JP2018520521A - チップ埋め込み技術を用いるオープンキャビティパッケージ - Google Patents
チップ埋め込み技術を用いるオープンキャビティパッケージ Download PDFInfo
- Publication number
- JP2018520521A JP2018520521A JP2018501849A JP2018501849A JP2018520521A JP 2018520521 A JP2018520521 A JP 2018520521A JP 2018501849 A JP2018501849 A JP 2018501849A JP 2018501849 A JP2018501849 A JP 2018501849A JP 2018520521 A JP2018520521 A JP 2018520521A
- Authority
- JP
- Japan
- Prior art keywords
- chip
- sensor system
- layer
- metal
- semiconductor chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005516 engineering process Methods 0.000 title description 6
- 238000000034 method Methods 0.000 claims abstract description 111
- 229910052751 metal Inorganic materials 0.000 claims abstract description 64
- 239000002184 metal Substances 0.000 claims abstract description 64
- 239000004065 semiconductor Substances 0.000 claims abstract description 57
- 239000003351 stiffener Substances 0.000 claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 claims abstract description 25
- 238000004544 sputter deposition Methods 0.000 claims abstract description 13
- 238000010030 laminating Methods 0.000 claims abstract description 12
- 239000000853 adhesive Substances 0.000 claims abstract description 9
- 230000001070 adhesive effect Effects 0.000 claims abstract description 9
- 238000000059 patterning Methods 0.000 claims abstract description 5
- 238000004140 cleaning Methods 0.000 claims abstract description 4
- 238000005520 cutting process Methods 0.000 claims abstract description 4
- 238000007747 plating Methods 0.000 claims abstract 3
- 230000008569 process Effects 0.000 claims description 70
- 239000000463 material Substances 0.000 claims description 29
- 229920000642 polymer Polymers 0.000 claims description 22
- 238000003475 lamination Methods 0.000 claims description 16
- 229920002120 photoresistant polymer Polymers 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 10
- 230000007613 environmental effect Effects 0.000 claims description 9
- 239000002861 polymer material Substances 0.000 claims description 9
- 230000001681 protective effect Effects 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 239000002390 adhesive tape Substances 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 230000002285 radioactive effect Effects 0.000 claims description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 239000012528 membrane Substances 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 239000011651 chromium Substances 0.000 claims description 2
- 238000000227 grinding Methods 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 238000005476 soldering Methods 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 239000010936 titanium Substances 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 2
- 238000009740 moulding (composite fabrication) Methods 0.000 claims 1
- 239000011810 insulating material Substances 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 40
- 150000001875 compounds Chemical class 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 6
- 238000013459 approach Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 238000012858 packaging process Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000945 filler Substances 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000000930 thermomechanical effect Effects 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00865—Multistep processes for the separation of wafers into individual elements
- B81C1/00873—Multistep processes for the separation of wafers into individual elements characterised by special arrangements of the devices, allowing an easier separation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/007—Interconnections between the MEMS and external electrical signals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00333—Aspects relating to packaging of MEMS devices, not covered by groups B81C1/00269 - B81C1/00325
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/568—Temporary substrate used as encapsulation process aid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/19—Manufacturing methods of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/96—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0214—Biosensors; Chemical sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0235—Accelerometers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0257—Microphones or microspeakers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0264—Pressure sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0278—Temperature sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0292—Sensors not provided for in B81B2201/0207 - B81B2201/0285
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/07—Interconnects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/09—Packages
- B81B2207/091—Arrangements for connecting external electrical signals to mechanical structures inside the package
- B81B2207/098—Arrangements not provided for in groups B81B2207/092 - B81B2207/097
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0118—Processes for the planarization of structures
- B81C2201/0125—Blanket removal, e.g. polishing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0128—Processes for removing material
- B81C2201/013—Etching
- B81C2201/0132—Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
- B81C2201/0156—Lithographic techniques
- B81C2201/0159—Lithographic techniques not provided for in B81C2201/0157
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/0181—Physical Vapour Deposition [PVD], i.e. evaporation, sputtering, ion plating or plasma assisted deposition, ion cluster beam technology
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/0183—Selective deposition
- B81C2201/0188—Selective deposition techniques not provided for in B81C2201/0184 - B81C2201/0187
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2203/00—Forming microstructural systems
- B81C2203/01—Packaging MEMS
- B81C2203/0136—Growing or depositing of a covering layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/561—Batch processing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68359—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used as a support during manufacture of interconnect decals or build up layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04105—Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/96—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being encapsulated in a common layer, e.g. neo-wafer or pseudo-wafer, said common layer being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
- H01L2924/3511—Warping
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Micromachines (AREA)
- Wire Bonding (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
Description
Claims (16)
- パッケージングされた半導体デバイスを製造するための方法であって、
第1の高さと、センサシステム及び端子を含む第1の表面とを有する半導体チップを提供すること、
垂直ピラーを有する平坦なパッドを含む金属性ピースを提供することであって、前記垂直ピラーが、前記パッド上に前記パッドの中央に対して対称的に置かれ、前記ピラー及びパッドが、前記第1の高さより大きい第2の高さを有し、前記ピラーとは反対の前記パッドの表面がはんだ付け可能である、前記金属性ピースを提供すること、
或るエリアの上にロー及びコラムに整然とピースのグリッドを形成するため、接着性キャリアテープ上に前記金属性ピースの前記ピラーを置くことであって、前記金属性ピースが、半導体チップを収容するような寸法とされる開口によって間隔が空けられる、前記ピラーを置くこと、
各開口内部にチップを置くことであって、前記半導体チップが、下方に面する前記センサシステム及び前記端子と、隣接するピース側壁からギャップによって間隔が空けられる側壁とを有する、前記各開口内部にチップを置くこと、
チップとピース側壁との間の前記ギャップを粘着的に充填するため、及び前記テープから離れて面する前記半導体チップ表面を覆うために、適合絶縁性ポリマー材料を真空吸引下でラミネートすることであって、それにより平らな表面を備えるハイブリッド金属/ポリマーコンテナに各チップを埋め込むことであって、前記材料が前記半導体チップの熱膨張係数に近づく熱膨張係数を有する、前記適合絶縁性ポリマー材料をラミネートすること、
前記半導体チップの裏面が、前記はんだ付け可能なピースの前記表面と共平面である表面を有するラミネーション材料により覆われたままである一方で、前記金属性ピースの前記はんだ付け可能な表面が露出されるまで、ラミネーション材料を均一に取り除くこと、
前記接着性テープを取り除くために前記接着性テープが上に向くように、埋め込みチップを備える前記ハイブリッド金属/ポリマーパネルを反転させること、
均一なエネルギー及びレートで、及び前記パネルが冷却される間に、チップ、ピース、及びラミネーション材料の表面に接着する第1の金属の少なくとも一つのシード層をスパッタリングすること、
チップ端子をそれぞれのピースに接続する再配線トレースのネットワークのためのウィンドウを画定する一方で、前記センサシステムの上の前記シード層を覆うように選択されたエリアの上に延在するフィルム部を保全するため、前記シード層上にフォトレジストフィルムを堆積、パターニング、及び形成すること、
開けられたネットワークウィンドウにおいて前記シード層上に第2の金属の層をめっきすること、
前記フォトレジストフィルムを剥がすこと、及び前記下にあるシード層を取り除くこと、
前記半導体チップの前記表面を含む全グリッドエリアの上に保護絶縁性スティフナー(stiffener)の層をラミネートすること、及び
各チップの前記センサシステムを露出させるため前記スティフナー層においてキャビティを開ける一方で、各チップの前記表面の残りの上の前記スティフナー層を開けられないまま残すこと、
を含む、方法。 - 請求項1に記載の方法であって、
前記金属性ピースを等しく対称的な半分に切ることにより別個のデバイスをシンギュレートするため、前記スティフナー保護されたハイブリッド金属/ポリマーパネル及び前記金属性ピースをダイシングするプロセスを更に含み、
各デバイスが、チップと、パッケージとして動作するハイブリッド金属/スティフナー基板に埋め込まれる端子としての金属性ピース半分とを含み、また、前記センサシステムを動作させるための前記保護スティフナーにおけるウィンドウを含む、
方法。 - 請求項1に記載の方法であって、更に、前記適合絶縁性ポリマー材料をラミネートする前記プロセスの後、前記適合絶縁性ポリマー材料を硬化するプロセスを含む、方法。
- 請求項1に記載の方法であって、前記取り除くプロセスが、グラインディング及びプラズマ薄化のプロセスを含むグループから選択される、方法。
- 請求項1に記載の方法であって、更に、前記スパッタリングするプロセスの前に、金属、チップの前記露出された表面、ラミネーション材料、及び金属性膜をスパッタリングするための機器においてプラズマ洗浄するプロセスを含む、方法。
- 請求項1に記載の方法であって、スパッタリングする前記プロセスが、
チタン、タングステン、タンタル、ジルコニウム、クロム、モリブデン、及びそれらの合金を含むグループから選択される金属の第1の層をスパッタリングすることであって、前記第1の層がチップ及びラミネーション表面に接着する、前記第1の層をスパッタリングすること、及び
遅延なしに、銅、銀、金、及びそれらの合金を含むグループから選択される金属の少なくとも一つの第2の層を前記第1の層上にスパッタリングすることであって、前記第2の層が前記第1の層に接着する、前記第2の層をスパッタリングすること、
を含む、方法。 - 請求項1に記載の方法であって、前記センサシステム及び前記半導体チップの前記端子が、絶縁性不活性重合体のコートにより覆われ、前記コートが、前記センサシステムの端子を露出させるために開口を有する、方法。
- 請求項1に記載の方法であって、前記センサシステムが、湿度、温度、圧力、化学的、磁気的、及び生物学的検出のための環境センサを含むグループから選択される、方法。
- 請求項1に記載の方法であって、前記センサシステムが、マイクロエレクトロメカニカルシステム(MEMS)環境的、機械的、熱的、化学的、放射性、磁気的、及び生物学的な量及び入力を含むグループから選択される、方法。
- パッケージングされる半導体デバイスを製造するための方法であって、
第1の高さと、センサシステム及び端子を含む第1の表面とを有する半導体チップを提供すること、
センサシステム及び端子を備えた前記半導体チップを下方に向けて接着性キャリアテープ上に置くこと、及び前記半導体チップを開口によって間隔が空けられるロー及びコラムに整然と配すること、
金属性ピースのグリッドを前記キャリアテープ上に置くことであって、前記金属性ピースが、前記第1の高さより大きい第2の高さを有し、前記半導体チップのローとコラムとの間の前記開口に適合するような寸法とされる一方で、前記金属性ピースの前記側壁と前記半導体チップとの間のギャップを残すことであって、前記金属性ピースが更に、隣接するチップ長さの一部上に載置するために前記ギャップにわたって延在する伸張された突出部を有すること、
チップとピース側壁との間の前記ギャップを粘着的に充填するため、及び前記キャリアテープから離れて面する前記半導体チップ表面を覆うために、適合絶縁性ポリマー材料を真空吸引下でラミネートすることであって、それにより平らな表面を備えるハイブリッド金属/ポリマーパネルに各チップを埋め込み、前記材料が、前記半導体チップの熱膨張係数に近づく熱膨張係数を有する、前記絶縁性ポリマー材料をラミネートすること、
前記半導体チップの裏側表面が、はんだ付け可能なピース表面と共平面である表面を有するラミネーション材料により覆われたままである一方で、前記金属性ピースの前記はんだ付け可能な表面が露出されるまでラミネーション材料を均一に取り除くこと、
前記テープを取り除くために前記接着性テープが上を向くように、埋め込みチップを備える前記ハイブリッド金属/ポリマーパネルを反転させること、
均一なエネルギー及びレートで及び前記パネルが冷却される間に、チップ、ピース、及びラミネーション表面に接着する第1の金属の少なくとも一つのシード層をスパッタリングすること、
チップ端子を膜に接続する再配線トレースのネットワークのためのウィンドウを画定する一方で、前記センサシステムの上の前記シード金属を覆うように選択されたエリアの上に延在する前記フィルム部を保全するため、前記シード層上にフォトレジストフィルムを堆積、パターニング、及び成長させること、
前記開けられたウィンドウにおける前記第1金属の前記シード層上に第2の金属の層をめっきすること、
前記フォトレジストフィルムを剥がすこと、及び前記露出されたシード金属を取り除くこと、
前記半導体チップの前記表面を含む全グリッドエリアの上に保護絶縁性スティフナーの層をラミネートすること、及び
各チップの前記センサシステムを露出させるために前記スティフナー層においてキャビティを開ける一方で、前記スティフナー層を各チップの前記表面の前記残りの上で開けらないまま残すこと、
を含む、方法。 - 請求項10に記載の方法であって、
個別のデバイスをシンギュレートするため、前記スティフナー保護されたハイブリッド金属/ポリマーパネルをダイシングするプロセスを更に含み、
各デバイスが、パッケージとして機能するハイブリッド金属/スティフナー基板に埋め込まれるチップを含み、また、前記センサシステムのための前記保護スティフナーにおけるウィンドウを含み、前記センサシステムとは反対の側のデバイスが、はんだ付け可能な端子を有する、
方法。 - 請求項10に記載の方法であって、スパッタリングする前記プロセスの前に、金属、チップの前記露出された表面、ラミネーション材料、及び金属性ピースをスパッタリングするための機器においてプラズマ洗浄するプロセスを更に含む、方法。
- 請求項10に記載の方法であって、前記半導体チップの前記センサシステム及び前記端子が、絶縁性不活性重合体のコートにより覆われ、前記コートが、前記センサシステム端子を露出させるための開口を有する、方法。
- 埋め込みチップのためのオープンキャビティパッケージであって、
センサシステム及びメタライズされた端子を含む第1の表面と、平行の第2の表面と、側壁とを有する半導体チップ、
前記半導体チップの前記第2の表面及び前記側壁に接着する絶縁性重合体材料のコンテナであって、前記第1の表面と共平面である第3の表面と、前記第2の表面に平行な第4の表面とを有する、前記コンテナ、
前記オープンキャビティパッケージの周囲に沿って前記絶縁性重合体材料に挿入される複数の金属性パッドであって、はんだ付けに適し、且つ、前記第4の表面と共平面である、平坦な外側表面と、前記パッド上に垂直に置かれ、且つ、前記センサシステム端子への導電性再配線トレースに接する、内部ピラーとを有する、前記複数の金属性パッド、及び
前記第1及び第3の表面及び前記再配線トレースを保護する一方で、感知されるべきエンティティに前記センサシステムを露出させるオープンキャビティを残す、絶縁性スティフナーの層、
を含む、オープンキャビティパッケージ。 - 請求項14に記載のオープンキャビティパッケージであって、前記センサシステムが、湿度、温度、圧力、化学的、磁気的、及び生物学的な検出のための環境センサを含むグループから選択される、オープンキャビティパッケージ。
- 請求項14に記載のオープンキャビティパッケージであって、前記センサシステムが、マイクロエレクトロメカニカルシステム(MEMS)環境的、機械的、熱的、化学的、放射性、磁気的、及び生物学的な量及び入力を含むグループから選択される、オープンキャビティパッケージ。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562192660P | 2015-07-15 | 2015-07-15 | |
US62/192,660 | 2015-07-15 | ||
US14/963,362 US9663357B2 (en) | 2015-07-15 | 2015-12-09 | Open cavity package using chip-embedding technology |
US14/963,362 | 2015-12-09 | ||
PCT/US2016/041231 WO2017011252A1 (en) | 2015-07-15 | 2016-07-07 | Open cavity package using chip-embedding technology |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2018520521A true JP2018520521A (ja) | 2018-07-26 |
JP2018520521A5 JP2018520521A5 (ja) | 2019-07-18 |
JP6746678B2 JP6746678B2 (ja) | 2020-08-26 |
Family
ID=57757506
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018501849A Active JP6746678B2 (ja) | 2015-07-15 | 2016-07-07 | チップ埋め込み技術を用いるオープンキャビティパッケージ |
Country Status (4)
Country | Link |
---|---|
US (1) | US9663357B2 (ja) |
JP (1) | JP6746678B2 (ja) |
CN (1) | CN107836036B (ja) |
WO (1) | WO2017011252A1 (ja) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9935148B2 (en) * | 2015-07-13 | 2018-04-03 | Xintec Inc. | Method for forming chip package having chip connected to sensing device with redistribution layer in insulator layer |
TWI735525B (zh) * | 2016-01-31 | 2021-08-11 | 美商天工方案公司 | 用於封裝應用之濺鍍系統及方法 |
DE102018100958B3 (de) * | 2018-01-17 | 2019-03-14 | Infineon Technologies Ag | Verfahren zum bilden einer chipanordnung, chipanordnung, verfahren zum bilden eines chipbausteins und chipbaustein |
US10727203B1 (en) * | 2018-05-08 | 2020-07-28 | Rockwell Collins, Inc. | Die-in-die-cavity packaging |
US10541220B1 (en) | 2018-08-02 | 2020-01-21 | Texas Instruments Incorporated | Printed repassivation for wafer chip scale packaging |
US11183460B2 (en) | 2018-09-17 | 2021-11-23 | Texas Instruments Incorporated | Embedded die packaging with integrated ceramic substrate |
US10883953B2 (en) * | 2018-10-16 | 2021-01-05 | Texas Instruments Incorporated | Semiconductor device for sensing impedance changes in a medium |
CN109444235A (zh) * | 2018-10-23 | 2019-03-08 | 中国科学院微电子研究所 | 集成式湿度传感器及其制造方法 |
US10650957B1 (en) | 2018-10-31 | 2020-05-12 | Texas Instruments Incorporated | Additive deposition low temperature curable magnetic interconnecting layer for power components integration |
US11031332B2 (en) | 2019-01-31 | 2021-06-08 | Texas Instruments Incorporated | Package panel processing with integrated ceramic isolation |
IT201900004835A1 (it) | 2019-04-01 | 2020-10-01 | Stmicroelectronics Malta Ltd | Procedimento per produrre dispositivi elettronici e dispositivo elettronico corrispondente |
EP3723117A1 (en) | 2019-04-10 | 2020-10-14 | AT & S Austria Technologie & Systemtechnik Aktiengesellschaft | Component carrier and method of manufacturing the same |
US11121076B2 (en) | 2019-06-27 | 2021-09-14 | Texas Instruments Incorporated | Semiconductor die with conversion coating |
US11587899B2 (en) | 2020-07-29 | 2023-02-21 | Texas Instruments Incorporated | Multi-layer semiconductor package with stacked passive components |
US11854922B2 (en) | 2021-06-21 | 2023-12-26 | Texas Instruments Incorporated | Semicondutor package substrate with die cavity and redistribution layer |
US20230411251A1 (en) * | 2022-06-16 | 2023-12-21 | Stmicroelectronics, Inc. | Thin substrate package and lead frame |
CN115565890B (zh) * | 2022-12-07 | 2023-04-18 | 西北工业大学 | 一种折叠式多芯片柔性集成封装方法及柔性集成封装芯片 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002533927A (ja) * | 1998-12-22 | 2002-10-08 | シリコン バンドウィドス, インコーポレイテッド | 開放形キャビティの半導体ダイパッケージ |
JP2010203857A (ja) * | 2009-03-02 | 2010-09-16 | Alps Electric Co Ltd | 圧力センサのパッケージ構造 |
JP2013066021A (ja) * | 2011-09-16 | 2013-04-11 | Omron Corp | 半導体装置及びマイクロフォン |
US20130221452A1 (en) * | 2011-09-15 | 2013-08-29 | Stats Chippac, Ltd. | Semiconductor Device and Method of Forming Semiconductor Die with Active Region Responsive to External Stimulus |
JP2015517919A (ja) * | 2012-02-27 | 2015-06-25 | 日本テキサス・インスツルメンツ株式会社 | 制御されたキャビティmemsパッケージを集積化ボードに埋め込むための方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6550337B1 (en) * | 2000-01-19 | 2003-04-22 | Measurement Specialties, Inc. | Isolation technique for pressure sensing structure |
US6653723B2 (en) | 2002-03-09 | 2003-11-25 | Fujitsu Limited | System for providing an open-cavity low profile encapsulated semiconductor package |
JP4200285B2 (ja) * | 2003-04-02 | 2008-12-24 | パナソニック株式会社 | 回路基板の製造方法 |
US20050236644A1 (en) | 2004-04-27 | 2005-10-27 | Greg Getten | Sensor packages and methods of making the same |
JP2006165252A (ja) * | 2004-12-07 | 2006-06-22 | Shinko Electric Ind Co Ltd | チップ内蔵基板の製造方法 |
JP5164362B2 (ja) * | 2005-11-02 | 2013-03-21 | キヤノン株式会社 | 半導体内臓基板およびその製造方法 |
US20090057885A1 (en) * | 2007-08-30 | 2009-03-05 | Infineon Technologies Ag | Semiconductor device |
US9064883B2 (en) * | 2011-08-25 | 2015-06-23 | Intel Mobile Communications GmbH | Chip with encapsulated sides and exposed surface |
US20130307147A1 (en) * | 2012-05-18 | 2013-11-21 | Xintec Inc. | Chip package and method for forming the same |
US9153706B2 (en) | 2013-05-23 | 2015-10-06 | Infineon Technologies Ag | Film-covered open-cavity sensor package |
-
2015
- 2015-12-09 US US14/963,362 patent/US9663357B2/en active Active
-
2016
- 2016-07-07 JP JP2018501849A patent/JP6746678B2/ja active Active
- 2016-07-07 WO PCT/US2016/041231 patent/WO2017011252A1/en active Application Filing
- 2016-07-07 CN CN201680040930.7A patent/CN107836036B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002533927A (ja) * | 1998-12-22 | 2002-10-08 | シリコン バンドウィドス, インコーポレイテッド | 開放形キャビティの半導体ダイパッケージ |
JP2010203857A (ja) * | 2009-03-02 | 2010-09-16 | Alps Electric Co Ltd | 圧力センサのパッケージ構造 |
US20130221452A1 (en) * | 2011-09-15 | 2013-08-29 | Stats Chippac, Ltd. | Semiconductor Device and Method of Forming Semiconductor Die with Active Region Responsive to External Stimulus |
JP2013066021A (ja) * | 2011-09-16 | 2013-04-11 | Omron Corp | 半導体装置及びマイクロフォン |
JP2015517919A (ja) * | 2012-02-27 | 2015-06-25 | 日本テキサス・インスツルメンツ株式会社 | 制御されたキャビティmemsパッケージを集積化ボードに埋め込むための方法 |
Also Published As
Publication number | Publication date |
---|---|
JP6746678B2 (ja) | 2020-08-26 |
WO2017011252A1 (en) | 2017-01-19 |
US20170015548A1 (en) | 2017-01-19 |
US9663357B2 (en) | 2017-05-30 |
CN107836036A (zh) | 2018-03-23 |
CN107836036B (zh) | 2020-12-25 |
WO2017011252A8 (en) | 2017-08-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6746678B2 (ja) | チップ埋め込み技術を用いるオープンキャビティパッケージ | |
JP6199322B2 (ja) | 制御されたキャビティmemsパッケージを集積化ボードに埋め込むための方法 | |
US6767764B2 (en) | Microelectromechanical system device packaging method | |
US20160061677A1 (en) | Various stress free sensor packages using wafer level supporting die and air gap technique | |
US10179729B2 (en) | Hermetic encapsulation for microelectromechanical systems (MEMS) devices | |
US9561954B2 (en) | Method of fabricating MEMS devices having a plurality of cavities | |
KR20150024792A (ko) | 패키지화된 mems 디바이스 | |
JP2018520521A5 (ja) | ||
US11082028B2 (en) | 3D-printed protective shell structures with support columns for stress sensitive circuits | |
WO2013019515A1 (en) | Metal thin shield on electrical device | |
JP2007189032A (ja) | 中空封止型半導体装置の製造方法 | |
WO2019005679A1 (en) | METHOD AND APPARATUS FOR ENCAPSULATION OF WAFER LEVEL | |
KR100636823B1 (ko) | Mems 소자 패키지 및 그 제조방법 | |
US9806034B1 (en) | Semiconductor device with protected sidewalls and methods of manufacturing thereof | |
Briindel et al. | Substrateless sensor packaging using wafer level fan-out technology | |
WO2009145726A1 (en) | Micro electro mechanical device package and method of manufacturing a micro electro mechanical device package | |
US11146234B2 (en) | Electrical device and method for manufacturing the same | |
US20230092132A1 (en) | Wafer level processing for microelectronic device package with cavity | |
Weiss et al. | Integrated cavity wafer level chip size package for MEMS applications | |
JP2009027127A (ja) | 大型パネルサイズ採用による半導体パッケージ製造方法 | |
Badihi | Wafer-level chip size package with an air cavity above the active surface for micromechanical applications |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20180115 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190610 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190610 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200313 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200613 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200708 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200805 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6746678 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313117 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313117 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313117 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |