JP2019083294A - 半導体装置とその製造方法 - Google Patents
半導体装置とその製造方法 Download PDFInfo
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Abstract
Description
20、40:半導体素子
20a、40a:上面電極
20b、40b:下面電極
22、122、222、322、422、522:第1上側絶縁基板
23、25、27、43、45,47:はんだ層
23'、43’、62、63:はんだ
24、44:導体スペーサ
26、126、226、326、426、526:第1下側絶縁基板
28、128、228、328、428、528:第1上側絶縁基板の絶縁層
30、130、230、330、430、530:第1上側絶縁基板の内側金属層
30a、56a、130a、156a、330a、356a、430a、456a:内側金属層の凹部
32、132、232、332、432、532:第1上側絶縁基板の外側金属層
34、134、234、334、434、534:第1下側絶縁基板の絶縁層
36、136、236、336、436、536:第1下側絶縁基板の内側金属層
38、138、238、338、438、538:第1下側絶縁基板の外側金属層
42、142、242、342.442、542:第2上側絶縁基板
46、146、246、346、446、546:第2下側絶縁基板
48、148、248、348、448、548:第2上側絶縁基板の絶縁層
50、150、250、350、450、550:第2上側絶縁基板の内側金属層
52、152、252、352、452、552:第2上側絶縁基板の外側金属層
54、154、254、354、454、554:第2下側絶縁基板の絶縁層
56、156、256、356、456、556:第2下側絶縁基板の内側金属層
58、158、258、358、458、558:第2下側絶縁基板の外側金属層
60、160、260、360、460、560:継ぎ手
70:封止体
Claims (4)
- 第1半導体素子及び第2半導体素子と、
絶縁層の両面に金属層がそれぞれ設けられた構造を有し、一方の金属層が前記第1半導体素子に接続される第1絶縁基板と、
絶縁層の両面に金属層がそれぞれ設けられた構造を有し、一方の金属層が前記第2半導体素子に接続される第2絶縁基板と、
を備え、
前記第1絶縁基板の前記一方の金属層は、前記第2絶縁基板の前記一方の金属層に、継ぎ手を介して電気的に接続されており、
前記継ぎ手は、前記第1絶縁基板及び前記第2絶縁基板と別部材で構成されており、
前記継ぎ手の一端は、前記第1絶縁基板の前記一方の金属層に接合されており、前記継ぎ手の他端は、前記第2絶縁基板の前記一方の金属層に接合されている、
半導体装置。 - 前記第1絶縁基板と前記第2絶縁基板の少なくとも一方では、前記一方の金属層に凹部が形成されており、前記継ぎ手の前記一端又は前記他端が前記凹部に接続されている、請求項1に記載の半導体装置。
- 前記第1絶縁基板の前記一方の金属層の少なくとも一部は、前記第2絶縁基板の前記一方の金属層の少なくとも一部に対向している、請求項1又は2に記載の半導体装置。
- 請求項1に記載の半導体装置の製造方法であって、
前記第1絶縁基板、前記第2絶縁基板及び前記継ぎ手をそれぞれ用意する工程と、
前記第1絶縁基板の前記一方の金属層に前記継ぎ手の前記一端を接合するとともに、前記第2絶縁基板の前記一方の金属層に前記継ぎ手の前記他端を接合する工程と、
を備える製造方法。
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JP2013016623A (ja) * | 2011-07-04 | 2013-01-24 | Denso Corp | 半導体装置 |
JP2014060410A (ja) * | 2008-04-09 | 2014-04-03 | Fuji Electric Co Ltd | 半導体装置 |
JP2016001644A (ja) * | 2014-06-11 | 2016-01-07 | サンケン電気株式会社 | 半導体モジュール |
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JP2014060410A (ja) * | 2008-04-09 | 2014-04-03 | Fuji Electric Co Ltd | 半導体装置 |
JP2013016623A (ja) * | 2011-07-04 | 2013-01-24 | Denso Corp | 半導体装置 |
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