JP2019165198A - 面発光レーザアレイ、検出装置およびレーザ装置 - Google Patents
面発光レーザアレイ、検出装置およびレーザ装置 Download PDFInfo
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Abstract
Description
図1は、第1の実施の形態による面発光レーザアレイの構成の一例を示す一部側面断面図であり、図2は、第1の実施の形態による面発光レーザアレイの構成の一例を示す一部下面図である。
図6は、第2の実施の形態による面発光レーザアレイの構成の一例を示す一部下面図である。図6は、面発光レーザアレイ1を半導体基板10の第2の面10b側から見た図である。第1の実施の形態では、発光素子20の配置位置に合わせて、マイクロレンズ41も正方格子状に配置されていたが、第2の実施の形態では、正六角形の各角部および中心に位置するように、発光素子20およびマイクロレンズ41を設けている。その他の構成は、第1の実施の形態と同様であるので、説明を省略する。
図7は、第3の実施の形態による面発光レーザアレイの構成の一例を示す一部側面断面図であり、図8は、第3の実施の形態による面発光レーザアレイの構成の一例を示す一部下面図である。第3の実施の形態による面発光レーザアレイ1では、半導体基板10の第2の面10b側に設けられる遮光部材42が、残差の部分だけではなく、マイクロレンズ41の外縁から所定の範囲の周縁部も覆う構成となっている。なお、第1の実施の形態と同一の構成要素には、同一の符号を付してその説明を省略する。
図12は、第4の実施の形態による面発光レーザアレイのマイクロレンズ部分の構成の一例を示す断面図である。第4の実施の形態では、裏面電極43に透明導電性材料を用い、半導体基板10の第2の面10b上の全面に裏面電極43が形成される場合を示している。透明導電性材料として、たとえば、In2O3:Sn,SnO2:F,ZnO:Al,ZnO:Ga,グラフェンなどを用いることができる。なお、その他の構成は、第1〜第3の実施の形態で説明したものと同様である。
第5の実施の形態では、第1〜第4の実施の形態で説明した面発光レーザアレイ1を検出装置に適用した場合を説明する。ここでは、検出装置として、レーザ光により対象物との距離の測定や形状マッピングを行うLiDAR(Light Detection and Ranging、または、Laser Imaging Detection and Ranging)装置100を例に挙げる。
第6の実施の形態では、第1〜第4の実施の形態で説明した面発光レーザアレイ1をレーザ装置に適用した場合を説明する。
10 半導体基板
10a 第1の面
10b 第2の面
20 発光素子
21 下部反射層
22 共振器構成層
23 上部反射層
24 電流狭窄層
25 メサ構造
26 保護膜
41 マイクロレンズ
42 遮光部材
43 裏面電極
51 表面電極
221 発光領域
241 電流狭窄領域
242 酸化領域
Claims (10)
- 基板の第1の面上に設けられ、前記第1の面に交差する方向に光を射出する複数の面発光レーザ素子と、
前記基板の前記第1の面に対向する第2の面上に、前記面発光レーザ素子に対応して配置され、前記光の放射角を変更する複数の光学素子と、
前記基板の前記第2の面上の前記複数の光学素子の間の領域に配置される遮光部材と、
を備える面発光レーザアレイ。 - 前記遮光部材は、前記光学素子の周縁部も被覆する請求項1に記載の面発光レーザアレイ。
- 前記光学素子上で前記遮光部材によって覆われる領域は、前記光学素子の直径に対して10%以下の領域である請求項2に記載の面発光レーザアレイ。
- 前記遮光部材は、前記基板の前記第2の面側の電極を兼ねている請求項1〜3のいずれか1つに記載の面発光レーザアレイ。
- 前記第2の面上の前記光学素子上および前記遮光部材上に設けられ、透明導電性材料からなる裏面電極をさらに備える請求項1〜3のいずれか1つに記載の面発光レーザアレイ。
- 前記基板は、GaAs基板であり、
前記面発光レーザ素子は、InGaAsからなる活性層を含む請求項1〜5のいずれか1つに記載の面発光レーザアレイ。 - 前記面発光レーザ素子が出射する前記光のピーク波長は、910〜970nmの範囲にある請求項1〜6のいずれか1つに記載の面発光レーザアレイ。
- 前記基板の厚さtは、前記基板中の前記光の前記放射角をθとし、前記面発光レーザ素子間のピッチをXとし、前記光学素子の直径をφとし、前記面発光レーザ素子での発光領域をaとしたときに、次式(1)を満たす請求項1〜7のいずれか1つに記載の面発光レーザアレイ。
- 請求項1〜8のいずれか1つに記載の面発光レーザアレイと、
前記面発光レーザアレイの前記面発光レーザ素子から射出された光を受光する受光部と、
を備える検出装置。 - 請求項1〜8のいずれか1つに記載の面発光レーザアレイと、
前記面発光レーザアレイから射出された光を共振させる固体レーザ媒質を含むレーザ共振器と、
を備えるレーザ装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CA3094046A CA3094046C (en) | 2018-03-19 | 2019-03-14 | Surface-emitting laser array, detection device, and laser device |
EP19715250.7A EP3769382A1 (en) | 2018-03-19 | 2019-03-14 | Surface-emitting laser array, detection device, and laser device |
CN201980019686.XA CN111869022B (zh) | 2018-03-19 | 2019-03-14 | 表面发射激光器阵列,检测设备和激光器设备 |
PCT/JP2019/010712 WO2019181757A1 (en) | 2018-03-19 | 2019-03-14 | Surface-emitting laser array, detection device, and laser device |
US16/981,503 US20210013703A1 (en) | 2018-03-19 | 2019-03-14 | Surface-emitting laser array, detection device, and laser device |
TW108108936A TWI703785B (zh) | 2018-03-19 | 2019-03-15 | 面射型雷射陣列、檢測裝置及雷射裝置 |
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JP2018051629 | 2018-03-19 | ||
JP2018051629 | 2018-03-19 |
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Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
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