JP2018538396A5 - - Google Patents

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Publication number
JP2018538396A5
JP2018538396A5 JP2018527885A JP2018527885A JP2018538396A5 JP 2018538396 A5 JP2018538396 A5 JP 2018538396A5 JP 2018527885 A JP2018527885 A JP 2018527885A JP 2018527885 A JP2018527885 A JP 2018527885A JP 2018538396 A5 JP2018538396 A5 JP 2018538396A5
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alkyl
formula
group
composition
hept
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JP2018527885A
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Japanese (ja)
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JP6770071B2 (ja
JP2018538396A (ja
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Priority claimed from PCT/US2016/064047 external-priority patent/WO2017095829A2/en
Publication of JP2018538396A publication Critical patent/JP2018538396A/ja
Publication of JP2018538396A5 publication Critical patent/JP2018538396A5/ja
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JP2018527885A 2015-11-30 2016-11-30 光酸発生剤及び塩基を含有する永久誘電体組成物 Active JP6770071B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562260881P 2015-11-30 2015-11-30
US62/260,881 2015-11-30
PCT/US2016/064047 WO2017095829A2 (en) 2015-11-30 2016-11-30 Permanent dielectric compositions containing photoacid generator and base

Publications (3)

Publication Number Publication Date
JP2018538396A JP2018538396A (ja) 2018-12-27
JP2018538396A5 true JP2018538396A5 (https=) 2019-11-21
JP6770071B2 JP6770071B2 (ja) 2020-10-14

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ID=57750547

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Application Number Title Priority Date Filing Date
JP2018527885A Active JP6770071B2 (ja) 2015-11-30 2016-11-30 光酸発生剤及び塩基を含有する永久誘電体組成物

Country Status (5)

Country Link
US (1) US10429734B2 (https=)
JP (1) JP6770071B2 (https=)
KR (1) KR20180088652A (https=)
TW (1) TWI684826B (https=)
WO (1) WO2017095829A2 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI652281B (zh) 2015-02-18 2019-03-01 日商住友電木股份有限公司 含有光產鹼劑的光可成像聚烯烴組成物
US11048168B2 (en) * 2015-11-30 2021-06-29 Promerus, Llc Permanent dielectric compositions containing photoacid generator and base
JPWO2024195603A1 (https=) * 2023-03-20 2024-09-26

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2961722B2 (ja) 1991-12-11 1999-10-12 ジェイエスアール株式会社 感放射線性樹脂組成物
JP3804138B2 (ja) * 1996-02-09 2006-08-02 Jsr株式会社 ArFエキシマレーザー照射用感放射線性樹脂組成物
JP3700276B2 (ja) * 1996-08-09 2005-09-28 Jsr株式会社 感放射線性樹脂組成物
JP3514590B2 (ja) * 1996-09-06 2004-03-31 信越化学工業株式会社 化学増幅ポジ型レジスト材料
US6103445A (en) * 1997-03-07 2000-08-15 Board Of Regents, The University Of Texas System Photoresist compositions comprising norbornene derivative polymers with acid labile groups
JP3262108B2 (ja) 1998-09-09 2002-03-04 東レ株式会社 ポジ型感光性樹脂組成物
KR100481601B1 (ko) * 1999-09-21 2005-04-08 주식회사 하이닉스반도체 광산 발생제와 함께 광염기 발생제를 포함하는 포토레지스트 조성물
KR100632572B1 (ko) * 2000-06-21 2006-10-09 주식회사 하이닉스반도체 신규의 포토레지스트용 중합체 및 이를 함유하는포토레지스트 조성물
JP3766286B2 (ja) * 2001-03-28 2006-04-12 株式会社東芝 複合部材の製造方法、感光性組成物、絶縁体、および複合部材
KR20020082006A (ko) * 2001-04-23 2002-10-30 금호석유화학 주식회사 신규한 산-민감성 중합체 및 이를 함유하는 레지스트 조성물
JP3952756B2 (ja) 2001-11-29 2007-08-01 日本ゼオン株式会社 感放射線性樹脂組成物及びその利用
JP5276958B2 (ja) * 2008-11-19 2013-08-28 東京応化工業株式会社 レジスト組成物、およびレジストパターン形成方法
US20100136477A1 (en) * 2008-12-01 2010-06-03 Ng Edward W Photosensitive Composition
KR101842735B1 (ko) 2010-09-02 2018-03-27 메르크 파텐트 게엠베하 전자 디바이스용 게이트 절연체 층
EP2643371B1 (en) * 2010-11-24 2014-04-02 Promerus, LLC A self-imageable film forming polymer, compositions thereof and devices and structures made therefrom
WO2013010190A2 (en) 2011-07-14 2013-01-17 Sumitomo Bakelite Co., Ltd. A self-imageable layer forming polymer and compositions thereof
KR101704474B1 (ko) * 2011-12-28 2017-02-09 금호석유화학 주식회사 레지스트용 첨가제 및 이를 포함하는 레지스트 조성물
KR101572049B1 (ko) * 2012-09-25 2015-11-26 프로메러스, 엘엘씨 사이클로올레핀성 중합체를 함유하는 말레이미드 및 그의 용도
WO2015038412A2 (en) * 2013-09-16 2015-03-19 Promerus, Llc Amine treated maleic anhydride polymers with pendent silyl group, compositions and applications thereof
TWI652281B (zh) * 2015-02-18 2019-03-01 日商住友電木股份有限公司 含有光產鹼劑的光可成像聚烯烴組成物
TWI659046B (zh) * 2015-05-06 2019-05-11 Sumitomo Bakelite Co., Ltd. 作爲永久介電材料的順丁烯二醯亞胺及環烯烴單體之聚合物

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