JP2019055889A - 赤外線吸収ガラス板及びその製造方法、並びに固体撮像素子デバイス - Google Patents
赤外線吸収ガラス板及びその製造方法、並びに固体撮像素子デバイス Download PDFInfo
- Publication number
- JP2019055889A JP2019055889A JP2017180073A JP2017180073A JP2019055889A JP 2019055889 A JP2019055889 A JP 2019055889A JP 2017180073 A JP2017180073 A JP 2017180073A JP 2017180073 A JP2017180073 A JP 2017180073A JP 2019055889 A JP2019055889 A JP 2019055889A
- Authority
- JP
- Japan
- Prior art keywords
- infrared
- glass plate
- absorbing glass
- solid
- absorbing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 title claims abstract description 180
- 238000003384 imaging method Methods 0.000 title abstract description 13
- 238000000034 method Methods 0.000 title description 11
- DWYMPOCYEZONEA-UHFFFAOYSA-L fluoridophosphate Chemical compound [O-]P([O-])(F)=O DWYMPOCYEZONEA-UHFFFAOYSA-L 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 30
- 238000005498 polishing Methods 0.000 claims description 29
- 239000002585 base Substances 0.000 claims description 27
- 238000010521 absorption reaction Methods 0.000 claims description 23
- 239000003599 detergent Substances 0.000 claims description 22
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 11
- 239000002253 acid Substances 0.000 claims description 8
- 238000013001 point bending Methods 0.000 claims description 7
- 150000001447 alkali salts Chemical class 0.000 claims description 6
- 125000000129 anionic group Chemical group 0.000 claims description 5
- 239000005303 fluorophosphate glass Substances 0.000 claims description 4
- 239000011159 matrix material Substances 0.000 claims description 4
- 125000002091 cationic group Chemical group 0.000 claims description 3
- 230000005855 radiation Effects 0.000 claims 1
- 150000001768 cations Chemical class 0.000 abstract description 5
- 150000001450 anions Chemical class 0.000 abstract 1
- 239000010408 film Substances 0.000 description 27
- 238000004031 devitrification Methods 0.000 description 11
- 238000002844 melting Methods 0.000 description 8
- 230000008018 melting Effects 0.000 description 8
- 239000003513 alkali Substances 0.000 description 7
- 238000004017 vitrification Methods 0.000 description 7
- 239000000203 mixture Substances 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 238000002834 transmittance Methods 0.000 description 6
- 230000006870 function Effects 0.000 description 5
- QPCDCPDFJACHGM-UHFFFAOYSA-N N,N-bis{2-[bis(carboxymethyl)amino]ethyl}glycine Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(=O)O)CCN(CC(O)=O)CC(O)=O QPCDCPDFJACHGM-UHFFFAOYSA-N 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 229960003330 pentetic acid Drugs 0.000 description 4
- 239000011734 sodium Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 239000012788 optical film Substances 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000007372 rollout process Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 238000005549 size reduction Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- -1 For example Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002738 chelating agent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000003280 down draw process Methods 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- MGFYIUFZLHCRTH-UHFFFAOYSA-N nitrilotriacetic acid Chemical compound OC(=O)CN(CC(O)=O)CC(O)=O MGFYIUFZLHCRTH-UHFFFAOYSA-N 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 159000000001 potassium salts Chemical class 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- DZCAZXAJPZCSCU-UHFFFAOYSA-K sodium nitrilotriacetate Chemical compound [Na+].[Na+].[Na+].[O-]C(=O)CN(CC([O-])=O)CC([O-])=O DZCAZXAJPZCSCU-UHFFFAOYSA-K 0.000 description 1
- 159000000000 sodium salts Chemical class 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- XFLNVMPCPRLYBE-UHFFFAOYSA-J tetrasodium;2-[2-[bis(carboxylatomethyl)amino]ethyl-(carboxylatomethyl)amino]acetate;tetrahydrate Chemical compound O.O.O.O.[Na+].[Na+].[Na+].[Na+].[O-]C(=O)CN(CC([O-])=O)CCN(CC([O-])=O)CC([O-])=O XFLNVMPCPRLYBE-UHFFFAOYSA-J 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 230000016776 visual perception Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/08—Compositions for glass with special properties for glass selectively absorbing radiation of specified wave lengths
- C03C4/082—Compositions for glass with special properties for glass selectively absorbing radiation of specified wave lengths for infrared absorbing glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/12—Silica-free oxide glass compositions
- C03C3/23—Silica-free oxide glass compositions containing halogen and at least one oxide, e.g. oxide of boron
- C03C3/247—Silica-free oxide glass compositions containing halogen and at least one oxide, e.g. oxide of boron containing fluorine and phosphorus
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C4/00—Compositions for glass with special properties
- C03C4/08—Compositions for glass with special properties for glass selectively absorbing radiation of specified wave lengths
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/26—Organic compounds containing nitrogen
- C11D3/33—Amino carboxylic acids
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Glass Compositions (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Optical Filters (AREA)
- Surface Treatment Of Glass (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017180073A JP2019055889A (ja) | 2017-09-20 | 2017-09-20 | 赤外線吸収ガラス板及びその製造方法、並びに固体撮像素子デバイス |
| TW107119109A TWI791530B (zh) | 2017-09-20 | 2018-06-04 | 紅外線吸收玻璃板及其製造方法、以及固體攝像元件裝置 |
| CN201880060438.5A CN111108075A (zh) | 2017-09-20 | 2018-08-22 | 红外线吸收玻璃板及其制造方法、以及固体摄像元件设备 |
| KR1020197031985A KR20200054911A (ko) | 2017-09-20 | 2018-08-22 | 적외선 흡수 유리판 및 그 제조 방법, 및 고체 촬상 소자 디바이스 |
| PCT/JP2018/031042 WO2019058858A1 (ja) | 2017-09-20 | 2018-08-22 | 赤外線吸収ガラス板及びその製造方法、並びに固体撮像素子デバイス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017180073A JP2019055889A (ja) | 2017-09-20 | 2017-09-20 | 赤外線吸収ガラス板及びその製造方法、並びに固体撮像素子デバイス |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2019055889A true JP2019055889A (ja) | 2019-04-11 |
Family
ID=65811444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017180073A Pending JP2019055889A (ja) | 2017-09-20 | 2017-09-20 | 赤外線吸収ガラス板及びその製造方法、並びに固体撮像素子デバイス |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2019055889A (zh) |
| KR (1) | KR20200054911A (zh) |
| CN (1) | CN111108075A (zh) |
| TW (1) | TWI791530B (zh) |
| WO (1) | WO2019058858A1 (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021019837A1 (ja) * | 2019-07-31 | 2021-02-04 | 日本電気硝子株式会社 | ガラス板のエッチング方法 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2020059431A1 (ja) * | 2018-09-20 | 2020-03-26 | 日本電気硝子株式会社 | 赤外線吸収ガラスの製造方法 |
| CN114538772B (zh) * | 2022-03-24 | 2022-12-02 | 成都光明光电股份有限公司 | 玻璃、玻璃元件及滤光器 |
| CN114455836B (zh) * | 2022-03-24 | 2023-07-18 | 成都光明光电股份有限公司 | 近红外光吸收玻璃、元件及滤光器 |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002160943A (ja) * | 2000-09-13 | 2002-06-04 | Nippon Sheet Glass Co Ltd | 非晶質材料の加工方法及びガラス基板 |
| JP2006342024A (ja) * | 2005-06-09 | 2006-12-21 | Asahi Techno Glass Corp | 近赤外線カットフィルタガラス |
| JP2010168262A (ja) * | 2008-03-31 | 2010-08-05 | Asahi Glass Co Ltd | 板状光学ガラス及び板状光学ガラスの端面処理方法 |
| JP2010197595A (ja) * | 2009-02-24 | 2010-09-09 | Asahi Glass Co Ltd | 近赤外線カットフィルタガラスおよびその製造方法 |
| JP2014222330A (ja) * | 2013-05-14 | 2014-11-27 | 株式会社ニコン | ガラス基板の表面処理方法およびフォトマスクの再生方法 |
| WO2017018273A1 (ja) * | 2015-07-24 | 2017-02-02 | 旭硝子株式会社 | 近赤外線カットフィルタガラス |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4169545B2 (ja) * | 2002-07-05 | 2008-10-22 | Ｈｏｙａ株式会社 | 近赤外光吸収ガラス、近赤外光吸収素子、近赤外光吸収フィルターおよび近赤外光吸収ガラス成形体の製造方法 |
| US7192897B2 (en) * | 2002-07-05 | 2007-03-20 | Hoya Corporation | Near-infrared light-absorbing glass, near-infrared light-absorbing element, near-infrared light-absorbing filter, and method of manufacturing near-infrared light-absorbing formed glass article, and copper-containing glass |
| JP4493417B2 (ja) * | 2004-06-09 | 2010-06-30 | Ｈｏｙａ株式会社 | 半導体パッケージの窓用ガラス、半導体パッケージ用ガラス窓および半導体パッケージ |
| JP2007099604A (ja) | 2005-09-06 | 2007-04-19 | Hoya Corp | 近赤外線吸収ガラス、それを備えた近赤外線吸収素子および撮像装置 |
| CN101544468B (zh) * | 2008-03-28 | 2013-05-01 | Hoya株式会社 | 氟磷酸玻璃、精密模压成形用预成形件、光学元件坯料、光学元件以及它们的制造方法 |
| JP5115984B2 (ja) * | 2008-03-28 | 2013-01-09 | Ｈｏｙａ株式会社 | フツリン酸ガラス、プレス成形用ガラス素材、光学素子ブランク、光学素子とそれぞれの製造方法 |
| WO2010119964A1 (ja) * | 2009-04-17 | 2010-10-21 | 旭硝子株式会社 | 近赤外線カットフィルタガラス |
| US8085472B2 (en) * | 2009-10-28 | 2011-12-27 | Tyco Electronics Corporation | Expanded beam interface device and method for fabricating same |
| WO2011055726A1 (ja) * | 2009-11-04 | 2011-05-12 | 旭硝子株式会社 | 近赤外線カットフィルタ |
| CN104755969B (zh) * | 2012-08-23 | 2018-06-08 | 旭硝子株式会社 | 近红外线截止滤波器和固体摄像装置 |
| WO2015080043A1 (ja) * | 2013-11-26 | 2015-06-04 | 旭硝子株式会社 | ガラス部材およびガラス部材の製造方法 |
| JP6811053B2 (ja) * | 2016-04-11 | 2021-01-13 | 日本電気硝子株式会社 | 赤外線吸収ガラス板及びその製造方法、並びに固体撮像素子デバイス |
-
2017
- 2017-09-20 JP JP2017180073A patent/JP2019055889A/ja active Pending
-
2018
- 2018-06-04 TW TW107119109A patent/TWI791530B/zh active
- 2018-08-22 CN CN201880060438.5A patent/CN111108075A/zh active Pending
- 2018-08-22 WO PCT/JP2018/031042 patent/WO2019058858A1/ja active Application Filing
- 2018-08-22 KR KR1020197031985A patent/KR20200054911A/ko not_active IP Right Cessation
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002160943A (ja) * | 2000-09-13 | 2002-06-04 | Nippon Sheet Glass Co Ltd | 非晶質材料の加工方法及びガラス基板 |
| JP2006342024A (ja) * | 2005-06-09 | 2006-12-21 | Asahi Techno Glass Corp | 近赤外線カットフィルタガラス |
| JP2010168262A (ja) * | 2008-03-31 | 2010-08-05 | Asahi Glass Co Ltd | 板状光学ガラス及び板状光学ガラスの端面処理方法 |
| JP2010197595A (ja) * | 2009-02-24 | 2010-09-09 | Asahi Glass Co Ltd | 近赤外線カットフィルタガラスおよびその製造方法 |
| JP2014222330A (ja) * | 2013-05-14 | 2014-11-27 | 株式会社ニコン | ガラス基板の表面処理方法およびフォトマスクの再生方法 |
| WO2017018273A1 (ja) * | 2015-07-24 | 2017-02-02 | 旭硝子株式会社 | 近赤外線カットフィルタガラス |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021019837A1 (ja) * | 2019-07-31 | 2021-02-04 | 日本電気硝子株式会社 | ガラス板のエッチング方法 |
| JP2021024747A (ja) * | 2019-07-31 | 2021-02-22 | 日本電気硝子株式会社 | ガラス板のエッチング方法 |
| CN114026053A (zh) * | 2019-07-31 | 2022-02-08 | 日本电气硝子株式会社 | 玻璃板的蚀刻方法 |
| JP7260852B2 (ja) | 2019-07-31 | 2023-04-19 | 日本電気硝子株式会社 | ガラス板のエッチング方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201918463A (zh) | 2019-05-16 |
| CN111108075A (zh) | 2020-05-05 |
| WO2019058858A1 (ja) | 2019-03-28 |
| KR20200054911A (ko) | 2020-05-20 |
| TWI791530B (zh) | 2023-02-11 |
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