JP2019062190A - 銅配線のためのシード層 - Google Patents
銅配線のためのシード層 Download PDFInfo
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- JP2019062190A JP2019062190A JP2018154364A JP2018154364A JP2019062190A JP 2019062190 A JP2019062190 A JP 2019062190A JP 2018154364 A JP2018154364 A JP 2018154364A JP 2018154364 A JP2018154364 A JP 2018154364A JP 2019062190 A JP2019062190 A JP 2019062190A
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- layer
- copper
- ruthenium
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- titanium
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- 239000010949 copper Substances 0.000 title claims abstract description 156
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 153
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 151
- 238000000034 method Methods 0.000 claims abstract description 72
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims abstract description 54
- 229910052707 ruthenium Inorganic materials 0.000 claims abstract description 54
- 230000004888 barrier function Effects 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims description 39
- 238000012545 processing Methods 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 31
- 238000000151 deposition Methods 0.000 claims description 27
- 239000012713 reactive precursor Substances 0.000 claims description 13
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 9
- 239000002243 precursor Substances 0.000 claims description 9
- 229910052721 tungsten Inorganic materials 0.000 claims description 9
- 239000001257 hydrogen Substances 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- 239000010937 tungsten Substances 0.000 claims description 8
- 125000002524 organometallic group Chemical group 0.000 claims description 7
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 5
- -1 tungsten nitride Chemical class 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 4
- IUYOGGFTLHZHEG-UHFFFAOYSA-N copper titanium Chemical compound [Ti].[Cu] IUYOGGFTLHZHEG-UHFFFAOYSA-N 0.000 claims description 4
- 229910052715 tantalum Inorganic materials 0.000 claims description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 238000012546 transfer Methods 0.000 claims description 2
- 239000012691 Cu precursor Substances 0.000 claims 1
- 229910052765 Lutetium Inorganic materials 0.000 claims 1
- 239000003989 dielectric material Substances 0.000 claims 1
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 claims 1
- 238000013508 migration Methods 0.000 abstract description 3
- 230000005012 migration Effects 0.000 abstract description 2
- 230000008569 process Effects 0.000 description 30
- 238000005240 physical vapour deposition Methods 0.000 description 15
- 238000000231 atomic layer deposition Methods 0.000 description 13
- 238000005229 chemical vapour deposition Methods 0.000 description 13
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 230000008021 deposition Effects 0.000 description 6
- 230000002776 aggregation Effects 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000009713 electroplating Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 238000005054 agglomeration Methods 0.000 description 3
- 238000004070 electrodeposition Methods 0.000 description 3
- 238000005429 filling process Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- VHYFNPMBLIVWCW-UHFFFAOYSA-N 4-Dimethylaminopyridine Chemical compound CN(C)C1=CC=NC=C1 VHYFNPMBLIVWCW-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- RBHOTLNMLNPNKT-UHFFFAOYSA-N CN(C)CCC(C)O[Cu]OC(C)CCN(C)C Chemical compound CN(C)CCC(C)O[Cu]OC(C)CCN(C)C RBHOTLNMLNPNKT-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- PIZHFBODNLEQBL-UHFFFAOYSA-N 2,2-diethoxy-1-phenylethanone Chemical compound CCOC(OCC)C(=O)C1=CC=CC=C1 PIZHFBODNLEQBL-UHFFFAOYSA-N 0.000 description 1
- VZEZONWRBFJJMZ-UHFFFAOYSA-N 3-allyl-2-[2-(diethylamino)ethoxy]benzaldehyde Chemical compound CCN(CC)CCOC1=C(CC=C)C=CC=C1C=O VZEZONWRBFJJMZ-UHFFFAOYSA-N 0.000 description 1
- 229960000549 4-dimethylaminophenol Drugs 0.000 description 1
- HVHUYKPEEWRAAQ-UHFFFAOYSA-N C(C)C(CC(C)O[Cu]OC(C)CC(CC)NC)NC Chemical compound C(C)C(CC(C)O[Cu]OC(C)CC(CC)NC)NC HVHUYKPEEWRAAQ-UHFFFAOYSA-N 0.000 description 1
- CJBVLDGFTXMPNM-UHFFFAOYSA-N C(C)N(CC)C([O-])C.[Cu+2].C(C)N(CC)C([O-])C Chemical compound C(C)N(CC)C([O-])C.[Cu+2].C(C)N(CC)C([O-])C CJBVLDGFTXMPNM-UHFFFAOYSA-N 0.000 description 1
- WXQYSWFGBBGRJM-UHFFFAOYSA-N CC(C(=C)C)=C.[Ru] Chemical compound CC(C(=C)C)=C.[Ru] WXQYSWFGBBGRJM-UHFFFAOYSA-N 0.000 description 1
- LRTAOPWKTISYBQ-UHFFFAOYSA-N CCC(NC)C(C)(CC)O[Cu]OC(C)(CC)C(CC)NC Chemical compound CCC(NC)C(C)(CC)O[Cu]OC(C)(CC)C(CC)NC LRTAOPWKTISYBQ-UHFFFAOYSA-N 0.000 description 1
- MFKNGWLTPFGBBK-UHFFFAOYSA-N COC(C)(C)O[Cu]OC(C)(C)OC Chemical compound COC(C)(C)O[Cu]OC(C)(C)OC MFKNGWLTPFGBBK-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910017566 Cu-Mn Inorganic materials 0.000 description 1
- 229910017767 Cu—Al Inorganic materials 0.000 description 1
- 229910017871 Cu—Mn Inorganic materials 0.000 description 1
- 102100027094 Echinoderm microtubule-associated protein-like 1 Human genes 0.000 description 1
- 101001057941 Homo sapiens Echinoderm microtubule-associated protein-like 1 Proteins 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 101000653787 Mus musculus Protein S100-A11 Proteins 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- WYEMLYFITZORAB-UHFFFAOYSA-N boscalid Chemical compound C1=CC(Cl)=CC=C1C1=CC=CC=C1NC(=O)C1=CC=CN=C1Cl WYEMLYFITZORAB-UHFFFAOYSA-N 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- KCDRJCREJNEKCZ-UHFFFAOYSA-N copper;1-(dimethylamino)ethanolate Chemical compound [Cu+2].CC([O-])N(C)C.CC([O-])N(C)C KCDRJCREJNEKCZ-UHFFFAOYSA-N 0.000 description 1
- JYVFVHINVDAPJO-UHFFFAOYSA-N copper;1-(dimethylamino)propan-2-olate Chemical compound [Cu+2].CC([O-])CN(C)C.CC([O-])CN(C)C JYVFVHINVDAPJO-UHFFFAOYSA-N 0.000 description 1
- AOPSBLDLHFNEAG-UHFFFAOYSA-N copper;2-methoxyethanolate Chemical compound [Cu+2].COCC[O-].COCC[O-] AOPSBLDLHFNEAG-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 150000001993 dienes Chemical class 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 125000002147 dimethylamino group Chemical group [H]C([H])([H])N(*)C([H])([H])[H] 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
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- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53228—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being copper
- H01L23/53238—Additional layers associated with copper layers, e.g. adhesion, barrier, cladding layers
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
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- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
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- H01L21/2855—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table by physical means, e.g. sputtering, evaporation
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- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
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- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
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Abstract
Description
110 作業
120 作業
130 作業
140 作業
150 作業
200 パターニングされた基板
201 基板
202 第1の誘電体層
203 エッチング停止層
204 第2の誘電体層
205 開口部
206 バリア層
207 シード層
207a 第1の銅層
207b ルテニウム層
207c 第2の銅層
208 バルク銅層
209 材料層
Claims (15)
- 材料層に形成された開口部を有するパターン形成された表面を備える基板を、第1の処理チャンバ内に配置することと、
前記開口部の壁に第1の銅層を形成すること、前記第1の銅層の上にルテニウム層を形成すること、前記ルテニウム層の上に第2の銅層を形成することを含む、前記開口部の前記壁にシード層を形成することと、
を含む、配線構造を形成する方法。 - 前記ルテニウム層を形成することは、前記基板をルテニウム前駆体に曝露すること、及び、前記基板を水素含有前駆体に曝露することを順次反復することを含む、請求項1に記載の方法。
- 前記ルテニウム層は、前記第1の銅層を形成するために使用される前記第1の処理チャンバとは異なる第2の処理チャンバ内で形成される、請求項1に記載の方法。
- 前記第1の銅層、前記ルテニウム層、及び前記第2の銅層は、前記第1の処理チャンバ内で前記基板を取り除くことなく形成される、請求項1に記載の方法。
- 前記ルテニウム層の厚みが、約1オングストロームから約20オングストロームの間である、請求項1に記載の方法。
- 前記パターン形成された表面は更に、前記材料層の上に配置されたバリア層を含み、前記バリア層は、タンタル、窒化タンタル、タングステン、チタン、チタンタングステン、窒化チタン、窒化タングステン、チタン銅、及びこれらの組み合わせからなる群から選択された材料を含み、前記第1の銅層は前記バリア層の上に形成される、請求項1に記載の方法。
- 前記バリア層は第2の処理チャンバ内で堆積され、前記第1の処理チャンバと前記第2の処理チャンバは移送チャンバによって接続される、請求項6に記載の方法。
- 前記第1の銅層を形成することは、前記基板を銅前駆体に曝露すること、及び、前記基板を水素前駆体に曝露することを順次反復することを含む、請求項1に記載の方法。
- 開口部が形成された材料層と前記材料層の上に配置されたバリア層とを含むパターニングされた基板の上に第1の銅層を堆積することと、
前記第1の銅層の上にルテニウム層を堆積することと、
前記ルテニウム層の上に第2の銅層を堆積することと
を含む、デバイスを形成する方法。 - 前記材料層は誘電体層を含む、請求項9に記載の方法。
- 前記バリア層は、タンタル、窒化タンタル、タングステン、チタン、チタンタングステン、窒化チタン、窒化タングステン、チタン銅、及びこれらの組み合わせからなる群から選択された材料を含む、請求項10に記載の方法。
- 前記第1及び第2の銅層を堆積することは、銅含有有機金属を含む第1の反応性前駆体、及び水素を含む第2の反応性前駆体に、前記パターニングされた基板を順次曝露することを含む、請求項11に記載の方法。
- 基板の材料層に形成された複数の開口部を有するパターン形成された表面を含む基板と、
前記開口部の壁に配置されたシード層であって、
第1の銅層、
前記第1の銅層の上に配置されたルテリウム層、及び
前記ルテリウム層の上に配置された第2の銅層
を備えるシード層と
を備えるデバイス。 - 前記ルテリウム層の厚みが、約1オングストロームから約20オングストロームの間である、請求項13に記載のデバイス。
- 前記材料層は誘電体材料を含み、前記デバイスは更に、前記シード層と前記開口部の前記壁との間に配置されたバリア層を含み、前記バリア層は、タンタル、窒化タンタル、タングステン、チタン、チタンタングステン、窒化チタン、窒化タングステン、チタン銅、及びこれらの組み合わせからなる群から選択された材料を含む、請求項13に記載のデバイス。
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