09-18 | 2018-09-18 | 絶縁ゲートバイポーラトランジスタ |
US16/536,451 US20200091327A1 (en) | 2018-09-18 | 2019-08-09 | Insulated gate bipolar transistor |
CN201910862120.5A CN110911472A (zh) | 2018-09-18 | 2019-09-12 | 绝缘栅双极型晶体管 |
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JP2018174031A JP7139812B2 (ja) | 2018-09-18 | 2018-09-18 | 絶縁ゲートバイポーラトランジスタ |
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JP2020047723A true JP2020047723A (ja) | 2020-03-26 |
JP7139812B2 JP7139812B2 (ja) | 2022-09-21 |
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JP (1) | JP7139812B2 (ja) |
CN (1) | CN110911472A (ja) |
Citations (7)
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JPH08204190A (ja) * | 1995-01-31 | 1996-08-09 | Nec Kansai Ltd | Mos電界効果トランジスタ |
JP2000269486A (ja) * | 1999-03-15 | 2000-09-29 | Toshiba Corp | 半導体装置 |
JP2001060688A (ja) * | 1999-08-23 | 2001-03-06 | Nec Corp | 半導体装置及びその製造方法 |
JP2006294853A (ja) * | 2005-04-11 | 2006-10-26 | Nec Electronics Corp | 電界効果トランジスタ |
JP2012190938A (ja) * | 2011-03-09 | 2012-10-04 | Toyota Motor Corp | Igbt |
JP2017017222A (ja) * | 2015-07-02 | 2017-01-19 | 株式会社豊田中央研究所 | 半導体装置 |
JP2017107948A (ja) * | 2015-12-08 | 2017-06-15 | トヨタ自動車株式会社 | Igbt |
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JP6135636B2 (ja) * | 2014-10-17 | 2017-05-31 | トヨタ自動車株式会社 | 半導体装置 |
JP6367760B2 (ja) * | 2015-06-11 | 2018-08-01 | トヨタ自動車株式会社 | 絶縁ゲート型スイッチング装置とその製造方法 |
WO2017010393A1 (ja) * | 2015-07-16 | 2017-01-19 | 富士電機株式会社 | 半導体装置および半導体装置の製造方法 |
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JPH08204190A (ja) * | 1995-01-31 | 1996-08-09 | Nec Kansai Ltd | Mos電界効果トランジスタ |
JP2000269486A (ja) * | 1999-03-15 | 2000-09-29 | Toshiba Corp | 半導体装置 |
JP2001060688A (ja) * | 1999-08-23 | 2001-03-06 | Nec Corp | 半導体装置及びその製造方法 |
JP2006294853A (ja) * | 2005-04-11 | 2006-10-26 | Nec Electronics Corp | 電界効果トランジスタ |
JP2012190938A (ja) * | 2011-03-09 | 2012-10-04 | Toyota Motor Corp | Igbt |
JP2017017222A (ja) * | 2015-07-02 | 2017-01-19 | 株式会社豊田中央研究所 | 半導体装置 |
JP2017107948A (ja) * | 2015-12-08 | 2017-06-15 | トヨタ自動車株式会社 | Igbt |
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