JP2019537271A5 - - Google Patents
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- JP2019537271A5 JP2019537271A5 JP2019529208A JP2019529208A JP2019537271A5 JP 2019537271 A5 JP2019537271 A5 JP 2019537271A5 JP 2019529208 A JP2019529208 A JP 2019529208A JP 2019529208 A JP2019529208 A JP 2019529208A JP 2019537271 A5 JP2019537271 A5 JP 2019537271A5
- Authority
- JP
- Japan
- Prior art keywords
- feature
- lithography method
- imprint lithography
- substrate
- size range
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000001459 lithography Methods 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 48
- 239000000758 substrate Substances 0.000 claims description 42
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
- 238000000059 patterning Methods 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 210000001747 pupil Anatomy 0.000 claims 4
- 239000000463 material Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 4
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662429214P | 2016-12-02 | 2016-12-02 | |
| US62/429,214 | 2016-12-02 | ||
| PCT/US2017/051444 WO2018102002A1 (en) | 2016-12-02 | 2017-09-14 | Configuring optical layers in imprint lithography processes |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021127297A Division JP7008157B2 (ja) | 2016-12-02 | 2021-08-03 | インプリントリソグラフィプロセスにおける光学層の構成 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019537271A JP2019537271A (ja) | 2019-12-19 |
| JP2019537271A5 true JP2019537271A5 (https=) | 2020-11-12 |
| JP6925423B2 JP6925423B2 (ja) | 2021-08-25 |
Family
ID=62240094
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019529208A Active JP6925423B2 (ja) | 2016-12-02 | 2017-09-14 | インプリントリソグラフィプロセスにおける光学層の構成 |
| JP2021127297A Active JP7008157B2 (ja) | 2016-12-02 | 2021-08-03 | インプリントリソグラフィプロセスにおける光学層の構成 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021127297A Active JP7008157B2 (ja) | 2016-12-02 | 2021-08-03 | インプリントリソグラフィプロセスにおける光学層の構成 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US10747107B2 (https=) |
| EP (2) | EP4357298A3 (https=) |
| JP (2) | JP6925423B2 (https=) |
| KR (1) | KR102231664B1 (https=) |
| CN (2) | CN110023234B (https=) |
| CA (1) | CA3045096C (https=) |
| IL (1) | IL266851B2 (https=) |
| WO (1) | WO2018102002A1 (https=) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP4357298A3 (en) | 2016-12-02 | 2024-08-07 | Molecular Imprints, Inc. | Configuring optical layers in imprint lithography processes |
| JP6952121B2 (ja) * | 2017-02-01 | 2021-10-20 | モレキュラー インプリンツ， インコーポレイテッドＭｏｌｅｃｕｌａｒ Ｉｍｐｒｉｎｔｓ，Ｉｎｃ． | インプリントリソグラフィプロセスにおける光学層の構成 |
| WO2019079679A1 (en) * | 2017-10-20 | 2019-04-25 | Magic Leap, Inc. | CONFIGURING OPTICAL LAYERS IN PRINTING LITHOGRAPHY METHODS |
| US11249405B2 (en) * | 2018-04-30 | 2022-02-15 | Canon Kabushiki Kaisha | System and method for improving the performance of a nanoimprint system |
| KR101990122B1 (ko) * | 2018-11-21 | 2019-06-19 | 주식회사 기가레인 | 임프린트 리소그래피용 리플리카 몰드 제작 장치 및 그 제작 방법 |
| WO2021174062A1 (en) * | 2020-02-28 | 2021-09-02 | Magic Leap, Inc. | Method of fabricating molds for forming eyepieces with integrated spacers |
| CN117761966A (zh) * | 2020-07-01 | 2024-03-26 | 吉佳蓝科技股份有限公司 | 纳米压印用复制模制作装置 |
| EP4202536B1 (en) * | 2020-08-20 | 2025-07-16 | Toppan Inc. | Diffraction sheet, method for manufacturing same, three-dimensional display device, light-beam reproduction device, three-dimensional space display system, light-beam reproduction method, and program |
| CN114002915B (zh) * | 2021-11-18 | 2024-08-16 | 北京驭光科技发展有限公司 | 压印衬底及压印方法 |
| CN114995055A (zh) * | 2022-08-08 | 2022-09-02 | 歌尔光学科技有限公司 | 一种双面压印方法以及双面压印产品 |
| WO2024123308A1 (en) | 2022-12-05 | 2024-06-13 | Magic Leap, Inc. | Optically functional structures for augmented reality devices |
| CN118782509B (zh) * | 2024-09-13 | 2025-02-07 | 度亘核芯光电技术(苏州)有限公司 | 一种芯片制备方法 |
| CN121325507B (zh) * | 2025-12-15 | 2026-02-24 | 深圳大学 | 一种双面压印成形方法及双面微纳结构元件 |
Family Cites Families (37)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2023510C (en) * | 1989-08-18 | 1994-03-29 | Yuji Ohkura | Single wavelength oscillating semiconductor laser device and method for manufacturing diffraction grating |
| EP0698804A3 (en) * | 1994-08-26 | 1998-09-02 | Omron Corporation | Optical low pass filter, polariser and liquid crystal display devices using such |
| US5544268A (en) * | 1994-09-09 | 1996-08-06 | Deacon Research | Display panel with electrically-controlled waveguide-routing |
| US5907436A (en) * | 1995-09-29 | 1999-05-25 | The Regents Of The University Of California | Multilayer dielectric diffraction gratings |
| US6396559B1 (en) | 1998-11-17 | 2002-05-28 | Sharp Kabushiki Kaisha | LCD including spacers used in combination with polymer walls |
| KR101031528B1 (ko) * | 2000-10-12 | 2011-04-27 | 더 보드 오브 리전츠 오브 더 유니버시티 오브 텍사스 시스템 | 실온 저압 마이크로- 및 나노- 임프린트 리소그래피용템플릿 |
| US7077992B2 (en) | 2002-07-11 | 2006-07-18 | Molecular Imprints, Inc. | Step and repeat imprint lithography processes |
| EP1443344A1 (en) * | 2003-01-29 | 2004-08-04 | Heptagon Oy | Manufacturing micro-structured elements |
| KR100893251B1 (ko) * | 2004-12-03 | 2009-04-17 | 샤프 가부시키가이샤 | 반사 방지재, 광학 소자, 및 표시 장치 및 스탬퍼의 제조방법 및 스탬퍼를 이용한 반사 방지재의 제조 방법 |
| US7573640B2 (en) | 2005-04-04 | 2009-08-11 | Mirage Innovations Ltd. | Multi-plane optical apparatus |
| US20070013293A1 (en) * | 2005-07-12 | 2007-01-18 | Eastman Kodak Company | OLED device having spacers |
| US20070178666A1 (en) * | 2006-01-31 | 2007-08-02 | Stats Chippac Ltd. | Integrated circuit system with waferscale spacer system |
| EP2016620A2 (en) | 2006-04-17 | 2009-01-21 | Omnivision Cdm Optics, Inc. | Arrayed imaging systems and associated methods |
| JP5102609B2 (ja) | 2006-12-28 | 2012-12-19 | 株式会社リコー | 再充填用インク及びインクカートリッジ |
| US7564067B2 (en) * | 2007-03-29 | 2009-07-21 | Eastman Kodak Company | Device having spacers |
| US8293354B2 (en) * | 2008-04-09 | 2012-10-23 | The Regents Of The University Of Michigan | UV curable silsesquioxane resins for nanoprint lithography |
| NL2003179A1 (nl) | 2008-07-18 | 2010-01-19 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method and scatterometry method and measurement system used therein. |
| US20100052216A1 (en) * | 2008-08-29 | 2010-03-04 | Yong Hyup Kim | Nano imprint lithography using an elastic roller |
| US8039399B2 (en) * | 2008-10-09 | 2011-10-18 | Micron Technology, Inc. | Methods of forming patterns utilizing lithography and spacers |
| JP2011071500A (ja) * | 2009-08-31 | 2011-04-07 | Fujifilm Corp | パターン転写装置及びパターン形成方法 |
| BR112012008635A2 (pt) * | 2009-10-14 | 2016-04-19 | Sharp Kk | matriz e método para fabricar matriz, e revestimento anti-reflexão |
| US8427747B2 (en) | 2010-04-22 | 2013-04-23 | 3M Innovative Properties Company | OLED light extraction films laminated onto glass substrates |
| KR101182234B1 (ko) * | 2010-05-28 | 2012-09-12 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
| CN102193310B (zh) * | 2011-05-17 | 2012-09-05 | 西安交通大学 | 一种机床测量用光栅两步固化辊压印成型方法 |
| US9676649B2 (en) | 2011-08-26 | 2017-06-13 | Corning Incorporated | Glass substrates with strategically imprinted B-side features and methods for manufacturing the same |
| US9616614B2 (en) | 2012-02-22 | 2017-04-11 | Canon Nanotechnologies, Inc. | Large area imprint lithography |
| SG10201707599WA (en) * | 2013-03-15 | 2017-10-30 | Richard Harry Turner | A System And Methods For The In Vitro Detection Of Particles And Soluble Chemical Entities In Body Fluids |
| CN105340094B (zh) | 2013-06-20 | 2018-10-12 | 飞利浦照明控股有限公司 | 发光设备 |
| JP6171740B2 (ja) * | 2013-09-02 | 2017-08-02 | セイコーエプソン株式会社 | 光学デバイス及び画像表示装置 |
| JP2015093399A (ja) * | 2013-11-11 | 2015-05-18 | セイコーエプソン株式会社 | 転写用の型、転写用の型を用いた回折格子及び光学装置、転写用の型を用いた凹凸形成方法、並びに凹凸形成方法を用いた回折格子の製造方法 |
| US10677969B2 (en) * | 2013-11-27 | 2020-06-09 | Magic Leap, Inc. | Manufacturing for virtual and augmented reality systems and components |
| EP3521253A1 (en) * | 2013-12-19 | 2019-08-07 | Corning Incorporated | Textured surfaces for display applications |
| CN103996778B (zh) * | 2014-03-14 | 2017-06-13 | 苏州大学 | 一种偏振出光发光二极管 |
| CA3168318A1 (en) * | 2014-09-29 | 2016-04-07 | Magic Leap, Inc. | Architectures and methods for outputting different wavelength light out of waveguides |
| JP6672585B2 (ja) * | 2014-12-15 | 2020-03-25 | 凸版印刷株式会社 | 表示体 |
| US9891436B2 (en) * | 2016-02-11 | 2018-02-13 | Microsoft Technology Licensing, Llc | Waveguide-based displays with anti-reflective and highly-reflective coating |
| EP4357298A3 (en) | 2016-12-02 | 2024-08-07 | Molecular Imprints, Inc. | Configuring optical layers in imprint lithography processes |
-
2017
- 2017-09-14 EP EP24161342.1A patent/EP4357298A3/en active Pending
- 2017-09-14 CA CA3045096A patent/CA3045096C/en active Active
- 2017-09-14 IL IL266851A patent/IL266851B2/en unknown
- 2017-09-14 CN CN201780074523.2A patent/CN110023234B/zh active Active
- 2017-09-14 EP EP17877037.6A patent/EP3548424B1/en active Active
- 2017-09-14 WO PCT/US2017/051444 patent/WO2018102002A1/en not_active Ceased
- 2017-09-14 US US15/704,129 patent/US10747107B2/en active Active
- 2017-09-14 KR KR1020197019075A patent/KR102231664B1/ko active Active
- 2017-09-14 CN CN202410025025.0A patent/CN117806119B/zh active Active
- 2017-09-14 JP JP2019529208A patent/JP6925423B2/ja active Active
-
2020
- 2020-07-21 US US16/934,226 patent/US11048164B2/en active Active
-
2021
- 2021-08-03 JP JP2021127297A patent/JP7008157B2/ja active Active
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