JP2018532293A - タイル張りの画像センサを用いた方法および装置 - Google Patents
タイル張りの画像センサを用いた方法および装置 Download PDFInfo
- Publication number
- JP2018532293A JP2018532293A JP2018509503A JP2018509503A JP2018532293A JP 2018532293 A JP2018532293 A JP 2018532293A JP 2018509503 A JP2018509503 A JP 2018509503A JP 2018509503 A JP2018509503 A JP 2018509503A JP 2018532293 A JP2018532293 A JP 2018532293A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- substrate
- tiles
- adhesive
- tile
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2018—Scintillation-photodiode combinations
- G01T1/20182—Modular detectors, e.g. tiled scintillators or tiled photodiodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/2006—Measuring radiation intensity with scintillation detectors using a combination of a scintillator and photodetector which measures the means radiation intensity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/20—Measuring radiation intensity with scintillation detectors
- G01T1/208—Circuits specially adapted for scintillation detectors, e.g. for the photo-multiplier section
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/24—Measuring radiation intensity with semiconductor detectors
- G01T1/243—Modular detectors, e.g. arrays formed from self contained units
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
- H10F39/018—Manufacture or treatment of image sensors covered by group H10F39/12 of hybrid image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F39/189—X-ray, gamma-ray or corpuscular radiation imagers
- H10F39/1898—Indirect radiation image sensors, e.g. using luminescent members
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/191—Photoconductor image sensors
- H10F39/195—X-ray, gamma-ray or corpuscular radiation imagers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
Landscapes
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Measurement Of Radiation (AREA)
- Toxicology (AREA)
- Apparatus For Radiation Diagnosis (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/828,772 US9599723B2 (en) | 2015-08-18 | 2015-08-18 | Method and apparatus with tiled image sensors |
| US14/828,772 | 2015-08-18 | ||
| PCT/US2016/043962 WO2017030751A1 (en) | 2015-08-18 | 2016-07-26 | Method and apparatus with tiled image sensors |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2018532293A true JP2018532293A (ja) | 2018-11-01 |
| JP2018532293A5 JP2018532293A5 (enExample) | 2019-09-12 |
Family
ID=56682254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018509503A Ceased JP2018532293A (ja) | 2015-08-18 | 2016-07-26 | タイル張りの画像センサを用いた方法および装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US9599723B2 (enExample) |
| EP (1) | EP3338111A1 (enExample) |
| JP (1) | JP2018532293A (enExample) |
| KR (1) | KR20180074660A (enExample) |
| CN (1) | CN108291972A (enExample) |
| TW (1) | TW201724548A (enExample) |
| WO (1) | WO2017030751A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107850678B (zh) * | 2015-07-17 | 2021-05-18 | 模拟技术公司 | 用于辐射成像模态装置的探测器阵列的探测器单元 |
| US9599723B2 (en) * | 2015-08-18 | 2017-03-21 | Carestream Health, Inc. | Method and apparatus with tiled image sensors |
| US10686003B2 (en) * | 2015-12-31 | 2020-06-16 | General Electric Company | Radiation detector assembly |
| WO2018202465A1 (en) * | 2017-05-01 | 2018-11-08 | Koninklijke Philips N.V. | Multi-layer radiation detector |
| US11156510B2 (en) * | 2017-05-26 | 2021-10-26 | Shenzhen New Degree Technology Co., Ltd. | Key unit and key array |
| CN107361858A (zh) * | 2017-08-29 | 2017-11-21 | 蒙显章 | 一次性手术定位膜及定位膜包 |
| US11942503B2 (en) | 2018-05-08 | 2024-03-26 | Eastern Blue Technologies, Inc. | Module and methods of assembly for large area flat panel detectors |
| KR102393910B1 (ko) * | 2019-03-22 | 2022-05-03 | 아크소프트 코포레이션 리미티드 | 타일형 이미지 센서 |
| US11869912B2 (en) | 2020-07-15 | 2024-01-09 | Semiconductor Components Industries, Llc | Method for defining a gap height within an image sensor package |
| CN114520239B (zh) * | 2020-11-20 | 2025-05-13 | 京东方科技集团股份有限公司 | X射线平板探测器及其制作方法、探测装置、成像系统 |
| US12261186B2 (en) | 2021-03-25 | 2025-03-25 | Raytheon Company | Mosaic focal plane array |
| CN115201236B (zh) * | 2021-04-14 | 2025-10-24 | 佳能医疗系统株式会社 | 放射线检测器模块、放射线检测器及x射线ct装置 |
| JP2024065926A (ja) * | 2022-10-31 | 2024-05-15 | キヤノン株式会社 | 放射線検出装置、その製造方法、センサモジュール及びct装置 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09298287A (ja) * | 1995-09-28 | 1997-11-18 | Canon Inc | 光電変換装置及びx線撮像装置 |
| US5827757A (en) * | 1996-07-16 | 1998-10-27 | Direct Radiography Corp. | Fabrication of large area x-ray image capturing element |
| JP2012027002A (ja) * | 2010-06-24 | 2012-02-09 | Canon Inc | 放射線検出装置及び放射線撮像システム |
| JP2014002115A (ja) * | 2012-06-20 | 2014-01-09 | Canon Inc | 放射線検出装置、その製造方法及び撮像システム |
| EP2735888A2 (en) * | 2012-11-21 | 2014-05-28 | Zakrytoe Akcionernoe Obshchestvo "Impul's" | X-ray imaging detector, method for manufacturing a photosensitive element and an x-ray imaging detector |
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| US3707760A (en) | 1971-05-19 | 1973-01-02 | Sieburg Ind Inc | Method and device for article working such as fracturing of semiconductor slices and separating semiconductor chips |
| US4617420A (en) | 1985-06-28 | 1986-10-14 | The Standard Oil Company | Flexible, interconnected array of amorphous semiconductor photovoltaic cells |
| US4942405A (en) | 1988-10-11 | 1990-07-17 | Hewlett-Packard Company | Light emitting diode print head assembly |
| US5072074A (en) | 1990-07-24 | 1991-12-10 | Interflex Corporation | High yield combined rigid and flexible printed circuits and method of manufacture |
| US5453145A (en) | 1991-03-04 | 1995-09-26 | Eastman Kodak Company | Z-axis dimensional control in manufacturing an LED printhead |
| US5254480A (en) | 1992-02-20 | 1993-10-19 | Minnesota Mining And Manufacturing Company | Process for producing a large area solid state radiation detector |
| FR2693033B1 (fr) | 1992-06-30 | 1994-08-19 | Commissariat Energie Atomique | Dispositif d'imagerie de grande dimension. |
| US5693947A (en) | 1993-04-28 | 1997-12-02 | The University Of Surrey | Radiation detectors |
| US5670009A (en) | 1995-02-28 | 1997-09-23 | Eastman Kodak Company | Assembly technique for an image sensor array |
| JP3805031B2 (ja) | 1995-10-20 | 2006-08-02 | キヤノン株式会社 | 光電変換装置 |
| US5909244A (en) | 1996-04-15 | 1999-06-01 | Massachusetts Institute Of Technology | Real time adaptive digital image processing for dynamic range remapping of imagery including low-light-level visible imagery |
| GB2315157B (en) | 1996-07-11 | 1998-09-30 | Simage Oy | Imaging apparatus |
| US5834782A (en) | 1996-11-20 | 1998-11-10 | Schick Technologies, Inc. | Large area image detector |
| JP3285815B2 (ja) | 1998-03-12 | 2002-05-27 | 松下電器産業株式会社 | リードフレーム,樹脂封止型半導体装置及びその製造方法 |
| WO2001048831A1 (en) | 1999-12-24 | 2001-07-05 | Bae Systems Information And Electronic Systems Integration, Inc. | Multi-color, multi-focal plane optical detector |
| JP3637826B2 (ja) | 2000-01-21 | 2005-04-13 | セイコーエプソン株式会社 | 半導体記憶装置 |
| US6426991B1 (en) | 2000-11-16 | 2002-07-30 | Koninklijke Philips Electronics N.V. | Back-illuminated photodiodes for computed tomography detectors |
| US6510195B1 (en) | 2001-07-18 | 2003-01-21 | Koninklijke Philips Electronics, N.V. | Solid state x-radiation detector modules and mosaics thereof, and an imaging method and apparatus employing the same |
| US6782076B2 (en) | 2001-12-07 | 2004-08-24 | Bede Scientific Instruments Limited | X-ray topographic system |
| US7868665B2 (en) | 2002-03-05 | 2011-01-11 | Nova R&D, Inc. | Integrated circuit and sensor for imaging |
| US6946661B2 (en) | 2002-12-23 | 2005-09-20 | Ge Medical Systems Global Technology Company, Llc | Methods and apparatus for X-ray image detector assemblies |
| US7379528B2 (en) | 2003-01-06 | 2008-05-27 | Koninklijke Philips Electronics N.V. | Radiation detector with shielded electronics for computed tomography |
| CN1973214B (zh) * | 2003-11-10 | 2010-09-15 | 江苏康众数字医疗设备有限公司 | 使用电互连的平铺光电传感器阵列的平板检测器 |
| US20050098732A1 (en) | 2003-11-10 | 2005-05-12 | Ls Technologies, Inc. | Flat-panel detector utilizing electrically interconnecting tiled photosensor arrays |
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| RU2510520C2 (ru) | 2008-11-21 | 2014-03-27 | Трикселль | Способ сборки ячеистого радиационного детектора |
| US9012262B2 (en) | 2011-04-19 | 2015-04-21 | Teledyne Rad-Icon Imaging Corp. | Method of direct tiling of an image sensor array |
| US9012859B2 (en) | 2012-05-18 | 2015-04-21 | General Electric Company | Tiled X-ray imager panel and method of forming the same |
| US9599723B2 (en) * | 2015-08-18 | 2017-03-21 | Carestream Health, Inc. | Method and apparatus with tiled image sensors |
-
2015
- 2015-08-18 US US14/828,772 patent/US9599723B2/en not_active Expired - Fee Related
-
2016
- 2016-07-26 CN CN201680048578.1A patent/CN108291972A/zh active Pending
- 2016-07-26 EP EP16750557.7A patent/EP3338111A1/en not_active Withdrawn
- 2016-07-26 WO PCT/US2016/043962 patent/WO2017030751A1/en not_active Ceased
- 2016-07-26 JP JP2018509503A patent/JP2018532293A/ja not_active Ceased
- 2016-07-26 KR KR1020187004576A patent/KR20180074660A/ko not_active Withdrawn
- 2016-08-17 TW TW105126269A patent/TW201724548A/zh unknown
-
2017
- 2017-02-03 US US15/423,645 patent/US9846246B2/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09298287A (ja) * | 1995-09-28 | 1997-11-18 | Canon Inc | 光電変換装置及びx線撮像装置 |
| US5827757A (en) * | 1996-07-16 | 1998-10-27 | Direct Radiography Corp. | Fabrication of large area x-ray image capturing element |
| JP2012027002A (ja) * | 2010-06-24 | 2012-02-09 | Canon Inc | 放射線検出装置及び放射線撮像システム |
| JP2014002115A (ja) * | 2012-06-20 | 2014-01-09 | Canon Inc | 放射線検出装置、その製造方法及び撮像システム |
| EP2735888A2 (en) * | 2012-11-21 | 2014-05-28 | Zakrytoe Akcionernoe Obshchestvo "Impul's" | X-ray imaging detector, method for manufacturing a photosensitive element and an x-ray imaging detector |
Also Published As
| Publication number | Publication date |
|---|---|
| US9846246B2 (en) | 2017-12-19 |
| US9599723B2 (en) | 2017-03-21 |
| TW201724548A (zh) | 2017-07-01 |
| EP3338111A1 (en) | 2018-06-27 |
| KR20180074660A (ko) | 2018-07-03 |
| US20170153334A1 (en) | 2017-06-01 |
| CN108291972A (zh) | 2018-07-17 |
| US20170052263A1 (en) | 2017-02-23 |
| WO2017030751A1 (en) | 2017-02-23 |
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