JP2019062599A - 搬送システム及び加工システム - Google Patents

搬送システム及び加工システム Download PDF

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Publication number
JP2019062599A
JP2019062599A JP2017183583A JP2017183583A JP2019062599A JP 2019062599 A JP2019062599 A JP 2019062599A JP 2017183583 A JP2017183583 A JP 2017183583A JP 2017183583 A JP2017183583 A JP 2017183583A JP 2019062599 A JP2019062599 A JP 2019062599A
Authority
JP
Japan
Prior art keywords
carriage
transport
module
movement error
conveyance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017183583A
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English (en)
Japanese (ja)
Other versions
JP2019062599A5 (enExample
Inventor
山本　武
Takeshi Yamamoto
武 山本
幸治 友田
Koji Tomota
幸治 友田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2017183583A priority Critical patent/JP2019062599A/ja
Priority to US16/129,013 priority patent/US10889449B2/en
Priority to CN201811114840.5A priority patent/CN109552835B/zh
Priority to CN202110526933.4A priority patent/CN113148592B/zh
Publication of JP2019062599A publication Critical patent/JP2019062599A/ja
Publication of JP2019062599A5 publication Critical patent/JP2019062599A5/ja
Priority to US17/120,939 priority patent/US11702295B2/en
Pending legal-status Critical Current

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Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/60—Electric or hybrid propulsion means for production processes

Landscapes

  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
  • Control Of Multiple Motors (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
JP2017183583A 2017-09-25 2017-09-25 搬送システム及び加工システム Pending JP2019062599A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2017183583A JP2019062599A (ja) 2017-09-25 2017-09-25 搬送システム及び加工システム
US16/129,013 US10889449B2 (en) 2017-09-25 2018-09-12 Transport system and manufacturing method of article
CN201811114840.5A CN109552835B (zh) 2017-09-25 2018-09-25 输送系统及物品的制造方法
CN202110526933.4A CN113148592B (zh) 2017-09-25 2018-09-25 输送系统、加工系统及对工件进行加工以制造物品的方法
US17/120,939 US11702295B2 (en) 2017-09-25 2020-12-14 Transport system and manufacturing method of article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017183583A JP2019062599A (ja) 2017-09-25 2017-09-25 搬送システム及び加工システム

Publications (2)

Publication Number Publication Date
JP2019062599A true JP2019062599A (ja) 2019-04-18
JP2019062599A5 JP2019062599A5 (enExample) 2020-11-12

Family

ID=66178678

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017183583A Pending JP2019062599A (ja) 2017-09-25 2017-09-25 搬送システム及び加工システム

Country Status (1)

Country Link
JP (1) JP2019062599A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11557954B2 (en) * 2017-10-27 2023-01-17 Canon Kabushiki Kaisha Transport system, processing system, and article manufacturing method
WO2023095578A1 (ja) * 2021-11-24 2023-06-01 住友重機械工業株式会社 駆動装置、可動子、制御方法、制御プログラム
WO2025027795A1 (ja) * 2023-08-01 2025-02-06 三菱電機株式会社 モータ制御装置、位置決め装置およびモータ制御方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003244929A (ja) * 2002-02-18 2003-08-29 Yaskawa Electric Corp リニアモータ
JP2008178237A (ja) * 2007-01-19 2008-07-31 Yaskawa Electric Corp リニアシステムの磁極位置補正方法およびこの補正方法を用いたリニアシステム
JP2013102570A (ja) * 2011-11-07 2013-05-23 Yamaha Motor Co Ltd リニアコンベア及びその駆動制御方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003244929A (ja) * 2002-02-18 2003-08-29 Yaskawa Electric Corp リニアモータ
JP2008178237A (ja) * 2007-01-19 2008-07-31 Yaskawa Electric Corp リニアシステムの磁極位置補正方法およびこの補正方法を用いたリニアシステム
JP2013102570A (ja) * 2011-11-07 2013-05-23 Yamaha Motor Co Ltd リニアコンベア及びその駆動制御方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11557954B2 (en) * 2017-10-27 2023-01-17 Canon Kabushiki Kaisha Transport system, processing system, and article manufacturing method
WO2023095578A1 (ja) * 2021-11-24 2023-06-01 住友重機械工業株式会社 駆動装置、可動子、制御方法、制御プログラム
WO2025027795A1 (ja) * 2023-08-01 2025-02-06 三菱電機株式会社 モータ制御装置、位置決め装置およびモータ制御方法

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