JP2019510364A - カチオン重合体助剤を含む研磨組成物 - Google Patents
カチオン重合体助剤を含む研磨組成物 Download PDFInfo
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- 238000005498 polishing Methods 0.000 title claims abstract description 167
- 239000000203 mixture Substances 0.000 title claims abstract description 119
- 229920006317 cationic polymer Polymers 0.000 title claims abstract description 38
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims abstract description 71
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims abstract description 69
- 239000000758 substrate Substances 0.000 claims abstract description 55
- 238000000034 method Methods 0.000 claims abstract description 52
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 31
- 229920003118 cationic copolymer Polymers 0.000 claims abstract description 26
- -1 heteroaromatic carboxylic acid Chemical class 0.000 claims abstract description 22
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 claims abstract description 21
- 239000000126 substance Substances 0.000 claims abstract description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims abstract description 4
- SIOXPEMLGUPBBT-UHFFFAOYSA-N picolinic acid Chemical compound OC(=O)C1=CC=CC=N1 SIOXPEMLGUPBBT-UHFFFAOYSA-N 0.000 claims description 22
- 229920001577 copolymer Polymers 0.000 claims description 12
- 229940081066 picolinic acid Drugs 0.000 claims description 11
- 229920000877 Melamine resin Polymers 0.000 claims description 9
- IVJISJACKSSFGE-UHFFFAOYSA-N formaldehyde;1,3,5-triazine-2,4,6-triamine Chemical group O=C.NC1=NC(N)=NC(N)=N1 IVJISJACKSSFGE-UHFFFAOYSA-N 0.000 claims description 6
- 238000006116 polymerization reaction Methods 0.000 claims description 4
- 125000002485 formyl group Chemical class [H]C(*)=O 0.000 claims description 3
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 claims description 3
- WJJMNDUMQPNECX-UHFFFAOYSA-N dipicolinic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=N1 WJJMNDUMQPNECX-UHFFFAOYSA-N 0.000 claims 4
- 239000002245 particle Substances 0.000 description 21
- 229920003263 Saduren® Polymers 0.000 description 14
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 12
- 239000003795 chemical substances by application Substances 0.000 description 8
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- 239000003139 biocide Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000003115 biocidal effect Effects 0.000 description 5
- 239000012141 concentrate Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 5
- 239000003002 pH adjusting agent Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000002253 acid Substances 0.000 description 4
- 229910000420 cerium oxide Inorganic materials 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 150000007513 acids Chemical class 0.000 description 3
- 239000000084 colloidal system Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- NLKNQRATVPKPDG-UHFFFAOYSA-M potassium iodide Chemical compound [K+].[I-] NLKNQRATVPKPDG-UHFFFAOYSA-M 0.000 description 3
- 239000002002 slurry Substances 0.000 description 3
- 229910052684 Cerium Inorganic materials 0.000 description 2
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- KFSLWBXXFJQRDL-UHFFFAOYSA-N Peracetic acid Chemical compound CC(=O)OO KFSLWBXXFJQRDL-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- KKEYFWRCBNTPAC-UHFFFAOYSA-N Terephthalic acid Chemical compound OC(=O)C1=CC=C(C(O)=O)C=C1 KKEYFWRCBNTPAC-UHFFFAOYSA-N 0.000 description 2
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 2
- 239000008139 complexing agent Substances 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- QQVIHTHCMHWDBS-UHFFFAOYSA-N isophthalic acid Chemical compound OC(=O)C1=CC=CC(C(O)=O)=C1 QQVIHTHCMHWDBS-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- XNGIFLGASWRNHJ-UHFFFAOYSA-N phthalic acid Chemical compound OC(=O)C1=CC=CC=C1C(O)=O XNGIFLGASWRNHJ-UHFFFAOYSA-N 0.000 description 2
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- OVSKIKFHRZPJSS-UHFFFAOYSA-N 2,4-D Chemical compound OC(=O)COC1=CC=C(Cl)C=C1Cl OVSKIKFHRZPJSS-UHFFFAOYSA-N 0.000 description 1
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 1
- 239000005711 Benzoic acid Substances 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 239000000908 ammonium hydroxide Substances 0.000 description 1
- 229920006318 anionic polymer Polymers 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 235000010233 benzoic acid Nutrition 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 125000002091 cationic group Chemical group 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 229960001759 cerium oxalate Drugs 0.000 description 1
- ZMZNLKYXLARXFY-UHFFFAOYSA-H cerium(3+);oxalate Chemical compound [Ce+3].[Ce+3].[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O.[O-]C(=O)C([O-])=O ZMZNLKYXLARXFY-UHFFFAOYSA-H 0.000 description 1
- 229910000421 cerium(III) oxide Inorganic materials 0.000 description 1
- UNJPQTDTZAKTFK-UHFFFAOYSA-K cerium(iii) hydroxide Chemical compound [OH-].[OH-].[OH-].[Ce+3] UNJPQTDTZAKTFK-UHFFFAOYSA-K 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- MVFCKEFYUDZOCX-UHFFFAOYSA-N iron(2+);dinitrate Chemical compound [Fe+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MVFCKEFYUDZOCX-UHFFFAOYSA-N 0.000 description 1
- MGIYRDNGCNKGJU-UHFFFAOYSA-N isothiazolinone Chemical compound O=C1C=CSN1 MGIYRDNGCNKGJU-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
- 239000012286 potassium permanganate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000001698 pyrogenic effect Effects 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 239000002455 scale inhibitor Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1409—Abrasive particles per se
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
- B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G12/00—Condensation polymers of aldehydes or ketones with only compounds containing hydrogen attached to nitrogen
- C08G12/02—Condensation polymers of aldehydes or ketones with only compounds containing hydrogen attached to nitrogen of aldehydes
- C08G12/40—Chemically modified polycondensates
- C08G12/42—Chemically modified polycondensates by etherifying
- C08G12/424—Chemically modified polycondensates by etherifying of polycondensates based on heterocyclic compounds
- C08G12/425—Chemically modified polycondensates by etherifying of polycondensates based on heterocyclic compounds based on triazines
- C08G12/427—Melamine
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
- C08L61/20—Condensation polymers of aldehydes or ketones with only compounds containing hydrogen attached to nitrogen
- C08L61/26—Condensation polymers of aldehydes or ketones with only compounds containing hydrogen attached to nitrogen of aldehydes with heterocyclic compounds
- C08L61/28—Condensation polymers of aldehydes or ketones with only compounds containing hydrogen attached to nitrogen of aldehydes with heterocyclic compounds with melamine
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/31051—Planarisation of the insulating layers
- H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step
Abstract
Description
集積回路の作製において、化学機械研磨(CMP)プロセスは典型的には、半導体装置構造のための平らな表面を形成するために利用される。研磨組成物(研磨スラリーとしても既知)は典型的には、他の化学的構成要素とともに液体担体中に摩耗材料を含有し、表面を、研磨組成物で飽和させた回転研磨パッドと接触させることによって当該表面へ適用される。化学的構成要素は、基材の少なくとも一部を化学的に改質して、摩耗及び研磨パッドの組み合わせによる物理的除去を促進する。いくつかの場合、当該化学的構成要素は、材料の除去も促進することがある。
本実施例は、湿式プロセスセリアを含む研磨組成物によって呈されるTEOS除去速度に及ぼす水溶性カチオン重合体の効果を実証する。
本実施例は、湿式プロセスセリアを含む研磨組成物によって呈される平面化効率に及ぼす水溶性カチオン重合体の効果を実証する。
本実施例は、湿式プロセスセリアを含む研磨組成物によって呈される平面化効率に及ぼすメチル化したメラミン−ホルムアルデヒド共重合体の効果を実証する。
本実施例は、「1パック」系及び「2パック」系の両方において湿式プロセスセリアを含む研磨組成物によって呈される平面化効率に及ぼすメチル化したメラミン−ホルムアルデヒド共重合体の効果を実証する。
本実施例は、湿式プロセスセリアを含む研磨組成物によって呈される平面化効率に及ぼす水溶性カチオン重合体の効果を実証する。
Claims (15)
- 化学機械研磨組成物であって、
(a)湿式プロセスセリアと、
(b)水溶性カチオン重合体または水溶性カチオン共重合体と、
(c)芳香族カルボン酸またはヘテロ芳香族カルボン酸と、
(d)水と、
を含み、約3〜約6のpHを有する、研磨組成物。 - 前記研磨組成物が、約0.05重量%〜約2重量%の湿式プロセスセリアを含む、請求項1に記載の研磨組成物。
- 前記水溶性カチオン重合体が、メラミンまたはそのハロゲン化誘導体とアルデヒドとの重合から調製された架橋性カチオン共重合体である、請求項1に記載の研磨組成物。
- 前記水溶性カチオン重合体が、メラミン−ホルムアルデヒド共重合体である、請求項3に記載の研磨組成物。
- 前記メラミン−ホルムアルデヒド共重合体が、メチル化したメラミン−ホルムアルデヒド共重合体である、請求項4に記載の研磨組成物。
- 前記研磨組成物が、約50ppm〜約200ppmの前記水溶性カチオン重合体または前記水溶性カチオン共重合体を含む、請求項1に記載の研磨組成物。
- 前記芳香族カルボン酸またはヘテロ芳香族カルボン酸が、ピコリン酸またはジピコリン酸である、請求項1に記載の研磨組成物。
- 基材を化学的機械的に研磨する方法であって、
(i)基材を、研磨パッド及び
(a)湿式プロセスセリアと、
(b)水溶性カチオン重合体または水溶性カチオン共重合体と、
(c)芳香族カルボン酸またはヘテロ芳香族カルボン酸と、
(d)水と、
を含む、約3〜約6のpHを有する化学機械研磨組成物と接触させることと、
(ii)前記基材に対して前記研磨パッド及び前記化学機械研磨組成物を移動させることと、
(iii)前記基材の少なくとも一部を摩耗させて、前記基材を研磨することと、を含む、方法。 - 前記研磨組成物が、約0.05重量%〜約2重量%の湿式プロセスセリアを含む、請求項8に記載の方法。
- 前記水溶性カチオン重合体が、メラミンまたはそのハロゲン化誘導体とアルデヒドとの重合から調製された架橋性カチオン共重合体である、請求項8に記載の方法。
- 前記水溶性カチオン重合体が、メラミン−ホルムアルデヒド共重合体である、請求項10に記載の方法。
- 前記メラミン−ホルムアルデヒド共重合体が、メチル化したメラミン−ホルムアルデヒド共重合体である、請求項11に記載の方法。
- 前記研磨組成物が、約50ppm〜約200ppmの前記水溶性カチオン重合体または前記水溶性カチオン共重合体を含む、請求項8に記載の方法。
- 前記芳香族カルボン酸またはヘテロ芳香族カルボン酸が、ピコリン酸またはジピコリン酸である、請求項8に記載の方法。
- 前記基材が、酸化ケイ素を含み、前記基材を研磨するために前記酸化ケイ素の少なくとも一部が前記基材から除去される、請求項8に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201662286742P | 2016-01-25 | 2016-01-25 | |
US62/286,742 | 2016-01-25 | ||
PCT/US2017/014821 WO2017132191A1 (en) | 2016-01-25 | 2017-01-25 | Polishing composition comprising cationic polymer additive |
Publications (2)
Publication Number | Publication Date |
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JP2019510364A true JP2019510364A (ja) | 2019-04-11 |
JP6936233B2 JP6936233B2 (ja) | 2021-09-15 |
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Country Status (7)
Country | Link |
---|---|
US (1) | US10301508B2 (ja) |
EP (1) | EP3408342B1 (ja) |
JP (1) | JP6936233B2 (ja) |
KR (1) | KR20180099902A (ja) |
CN (1) | CN108495906B (ja) |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102461667B1 (ko) * | 2021-10-25 | 2022-11-03 | 주식회사 한솔케미칼 | 분리막용 공중합체 및 이를 포함하는 이차전지 |
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US10428241B2 (en) | 2017-10-05 | 2019-10-01 | Fujifilm Electronic Materials U.S.A., Inc. | Polishing compositions containing charged abrasive |
KR20200032601A (ko) * | 2018-09-18 | 2020-03-26 | 주식회사 케이씨텍 | 연마용 슬러리 조성물 |
KR20220083728A (ko) | 2019-10-15 | 2022-06-20 | 후지필름 일렉트로닉 머티리얼스 유.에스.에이., 아이엔씨. | 연마 조성물 및 이의 사용 방법 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008519466A (ja) * | 2004-11-05 | 2008-06-05 | キャボット マイクロエレクトロニクス コーポレイション | 窒化ケイ素の除去速度が酸化ケイ素と比べて高い研磨組成物及び方法 |
JP2014053502A (ja) * | 2012-09-07 | 2014-03-20 | Toshiba Corp | 半導体装置の製造方法 |
WO2015013162A1 (en) * | 2013-07-22 | 2015-01-29 | Cabot Microelectronics Corporation | Compositions and methods for cmp of silicon oxide, silicon nitride, and polysilicon materials |
WO2015053981A1 (en) * | 2013-10-10 | 2015-04-16 | Cabot Microelectronics Corporation | Wet-process ceria compositions for selectively polishing substrates, and methods related thereto |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU1457101A (en) | 1999-10-28 | 2001-05-08 | Cabot Microelectronics Corporation | Chemical mechanical polishing compositions and systems |
JP4123685B2 (ja) | 2000-05-18 | 2008-07-23 | Jsr株式会社 | 化学機械研磨用水系分散体 |
JP3993369B2 (ja) | 2000-07-14 | 2007-10-17 | 株式会社東芝 | 半導体装置の製造方法 |
US6841480B2 (en) * | 2002-02-04 | 2005-01-11 | Infineon Technologies Ag | Polyelectrolyte dispensing polishing pad, production thereof and method of polishing a substrate |
JP2004247605A (ja) | 2003-02-14 | 2004-09-02 | Toshiba Corp | Cmp用スラリーおよび半導体装置の製造方法 |
US7044836B2 (en) | 2003-04-21 | 2006-05-16 | Cabot Microelectronics Corporation | Coated metal oxide particles for CMP |
US7037351B2 (en) | 2003-07-09 | 2006-05-02 | Dynea Chemicals Oy | Non-polymeric organic particles for chemical mechanical planarization |
US20050175811A1 (en) * | 2004-02-06 | 2005-08-11 | Daikin Industries, Ltd. | Treatment comprising water-and oil-repellent agent |
KR100582771B1 (ko) | 2004-03-29 | 2006-05-22 | 한화석유화학 주식회사 | 반도체 얕은 트렌치 소자 분리 공정용 화학적 기계적 연마슬러리 |
US7531105B2 (en) * | 2004-11-05 | 2009-05-12 | Cabot Microelectronics Corporation | Polishing composition and method for high silicon nitride to silicon oxide removal rate ratios |
US7494519B2 (en) | 2005-07-28 | 2009-02-24 | 3M Innovative Properties Company | Abrasive agglomerate polishing method |
WO2009039386A1 (en) * | 2007-09-21 | 2009-03-26 | Saint-Gobain Abrasives, Inc. | Melamine methylol for abrasive products |
TWI573864B (zh) * | 2012-03-14 | 2017-03-11 | 卡博特微電子公司 | 具有高移除率及低缺陷率之對氧化物及氮化物有選擇性之cmp組成物 |
US9434859B2 (en) * | 2013-09-24 | 2016-09-06 | Cabot Microelectronics Corporation | Chemical-mechanical planarization of polymer films |
US9758697B2 (en) * | 2015-03-05 | 2017-09-12 | Cabot Microelectronics Corporation | Polishing composition containing cationic polymer additive |
-
2017
- 2017-01-25 WO PCT/US2017/014821 patent/WO2017132191A1/en active Application Filing
- 2017-01-25 CN CN201780007928.4A patent/CN108495906B/zh active Active
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- 2017-01-25 TW TW106103032A patent/TWI631197B/zh active
- 2017-01-25 EP EP17744797.6A patent/EP3408342B1/en active Active
- 2017-01-25 KR KR1020187024281A patent/KR20180099902A/ko not_active Application Discontinuation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008519466A (ja) * | 2004-11-05 | 2008-06-05 | キャボット マイクロエレクトロニクス コーポレイション | 窒化ケイ素の除去速度が酸化ケイ素と比べて高い研磨組成物及び方法 |
JP2014053502A (ja) * | 2012-09-07 | 2014-03-20 | Toshiba Corp | 半導体装置の製造方法 |
WO2015013162A1 (en) * | 2013-07-22 | 2015-01-29 | Cabot Microelectronics Corporation | Compositions and methods for cmp of silicon oxide, silicon nitride, and polysilicon materials |
WO2015053981A1 (en) * | 2013-10-10 | 2015-04-16 | Cabot Microelectronics Corporation | Wet-process ceria compositions for selectively polishing substrates, and methods related thereto |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102461667B1 (ko) * | 2021-10-25 | 2022-11-03 | 주식회사 한솔케미칼 | 분리막용 공중합체 및 이를 포함하는 이차전지 |
WO2023074967A1 (ko) * | 2021-10-25 | 2023-05-04 | 주식회사 한솔케미칼 | 분리막용 공중합체 및 이를 포함하는 이차전지 |
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US20170210946A1 (en) | 2017-07-27 |
EP3408342A1 (en) | 2018-12-05 |
EP3408342A4 (en) | 2019-10-30 |
JP6936233B2 (ja) | 2021-09-15 |
KR20180099902A (ko) | 2018-09-05 |
TW201728713A (zh) | 2017-08-16 |
TWI631197B (zh) | 2018-08-01 |
CN108495906A (zh) | 2018-09-04 |
CN108495906B (zh) | 2020-11-10 |
US10301508B2 (en) | 2019-05-28 |
EP3408342B1 (en) | 2024-03-06 |
WO2017132191A1 (en) | 2017-08-03 |
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