JP2019067945A - テープ拡張装置及びテープ拡張方法 - Google Patents
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- 238000000034 method Methods 0.000 title claims abstract description 13
- 238000001816 cooling Methods 0.000 claims abstract description 103
- 238000010438 heat treatment Methods 0.000 claims abstract description 52
- 238000003825 pressing Methods 0.000 claims abstract description 29
- 230000002093 peripheral effect Effects 0.000 claims abstract description 21
- 230000008569 process Effects 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 102
- 238000009300 dissolved air flotation Methods 0.000 description 34
- 239000000463 material Substances 0.000 description 26
- 230000007246 mechanism Effects 0.000 description 24
- 210000000078 claw Anatomy 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 8
- 238000012545 processing Methods 0.000 description 7
- 238000004891 communication Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000008602 contraction Effects 0.000 description 4
- 230000003028 elevating effect Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 239000002313 adhesive film Substances 0.000 description 3
- 238000013459 approach Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 101100008635 Caenorhabditis elegans daf-12 gene Proteins 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000002407 reforming Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/79—Apparatus for Tape Automated Bonding [TAB]
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/86—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using tape automated bonding [TAB]
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Dicing (AREA)
Abstract
Description
11 :環状フレーム
12 :エキスパンドテープ
13 :ウェーハ
15 :改質層
16 :チップ
17 :DAF
20 :テープ拡張装置
21 :基台
22 :フレーム保持手段
23 :押圧手段
24 :冷却テーブル
25 :仮置きステージ
26 :フレーム把持爪
27 :加熱手段
35 :ローラー
36 :上部支持体
37 :下部支持体
38 :板状メッシュ材
38a :吸引孔
39 :吸引溝
40 :吸引手段
41 :吸引手段
42 :冷却手段
43 :冷却伝達部
Claims (2)
- 複数の分割予定ラインによって区画された領域に複数のデバイスが形成されたウェーハが貼着されるとともに外周部が環状フレームに装着されたエキスパンドテープを拡張するためのテープ拡張装置であって、
該エキスパンドテープに貼着された該ウェーハが鉛直下向きに向いた状態で該環状フレームを上面に保持するフレーム保持手段と、
該フレーム保持手段と該ウェーハの外周縁との間で該エキスパンドテープを上方から環状に押圧して拡張し、分割起点に沿って該ウェーハを分割する押圧手段と、
環状の該押圧手段の内周側に昇降可能に配設され、該エキスパンドテープを介して該ウェーハ全面にわたって当接する当接面に吸引孔を有する冷却テーブルと、
該フレーム保持手段と該ウェーハの外周縁との間で伸長した該エキスパンドテープを加熱して収縮させる加熱手段と、を備えることを特徴とするテープ拡張装置。 - 請求項1記載のテープ拡張装置を用いるテープ拡張方法において、
該ウェーハが鉛直下向きに向いた状態で、該冷却テーブルの該当接面の下方に該エキスパンドテープの裏面が位置するように該環状フレームを保持する保持ステップと、
該保持ステップを実施した後に、該冷却テーブルの該当接面に該エキスパンドテープの裏面を当接させ、該吸引孔に吸引力を作用させ該エキスパンドテープを冷却するエキスパンドテープ冷却ステップと、
該フレーム保持手段と該押圧手段とを相対移動させて該エキスパンドテープを拡張するエキスパンドテープ拡張ステップと、
該冷却テーブルの該当接面を該エキスパンドテープ裏面に当接させて該吸引孔に吸引力を作用させた状態で、該フレーム保持手段と該ウェーハの外周縁との間で伸長した該エキスパンドテープを該加熱手段により加熱して収縮させる加熱ステップと、を有することを特徴とするテープ拡張方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2017192601A JP7030469B2 (ja) | 2017-10-02 | 2017-10-02 | テープ拡張装置及びテープ拡張方法 |
TW107131065A TWI760558B (zh) | 2017-10-02 | 2018-09-05 | 膠帶擴張裝置及膠帶擴張方法 |
CN201811112958.4A CN109599352B (zh) | 2017-10-02 | 2018-09-25 | 带扩展装置和带扩展方法 |
KR1020180115964A KR102597940B1 (ko) | 2017-10-02 | 2018-09-28 | 테이프 확장 장치 및 테이프 확장 방법 |
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JP2017192601A JP7030469B2 (ja) | 2017-10-02 | 2017-10-02 | テープ拡張装置及びテープ拡張方法 |
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JP (1) | JP7030469B2 (ja) |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021034397A (ja) * | 2019-08-14 | 2021-03-01 | 株式会社ディスコ | エキスパンド装置 |
WO2023209901A1 (ja) * | 2022-04-27 | 2023-11-02 | ヤマハ発動機株式会社 | エキスパンド装置、半導体チップの製造方法および半導体チップ |
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CN110729186A (zh) * | 2019-10-24 | 2020-01-24 | 东莞记忆存储科技有限公司 | 一种晶圆切割及分离的加工工艺方法 |
CN111267017B (zh) * | 2020-03-17 | 2022-05-13 | 华天慧创科技(西安)有限公司 | 一种避免晶圆镀膜时中间变形的支架工装及工作方法 |
JPWO2023042263A1 (ja) * | 2021-09-14 | 2023-03-23 | ||
KR102576912B1 (ko) * | 2022-10-05 | 2023-09-11 | 제너셈(주) | 디태치 구조체 및 이를 포함하는 디태치 장치 |
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JP2007305687A (ja) * | 2006-05-09 | 2007-11-22 | Disco Abrasive Syst Ltd | ウエーハの分割方法および分割装置 |
US20120009763A1 (en) * | 2010-05-12 | 2012-01-12 | Stmicroelectronics (Tours) Sas | Semiconductor chip manufacturing method |
JP2012164844A (ja) * | 2011-02-08 | 2012-08-30 | Toyota Motor Corp | エキスパンド方法、エキスパンド装置、粘着シート |
JP2013041967A (ja) * | 2011-08-15 | 2013-02-28 | Disco Abrasive Syst Ltd | 分割装置 |
JP2013051368A (ja) * | 2011-08-31 | 2013-03-14 | Tokyo Seimitsu Co Ltd | ワーク分割装置及びワーク分割方法 |
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JP3408805B2 (ja) | 2000-09-13 | 2003-05-19 | 浜松ホトニクス株式会社 | 切断起点領域形成方法及び加工対象物切断方法 |
JP4793128B2 (ja) | 2006-06-23 | 2011-10-12 | 株式会社デンソー | 半導体装置の製造装置及び半導体装置の製造方法 |
JP5791866B2 (ja) | 2009-03-06 | 2015-10-07 | 株式会社ディスコ | ワーク分割装置 |
JP2011077482A (ja) * | 2009-10-02 | 2011-04-14 | Disco Abrasive Syst Ltd | テープ拡張装置 |
JP2015015359A (ja) * | 2013-07-04 | 2015-01-22 | 株式会社ディスコ | ウエーハの加工方法 |
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Patent Citations (5)
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JP2007305687A (ja) * | 2006-05-09 | 2007-11-22 | Disco Abrasive Syst Ltd | ウエーハの分割方法および分割装置 |
US20120009763A1 (en) * | 2010-05-12 | 2012-01-12 | Stmicroelectronics (Tours) Sas | Semiconductor chip manufacturing method |
JP2012164844A (ja) * | 2011-02-08 | 2012-08-30 | Toyota Motor Corp | エキスパンド方法、エキスパンド装置、粘着シート |
JP2013041967A (ja) * | 2011-08-15 | 2013-02-28 | Disco Abrasive Syst Ltd | 分割装置 |
JP2013051368A (ja) * | 2011-08-31 | 2013-03-14 | Tokyo Seimitsu Co Ltd | ワーク分割装置及びワーク分割方法 |
Cited By (3)
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JP2021034397A (ja) * | 2019-08-14 | 2021-03-01 | 株式会社ディスコ | エキスパンド装置 |
JP7325258B2 (ja) | 2019-08-14 | 2023-08-14 | 株式会社ディスコ | エキスパンド装置 |
WO2023209901A1 (ja) * | 2022-04-27 | 2023-11-02 | ヤマハ発動機株式会社 | エキスパンド装置、半導体チップの製造方法および半導体チップ |
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TWI760558B (zh) | 2022-04-11 |
TW201929060A (zh) | 2019-07-16 |
KR102597940B1 (ko) | 2023-11-02 |
KR20190039000A (ko) | 2019-04-10 |
CN109599352B (zh) | 2024-03-19 |
JP7030469B2 (ja) | 2022-03-07 |
CN109599352A (zh) | 2019-04-09 |
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