JP2019201091A - 半導体積層体および受光素子 - Google Patents
半導体積層体および受光素子 Download PDFInfo
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- JP2019201091A JP2019201091A JP2018094257A JP2018094257A JP2019201091A JP 2019201091 A JP2019201091 A JP 2019201091A JP 2018094257 A JP2018094257 A JP 2018094257A JP 2018094257 A JP2018094257 A JP 2018094257A JP 2019201091 A JP2019201091 A JP 2019201091A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 144
- 238000009792 diffusion process Methods 0.000 claims abstract description 83
- 150000001875 compounds Chemical class 0.000 claims abstract description 46
- 239000012535 impurity Substances 0.000 claims abstract description 36
- 229910021478 group 5 element Inorganic materials 0.000 claims abstract description 22
- 239000000969 carrier Substances 0.000 claims abstract description 20
- 239000000758 substrate Substances 0.000 claims description 34
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 17
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 claims description 11
- 229910005542 GaSb Inorganic materials 0.000 claims description 7
- 229910000673 Indium arsenide Inorganic materials 0.000 claims description 7
- RPQDHPTXJYYUPQ-UHFFFAOYSA-N indium arsenide Chemical compound [In]#[As] RPQDHPTXJYYUPQ-UHFFFAOYSA-N 0.000 claims description 7
- 230000007423 decrease Effects 0.000 claims description 6
- WPYVAWXEWQSOGY-UHFFFAOYSA-N indium antimonide Chemical compound [Sb]#[In] WPYVAWXEWQSOGY-UHFFFAOYSA-N 0.000 claims description 6
- 229910017115 AlSb Inorganic materials 0.000 claims description 4
- 229910005540 GaP Inorganic materials 0.000 claims description 4
- 230000035945 sensitivity Effects 0.000 abstract description 21
- 238000004519 manufacturing process Methods 0.000 description 23
- 238000000034 method Methods 0.000 description 17
- 229910052751 metal Inorganic materials 0.000 description 16
- 239000002184 metal Substances 0.000 description 16
- 230000015572 biosynthetic process Effects 0.000 description 15
- 238000002161 passivation Methods 0.000 description 15
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 14
- 239000000463 material Substances 0.000 description 13
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 12
- 239000002994 raw material Substances 0.000 description 12
- 238000009825 accumulation Methods 0.000 description 11
- 238000000927 vapour-phase epitaxy Methods 0.000 description 11
- 239000007789 gas Substances 0.000 description 7
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 6
- 229910052787 antimony Inorganic materials 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 4
- HTDIUWINAKAPER-UHFFFAOYSA-N trimethylarsine Chemical compound C[As](C)C HTDIUWINAKAPER-UHFFFAOYSA-N 0.000 description 4
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 3
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 3
- -1 aluminum antimony Chemical compound 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- HZXMRANICFIONG-UHFFFAOYSA-N gallium phosphide Chemical compound [Ga]#P HZXMRANICFIONG-UHFFFAOYSA-N 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- OTRPZROOJRIMKW-UHFFFAOYSA-N triethylindigane Chemical compound CC[In](CC)CC OTRPZROOJRIMKW-UHFFFAOYSA-N 0.000 description 3
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000001451 molecular beam epitaxy Methods 0.000 description 2
- 239000011669 selenium Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- ZGNPLWZYVAFUNZ-UHFFFAOYSA-N tert-butylphosphane Chemical compound CC(C)(C)P ZGNPLWZYVAFUNZ-UHFFFAOYSA-N 0.000 description 2
- SXZDTYABFPAVOF-UHFFFAOYSA-N CCCC[Sb] Chemical group CCCC[Sb] SXZDTYABFPAVOF-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 101100208382 Danio rerio tmsb gene Proteins 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 description 1
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- QTQRGDBFHFYIBH-UHFFFAOYSA-N tert-butylarsenic Chemical compound CC(C)(C)[As] QTQRGDBFHFYIBH-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- RBEXEKTWBGMBDZ-UHFFFAOYSA-N tri(propan-2-yl)stibane Chemical compound CC(C)[Sb](C(C)C)C(C)C RBEXEKTWBGMBDZ-UHFFFAOYSA-N 0.000 description 1
- KKOFCVMVBJXDFP-UHFFFAOYSA-N triethylstibane Chemical compound CC[Sb](CC)CC KKOFCVMVBJXDFP-UHFFFAOYSA-N 0.000 description 1
- PORFVJURJXKREL-UHFFFAOYSA-N trimethylstibine Chemical compound C[Sb](C)C PORFVJURJXKREL-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
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Abstract
Description
最初に本願発明の実施態様を列記して説明する。本願の半導体積層体は、III−V族化合物半導体からなり、導電型がn型であるベース層と、III−V族化合物半導体からなる受光層と、III−V族化合物半導体からなり、受光層に接触して配置される調整層と、III−V族化合物半導体からなり、p型のキャリアを生成する不純物であるp型不純物の濃度が1×1016cm−3以下である拡散ブロック層と、III−V族化合物半導体からなり、導電型がp型であるコンタクト層と、を備える。ベース層、受光層、調整層、拡散ブロック層およびコンタクト層はこの順に積層される。調整層において、受光層を構成するV族元素と同一の元素の濃度は、受光層側の主面に比べて拡散ブロック層側の主面において低い。
次に、本発明にかかる半導体積層体の実施の形態を、以下に図面を参照しつつ説明する。なお、以下の図面において同一または相当する部分には同一の参照番号を付しその説明は繰返さない。
図1を参照して、実施の形態1における半導体積層体10は、基板11と、バッファ層12と、受光層としての量子井戸構造である量子井戸受光層13と、調整層16と、拡散ブロック層14と、コンタクト層15とを備えている。
次に、本発明にかかる半導体積層体および受光素子の他の実施の形態である実施の形態2における半導体積層体および受光素子について説明する。図10は、実施の形態2における半導体積層体の構造を示す概略断面図であって、実施の形態1の図1に対応する。図11は、実施の形態2における受光素子の構造を示す概略断面図であって、実施の形態1の図2に対応する。
次に、本発明にかかる受光素子のさらに他の実施の形態である実施の形態3における受光素子およびセンサについて説明する。図12および図2を参照して、実施の形態3の赤外線受光素子1は、図2に示す構造を単位構造とし、当該単位構造が、基板11の一方の主面11Aが延在する方向に複数繰り返される構造を有している。そして、赤外線受光素子1は、画素数に対応する複数のp側電極92を有する。一方、n側電極91は1つだけ配置される。
10 半導体積層体
11 基板
11A,11B 主面
12 バッファ層
12A 第1主面
13 量子井戸受光層
131 第1要素層
132 第2要素層
13A 主面
14 拡散ブロック層
14A 主面
14B 主面
15 コンタクト層
15A 主面
15B 主面
16 調整層
161 第1調整層
162 第2調整層
163 第3調整層
16A 主面
16B 主面
20 ベース層
70 読み出し回路
71 本体
72,73 バンプ
75 配線
80 パッシベーション膜
81,82 開口部
91 n側電極
92 p側電極
99 トレンチ
99A 側壁
99B 底壁
100 赤外線センサ
Claims (12)
- III−V族化合物半導体からなり、導電型がn型であるベース層と、
III−V族化合物半導体からなる受光層と、
III−V族化合物半導体からなり、前記受光層に接触して配置される調整層と、
III−V族化合物半導体からなり、p型のキャリアを生成する不純物であるp型不純物の濃度が1×1016cm−3以下である拡散ブロック層と、
III−V族化合物半導体からなり、導電型がp型であるコンタクト層と、を備え、
前記ベース層、前記受光層、前記調整層、前記拡散ブロック層および前記コンタクト層はこの順に積層され、
前記調整層において、前記受光層を構成するV族元素と同一の元素の濃度は、前記受光層側の主面に比べて前記拡散ブロック層側の主面において低い、半導体積層体。 - 前記調整層において、前記受光層を構成するV族元素と同一の元素の濃度が、前記受光層側の主面から前記拡散ブロック層側の主面に近づくにしたがって低くなっている、請求項1に記載の半導体積層体。
- 前記調整層において、前記受光層を構成するV族元素と同一の元素の濃度が、前記受光層側の主面から前記拡散ブロック層側の主面に近づくにしたがって単調に低くなっている、請求項2に記載の半導体積層体。
- 前記調整層において、前記受光層を構成するV族元素と同一の元素の濃度が、前記受光層側の主面から前記拡散ブロック層側の主面に近づくにしたがって段階的に低くなっている、請求項2に記載の半導体積層体。
- 前記受光層を構成する前記V族元素はSbである、請求項1から請求項4のいずれか1項に記載の半導体積層体。
- 前記調整層の厚みは2nm以上である、請求項1から請求項5のいずれか1項に記載の半導体積層体。
- 前記拡散ブロック層の厚みは50nm以上である、請求項1から請求項6のいずれか1項に記載の半導体積層体。
- 前記受光層は、InxGa1−xAs(xは0.38以上1以下)層とGaAs1−ySby(yは0.36以上1以下)層とのペア、またはGa1−uInuNvAs1−v(uは0.4以上0.8以下、vは0を超え0.2以下)層とGaAs1−ySby(yは0.36以上0.62以下)層とのペアを含む多重量子井戸構造である、請求項1から請求項7のいずれか1項に記載の半導体積層体。
- 前記ベース層は、GaAs、GaP、GaSb、InP、InAs、InSb、AlSb、またはAlAsからなる基板を含む、請求項8に記載の半導体積層体。
- 前記調整層はInsGa1−sAstSb1−t(sは0以上1以下、tは0以上1以下)層である、請求項8または請求項9のいずれか1項に記載の半導体積層体。
- 前記受光層の厚みは1μm以上である、請求項1から請求項10のいずれか1項に記載の半導体積層体。
- 請求項1から請求項11のいずれか1項に記載の半導体積層体と、
前記半導体積層体上に配置された電極と、を備える、受光素子。
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