JP2019212729A - 半導体装置及び半導体装置の製造方法 - Google Patents
半導体装置及び半導体装置の製造方法 Download PDFInfo
- Publication number
- JP2019212729A JP2019212729A JP2018106790A JP2018106790A JP2019212729A JP 2019212729 A JP2019212729 A JP 2019212729A JP 2018106790 A JP2018106790 A JP 2018106790A JP 2018106790 A JP2018106790 A JP 2018106790A JP 2019212729 A JP2019212729 A JP 2019212729A
- Authority
- JP
- Japan
- Prior art keywords
- inductor
- wiring layer
- semiconductor substrate
- semiconductor device
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 279
- 238000004519 manufacturing process Methods 0.000 title claims description 42
- 238000000034 method Methods 0.000 title abstract description 48
- 239000000758 substrate Substances 0.000 claims abstract description 89
- 239000010410 layer Substances 0.000 claims description 103
- 239000011229 interlayer Substances 0.000 claims description 31
- 239000012535 impurity Substances 0.000 claims description 26
- 238000009792 diffusion process Methods 0.000 claims description 17
- 238000005498 polishing Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 description 54
- 229910004438 SUB2 Inorganic materials 0.000 description 34
- 101100311330 Schizosaccharomyces pombe (strain 972 / ATCC 24843) uap56 gene Proteins 0.000 description 34
- 101150018444 sub2 gene Proteins 0.000 description 34
- JPKJQBJPBRLVTM-OSLIGDBKSA-N (2s)-2-amino-n-[(2s,3r)-3-hydroxy-1-[[(2s)-1-[[(2s)-1-[[(2s)-1-[[(2r)-1-(1h-indol-3-yl)-3-oxopropan-2-yl]amino]-1-oxo-3-phenylpropan-2-yl]amino]-1-oxo-3-phenylpropan-2-yl]amino]-1-oxo-3-phenylpropan-2-yl]amino]-1-oxobutan-2-yl]-6-iminohexanamide Chemical compound C([C@H](NC(=O)[C@@H](NC(=O)[C@@H](N)CCCC=N)[C@H](O)C)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@@H](CC=1C=CC=CC=1)C(=O)N[C@H](CC=1C2=CC=CC=C2NC=1)C=O)C1=CC=CC=C1 JPKJQBJPBRLVTM-OSLIGDBKSA-N 0.000 description 26
- 102100031277 Calcineurin B homologous protein 1 Human genes 0.000 description 26
- 241000839426 Chlamydia virus Chp1 Species 0.000 description 26
- 101000777252 Homo sapiens Calcineurin B homologous protein 1 Proteins 0.000 description 26
- 101000943802 Homo sapiens Cysteine and histidine-rich domain-containing protein 1 Proteins 0.000 description 26
- 238000005468 ion implantation Methods 0.000 description 25
- 239000000463 material Substances 0.000 description 22
- 102100031272 Calcineurin B homologous protein 2 Human genes 0.000 description 20
- 241001510512 Chlamydia phage 2 Species 0.000 description 20
- 101000777239 Homo sapiens Calcineurin B homologous protein 2 Proteins 0.000 description 20
- 125000006850 spacer group Chemical group 0.000 description 20
- 208000036252 interstitial lung disease 1 Diseases 0.000 description 19
- 238000002161 passivation Methods 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 11
- 102100036464 Activated RNA polymerase II transcriptional coactivator p15 Human genes 0.000 description 10
- 102100031418 EF-hand domain-containing protein D2 Human genes 0.000 description 10
- 101000713904 Homo sapiens Activated RNA polymerase II transcriptional coactivator p15 Proteins 0.000 description 10
- 101000802344 Homo sapiens Zinc finger SWIM domain-containing protein 7 Proteins 0.000 description 10
- 229910004444 SUB1 Inorganic materials 0.000 description 10
- 238000005229 chemical vapour deposition Methods 0.000 description 10
- 238000005530 etching Methods 0.000 description 9
- 208000036971 interstitial lung disease 2 Diseases 0.000 description 9
- 101500013676 Helix lucorum Peptide CNP1 Proteins 0.000 description 8
- 239000010949 copper Substances 0.000 description 7
- 102100031478 C-type natriuretic peptide Human genes 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910000881 Cu alloy Inorganic materials 0.000 description 6
- 101500013677 Helix lucorum Peptide CNP2 Proteins 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 5
- 101100188686 Danio rerio opn1sw2 gene Proteins 0.000 description 4
- 102100031414 EF-hand domain-containing protein D1 Human genes 0.000 description 4
- 101150096151 EFHD1 gene Proteins 0.000 description 4
- 101150089053 SWS2 gene Proteins 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 238000000151 deposition Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 208000029523 Interstitial Lung disease Diseases 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0688—Integrated circuits having a three-dimensional layout
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
- H01L21/743—Making of internal connections, substrate contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5226—Via connections in a multilevel interconnection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5227—Inductive arrangements or effects of, or between, wiring layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/528—Geometry or layout of the interconnection structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/64—Impedance arrangements
- H01L23/645—Inductive arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0657—Stacked arrangements of devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/10—Inductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0288—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using passive elements as protective elements, e.g. resistors, capacitors, inductors, spark-gaps
Abstract
Description
以下に、第1実施形態に係る半導体装置の概略構成を説明する。
図2に示されるように、第1半導体チップCHP1は、第1面F1と、第2面F2とを有している。第2面F2は、第1面F1の反対面である。第2半導体チップCHP2は、第3面F3と、第4面F4とを有している。第4面F4は、第3面F3の反対面である。
以下に、第1実施形態に係る半導体装置の製造方法を説明する。
以下に、第1実施形態に係る半導体装置の効果を説明する。
以下に、第2実施形態に係る半導体装置の構成を説明する。なお、第1実施形態に係る半導体装置の構成と異なる点を主に説明し、重複する説明は繰り返さない。
以下に、第2実施形態に係る半導体装置の製造方法を説明する。なお、第1実施形態に係る半導体装置の製造方法と異なる点を主に説明し、重複する説明は繰り返さない。
以下に、第2実施形態に係る半導体装置の効果を説明する。なお、第1実施形態に係る半導体装置の効果と異なる点を主に説明し、重複する説明は繰り返さない。
Claims (15)
- 第1半導体基板と、
前記第1半導体基板上に形成され、かつ互いに電気的に接続された第1電極パッド及び第1インダクタを有する第1配線層と、
前記第1配線層上に形成され、かつ互いに電気的に接続された第2インダクタ及び第2電極パッドを有する第2配線層と、
前記第2配線層上に形成された第2半導体基板と、
前記第2半導体基板の裏面から前記第1電極パッドに達するように、前記第2半導体基板、前記第2配線層及び前記第1配線層に形成された第1導電部と、
前記第2半導体基板の前記裏面から前記第2電極パッドに達するように、前記第2半導体基板及び前記第2配線層中に形成された第2導電部と、
を備え、
前記第1インダクタ及び前記第2インダクタは互いに対向するように配置されている、半導体装置。 - 前記第2半導体基板には、半導体素子を構成する不純物拡散領域と、前記不純物拡散領域を前記第1導電部から絶縁分離する第1絶縁部とが形成されており、
前記第1絶縁部の幅は前記第1インダクタと前記第2インダクタとの間隔以上である、請求項1に記載の半導体装置。 - 前記第1絶縁部の数は2以上である、請求項2に記載の半導体装置。
- 前記第1絶縁部の数は4以上である、請求項3に記載の半導体装置。
- 前記第1導電部は、
前記第2半導体基板の前記裏面から前記第1電極パッドに達するように前記第2半導体基板、前記第2配線層及び前記第1配線層に形成された第1開口部と、
前記第1開口部の内側面を覆うように形成された絶縁膜と、
前記第1開口部を埋めるように前記絶縁膜上に形成された第1導電膜と、
を有し、
前記絶縁膜の厚さは前記第1インダクタと前記第2インダクタとの間隔以上である、請求項1に記載の半導体装置。 - 第1半導体基板と、
前記第1半導体基板上に形成され、かつ互いに電気的に接続された第1電極パッド及び第1インダクタを有する第1配線層と、
前記第1配線層上に形成され、かつ互いに電気的に接続された第2インダクタ及び第2電極パッドと、前記第1電極パッドに電気的に接続された第3電極パッドとを有する第2配線層と、
前記第2配線層上に形成された第2半導体基板と、
前記第2半導体基板の裏面から前記第3電極パッドに達するように、前記第2半導体基板及び前記第2配線層に形成された第1導電部と、
前記第2半導体基板の前記裏面から前記第2電極パッドに達するように、前記第2半導体基板及び前記第2配線層中に形成された第2導電部と、
を備え、
前記第1インダクタ及び前記第2インダクタは互いに対向するように配置されている、半導体装置。 - 前記第2半導体基板には、半導体素子を構成する不純物拡散領域と、前記不純物拡散領域を前記第1導電部から絶縁分離する第1絶縁部とが形成されており、
前記第1絶縁部の幅は前記第1インダクタと前記第2インダクタとの間隔以上である、請求項6に記載の半導体装置。 - 前記第1絶縁部の数は2以上である、請求項7に記載の半導体装置。
- 前記第1絶縁部の数は4以上である、請求項8に記載の半導体装置。
- 前記第1導電部は、
前記第2半導体基板の前記裏面から前記第3電極パッドに達するように前記第2半導体基板及び前記第1配線層に形成された第1開口部と、
前記第1開口部の内側面を覆うように形成された絶縁膜と、
前記第1開口部を埋めるように前記絶縁膜上に形成された第1導電膜と、
を有し、
前記絶縁膜の厚さは前記第1インダクタと前記第2インダクタとの間隔以上である、請求項6に記載の半導体装置。 - 第1半導体基板と、前記第1半導体基板上に形成され、かつ互いに電気的に接続された第1インダクタ及び第1電極パッドを有する第1配線層とを有する第1半導体チップを準備する工程と、
第2半導体基板と、前記第2半導体基板上に形成され、かつ互いに電気的に接続された第2インダクタ及び第2電極パッドを有する第2配線層とを有する第2半導体チップを準備する工程と、
前記第1インダクタと前記第2インダクタとが互いに対向するように、前記第1配線層及び前記第2配線層を互いに接合する工程と、
前記第2半導体基板の裏面から前記第1電極パッドに達するように、前記第2半導体基板、前記第2配線層及び前記第1配線層に第1開口部を形成するとともに、前記第2半導体基板の前記裏面から前記第2電極パッドに達するように、前記第2半導体基板及び前記第2配線層に第2開口部を形成する工程と、
前記第1開口部内に第1導電膜を埋め込むとともに、前記第2開口部内に第2導電膜を埋め込む工程とを備える、半導体装置の製造方法。 - 前記第2半導体チップを準備する工程は、
前記第2半導体基板に半導体素子を構成する不純物拡散領域を形成する工程と、
前記第2半導体基板の前記不純物拡散領域とは異なる領域に第3開口部を形成する工程と、
前記第3開口部内を埋め込むように第1絶縁膜を形成する工程と、
前記第1絶縁膜が露出するように、前記第2半導体基板の前記裏面を研磨する工程と、
を有し、
前記第1配線層は第1層間絶縁膜を含み、
前記第2配線層は第2層間絶縁膜を含み、
前記第1絶縁膜の幅は前記第1インダクタと前記第2インダクタとの間隔以上である、請求項11に記載の半導体装置の製造方法。 - 前記第1絶縁膜の数は、2以上である、請求項12に記載の半導体装置の製造方法。
- 前記第1絶縁膜の数は、4以上である、請求項13に記載の半導体装置の製造方法。
- 前記第1開口部内に前記第1導電膜が埋め込まれる前に、前記第1開口部の内側面上に第2絶縁膜を形成する工程をさらに備え、
前記第2絶縁膜の厚さは、前記第1インダクタと前記第2インダクタとの間隔以上である、請求項11に記載の半導体装置の製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018106790A JP2019212729A (ja) | 2018-06-04 | 2018-06-04 | 半導体装置及び半導体装置の製造方法 |
US16/408,023 US10950543B2 (en) | 2018-06-04 | 2019-05-09 | Semiconductor device and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018106790A JP2019212729A (ja) | 2018-06-04 | 2018-06-04 | 半導体装置及び半導体装置の製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2019212729A true JP2019212729A (ja) | 2019-12-12 |
Family
ID=68694329
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018106790A Pending JP2019212729A (ja) | 2018-06-04 | 2018-06-04 | 半導体装置及び半導体装置の製造方法 |
Country Status (2)
Country | Link |
---|---|
US (1) | US10950543B2 (ja) |
JP (1) | JP2019212729A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2022045632A (ja) * | 2020-09-09 | 2022-03-22 | 株式会社東芝 | 電子デバイス |
JP7475903B2 (ja) | 2020-03-10 | 2024-04-30 | 株式会社東芝 | アイソレータ |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11043470B2 (en) * | 2019-11-25 | 2021-06-22 | Xilinx, Inc. | Inductor design in active 3D stacking technology |
JP2021174955A (ja) * | 2020-04-30 | 2021-11-01 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
US20220223498A1 (en) * | 2021-01-08 | 2022-07-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | Backside or frontside through substrate via (tsv) landing on metal |
US11705433B2 (en) * | 2021-07-20 | 2023-07-18 | Renesas Electronics Corporation | Semiconductor device |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007067057A (ja) * | 2005-08-30 | 2007-03-15 | Renesas Technology Corp | 半導体装置およびその製造方法 |
JP2007073812A (ja) * | 2005-09-08 | 2007-03-22 | Mitsubishi Electric Corp | 半導体装置 |
JP2010080897A (ja) * | 2008-09-29 | 2010-04-08 | Panasonic Corp | 半導体装置及びその製造方法 |
JP2011054637A (ja) * | 2009-08-31 | 2011-03-17 | Sony Corp | 半導体装置およびその製造方法 |
JP2013187352A (ja) * | 2012-03-08 | 2013-09-19 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置およびその製造方法 |
JP2015503228A (ja) * | 2011-11-16 | 2015-01-29 | クアルコム,インコーポレイテッド | 絶縁層および第2の層を有する積層されたチップセットおよびそれを形成する方法 |
JP2016139818A (ja) * | 2016-03-04 | 2016-08-04 | ソニー株式会社 | 固体撮像装置、及び、電子機器 |
JP2017103458A (ja) * | 2015-11-30 | 2017-06-08 | 台湾積體電路製造股▲ふん▼有限公司Taiwan Semiconductor Manufacturing Company,Ltd. | 集積チップおよびその製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8058137B1 (en) * | 2009-04-14 | 2011-11-15 | Monolithic 3D Inc. | Method for fabrication of a semiconductor device and structure |
JP5646830B2 (ja) | 2009-09-02 | 2014-12-24 | ルネサスエレクトロニクス株式会社 | 半導体装置、半導体装置の製造方法、及びリードフレーム |
US9142488B2 (en) * | 2013-05-30 | 2015-09-22 | International Business Machines Corporation | Manganese oxide hard mask for etching dielectric materials |
JP6271221B2 (ja) * | 2013-11-08 | 2018-01-31 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
US10217726B1 (en) * | 2017-08-31 | 2019-02-26 | Micron Technology, Inc. | Stacked semiconductor dies including inductors and associated methods |
-
2018
- 2018-06-04 JP JP2018106790A patent/JP2019212729A/ja active Pending
-
2019
- 2019-05-09 US US16/408,023 patent/US10950543B2/en active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007067057A (ja) * | 2005-08-30 | 2007-03-15 | Renesas Technology Corp | 半導体装置およびその製造方法 |
JP2007073812A (ja) * | 2005-09-08 | 2007-03-22 | Mitsubishi Electric Corp | 半導体装置 |
JP2010080897A (ja) * | 2008-09-29 | 2010-04-08 | Panasonic Corp | 半導体装置及びその製造方法 |
JP2011054637A (ja) * | 2009-08-31 | 2011-03-17 | Sony Corp | 半導体装置およびその製造方法 |
JP2015503228A (ja) * | 2011-11-16 | 2015-01-29 | クアルコム,インコーポレイテッド | 絶縁層および第2の層を有する積層されたチップセットおよびそれを形成する方法 |
JP2013187352A (ja) * | 2012-03-08 | 2013-09-19 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置およびその製造方法 |
JP2017103458A (ja) * | 2015-11-30 | 2017-06-08 | 台湾積體電路製造股▲ふん▼有限公司Taiwan Semiconductor Manufacturing Company,Ltd. | 集積チップおよびその製造方法 |
JP2016139818A (ja) * | 2016-03-04 | 2016-08-04 | ソニー株式会社 | 固体撮像装置、及び、電子機器 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7475903B2 (ja) | 2020-03-10 | 2024-04-30 | 株式会社東芝 | アイソレータ |
JP2022045632A (ja) * | 2020-09-09 | 2022-03-22 | 株式会社東芝 | 電子デバイス |
US11676919B2 (en) | 2020-09-09 | 2023-06-13 | Kabushiki Kaisha Toshiba | Electronic device |
JP7437275B2 (ja) | 2020-09-09 | 2024-02-22 | 株式会社東芝 | 電子デバイス |
US11935846B2 (en) | 2020-09-09 | 2024-03-19 | Kabushiki Kaisha Toshiba | Electronic device |
Also Published As
Publication number | Publication date |
---|---|
US20190371727A1 (en) | 2019-12-05 |
US10950543B2 (en) | 2021-03-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2019212729A (ja) | 半導体装置及び半導体装置の製造方法 | |
TWI479554B (zh) | 晶圓穿孔及其製造方法 | |
US8748308B2 (en) | Through wafer vias and method of making same | |
US6943067B2 (en) | Three-dimensional integrated semiconductor devices | |
US8735251B2 (en) | Through silicon via and method of fabricating same | |
US7253492B2 (en) | Semiconductor structure with via structure | |
US7482675B2 (en) | Probing pads in kerf area for wafer testing | |
US8518787B2 (en) | Through wafer vias and method of making same | |
JP5637632B2 (ja) | ボンドパッド下の溝を特徴とするrf装置及び方法 | |
US8790985B2 (en) | High voltage resistance coupling structure | |
CN104425453A (zh) | 3dic互连装置和方法 | |
US9929042B2 (en) | Semiconductor device having a discontinued part between a first insulating film and a second insulating film | |
CN103456681B (zh) | 用于后段半导体器件加工的方法和装置 | |
TWI785475B (zh) | 半導體結構及其形成方法 | |
JP2010114352A (ja) | 半導体装置の製造方法および半導体装置 | |
JP3447871B2 (ja) | 配線の形成方法及び半導体素子の形成方法 | |
JP2019160828A (ja) | 半導体装置及び半導体装置の製造方法 | |
JPH03276727A (ja) | 半導体集積回路装置 | |
JPH1050999A (ja) | 半導体装置及びその製造方法 | |
JP2000216367A (ja) | 集積回路デバイス | |
JPH05190775A (ja) | 半導体装置及びその製造方法 | |
KR20110024470A (ko) | 반도체 소자 및 그 제조방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20201014 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210730 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210817 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20211001 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20220208 |