JP7274556B2 - 炭化タンタルコーティング炭素材料及びその製造方法 - Google Patents
炭化タンタルコーティング炭素材料及びその製造方法 Download PDFInfo
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Description
従来技術に係る炭化タンタルコーティング炭素材料と本発明の一実施形態に係る炭化タンタルコーティング炭素材料の炭化タンタルコーティング層のマイクロクラックの形状及び前記炭化タンタルコーティング炭素材料を単結晶SiC成長工程に使用した後、炭素基材の損傷度を比較観測した。
炭化タンタルコーティング層の厚さ変化によるマイクロクラック幅の変化を観測するために、炭素基材の表面の粗さ及び炭化タンタルの浸透の深さを一定に固定した状態で、炭化タンタルコーティング層の厚さのみを変化させて炭化タンタルコーティング炭素材料を製造してから、発生したマイクロクラックの幅を測定した。
炭素基材の表面の粗さ(Ra)変化によるマイクロクラック幅の変化を観測するために、炭化タンタルコーティング層の厚さ、及び炭化タンタルの浸透の深さを一定に固定した状態で炭素基材の表面の粗さ(Ra)のみを変化させ、炭化タンタルコーティング炭素材料を製造した後、発生したマイクロクラックの幅を測定した。炭素基材の表面の粗さは、炭素基材の表面をレーザ顕微鏡で非接触3D測定システムを用いて50倍率で観察して測定面積の粗さを測定した(モデル名:KEYENCE、VK-X1100、プログラム名:LS_Vkxz)。
炭化タンタル浸透の深さ変化によるマイクロクラック幅の変化を観測するために、炭化タンタルコーティング層の厚さ及び炭素基材の表面の粗さを一定に固定した状態で炭化タンタルの浸透の深さのみを変化させて炭化タンタルコーティング炭素材料を製造した後、発生したマイクロクラックの幅を測定した。
炭素基材の表面の粗さ及び炭化タンタル浸透の深さが改善された条件で一定に固定し、炭化タンタルコーティング層の厚さをそれぞれ相違にして炭化タンタルコーティング炭素材料を製造した後、発生したマイクロクラックの幅を測定した。
マイクロクラックによる炭素基材の損傷程度を確認するために、酸火鉢で酸化テストを実施した。各条件ごとの試片を製造してテストを実施し、テスト試片の大きさは20mm×20mm×2tである。
Claims (9)
- 炭素基材と、
前記炭素基材上に形成された炭化タンタルコーティング層と、を含み、
前記炭化タンタルコーティング層に含まれている最大マイクロクラックの幅は、1.5μm~2.6μmであり、
前記炭素基材は表面気孔を含み、
炭素基材の表面気孔を通じて前記炭素基材内に炭化タンタルが浸透され、
前記炭化タンタルの浸透の深さは、30μm~150μmである、炭化タンタルコーティング炭素材料。 - 前記炭素基材は、グラフェン、黒鉛及びフラーレンからなる群より選択される1つ以上を含む、請求項1に記載の炭化タンタルコーティング炭素材料。
- 前記炭素基材の熱膨張係数は、4.0×10-6/℃~5.0×10-6/℃である、請求項1に記載の炭化タンタルコーティング炭素材料。
- 前記炭素基材の表面の粗さ(Ra)は、0.6μm~10μmである、請求項1に記載の炭化タンタルコーティング炭素材料。
- 前記炭素基材は、表面前処理されたものであり、
前記前処理は、プラズマ処理、音波処理、酸(acid)処理、サンドブラスト及び研磨処理からなる群より選択される1つ以上を含む、請求項1に記載の炭化タンタルコーティング炭素材料。 - 前記炭素基材の表面気孔は、1μm~50μmの直径を有する、請求項1に記載の炭化タンタルコーティング炭素材料。
- 前記炭化タンタルコーティング層の厚さは、10μm~35μmである、請求項1に記載の炭化タンタルコーティング炭素材料。
- 炭素基材を準備するステップと、
前記炭素基材上にCVD方式で炭化タンタルコーティング層を形成させるステップと、を含み、
前記炭素基材上にCVD方式で炭化タンタルコーティング層を形成させるステップでは、前記炭素基材の表面気孔を通じて、前記炭素基材の内部に炭化タンタルが浸透され、
前記炭化タンタルコーティング層の厚さは、10μm~35μmであり、
前記炭素基材の表面の粗さ(Ra)は、0.6μm~10μmであり、
前記炭化タンタルの浸透の深さは30μm~150μmであり、
前記炭化タンタルコーティング層に含まれている最大マイクロクラックの幅は、1.5μm~2.6μmである、炭化タンタルコーティング炭素材料の製造方法。 - 前記炭素基材を準備するステップの後に、前記炭素基材の表面をプラズマ処理、音波処理、酸処理、サンドブラスト、及び研磨処理からなる群より選択される1つ以上の方法で前処理するステップをさらに含む、請求項8に記載の炭化タンタルコーティング炭素材料の製造方法。
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