JP2019502273A5 - - Google Patents

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Publication number
JP2019502273A5
JP2019502273A5 JP2018549432A JP2018549432A JP2019502273A5 JP 2019502273 A5 JP2019502273 A5 JP 2019502273A5 JP 2018549432 A JP2018549432 A JP 2018549432A JP 2018549432 A JP2018549432 A JP 2018549432A JP 2019502273 A5 JP2019502273 A5 JP 2019502273A5
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JP
Japan
Prior art keywords
nanocolumns
sub
pit
center
nanocolumn
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JP2018549432A
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English (en)
Japanese (ja)
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JP6947746B2 (ja
JP2019502273A (ja
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Priority claimed from US15/377,775 external-priority patent/US11322652B2/en
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Publication of JP2019502273A publication Critical patent/JP2019502273A/ja
Publication of JP2019502273A5 publication Critical patent/JP2019502273A5/ja
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Publication of JP6947746B2 publication Critical patent/JP6947746B2/ja
Expired - Fee Related legal-status Critical Current
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JP2018549432A 2015-12-14 2016-12-14 複合ＧａＮナノカラムの製造方法 Expired - Fee Related JP6947746B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201562267117P 2015-12-14 2015-12-14
US62/267,117 2015-12-14
US15/377,775 2016-12-13
US15/377,775 US11322652B2 (en) 2015-12-14 2016-12-13 Methods for producing composite GaN nanocolumns and light emitting structures made from the methods
PCT/US2016/066729 WO2017106387A1 (en) 2015-12-14 2016-12-14 METHODS FOR PRODUCING COMPOSITE GaN NANOCOLUMNS AND LIGHT EMITTING STRUCTURES MADE FROM THE METHODS

Publications (3)

Publication Number Publication Date
JP2019502273A JP2019502273A (ja) 2019-01-24
JP2019502273A5 true JP2019502273A5 (enExample) 2020-01-30
JP6947746B2 JP6947746B2 (ja) 2021-10-13

Family

ID=59020145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018549432A Expired - Fee Related JP6947746B2 (ja) 2015-12-14 2016-12-14 複合ＧａＮナノカラムの製造方法

Country Status (6)

Country Link
US (1) US11322652B2 (enExample)
JP (1) JP6947746B2 (enExample)
KR (1) KR20180095608A (enExample)
CN (1) CN108604538A (enExample)
TW (1) TWI740865B (enExample)
WO (1) WO2017106387A1 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11322652B2 (en) * 2015-12-14 2022-05-03 Ostendo Technologies, Inc. Methods for producing composite GaN nanocolumns and light emitting structures made from the methods
CN109148654B (zh) * 2018-08-30 2020-04-07 芜湖德豪润达光电科技有限公司 非极性面ⅲ族氮化物外延结构及其制备方法
US10854646B2 (en) * 2018-10-19 2020-12-01 Attollo Engineering, LLC PIN photodetector
DE112019006510T5 (de) * 2019-03-12 2021-09-23 Ulvac, Inc. Vakuumabscheidungsvorrichtung
US11637219B2 (en) 2019-04-12 2023-04-25 Google Llc Monolithic integration of different light emitting structures on a same substrate
CN110993755B (zh) * 2019-12-18 2021-09-21 天津工业大学 电注入三维GaN核壳结构Nano-LED及制造方法
WO2024084634A1 (ja) * 2022-10-19 2024-04-25 京セラ株式会社 半導体基板、半導体基板の製造方法および製造装置
CN116705889B (zh) * 2023-06-28 2024-02-27 北京科技大学 梯度应变调控的范德华异质结型光电探测器及其制备方法

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WO2003089695A1 (en) * 2002-04-15 2003-10-30 The Regents Of The University Of California Non-polar a-plane gallium nitride thin films grown by metalorganic chemical vapor deposition
KR20060127743A (ko) * 2005-06-06 2006-12-13 스미토모덴키고교가부시키가이샤 질화물 반도체 기판과 그 제조 방법
JP2007048869A (ja) * 2005-08-09 2007-02-22 Sony Corp ＧａＮ系半導体発光素子の製造方法
CN101443887B (zh) * 2006-03-10 2011-04-20 Stc.Unm公司 Gan纳米线的脉冲式生长及在族ⅲ氮化物半导体衬底材料中的应用和器件
AU2007313096B2 (en) 2006-03-10 2011-11-10 Unm Rainforest Innovations Pulsed growth of GaN nanowires and applications in group III nitride semiconductor substrate materials and devices
JP5082752B2 (ja) * 2006-12-21 2012-11-28 日亜化学工業株式会社 半導体発光素子用基板の製造方法及びそれを用いた半導体発光素子
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TWI621278B (zh) 2013-12-17 2018-04-11 瑞典商Ｇｌｏ公司 具有應變改質表面活性區域之第三族氮化物奈米線ｌｅｄ及其製造方法
KR102140741B1 (ko) * 2014-02-18 2020-08-03 엘지전자 주식회사 무분극 이종 기판 및 그 제조방법, 이를 이용한 질화물 반도체 발광 소자
FR3019188B1 (fr) * 2014-03-27 2017-11-24 Commissariat Energie Atomique Procede de croissance d'un element allonge a partir d'un germe forme dans un creux d'une couche ou d'un plot de nucleation
US9773889B2 (en) * 2014-07-18 2017-09-26 Taiwan Semiconductor Manufacturing Company Limited Method of semiconductor arrangement formation
US11322652B2 (en) * 2015-12-14 2022-05-03 Ostendo Technologies, Inc. Methods for producing composite GaN nanocolumns and light emitting structures made from the methods

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