JP2019146365A5 - - Google Patents
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- Publication number
- JP2019146365A5 JP2019146365A5 JP2018028549A JP2018028549A JP2019146365A5 JP 2019146365 A5 JP2019146365 A5 JP 2019146365A5 JP 2018028549 A JP2018028549 A JP 2018028549A JP 2018028549 A JP2018028549 A JP 2018028549A JP 2019146365 A5 JP2019146365 A5 JP 2019146365A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- electrode
- actuator according
- piezoelectric actuator
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018028549A JP2019146365A (ja) | 2018-02-21 | 2018-02-21 | 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018028549A JP2019146365A (ja) | 2018-02-21 | 2018-02-21 | 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2019146365A JP2019146365A (ja) | 2019-08-29 |
| JP2019146365A5 true JP2019146365A5 (enExample) | 2021-02-25 |
Family
ID=67774071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018028549A Withdrawn JP2019146365A (ja) | 2018-02-21 | 2018-02-21 | 圧電アクチュエーター、圧電駆動装置、ロボット、電子部品搬送装置、プリンターおよびプロジェクター |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2019146365A (enExample) |
-
2018
- 2018-02-21 JP JP2018028549A patent/JP2019146365A/ja not_active Withdrawn
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