JP2019110105A5 - - Google Patents

Info

Publication number

JP2019110105A5

JP2019110105A5 JP2018113784A JP2018113784A JP2019110105A5 JP 2019110105 A5 JP2019110105 A5 JP 2019110105A5 JP 2018113784 A JP2018113784 A JP 2018113784A JP 2018113784 A JP2018113784 A JP 2018113784A JP 2019110105 A5 JP2019110105 A5 JP 2019110105A5

Authority

JP

Japan

Prior art keywords

thick film

powder

film conductor

mass

glass

Prior art date

2018-06-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
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• 239000000843 powder Substances 0.000 description 163
• 239000004020 conductor Substances 0.000 description 158
• 239000011521 glass Substances 0.000 description 97
• AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 80
• 239000000203 mixture Substances 0.000 description 45
• 239000002245 particle Substances 0.000 description 43
• 239000000758 substrate Substances 0.000 description 39
• 238000007747 plating Methods 0.000 description 32
• 238000010304 firing Methods 0.000 description 23
• 239000000853 adhesive Substances 0.000 description 21
• 230000001070 adhesive effect Effects 0.000 description 21
• 239000000919 ceramic Substances 0.000 description 18
• 238000000034 method Methods 0.000 description 18
• 230000000694 effects Effects 0.000 description 17
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 15
• 238000001035 drying Methods 0.000 description 15
• PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 15
• KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 15
• 230000000052 comparative effect Effects 0.000 description 14
• 239000011572 manganese Substances 0.000 description 11
• 239000002904 solvent Substances 0.000 description 11
• BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 10
• 239000010944 silver (metal) Substances 0.000 description 10
• 238000004898 kneading Methods 0.000 description 9
• 238000004519 manufacturing process Methods 0.000 description 9
• 239000011347 resin Substances 0.000 description 9
• 229920005989 resin Polymers 0.000 description 9
• 229910052709 silver Inorganic materials 0.000 description 8
• PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 7
• 229910004298 SiO 2 Inorganic materials 0.000 description 7
• 229910052748 manganese Inorganic materials 0.000 description 7
• 229910000679 solder Inorganic materials 0.000 description 7
• 238000000576 coating method Methods 0.000 description 6
• 238000009713 electroplating Methods 0.000 description 6
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• 230000008018 melting Effects 0.000 description 5
• 229910052763 palladium Inorganic materials 0.000 description 5
• 239000001856 Ethyl cellulose Substances 0.000 description 4
• ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 4
• 229910052797 bismuth Inorganic materials 0.000 description 4
• JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 4
• 239000011248 coating agent Substances 0.000 description 4
• 230000006866 deterioration Effects 0.000 description 4
• 229920001249 ethyl cellulose Polymers 0.000 description 4
• 235000019325 ethyl cellulose Nutrition 0.000 description 4
• 230000009477 glass transition Effects 0.000 description 4
• 238000007650 screen-printing Methods 0.000 description 4
• 238000012360 testing method Methods 0.000 description 4
• 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 3
• 230000005856 abnormality Effects 0.000 description 3
• WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 3
• SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 3
• 239000006185 dispersion Substances 0.000 description 3
• 238000010438 heat treatment Methods 0.000 description 3
• 238000002156 mixing Methods 0.000 description 3
• BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
• 239000000126 substance Substances 0.000 description 3
• 229940116411 terpineol Drugs 0.000 description 3
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
• QPLDLSVMHZLSFG-UHFFFAOYSA-N CuO Inorganic materials [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
• 229910010413 TiO 2 Inorganic materials 0.000 description 2
• GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 2
• 239000002253 acid Substances 0.000 description 2
• 229910045601 alloy Inorganic materials 0.000 description 2
• 239000000956 alloy Substances 0.000 description 2
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• 238000009826 distribution Methods 0.000 description 2
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• 229910052737 gold Inorganic materials 0.000 description 2
• 239000010931 gold Substances 0.000 description 2
• 230000001771 impaired effect Effects 0.000 description 2
• 239000012535 impurity Substances 0.000 description 2
• NUJOXMJBOLGQSY-UHFFFAOYSA-N manganese dioxide Chemical compound O=[Mn]=O NUJOXMJBOLGQSY-UHFFFAOYSA-N 0.000 description 2
• KVGMATYUUPJFQL-UHFFFAOYSA-N manganese(2+) oxygen(2-) Chemical compound [O--].[O--].[O--].[O--].[Mn++].[Mn++].[Mn++] KVGMATYUUPJFQL-UHFFFAOYSA-N 0.000 description 2
• WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 2
• 238000005259 measurement Methods 0.000 description 2
• 238000001000 micrograph Methods 0.000 description 2
• 239000011812 mixed powder Substances 0.000 description 2
• 238000012986 modification Methods 0.000 description 2
• 230000004048 modification Effects 0.000 description 2
• 229910052697 platinum Inorganic materials 0.000 description 2
• 239000010970 precious metal Substances 0.000 description 2
• 238000002360 preparation method Methods 0.000 description 2
• 230000001681 protective effect Effects 0.000 description 2
• 230000000630 rising effect Effects 0.000 description 2
• 238000005987 sulfurization reaction Methods 0.000 description 2
• 230000003746 surface roughness Effects 0.000 description 2
• XLOMVQKBTHCTTD-UHFFFAOYSA-N zinc oxide Inorganic materials [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
• OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
• 229910016276 Bi2O3—SiO2—B2O3 Inorganic materials 0.000 description 1
• CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
• 229910021586 Nickel(II) chloride Inorganic materials 0.000 description 1
• KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
• 229910020816 Sn Pb Inorganic materials 0.000 description 1
• 229910001128 Sn alloy Inorganic materials 0.000 description 1
• 229910020922 Sn-Pb Inorganic materials 0.000 description 1
• 229910008783 Sn—Pb Inorganic materials 0.000 description 1
• NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
• 229910052946 acanthite Inorganic materials 0.000 description 1
• 229910000272 alkali metal oxide Inorganic materials 0.000 description 1
• 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
• 239000005407 aluminoborosilicate glass Substances 0.000 description 1
• 238000004458 analytical method Methods 0.000 description 1
• 239000011324 bead Substances 0.000 description 1
• 238000005452 bending Methods 0.000 description 1
• KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
• 239000004327 boric acid Substances 0.000 description 1
• 239000005388 borosilicate glass Substances 0.000 description 1
• 238000001354 calcination Methods 0.000 description 1
• 239000000470 constituent Substances 0.000 description 1
• 238000011109 contamination Methods 0.000 description 1
• 239000010949 copper Substances 0.000 description 1
• 230000001186 cumulative effect Effects 0.000 description 1
• 230000007547 defect Effects 0.000 description 1
• 230000003111 delayed effect Effects 0.000 description 1
• 238000004455 differential thermal analysis Methods 0.000 description 1
• 238000003912 environmental pollution Methods 0.000 description 1
• 229910052839 forsterite Inorganic materials 0.000 description 1
• 239000008187 granular material Substances 0.000 description 1
• 238000007646 gravure printing Methods 0.000 description 1
• 239000007970 homogeneous dispersion Substances 0.000 description 1
• 230000006872 improvement Effects 0.000 description 1
• 238000007644 letterpress printing Methods 0.000 description 1
• 229910052744 lithium Inorganic materials 0.000 description 1
• HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
• PPNAOCWZXJOHFK-UHFFFAOYSA-N manganese(2+);oxygen(2-) Chemical group [O-2].[Mn+2] PPNAOCWZXJOHFK-UHFFFAOYSA-N 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 229910044991 metal oxide Inorganic materials 0.000 description 1
• 150000004706 metal oxides Chemical class 0.000 description 1
• 229910052759 nickel Inorganic materials 0.000 description 1
• QMMRZOWCJAIUJA-UHFFFAOYSA-L nickel dichloride Chemical compound Cl[Ni]Cl QMMRZOWCJAIUJA-UHFFFAOYSA-L 0.000 description 1
• LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 1
• 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 1
• 230000003647 oxidation Effects 0.000 description 1
• 238000007254 oxidation reaction Methods 0.000 description 1
• 230000000704 physical effect Effects 0.000 description 1
• 229910052700 potassium Inorganic materials 0.000 description 1
• 238000007639 printing Methods 0.000 description 1
• 239000002994 raw material Substances 0.000 description 1
• 238000011160 research Methods 0.000 description 1
• 229910052707 ruthenium Inorganic materials 0.000 description 1
• 238000004062 sedimentation Methods 0.000 description 1
• XUARKZBEFFVFRG-UHFFFAOYSA-N silver sulfide Chemical compound [S-2].[Ag+].[Ag+] XUARKZBEFFVFRG-UHFFFAOYSA-N 0.000 description 1
• 229940056910 silver sulfide Drugs 0.000 description 1
• 238000005245 sintering Methods 0.000 description 1
• 229910052708 sodium Inorganic materials 0.000 description 1
• 229910052717 sulfur Inorganic materials 0.000 description 1
• 239000011593 sulfur Substances 0.000 description 1
• 230000001629 suppression Effects 0.000 description 1
• 238000009864 tensile test Methods 0.000 description 1
• 230000000930 thermomechanical effect Effects 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1