JP2019505829A - 光学面を研磨する方法及び光学素子 - Google Patents

光学面を研磨する方法及び光学素子 Download PDF

Info

Publication number
JP2019505829A
JP2019505829A JP2018528789A JP2018528789A JP2019505829A JP 2019505829 A JP2019505829 A JP 2019505829A JP 2018528789 A JP2018528789 A JP 2018528789A JP 2018528789 A JP2018528789 A JP 2018528789A JP 2019505829 A JP2019505829 A JP 2019505829A
Authority
JP
Japan
Prior art keywords
polishing
optical surface
area
optical
shape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2018528789A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019505829A5 (pt
Inventor
ユルゲン　ホフマン
ホフマン ユルゲン
フィシャル ロバート
フィシャル ロバート
スティッケル フランツ−ヨーゼフ
スティッケル フランツ−ヨーゼフ
マテナ マンフレッド
マテナ マンフレッド
セイトナー マーク
セイトナー マーク
Original Assignee
カール・ツァイス・エスエムティー・ゲーエムベーハー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by カール・ツァイス・エスエムティー・ゲーエムベーハー filed Critical カール・ツァイス・エスエムティー・ゲーエムベーハー
Publication of JP2019505829A publication Critical patent/JP2019505829A/ja
Publication of JP2019505829A5 publication Critical patent/JP2019505829A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/02—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0891—Ultraviolet [UV] mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/10—Mirrors with curved faces
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70316—Details of optical elements, e.g. of Bragg reflectors, extreme ultraviolet [EUV] multilayer or bilayer mirrors or diffractive optical elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
    • B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
    • B24B31/112—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using magnetically consolidated grinding powder, moved relatively to the workpiece under the influence of pressure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/061—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements characterised by a multilayer structure
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/064—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements having a curved surface
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K2201/00—Arrangements for handling radiation or particles
    • G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
    • G21K2201/067—Construction details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Optical Filters (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP2018528789A 2015-12-02 2016-11-16 光学面を研磨する方法及び光学素子 Pending JP2019505829A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102015223983.7 2015-12-02
DE102015223983.7A DE102015223983A1 (de) 2015-12-02 2015-12-02 Verfahren zum Polieren einer optischen Oberfläche und optisches Element
PCT/EP2016/077866 WO2017093020A1 (de) 2015-12-02 2016-11-16 Verfahren zum polieren einer optischen oberfläche und optisches element

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2021068492A Division JP7053925B2 (ja) 2015-12-02 2021-04-14 光学面を研磨する方法及び光学素子

Publications (2)

Publication Number Publication Date
JP2019505829A true JP2019505829A (ja) 2019-02-28
JP2019505829A5 JP2019505829A5 (pt) 2019-12-26

Family

ID=57348658

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2018528789A Pending JP2019505829A (ja) 2015-12-02 2016-11-16 光学面を研磨する方法及び光学素子
JP2021068492A Active JP7053925B2 (ja) 2015-12-02 2021-04-14 光学面を研磨する方法及び光学素子

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2021068492A Active JP7053925B2 (ja) 2015-12-02 2021-04-14 光学面を研磨する方法及び光学素子

Country Status (4)

Country Link
JP (2) JP2019505829A (pt)
CN (1) CN108369299B (pt)
DE (1) DE102015223983A1 (pt)
WO (1) WO2017093020A1 (pt)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020166135A (ja) * 2019-03-29 2020-10-08 株式会社ロジストラボ 光学素子の製造方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107322411B (zh) * 2017-06-09 2023-04-11 中国科学院西安光学精密机械研究所 一种大口径非球面光学元件抛光装置
DE102017216128A1 (de) * 2017-09-13 2019-03-14 Carl Zeiss Smt Gmbh Verfahren zum Bearbeiten eines Werkstücks bei der Herstellung eines optischen Elements
DE102018202570A1 (de) * 2018-02-20 2019-08-22 Carl Zeiss Smt Gmbh Verfahren zum Polieren eines Werkstücks bei der Herstellung eines optischen Elements
US11443950B2 (en) * 2019-03-01 2022-09-13 Zygo Corporation Method for figure control of optical surfaces
CN115319625A (zh) * 2022-08-11 2022-11-11 浙江百康光学股份有限公司 工件抛光工艺

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5958415A (ja) * 1982-09-29 1984-04-04 Seiko Epson Corp 累進多焦点レンズ
JP2002052451A (ja) * 2000-08-11 2002-02-19 Canon Inc 研磨方法及び光学素子及び光学素子の成形用金型
JP2002346899A (ja) * 2001-03-23 2002-12-04 Ricoh Co Ltd 曲面加工法及び加工装置
JP2002370147A (ja) * 2001-06-12 2002-12-24 Canon Inc 研磨工具
US7118449B1 (en) * 2004-09-20 2006-10-10 Carl Zeiss Smt Ag Method of manufacturing an optical element

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63221954A (ja) * 1987-03-11 1988-09-14 Matsushita Electric Ind Co Ltd 曲面研磨方法
JPH09239653A (ja) * 1996-03-06 1997-09-16 Nikon Corp 研磨装置
JP2001246539A (ja) * 2000-03-03 2001-09-11 Inst Of Physical & Chemical Res 非軸対称非球面ミラーの研削加工方法
JP2001322063A (ja) * 2000-05-18 2001-11-20 Canon Inc 光学素子の加工方法
JP3882764B2 (ja) * 2003-02-19 2007-02-21 セイコーエプソン株式会社 累進屈折力レンズ
DE10338893B4 (de) * 2003-08-23 2007-07-05 Essilor International (Compagnie Generale D'optique) Verfahren zur Herstellung von Brillengläsern und anderen optischen Formkörpern aus Kunststoff
DE102007013563A1 (de) * 2007-03-21 2008-09-25 Carl Zeiss Smt Ag Verfahren und Vorrichtung zur Herstellung eines Elements mit mindestens einer Freiformfläche mit hoher Formgenauigkeit und geringer Oberflächenrauhigkeit
JP5029485B2 (ja) * 2008-05-12 2012-09-19 株式会社島津製作所 非球面反射光学素子
PL2184132T3 (pl) * 2008-11-07 2013-08-30 Essilor Int Sposób i urządzenie do wytwarzania soczewki optycznej
KR101039144B1 (ko) * 2008-12-10 2011-06-07 한국표준과학연구원 입력된 데이터에 근거하여 대구경 광학렌즈로 연마하는 장치
JP5399167B2 (ja) * 2009-08-19 2014-01-29 オリンパス株式会社 研磨方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5958415A (ja) * 1982-09-29 1984-04-04 Seiko Epson Corp 累進多焦点レンズ
JP2002052451A (ja) * 2000-08-11 2002-02-19 Canon Inc 研磨方法及び光学素子及び光学素子の成形用金型
JP2002346899A (ja) * 2001-03-23 2002-12-04 Ricoh Co Ltd 曲面加工法及び加工装置
JP2002370147A (ja) * 2001-06-12 2002-12-24 Canon Inc 研磨工具
US7118449B1 (en) * 2004-09-20 2006-10-10 Carl Zeiss Smt Ag Method of manufacturing an optical element

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020166135A (ja) * 2019-03-29 2020-10-08 株式会社ロジストラボ 光学素子の製造方法
WO2020202696A1 (ja) * 2019-03-29 2020-10-08 株式会社ロジストラボ 光学素子の製造方法
JP7162844B2 (ja) 2019-03-29 2022-10-31 株式会社ロジストラボ 光学素子の製造方法

Also Published As

Publication number Publication date
WO2017093020A1 (de) 2017-06-08
JP2021119393A (ja) 2021-08-12
DE102015223983A1 (de) 2017-06-08
JP7053925B2 (ja) 2022-04-12
CN108369299A (zh) 2018-08-03
CN108369299B (zh) 2020-11-10

Similar Documents

Publication Publication Date Title
JP7053925B2 (ja) 光学面を研磨する方法及び光学素子
JP7252311B2 (ja) 可変屈折率を有する累進眼鏡レンズ並びにその設計及び製造の方法
CN105690187B (zh) 离轴非球面镜的加工方法
KR20160015263A (ko) 안과용 렌즈를 제조하기 위한 공정 및 시스템
JP3973466B2 (ja) 成形用型、成形用型の製造方法、成形用型の製造システム、及び成形方法
US7481543B1 (en) Mirror for use in a projection exposure apparatus
KR101622419B1 (ko) 안경테 렌즈용 전구체 렌즈의 제조방법
Beaucamp et al. Reduction of mid-spatial frequency errors on aspheric and freeform optics by circular-random path polishing
AU2012300658B2 (en) Method of surfacing a surface of a spectacle lens
JP6197406B2 (ja) 眼鏡レンズ加工装置、眼鏡レンズ加工プログラム
Supranowitz et al. Improving surface figure and microroughness of IR materials and diamond turned surfaces with magnetorheological finishing (MRF)
JP2009125850A (ja) 眼鏡レンズおよびその製造方法
JP2011020241A (ja) 研磨加工方法
Nelson et al. VIBE™ finishing to remove mid-spatial frequency ripple
CN112805152B (zh) 用于通过增材制造来制造光学镜片的方法以及对应的中间光学元件
Fuchs Fabrication, metrology and alignment challenges for freeform imaging systems
RU2810680C1 (ru) Способ формирования на поверхности оптических элементов астигматизма и более высоких порядков полиномов Цернике с коэффициентами n=m (n≥2)
US11618122B1 (en) Methods and apparatus for generating free-form optical components
JP2007000989A (ja) 曲面の研磨方法
JP7538343B2 (ja) 眼鏡レンズの数値的表現を決定するコンピュータ実施方法
JP2007136623A (ja) 軸対称非球面研磨方法
JP7414447B2 (ja) 眼鏡レンズ設計システム、眼鏡レンズ設計方法、及び眼鏡レンズ設計プログラム
Bouvier Investigation of polishing algorithms and removal processes for deterministic subaperture polisher
Kelm et al. Simulation and analysis of the polishing process for aspheres
Boerret et al. High-speed form preserving polishing of precision aspheres

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20191113

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20191113

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20200720

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20200901

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20201201

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20201215