JP2018536991A - 単結晶半導体ウエハおよび半導体ウエハの製造方法 - Google Patents
単結晶半導体ウエハおよび半導体ウエハの製造方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 61
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
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- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
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- 230000001419 dependent effect Effects 0.000 claims description 5
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- 238000005530 etching Methods 0.000 description 3
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Abstract
Description
電子部品の製造に用いられる、たとえばシリコンウエハなどの単結晶半導体ウエハは、極めて平坦な表面を有していなければならない。さもなければ、フォトリソグラフィの間にナノメータの範囲の構造を表面上にくっきりと描くことができない。さらに進歩する電子部品の小型化のために、平坦度に関する要求は絶えず高まっている。この場合、縁部に直接隣接するシリコンウエハの領域は、多種多様な効果により、特定の問題を覆し得る。両面研磨は、大規模製造における縁部領域の良好な局所形状値を有する極めて平坦なシリコンウエハを実現する好適な方法である。たとえば、1mmの縁部除外である場合、約30nmのESFQRavgが実現される。パラメータESFQRおよびその決定は、SEMI基準M67−1108に規定される。これは、シリコンウエハの縁部に径方向に配置される測定領域に規定される局所的な平坦度の値を含む。シリコンウエハの全ての測定領域のESFQR値の平均値は、ESFQRavgと略される。
−懸濁硬質物質粒子を含み、ノズルによって小さい表面領域上へ向けられる流体噴射を用いる少なくとも1つの半導体ウエハ表面の少なくとも一部の局所的な材料除去加工であって、ノズルは、半導体ウエハの予め規定された形状パラメータが改善されるように処理対象となる表面の一部の上方で動かされるステップ、
−半導体ウエハの少なくとも1つの表面の研磨ステップ。
本発明に係る半導体ウエハは、研磨された半導体ウエハの典型であるとして、0.8nm以下、好ましくは0.5nm以下の粗さRa(「平均粗さ」)によって区別される。指標値は、白色光干渉計によって決定される250μmの限界波長での平均粗さに関する。しかし、同時に、本発明に係る半導体ウエハは、8nm以下、好ましくは5nm以下の値ESFQRavg(縁部領域における平坦度を特徴付ける)を有する。従来技術に従うヘイズフリーの研磨によっては、0.2nmまたはさらには0.1nmまでの粗さRaを実現することが可能である。
その後は、少なくともFJP処理を予め受けた半導体ウエハの面が化学的機械的研磨を受ける。この場合、両面研磨された領域とFJP処理された領域との間の粗さの差異がなくなり、半導体ウエハはヘイズフリーの態様で研磨された均一に滑らかな表面を獲得する。この研磨は好ましくは片面研磨として実施され、材料除去は好ましくは1μm以下であり、特に好ましくは0.5μm以下である。好ましくは、たとえばEP847835A1に記載されるような、複数の回転的に対称的な圧力ゾーンを有する研磨ヘッドを備える研磨装置がこの目的のために用いられる。これは、少量の材料除去とともに、半導体ウエハの縁部領域におけるFJPによって設定された平坦度の実質的な維持を可能にする。
「第1の特に好ましい実施形態」は、特に、パラメータESFQRを最適化するために、半導体ウエハの縁部領域の平坦度を向上させるように適合される。
1 DSP後かつFJP前の半導体ウエハの径方向のプロファイル
2 FJP後の半導体ウエハの径方向のプロファイル
Claims (13)
- 250μmの限界波長で最大0.8nmの平均粗さRaを有し、1mmの縁部除外の場合ESFQRavgは8nm以下である、単結晶半導体ウエハ。
- ESFQRavgは5nm以下である、請求項1に記載の単結晶半導体ウエハ。
- ポリUTP法によって決定された金属含有量が銅元素およびニッケル元素に最大3×1010cm-2である、請求項1または請求項2に記載の単結晶半導体ウエハ。
- 前記半導体ウエハは実質的にシリコンを含む、請求項1〜3のいずれか一項に記載の単結晶半導体ウエハ。
- 直径が少なくとも300mmである、請求項4に記載の単結晶半導体ウエハ。
- 単結晶半導体ウエハの製造方法であって、
前記半導体ウエハの同時両面研磨ステップと、
懸濁硬質物質粒子を含み、ノズルによって小さい表面領域上へ向けられる流体噴射を用いる前記半導体ウエハの少なくとも1つの表面の少なくとも一部の局所的な材料除去加工であって、前記ノズルは、前記半導体ウエハの予め規定された形状パラメータが改善されるように処理対象となる表面の一部の上方で動かされるステップと、
前記半導体ウエハの少なくとも1つの表面の研磨ステップと、
をこの順序で含む、方法。 - 前記局所的な材料除去加工は、同一の半導体ウエハの前記同時両面研磨ステップ後に実行される前記形状パラメータの位置依存測定に基づいて実行される、請求項6に記載の方法。
- 前記局所的な材料除去加工は、同一タイプの半導体ウエハの同一タイプの同時両面研磨ステップ後に行なわれる前記形状パラメータの既知の位置依存測定に基づいて行われ、処理対象となる前記半導体ウエハ自体はこの測定を受けていない、請求項7に記載の方法。
- 前記形状パラメータは、パラメータESFQRである、請求項6〜8のいずれか1項に記載の方法。
- 前記材料除去は、0.5〜3mmの距離で加工対象の表面の上方で動かされ前記懸濁硬質物質粒子を含む前記流体噴射が噴出するノズルによって実行され、前記流体は、前記ノズルと前記表面との間に蓄積され、前記材料除去は、主として前記表面と前記ノズルの縁部との間の前記表面に平行に流れる懸濁硬質物質粒子を含む流体によって実行される、請求項6〜9のいずれか1項に記載の方法。
- 1μm以下の材料が前記半導体ウエハの少なくとも片面の最終的な研磨において除去される、請求項6〜10のいずれか1項に記載の方法。
- 前記半導体の前記同時両面研磨ステップの間に、規定された隆起部を有するプロファイルが縁部の近傍の領域で製造される、請求項6〜11のいずれか1項に記載の方法。
- 前記局所的な材料除去加工の間に、前記ノズルは、前記隆起部が位置する前記縁部の近傍の前記領域の上方で円形状の経路でまたは螺旋状に動かされ、前記隆起部は、前記局所的な材料除去加工の過程で少なくとも部分的に除去される、請求項12に記載の方法。
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DE102015224933.6A DE102015224933A1 (de) | 2015-12-11 | 2015-12-11 | Monokristalline Halbleiterscheibe und Verfahren zur Herstellung einer Halbleiterscheibe |
DE102015224933.6 | 2015-12-11 | ||
PCT/EP2016/079524 WO2017097670A1 (de) | 2015-12-11 | 2016-12-02 | Monokristalline halbleiterscheibe und verfahren zur herstellung einer halbleiterscheibe |
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CN108369895A (zh) | 2018-08-03 |
US20180342383A1 (en) | 2018-11-29 |
JP6611938B2 (ja) | 2019-11-27 |
EP3387667A1 (de) | 2018-10-17 |
US11075070B2 (en) | 2021-07-27 |
KR102064579B1 (ko) | 2020-02-11 |
TW201721733A (zh) | 2017-06-16 |
KR20180054758A (ko) | 2018-05-24 |
WO2017097670A1 (de) | 2017-06-15 |
TWI614803B (zh) | 2018-02-11 |
CN108369895B (zh) | 2022-09-27 |
DE102015224933A1 (de) | 2017-06-14 |
EP3387667B1 (de) | 2024-05-01 |
SG11201803021YA (en) | 2018-05-30 |
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