JP2019530981A - Pvdルテニウムを使用した方法及び装置 - Google Patents
Pvdルテニウムを使用した方法及び装置 Download PDFInfo
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- JP2019530981A JP2019530981A JP2019517908A JP2019517908A JP2019530981A JP 2019530981 A JP2019530981 A JP 2019530981A JP 2019517908 A JP2019517908 A JP 2019517908A JP 2019517908 A JP2019517908 A JP 2019517908A JP 2019530981 A JP2019530981 A JP 2019530981A
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- Prior art keywords
- layer
- ruthenium
- temperature
- silicon compound
- substrate
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- 229910052707 ruthenium Inorganic materials 0.000 title claims abstract description 84
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 title claims abstract description 76
- 238000000034 method Methods 0.000 title claims abstract description 35
- 230000004888 barrier function Effects 0.000 claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 150000003377 silicon compounds Chemical class 0.000 claims abstract description 20
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 15
- 125000006850 spacer group Chemical group 0.000 claims abstract description 15
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052743 krypton Inorganic materials 0.000 claims abstract description 12
- -1 ruthenium nitride Chemical class 0.000 claims abstract description 11
- 229920005591 polysilicon Polymers 0.000 claims abstract description 8
- 150000004767 nitrides Chemical class 0.000 claims abstract description 7
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 5
- 238000000137 annealing Methods 0.000 claims description 12
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 10
- 229910008482 TiSiN Inorganic materials 0.000 claims description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910021341 titanium silicide Inorganic materials 0.000 claims description 2
- 229910008484 TiSi Inorganic materials 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 abstract description 6
- 229910010293 ceramic material Inorganic materials 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 14
- 230000008569 process Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 8
- 229910052721 tungsten Inorganic materials 0.000 description 7
- 239000010937 tungsten Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000000231 atomic layer deposition Methods 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000014509 gene expression Effects 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000004151 rapid thermal annealing Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- UGACIEPFGXRWCH-UHFFFAOYSA-N [Si].[Ti] Chemical compound [Si].[Ti] UGACIEPFGXRWCH-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000002294 plasma sputter deposition Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
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- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Electrodes Of Semiconductors (AREA)
- Semiconductor Memories (AREA)
- Physical Vapour Deposition (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
Description
[0040] 図3は、堆積時のルテニウム膜、アニールしたルテニウム膜、及び堆積時のタングステン膜の金属抵抗(μΩ・cm)を膜厚の関数として示したグラフである。アニール後のルテニウムの抵抗は、堆積時のタングステンの抵抗と同様であった。ルテニウム膜は、窒素環境下で約30秒間、約900℃の温度でアニールされた。
Claims (15)
- ゲートスタックを形成する方法であって、
ルテニウムを含むターゲットと、前記ターゲットに対向させてスパッタ堆積される基板を支持するためのペデスタルであって、約350℃以上の温度で高電流静電チャックを備えるペデスタルとを含む、プラズマスパッタチャンバを提供することと、
前記基板上にルテニウム層を堆積するため、前記チャンバにクリプトンを流し込み、クリプトンを励起してプラズマにすることと、
アニールチャンバを提供することと、
約500℃以上の温度で、前記基板上の前記ルテニウム層をアニールすることと、
を含む、方法。 - 前記静電チャックは、約450℃から約550℃の範囲内の温度にある、請求項1に記載の方法。
- 前記静電チャックは高抵抗セラミックを含む、請求項1に記載の方法。
- 前記ルテニウム層のアニール処理が、N2環境下で約30秒間、約900℃の温度で行われる、請求項1に記載の方法。
- 前記ルテニウム層のアニール処理は、前記ルテニウム層を約500℃まで加熱することと、約50℃/秒以上の速度で温度を約900℃まで上げることと、前記温度を約30秒間保持することと、前記温度を約70℃/秒以上の速度で冷却することとを含む、請求項1に記載の方法。
- 前記ルテニウム層は、界面層なしでバリア層の上に直接堆積される、請求項1に記載の方法。
- 前記バリア層は、TiN、TaN、WN又はTiSiNのうちの一又は複数を含む、請求項1から6のいずれか一項に記載の方法。
- 前記バリア層はケイ素化合物層の上に形成される、請求項7に記載の方法。
- 前記ケイ素化合物層は約20Åの厚さを有するTiSiを含む、請求項8に記載の方法。
- 前記ルテニウム層の側面にSiNを含むスペーサ層を形成することを更に含み、前記スペーサ層を形成することは、窒化ルテニウムを実質的に全く形成しない、請求項1に記載の方法。
- ゲートスタックであって、
基板上にポリシリコン層と、
前記ポリシリコン層上にケイ素化合物層と、
前記ケイ素化合物層上にバリア層と、
前記バリア層上にルテニウム層と、
前記ルテニウム層の側面に窒化物を含むスペーサ層とを含み、
前記ルテニウム層は、前記スペーサ層の形成後、窒化ルテニウムを実質的に全く含まない、ゲートスタック。 - 前記ケイ素化合物層は、厚さ約20Åのケイ化チタンを含む、請求項11に記載のゲートスタック。
- 前記バリア層はTiN、TaN、WN又はTiSiNのうちの一又は複数を含む、請求項12に記載のゲートスタック。
- 前記ルテニウム層が、界面層なしで前記バリア層の上に直接形成される、請求項13に記載の方法。
- 前記ルテニウム層と前記バリア層との間に界面層を更に含む、請求項13に記載の方法。
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