JP2019146365A - 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター - Google Patents
圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター Download PDFInfo
- Publication number
- JP2019146365A JP2019146365A JP2018028549A JP2018028549A JP2019146365A JP 2019146365 A JP2019146365 A JP 2019146365A JP 2018028549 A JP2018028549 A JP 2018028549A JP 2018028549 A JP2018028549 A JP 2018028549A JP 2019146365 A JP2019146365 A JP 2019146365A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- electrode
- piezoelectric actuator
- diaphragm
- actuator according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000005540 biological transmission Effects 0.000 description 28
- 239000000463 material Substances 0.000 description 13
- 239000000853 adhesive Substances 0.000 description 12
- 230000001070 adhesive effect Effects 0.000 description 12
- 239000004973 liquid crystal related substance Substances 0.000 description 12
- 230000007246 mechanism Effects 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 230000008859 change Effects 0.000 description 10
- 238000005452 bending Methods 0.000 description 9
- 238000001514 detection method Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 230000008569 process Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 239000000470 constituent Substances 0.000 description 7
- 230000004048 modification Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000033001 locomotion Effects 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 238000003825 pressing Methods 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 239000013256 coordination polymer Substances 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000011144 upstream manufacturing Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 239000013590 bulk material Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000012636 effector Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- -1 (Ir) Substances 0.000 description 1
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- WOIHABYNKOEWFG-UHFFFAOYSA-N [Sr].[Ba] Chemical compound [Sr].[Ba] WOIHABYNKOEWFG-UHFFFAOYSA-N 0.000 description 1
- VNSWULZVUKFJHK-UHFFFAOYSA-N [Sr].[Bi] Chemical compound [Sr].[Bi] VNSWULZVUKFJHK-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000007974 melamines Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
- 229910052706 scandium Inorganic materials 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- XMVONEAAOPAGAO-UHFFFAOYSA-N sodium tungstate Chemical compound [Na+].[Na+].[O-][W]([O-])(=O)=O XMVONEAAOPAGAO-UHFFFAOYSA-N 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Images
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018028549A JP2019146365A (ja) | 2018-02-21 | 2018-02-21 | 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018028549A JP2019146365A (ja) | 2018-02-21 | 2018-02-21 | 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2019146365A true JP2019146365A (ja) | 2019-08-29 |
| JP2019146365A5 JP2019146365A5 (enExample) | 2021-02-25 |
Family
ID=67774071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018028549A Withdrawn JP2019146365A (ja) | 2018-02-21 | 2018-02-21 | 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2019146365A (enExample) |
-
2018
- 2018-02-21 JP JP2018028549A patent/JP2019146365A/ja not_active Withdrawn
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6828342B2 (ja) | 圧電アクチュエーター、圧電モーター、ロボット、電子部品搬送装置、プリンターおよび圧電アクチュエーターの製造方法 | |
| US10179405B2 (en) | Piezoelectric drive device, robot, and drive method thereof | |
| JP2018038188A (ja) | 振動子、圧電アクチュエーター、圧電モーター、ロボット、電子部品搬送装置および振動子の製造方法 | |
| US11031884B2 (en) | Control device for vibration actuator, method of controlling vibration actuator, robot, electronic component conveyance apparatus, printer, projector, and vibration device | |
| US11205974B2 (en) | Piezoelectric driving device, piezoelectric motor, robot, electronic component conveyance apparatus, printer, and projector | |
| CN109309458B (zh) | 压电驱动装置及其驱动方法、机器人、电子部件输送装置 | |
| JP2018074723A (ja) | 駆動装置、圧電モーター、ロボット、電子部品搬送装置およびプリンター | |
| JP7077682B2 (ja) | 圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター | |
| US11133453B2 (en) | Piezoelectric driving device, piezoelectric motor, robot, electronic-component conveying apparatus, printer, and projector | |
| CN108809141B (zh) | 压电驱动装置及其驱动方法、机器人及电子部件输送装置 | |
| JP2018174640A (ja) | 圧電駆動装置、圧電駆動装置の駆動方法、ロボット、電子部品搬送装置、プリンターおよびプロジェクター | |
| JP2019146365A (ja) | 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター | |
| JP2019114671A (ja) | 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター | |
| JP2020107657A (ja) | 圧電素子ユニット、圧電駆動装置、圧電素子ユニットの製造方法、およびロボット | |
| JP2019146435A (ja) | 圧電駆動装置、圧電アクチュエーターの制御方法、ロボット、電子部品搬送装置、プリンターおよびプロジェクター | |
| JP2018057148A (ja) | 振動子、圧電アクチュエーター、圧電モーター、ロボット、電子部品搬送装置およびプリンター | |
| JP6954007B2 (ja) | 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター | |
| JP2018074011A (ja) | 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよび圧電駆動装置の製造方法 | |
| JP2019117853A (ja) | 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター | |
| JP2019068546A (ja) | 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター | |
| JP2018037507A (ja) | 振動子、圧電アクチュエーター、圧電モーター、ロボットおよび電子部品搬送装置 | |
| JP2020191767A (ja) | 圧電アクチュエーター及びロボット | |
| JP2019160975A (ja) | 圧電アクチュエーター、圧電アクチュエーターの付加力検出方法、圧電アクチュエーターの共振状態検出方法、圧電駆動装置、ハンド、ロボット、電子部品搬送装置、プリンターおよびプロジェクター | |
| JP2018019540A (ja) | 圧電アクチュエーター、圧電モーター、ロボットおよび電子部品搬送装置 | |
| JP2020141451A (ja) | 圧電駆動装置、圧電駆動装置の製造方法およびロボット |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD05 | Notification of revocation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7425 Effective date: 20180910 |
|
| RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20181121 |
|
| RD07 | Notification of extinguishment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7427 Effective date: 20200807 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210113 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210113 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210913 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20210916 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210921 |
|
| RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20211108 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20211122 |