JP2019515128A - 炭化タンタルコーティング炭素材料 - Google Patents
炭化タンタルコーティング炭素材料 Download PDFInfo
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- JP2019515128A JP2019515128A JP2018555583A JP2018555583A JP2019515128A JP 2019515128 A JP2019515128 A JP 2019515128A JP 2018555583 A JP2018555583 A JP 2018555583A JP 2018555583 A JP2018555583 A JP 2018555583A JP 2019515128 A JP2019515128 A JP 2019515128A
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- tantalum carbide
- ray diffraction
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- Prior art date
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- 229910003468 tantalcarbide Inorganic materials 0.000 title claims abstract description 64
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 title claims abstract description 56
- 239000003575 carbonaceous material Substances 0.000 title claims abstract description 31
- 238000002441 X-ray diffraction Methods 0.000 claims abstract description 46
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- 239000000126 substance Substances 0.000 abstract description 8
- 238000000034 method Methods 0.000 description 16
- 239000010408 film Substances 0.000 description 15
- 239000013078 crystal Substances 0.000 description 14
- 239000007789 gas Substances 0.000 description 13
- 230000007797 corrosion Effects 0.000 description 7
- 238000005260 corrosion Methods 0.000 description 7
- 230000008016 vaporization Effects 0.000 description 7
- 238000000151 deposition Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000009834 vaporization Methods 0.000 description 6
- 230000035939 shock Effects 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005336 cracking Methods 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000010977 jade Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000000634 powder X-ray diffraction Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000002233 thin-film X-ray diffraction Methods 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/05—Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/914—Carbides of single elements
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G35/00—Compounds of tantalum
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
- C01P2002/72—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
- C01P2002/74—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by peak-intensities or a ratio thereof only
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
- Carbon And Carbon Compounds (AREA)
Abstract
Description
Claims (6)
- 炭素基材及び前記炭素基材上に形成された炭化タンタルコーティング面を含み、前記炭化タンタルコーティング面の、111面、200面、220面、及び311面のX線回折ピークを主ピークとして有し、前記ピークのうち前記111面のピークが最大の回折強度を有する、炭化タンタルコーティング炭素材料。
- 前記200面、220及び311面のX線回折ピークのいずれか1つのX線回折ピークの回折強度/111面のX線回折ピークの回折強度は0.6〜0.9である、請求項1に記載の炭化タンタルコーティング炭素材料。
- 前記220又は311面のX線回折ピークの回折強度/200面のX線回折ピークの回折強度は0.6〜1である、請求項1に記載の炭化タンタルコーティング炭素材料。
- 前記200面、220及び311面のX線回折ピークのいずれか1つのピーク面積/111面のX線回折ピークの面積は0.6〜0.9である、請求項1に記載の炭化タンタルコーティング炭素材料。
- 前記220又は311面のX線回折ピークの面積/200面のX線回折ピークの面積は0.6〜1である、請求項1に記載の炭化タンタルコーティング炭素材料。
- 前記111面のピークの2θ値は34°〜35°である、請求項1に記載の炭化タンタルコーティング炭素材料。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2016-0064255 | 2016-05-25 | ||
KR1020160064255A KR101824883B1 (ko) | 2016-05-25 | 2016-05-25 | 탄화탄탈 코팅 탄소 재료 |
PCT/KR2017/005358 WO2017204534A1 (ko) | 2016-05-25 | 2017-05-24 | 탄화탄탈 코팅 탄소 재료 |
Publications (2)
Publication Number | Publication Date |
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JP2019515128A true JP2019515128A (ja) | 2019-06-06 |
JP6854297B2 JP6854297B2 (ja) | 2021-04-07 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2018555583A Active JP6854297B2 (ja) | 2016-05-25 | 2017-05-24 | 炭化タンタルコーティング炭素材料 |
Country Status (7)
Country | Link |
---|---|
US (1) | US11279620B2 (ja) |
EP (1) | EP3466874A4 (ja) |
JP (1) | JP6854297B2 (ja) |
KR (1) | KR101824883B1 (ja) |
CN (1) | CN109153571B (ja) |
TW (1) | TWI681928B (ja) |
WO (1) | WO2017204534A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020517574A (ja) * | 2017-04-28 | 2020-06-18 | トカイ カーボン コリア カンパニー,リミティド | TaCを含んでいるコーティング層を有する炭素材料及びその製造方法 |
JP2020517571A (ja) * | 2017-04-28 | 2020-06-18 | トカイ カーボン コリア カンパニー,リミティド | TaCを含んでいるコーティング層を有する炭素材料及びその製造方法 |
JP2022087846A (ja) * | 2020-12-01 | 2022-06-13 | トカイ カーボン コリア カンパニー,リミティド | 炭化タンタルコーティング炭素材料及びその製造方法 |
JP2022087844A (ja) * | 2020-12-01 | 2022-06-13 | トカイ カーボン コリア カンパニー,リミティド | 炭化タンタル複合材 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111825478B (zh) * | 2020-09-21 | 2020-12-08 | 中电化合物半导体有限公司 | 基于多孔碳材料的碳化钽涂层及其制备方法 |
DE102022207893A1 (de) | 2022-07-29 | 2024-02-01 | Sgl Carbon Se | Substrat, umfassend eine tantalbeschichtung |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004084057A (ja) * | 2002-06-28 | 2004-03-18 | Ibiden Co Ltd | 炭素複合材料 |
JP2013075814A (ja) * | 2011-09-14 | 2013-04-25 | Toyota Central R&D Labs Inc | 高耐熱部材、その製造方法、黒鉛ルツボおよび単結晶インゴットの製造方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5275567B2 (ja) * | 2005-02-14 | 2013-08-28 | 東洋炭素株式会社 | 炭化タンタル被覆炭素材料およびその製造方法 |
CN1329343C (zh) * | 2005-06-07 | 2007-08-01 | 中国科学院山西煤炭化学研究所 | 模压成型制备碳化钽/炭复合材料的方法 |
KR101100041B1 (ko) | 2009-09-02 | 2011-12-29 | 주식회사 티씨케이 | 엘이디 제조 장비용 서셉터의 제조방법 |
EP2520691B1 (en) * | 2009-12-28 | 2022-08-10 | Toyo Tanso Co., Ltd. | Tantalum carbide-coated carbon material and manufacturing method for same |
CN102295474B (zh) | 2011-06-10 | 2013-04-17 | 中南大学 | 一种SiC-TaC涂层/基体协同改性C/C复合材料制备方法 |
JP6196246B2 (ja) * | 2013-02-06 | 2017-09-13 | 東洋炭素株式会社 | 炭化ケイ素−炭化タンタル複合材及びサセプタ |
KR101591050B1 (ko) * | 2015-08-03 | 2016-02-02 | 임광현 | 탄소 함유 소재에 초고온 세라믹의 코팅 방법 |
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2016
- 2016-05-25 KR KR1020160064255A patent/KR101824883B1/ko active IP Right Grant
-
2017
- 2017-05-24 US US16/098,568 patent/US11279620B2/en active Active
- 2017-05-24 WO PCT/KR2017/005358 patent/WO2017204534A1/ko unknown
- 2017-05-24 CN CN201780023205.3A patent/CN109153571B/zh active Active
- 2017-05-24 JP JP2018555583A patent/JP6854297B2/ja active Active
- 2017-05-24 EP EP17803053.2A patent/EP3466874A4/en active Pending
- 2017-05-25 TW TW106117361A patent/TWI681928B/zh active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004084057A (ja) * | 2002-06-28 | 2004-03-18 | Ibiden Co Ltd | 炭素複合材料 |
JP2013075814A (ja) * | 2011-09-14 | 2013-04-25 | Toyota Central R&D Labs Inc | 高耐熱部材、その製造方法、黒鉛ルツボおよび単結晶インゴットの製造方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020517574A (ja) * | 2017-04-28 | 2020-06-18 | トカイ カーボン コリア カンパニー,リミティド | TaCを含んでいるコーティング層を有する炭素材料及びその製造方法 |
JP2020517571A (ja) * | 2017-04-28 | 2020-06-18 | トカイ カーボン コリア カンパニー,リミティド | TaCを含んでいるコーティング層を有する炭素材料及びその製造方法 |
JP7250699B2 (ja) | 2017-04-28 | 2023-04-03 | トカイ カーボン コリア カンパニー,リミティド | TaCを含んでいるコーティング層を有する炭素材料及びその製造方法 |
JP2022087846A (ja) * | 2020-12-01 | 2022-06-13 | トカイ カーボン コリア カンパニー,リミティド | 炭化タンタルコーティング炭素材料及びその製造方法 |
JP2022087844A (ja) * | 2020-12-01 | 2022-06-13 | トカイ カーボン コリア カンパニー,リミティド | 炭化タンタル複合材 |
JP7274556B2 (ja) | 2020-12-01 | 2023-05-16 | トカイ カーボン コリア カンパニー,リミティド | 炭化タンタルコーティング炭素材料及びその製造方法 |
JP7382377B2 (ja) | 2020-12-01 | 2023-11-16 | トカイ カーボン コリア カンパニー,リミティド | 炭化タンタル複合材 |
Also Published As
Publication number | Publication date |
---|---|
EP3466874A1 (en) | 2019-04-10 |
CN109153571A (zh) | 2019-01-04 |
CN109153571B (zh) | 2022-07-12 |
TWI681928B (zh) | 2020-01-11 |
JP6854297B2 (ja) | 2021-04-07 |
EP3466874A4 (en) | 2020-01-22 |
KR20170133155A (ko) | 2017-12-05 |
KR101824883B1 (ko) | 2018-02-02 |
TW201815672A (zh) | 2018-05-01 |
US11279620B2 (en) | 2022-03-22 |
WO2017204534A1 (ko) | 2017-11-30 |
US20200216319A1 (en) | 2020-07-09 |
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