JP2019200235A5 - - Google Patents

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Publication number
JP2019200235A5
JP2019200235A5 JP2018093066A JP2018093066A JP2019200235A5 JP 2019200235 A5 JP2019200235 A5 JP 2019200235A5 JP 2018093066 A JP2018093066 A JP 2018093066A JP 2018093066 A JP2018093066 A JP 2018093066A JP 2019200235 A5 JP2019200235 A5 JP 2019200235A5
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JP
Japan
Prior art keywords
shutter member
light
exposure apparatus
control unit
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018093066A
Other languages
English (en)
Japanese (ja)
Other versions
JP7352332B2 (ja
JP2019200235A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2018093066A priority Critical patent/JP7352332B2/ja
Priority claimed from JP2018093066A external-priority patent/JP7352332B2/ja
Priority to TW108114067A priority patent/TWI766158B/zh
Priority to KR1020190055389A priority patent/KR102497946B1/ko
Publication of JP2019200235A publication Critical patent/JP2019200235A/ja
Publication of JP2019200235A5 publication Critical patent/JP2019200235A5/ja
Application granted granted Critical
Publication of JP7352332B2 publication Critical patent/JP7352332B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2018093066A 2018-05-14 2018-05-14 露光装置 Active JP7352332B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018093066A JP7352332B2 (ja) 2018-05-14 2018-05-14 露光装置
TW108114067A TWI766158B (zh) 2018-05-14 2019-04-23 曝光裝置及使用其之物品之製造方法
KR1020190055389A KR102497946B1 (ko) 2018-05-14 2019-05-13 노광 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018093066A JP7352332B2 (ja) 2018-05-14 2018-05-14 露光装置

Publications (3)

Publication Number Publication Date
JP2019200235A JP2019200235A (ja) 2019-11-21
JP2019200235A5 true JP2019200235A5 (enExample) 2021-06-17
JP7352332B2 JP7352332B2 (ja) 2023-09-28

Family

ID=68612097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018093066A Active JP7352332B2 (ja) 2018-05-14 2018-05-14 露光装置

Country Status (3)

Country Link
JP (1) JP7352332B2 (enExample)
KR (1) KR102497946B1 (enExample)
TW (1) TWI766158B (enExample)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04229843A (ja) * 1990-12-27 1992-08-19 Canon Inc 露光装置用シャッタ
JPH0555106A (ja) * 1991-08-28 1993-03-05 Canon Inc 露光量制御装置
JP3988091B2 (ja) * 1997-01-17 2007-10-10 フジノン株式会社 露光制御装置
JP4346320B2 (ja) * 2003-02-05 2009-10-21 大日本印刷株式会社 露光方法及び露光装置
JP5100088B2 (ja) * 2006-11-07 2012-12-19 キヤノン株式会社 露光装置及びデバイス製造方法
JP5173650B2 (ja) * 2008-07-29 2013-04-03 キヤノン株式会社 露光装置およびデバイス製造方法
JP6194702B2 (ja) 2013-08-30 2017-09-13 ソニー株式会社 露出制御装置および露出制御方法、ならびに撮像装置
JP6415057B2 (ja) 2014-02-07 2018-10-31 キヤノン株式会社 露光装置、および物品の製造方法
JP6861463B2 (ja) * 2015-06-16 2021-04-21 キヤノン株式会社 露光装置及び物品の製造方法
CN107290938B (zh) * 2016-03-31 2019-05-31 上海微电子装备（集团）股份有限公司 一种用于光刻机曝光的快门装置及其使用方法

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