JP2019527471A - マイクロデバイスの移動のためのシステム及び方法 - Google Patents
マイクロデバイスの移動のためのシステム及び方法 Download PDFInfo
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Abstract
Description
Claims (15)
- 基板上にマイクロデバイスを位置付けるための装置であって、
移動元基板及び移動先基板を保持するための一又は複数の支持体、
前記移動元基板上のマイクロデバイスに接着剤を供給するための接着剤分注器、
前記移動元基板から前記移動先基板に前記マイクロデバイスを移動させるための移動面を含む移動デバイス、及び、
コントローラであって、
前記移動先基板上での選択されたマイクロデバイス同士の望ましい間隔に基づいて、前記移動元基板上の前記選択されたマイクロデバイスに前記接着剤を選択的に分注するよう、前記接着剤分注器を動作させることと、
前記移動面が、前記選択されたマイクロデバイスを前記移動面に付着させるために前記移動元基板上の前記接着剤に接合し、次いで、前記移動元基板から前記移動先基板に前記選択されたマイクロデバイスを移動させるように、前記移動デバイスを動作させることとを行うよう構成された、コントローラを備える、装置。 - 前記コントローラは、前記移動面が、前記移動先基板に第1のマイクロデバイスを移動させてから、第2のマイクロデバイスが前記第1のマイクロデバイスに隣接するように前記第2のマイクロデバイスを前記移動先基板に移動させるように、前記移動デバイスを動作させるよう構成されており、前記第1のマイクロデバイスと前記第2のマイクロデバイスは両方とも、前記移動先基板上で前記望ましい間隔を有する、請求項1に記載の装置。
- 前記コントローラは、前記第1のマイクロデバイスを第1移動元基板から移動させ、かつ、前記第2のマイクロデバイスを第2移動元基板から移動させるように、前記移動デバイスを動作させるよう構成されている、請求項2に記載の装置。
- 前記移動元基板上の一又は複数の不具合マイクロデバイスを検出するためのセンサを更に含み、前記コントローラは、前記一又は複数の不良マイクロデバイスには前記接着剤が分注されないようにして、前記選択されたマイクロデバイスが前記一又は複数の不良マイクロデバイスを含まないように、前記接着剤を選択的に分注するよう構成されている、請求項1に記載の装置。
- 前記センサが、前記移動元基板上の前記マイクロデバイスを光励起させるよう構成された回路と、前記移動元基板上の前記マイクロデバイスによって発された光を検出するための光学検出器とを備える、請求項4に記載の装置。
- 前記移動面が、前記選択されたマイクロデバイスを受容するための伸縮性フィルムを含み、前記コントローラは、前記移動面が前記移動先基板に前記選択されたマイクロデバイスを移動させた時に前記選択されたマイクロデバイス同士が前記望ましい間隔を有するように、アクチュエータに前記フィルムを伸長させるよう構成されている、請求項1に記載の装置。
- 前記移動デバイスが、前記移動元基板から前記選択されたマイクロデバイスを受容するためのローラを備える、請求項1に記載の装置。
- 前記移動面が、前記移動元基板から前記選択されたマイクロデバイスを受容するための平らな表面を含む、請求項1に記載の装置。
- 前記移動デバイスが、前記移動面が前記移動先基板に前記選択されたマイクロデバイスを移動させる時に前記移動面を加熱するための、加熱素子を含む、請求項1に記載の装置。
- 前記移動デバイスを動作させる前に、選択的に分注された前記接着剤を硬化させるための放射パターンを発する、放射エミッタを更に備える、請求項1に記載の装置。
- 移動先基板にマイクロデバイスを移動させる方法であって、
前記移動先基板上での選択されたマイクロデバイス同士の望ましい間隔に基づいて、移動元基板上の前記選択されたマイクロデバイスに接着剤を選択的に分注することと、
前記選択されたマイクロデバイスを移動面に付着させるために、前記移動元基板上の前記接着剤と前記移動面とを接合させることと、
前記移動面を使用して、かつ、前記移動先基板上での前記選択されたマイクロデバイス同士の前記望ましい間隔にしたがって、前記移動元基板から前記移動先基板に、前記選択されたマイクロデバイスの各々を移動させることとを含む、方法。 - 前記マイクロデバイスが発光ダイオードを含む、請求項11に記載の方法。
- 前記移動元基板上の前記発光ダイオードを光励起させ、前記移動元基板上の一又は複数の不具合マイクロデバイスを検出することと、
前記一又は複数の不具合マイクロデバイスには前記接着剤が分注されないようにして、前記選択されたマイクロデバイスが前記一又は複数の不具合マイクロデバイスを含まないように、前記接着剤を選択的に分注することとを更に含む、請求項12に記載の方法。 - 前記一又は複数の不具合マイクロデバイスの場所に基づいて、前記移動面に前記一又は複数のマイクロデバイスを移動させることを更に含む、請求項13に記載の方法。
- 前記移動面が前記移動先基板に前記選択されたマイクロデバイスを移動させた時に前記選択されたマイクロデバイス同士が前記望ましい間隔を有するようにするために、前記移動面を伸長させることを更に含む、請求項11に記載の方法。
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