JP2022087844A - 炭化タンタル複合材 - Google Patents
炭化タンタル複合材 Download PDFInfo
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- 229910003468 tantalcarbide Inorganic materials 0.000 title claims abstract description 92
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 title claims abstract description 82
- 239000002131 composite material Substances 0.000 title claims abstract description 36
- 238000000034 method Methods 0.000 claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 25
- 239000013078 crystal Substances 0.000 claims description 13
- 238000002441 X-ray diffraction Methods 0.000 claims description 9
- 230000037303 wrinkles Effects 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 229910002804 graphite Inorganic materials 0.000 claims description 5
- 239000010439 graphite Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 abstract description 16
- 238000001179 sorption measurement Methods 0.000 abstract description 5
- 230000005855 radiation Effects 0.000 abstract description 4
- 238000009529 body temperature measurement Methods 0.000 abstract description 2
- 230000008021 deposition Effects 0.000 abstract description 2
- 239000002344 surface layer Substances 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 26
- 230000000052 comparative effect Effects 0.000 description 13
- 239000002245 particle Substances 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000001878 scanning electron micrograph Methods 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000003575 carbonaceous material Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000000407 epitaxy Methods 0.000 description 3
- 238000004886 process control Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 241000976924 Inca Species 0.000 description 1
- 235000012308 Tagetes Nutrition 0.000 description 1
- 241000736851 Tagetes Species 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
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Abstract
Description
(Iは、XRD回折分析で回折強度である)
TaCをグラファイト基材上にCVD蒸着法に基づいて蒸着した。
TaCをグラファイト基材上にCVD蒸着法に基づいて蒸着した。
(1)表面の微細構造の分析
実施例及び比較例において製造されたTaCの表面の微細構造をSEMで観察し、その結果を表1及び図1~図3に示した。また、表1において、Ta及びCの組成比はEDSで測定したデータであり、Atomic%基準である(モデル名:Oxford INCA x-act)。
実施例及び比較例で製造されたTaCのXRDを測定して図5~図7に示し、XRDグラフで式1による優先成長ピークと主成長ピークの強度比を計算して表2に示した。成長方向に対する分析は、XRD設備(製造会社:Rigaku/モデル名:Ultima IV)を用いて各方向のピーク強度を測定し、測定条件は、測定角度10°~80°、スキャン速度10、スキャン幅0.2、及び測定パワー40kV、40mAである。
接触角測定装置(製造会社:Dataphysics Instruments/モデル名:OCA20)を用いて水滴接触角を測定し、TaCの表面に異物の吸着有無を判別して表2及び図4に示した。
Claims (12)
- 基材と、
前記基材上に形成された炭化タンタル層と、を含み、
前記炭化タンタル膜の表面の接触角が50°以上である、炭化タンタル複合材。 - 前記炭化タンタル膜の表面の接触角は、65°~76°である、請求項1に記載の炭化タンタル複合材。
- 前記炭化タンタル膜は、X線回折分析で(111)面の優先成長である、請求項1に記載の炭化タンタル複合材。
- 前記炭化タンタル膜は、(111)、(200)、(220)、(311)及び(222)面のX線回折ピークを主ピークとして含み、下記の関係式(1)による回折強度比は1.5以上である、請求項1に記載の炭化タンタル複合材。
I(111)/I((200)+(220)+(311)+(222)) (1) - 前記炭化タンタル膜は、(111)、(200)、(220)、(311)及び(222)面のX線回折ピークを主ピークとして含み、下記の関係式(1)による回折強度比は1.8~2.5である、請求項1に記載の炭化タンタル複合材。
I(111)/I((200)+(220)+(311)+(222)) (1) - 前記炭化タンタル膜のうち、Ta対Cの原子比は、0.9~1.34である、請求項1に記載の炭化タンタル複合材。
- 前記炭化タンタル膜は、CVDで形成されるものである、請求項1に記載の炭化タンタル複合材。
- 前記炭化タンタル膜は、結晶粒系表面の単位面積(μm2)当たり30個以下のシワ模様を含む、請求項1に記載の炭化タンタル複合材。
- 前記炭化タンタル膜は、10μm~50μmの厚さを含む、請求項1に記載の炭化タンタル複合材。
- 前記基材の厚さ対前記基材の一面に形成されている前記炭化タンタル膜の厚さの比は、2000:1~100:1である、請求項1に記載の炭化タンタル複合材。
- 前記基材は黒鉛を含む、請求項1に記載の炭化タンタル複合材。
- 前記炭化タンタル複合材は、単結晶SiC/AlNエピタキシ(SiC/AlNエピタキシ)及びSiC/AlN成長(SiC/AlN Growth)工程設備に用いられる装置の部品である、請求項1に記載の炭化タンタル複合材。
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EP (1) | EP4008804A1 (ja) |
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2004084057A (ja) * | 2002-06-28 | 2004-03-18 | Ibiden Co Ltd | 炭素複合材料 |
WO2006085635A1 (ja) * | 2005-02-14 | 2006-08-17 | Toyo Tanso Co., Ltd. | 炭化タンタル被覆炭素材料およびその製造方法 |
JP2006348388A (ja) * | 2002-06-28 | 2006-12-28 | Ibiden Co Ltd | 炭素複合材料 |
JP2019515128A (ja) * | 2016-05-25 | 2019-06-06 | トーカイ カーボン コリア シーオー エルティディTOKAI CARBON KOREA Co., Ltd. | 炭化タンタルコーティング炭素材料 |
JP2019099453A (ja) * | 2017-12-04 | 2019-06-24 | 信越化学工業株式会社 | 炭化タンタル被覆炭素材料及びその製造方法、半導体単結晶製造装置用部材 |
JP2019108611A (ja) * | 2017-12-19 | 2019-07-04 | トーカイ カーボン コリア カンパニー.,リミテッド | CVDを用いたTaCコーティング層の製造方法及びそれを用いて製造したTaCの物性 |
JP2020517574A (ja) * | 2017-04-28 | 2020-06-18 | トカイ カーボン コリア カンパニー,リミティド | TaCを含んでいるコーティング層を有する炭素材料及びその製造方法 |
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WO2004016548A2 (en) * | 2002-08-14 | 2004-02-26 | Applied Thin Films, Inc. | Aluminum phosphate compounds, compositions, materials and related composites. |
KR20190065941A (ko) * | 2017-12-04 | 2019-06-12 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 탄화탄탈 피복 탄소 재료 및 그 제조 방법, 반도체 단결정 제조 장치용 부재 |
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JP2004084057A (ja) * | 2002-06-28 | 2004-03-18 | Ibiden Co Ltd | 炭素複合材料 |
JP2006348388A (ja) * | 2002-06-28 | 2006-12-28 | Ibiden Co Ltd | 炭素複合材料 |
WO2006085635A1 (ja) * | 2005-02-14 | 2006-08-17 | Toyo Tanso Co., Ltd. | 炭化タンタル被覆炭素材料およびその製造方法 |
JP2019515128A (ja) * | 2016-05-25 | 2019-06-06 | トーカイ カーボン コリア シーオー エルティディTOKAI CARBON KOREA Co., Ltd. | 炭化タンタルコーティング炭素材料 |
JP2020517574A (ja) * | 2017-04-28 | 2020-06-18 | トカイ カーボン コリア カンパニー,リミティド | TaCを含んでいるコーティング層を有する炭素材料及びその製造方法 |
JP2019099453A (ja) * | 2017-12-04 | 2019-06-24 | 信越化学工業株式会社 | 炭化タンタル被覆炭素材料及びその製造方法、半導体単結晶製造装置用部材 |
JP2019108611A (ja) * | 2017-12-19 | 2019-07-04 | トーカイ カーボン コリア カンパニー.,リミテッド | CVDを用いたTaCコーティング層の製造方法及びそれを用いて製造したTaCの物性 |
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EP4008804A1 (en) | 2022-06-08 |
US20220170149A1 (en) | 2022-06-02 |
TW202223142A (zh) | 2022-06-16 |
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