WO2009145726A1 - Micro electro mechanical device package and method of manufacturing a micro electro mechanical device package - Google Patents

Micro electro mechanical device package and method of manufacturing a micro electro mechanical device package Download PDF

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Publication number
WO2009145726A1
WO2009145726A1 PCT/SG2008/000193 SG2008000193W WO2009145726A1 WO 2009145726 A1 WO2009145726 A1 WO 2009145726A1 SG 2008000193 W SG2008000193 W SG 2008000193W WO 2009145726 A1 WO2009145726 A1 WO 2009145726A1
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WO
WIPO (PCT)
Prior art keywords
electro mechanical
micro electro
mechanical device
composite structure
package
Prior art date
Application number
PCT/SG2008/000193
Other languages
French (fr)
Inventor
Vaidyanathan Kripesh
Aibin Yu
Soon Wee Ho
Leong Ching Wai
Phyo Thaw Phyo
Ei Pa Pa Myo
Fusao Ishii
Mohanraj Soundarapandian
Original Assignee
Agency For Science, Technology And Research
Silicon Quest, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency For Science, Technology And Research, Silicon Quest, Inc. filed Critical Agency For Science, Technology And Research
Publication of WO2009145726A1 publication Critical patent/WO2009145726A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/007—Interconnections between the MEMS and external electrical signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93—Batch processes
    • H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0118—Bonding a wafer on the substrate, i.e. where the cap consists of another wafer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/4901—Structure
    • H01L2224/4903—Connectors having different sizes, e.g. different diameters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491—Disposition
    • H01L2224/4912—Layout
    • H01L2224/49175—Parallel arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92—Specific sequence of method steps
    • H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
    • H01L2224/9222—Sequential connecting processes
    • H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
    • H01L2224/92247—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/146—Mixed devices
    • H01L2924/1461—MEMS
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/1515—Shape
    • H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/1517—Multilayer substrate
    • H01L2924/15192—Resurf arrangement of the internal vias
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1532—Connection portion the connection portion being formed on the die mounting surface of the substrate
    • H01L2924/15321—Connection portion the connection portion being formed on the die mounting surface of the substrate being a ball array, e.g. BGA
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161—Cap
    • H01L2924/1615—Shape
    • H01L2924/16195—Flat cap [not enclosing an internal cavity]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161—Cap
    • H01L2924/162—Disposition
    • H01L2924/16251—Connecting to an item not being a semiconductor or solid-state body, e.g. cap-to-substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/191—Disposition
    • H01L2924/19101—Disposition of discrete passive components
    • H01L2924/19107—Disposition of discrete passive components off-chip wires

Definitions

  • the present invention relates generally to a micro electro mechanical device package and to a method of manufacturing a micro electro mechanical device package, hi particular, the present invention relates to a digital micro mirror device package and a method of manufacturing a digital micro mirror device package.
  • Micro electro mechanical devices also known as "MEMS" are used in a wide range of technical fields.
  • An example of a micro electro mechanical device is a digital micro mirror device (also known as “DMDTM”) which is one of the key components for Digital Light Processing (“DLPTM”) display systems.
  • a micro mirror device package usually comprises a carrier substrate and a micro mirror device which is mounted on the carrier substrate. Since the micro mirror device is highly sensitive to environmental influences such as moisture and dust, the micro mirror device package may further comprise a shielding means which hermetically seals the micro mirror device against its environment.
  • Figure 1 shows an embodiment of a micro mirror device package 100 comprising a carrier substrate 102 and a micro mirror device 104 mounted on the carrier substrate 102.
  • the micro mirror device package 100 further comprises a shielding means 106 comprising a ring shaped element 108 which laterally shields the micro mirror device 104, and a plate element 110 provided on the ring shaped element 108 which shields the micro mirror device 104 from above.
  • the carrier substrate 102 shields the micro mirror device 104 from below.
  • the micro mirror device 104 is electrically contactable by bonding wires 112.
  • the formation of the shielding means 106 usually is quite complicated. [0004] It is an object of the present invention to facilitate the formation of micro mirror device packages having a shielding means for shielding the micro mirror devices [0005]
  • the present invention provides a micro mirror device package according to claim 1. Further, the present invention provides methods of manufacturing a micro mirror device packages according to claims 12 and 25. Further embodiments of the present invention are defined in the subclaims.
  • a micro electro mechanical device package comprising: a composite structure comprising a substrate and at least one further layer provided on the substrate, wherein the composite structure comprises a cavity extending from the top surface of the composite structure into the substrate; a micro electro mechanical device provided within the cavity; a transparent plate covering the cavity such that the cavity is hermetically sealed; and package contact pads for electrically contacting the package, wherein the micro electro mechanical device is electrically connected to the package contact pads.
  • the transparent plate is a glass plate.
  • the glass plate is bonded to the composite structure by a bonding layer, wherein the bonding layer comprises or consists of frit glass material or solder material.
  • the composite structure comprises a wiring layer provided on or above the substrate, wherein the wiring layer comprises conductive connections electrically connecting the micro electro mechanical device to the package contact pads.
  • the composite structure comprises an isolation layer provided on or above the wiring layer.
  • the bonding layer is provided on the isolation layer.
  • the micro electro mechanical device is electrically connected to the conductive connections by bonding wires.
  • the package is mounted on a circuit board such that the bottom surface of the substrate faces the top surface of the circuit board.
  • the package is mounted on a circuit board such that the top surface of the transparent plate faces the top surface of the circuit board, wherein at least a part of the circuit board area located below the transparent plate is cut off such that light can impinge through the circuit board onto the transparent plate.
  • the package is mechanically bonded to the circuit board only by conductive material provided on the package contact pads, wherein the conductive material also electrically connects the package to the circuit board.
  • the micro electro mechanical device is a digital micro mirror device comprising a mirror which faces the transparent plate.
  • a method of manufacturing micro electro mechanical device packages comprising: forming a composite structure comprising a support wafer and at least one further layer provided on the support wafer such that a plurality of cavities are formed within the composite structure, each cavity extending from the top surface of the composite structure into the support wafer; placing a micro electro mechanical device provided into each cavity; covering the cavities with a transparent wafer such that all cavities are hermetically sealed; and singularizing the composite structure thus obtained into single micro electro mechanical packages.
  • the cavities are hermetically sealed by bonding the transparent wafer to the composite structure.
  • the transparent wafer is bonded to the composite structure using frit glass material or solder material as bonding material.
  • the bonding is carried out at temperatures ranging form about 150 °C to about 400 0 C.
  • the transparent wafer is pressed onto the composite structure using pressures ranging from about 1 MPa to about 10 MPa.
  • the duration of the bonding process ranges from about 5 minutes to about 60 minutes.
  • the formation of the composite structure comprises forming a wiring layer on or above the support wafer, wherein the wiring layer comprises conductive connections and package contact pads being electrically connected to the conductive connections, wherein the conductive connections electrically connect the micro electro mechanical devices to the package contact pads.
  • the formation of the composite structure comprises forming an isolation layer on or above the wiring layer.
  • the transparent wafer is formed on or above the isolation layer.
  • the transparent wafer is singularized.
  • solder material is provided on contacting pads which are electrically connected to the micro electro mechanical devices.
  • a method of manufacturing a micro electro mechanical device package comprising: forming a composite structure comprising a substrate and at least one further layer provided on the substrate; forming a cavity within the composite structure extending from the top surface of the composite structure into the substrate; placing a micro electro mechanical device into the cavity; and covering the cavity with a transparent plate such that the cavity is hermetically sealed.
  • FIG. 1 shows a schematic cross-sectional view of an embodiment of a micro electro mechanical device package
  • FIG. 2 shows a flow chart of a method of manufacturing micro electro mechanical device packages according to an embodiment of the present invention
  • FIGS. 3 A to 3 C show schematic cross-sectional views of manufacturing stages of a method of manufacturing micro electro mechanical device packages according to an embodiment of the present invention
  • FIGS. 4 A to 4E show schematic cross-sectional views of manufacturing stages of a method of manufacturing micro electro mechanical device packages according to an embodiment of the present invention
  • FIGS. 5A to 5G show schematic cross-sectional views of manufacturing stages of a method of manufacturing micro electro mechanical device packages according to an embodiment of the present invention
  • FIGS. 6 A to 6D show schematic cross-sectional views of manufacturing stages of a method of manufacturing micro electro mechanical device packages according to an embodiment of the present invention
  • FIG. 7 shows a schematic cross-sectional view of a micro electro mechanical device package according to an embodiment of the present invention
  • FIG. 8 shows a schematic cross-sectional view of a micro electro mechanical device package according to an embodiment of the present invention
  • FIG. 9 shows a schematic cross-sectional view of a micro electro mechanical device package according to an embodiment of the present invention.
  • FIG. 10 shows a schematic top view of a micro electro mechanical device package according to an embodiment of the present invention.
  • FIG. 11 shows a schematic perspective view of a wafer level process in a manufacturing stage of a method of manufacturing micro electro mechanical packages according to an embodiment of the present invention
  • FIG. 12 shows a schematic top view of a part of a micro electro mechanical device package according to an embodiment of the present invention.
  • FIG. 13 shows a schematic cross-sectional view of a micro electro mechanical device package according to an embodiment of the present invention.
  • FIG. 2 shows a method 200 of manufacturing a micro electro mechanical device packages according to an embodiment of the present invention.
  • a composite structure is formed comprising a support wafer and at least one further layer provided on the support wafer such that a plurality of cavities are formed within the composite structure, each cavity extending from the top surface of the composite structure into the support wafer.
  • a micro electro mechanical device is placed into each cavity.
  • the cavities are covered with a transparent wafer such that all cavities are hermetically sealed.
  • the composite structure thus obtained is singularized into single micro electro mechanical device packages.
  • FIG. 3 A shows a manufacturing stage A obtained after having formed a plurality of micro electro mechanical devices (indicated by layer 302) on/within a support wafer 300.
  • the micro electro mechanical devices are digital micro mirror devices (the layer 302 in this case includes micro mirrors).
  • FIG. 3 B shows a manufacturing stage B obtained after having thinned the wafer 300, and after having provided a metallization layer 304 on the back side of the wafer
  • the metallization layer 304 may for example comprise or consist of solder material.
  • FIG. 3 C shows a manufacturing stage C obtained after having singularized the composite structure thus obtained into single digital micro mirror devices 306 ("dies"), for example by carrying out a dicing process using a saw or an etching process.
  • FIG. 4A shows a manufacturing stage D obtained after having provided a support wafer 400.
  • the support wafer 400 comprises or consists of glass.
  • the present invention is not restricted thereto; the support wafer 400 may also comprise or consist of other materials like silicon, ceramic material, etc..
  • FIG. 4B shows a manufacturing stage E obtained after having provided a plurality of cavities 402 within the support wafer 400.
  • the cavities 402 may for example be formed using mechanical drilling devices or using etching processes. For sake of simplicity, only one cavity 402 is shown.
  • FIG. 4C shows a manufacturing stage F obtained after having provided a metallization layer 404 on the bottom surface of each cavity. Further, a wiring layer 406 has been provided on parts of the top surface 408 located outside the cavities 402. The wiring layer 406 comprises conductive connections (not shown) which are isolated against each other. The wiring layer may for example be formed by depositing a metal layer and patterning the same.
  • FIG. 4D shows a manufacturing stage G obtained after having formed a passivation layer 408 on parts of the wiring layer 406.
  • the passivation layer 408 may for example comprise or consist of an isolation material like a dielectric material like SiO 2 or
  • FIG. 4E shows a manufacturing stage H obtained after having formed package contact pad layers 410 ("layers of under bump metallization" (UBM)) on parts of the wiring layer 406.
  • the package contact pad layers 410 may for example comprise or consist of
  • FIG. 5A shows a manufacturing stage I obtained after having placed a digital micro mirror device 306 into each cavity 402 ("die attach").
  • the digital micro mirror devices 306 are fixed to the metallization layer 404 by stacking the metallization layer 304 on the metallization layer 404.
  • the metallization layer 304 and the metallization layer 404 may for example comprise or consist of preformed solder material (e.g. In) or an evaporated thin solder film which is then heated by a heating process.
  • the temperature of the heating process may for example be about 170 °C.
  • FIG. 5B shows a manufacturing stage K obtained after having released the composite structure obtained in manufacturing stage I and after having electrically connected the digital micro mirror device 306 to the wiring layer 406 using bonding wires 500.
  • the bonding process may be a programmable wire bonding process.
  • FIG. 5C shows a manufacturing stage L obtained after having cleaned the composite structure obtained in manufacturing stage K using for example O 2 plasma, Aceton etc.
  • FIG. 5D shows a manufacturing stage M obtained after having formed a bonding layer 502 on the passivation layer 500. Further, a transparent wafer 504 (which may for example have a thickness of 300 ⁇ m) is formed on the bonding layer 502. The bonding process may be carried out such that the digital micro mirror devices 306 are hermetically sealed.
  • the bonding layer 502 comprises or consists of frit glass or solder material.
  • the transparent wafer 504 comprises or consists of glass.
  • FIG. 5E shows a manufacturing stage N obtained after having singularized the transparent wafer 504.
  • the singularization of the transparent wafer 504 is carried out such that the package contact pad layers 410 are exposed.
  • FIG. 5F shows a manufacturing stage O obtained after having provided solder balls 506 on the package contact pad layers 410.
  • FIG. 5G shows a manufacturing stage P obtained after having singularized the composite structure shown in FIG. 5F into single digital micro mirror device packages
  • FIGS. 5E to 5G show the case where the solder balls are formed on the package contact pad layers 410 before singularizing the composite structure into single digital micro mirror device packages 508.
  • FIG. 6 A shows a manufacturing stage Q obtained after having singularized the composite structure obtained in manufacturing stage E into single digital micro mirror device packages 600.
  • the single digital micro mirror device package 600 is inserted into a supporting structure 602 which may for example be a jig.
  • FIG. 6B shows a manufacturing stage R obtained using a jig tool 608 to bump solder balls, i.e. to provide solder ball material 606 .
  • FIG. 6C shows a manufacturing stage S obtained after having provided solder balls 506 on the package contact pad layers 410 using a solder ball placement stencil
  • FIG. 6D shows a manufacturing stage T obtained after having removed the digital micro mirror device package 600 from the supporting structure 602.
  • FIG. 7 shows how the digital micro mirror devices 508 may be used.
  • An incident light beam 700 traverses the transparent plate 504 and impinges onto the micro mirrors contained in layer 302.
  • the incident light beam 700 is reflected by the micro mirrors, thereby generating a reflected light beam 702 which again traverses the transparent plate 504.
  • FIG. 8 shows a first alternative how the digital micro mirror packages 508 may be mounted on a supporting structure 800 which may for example be a printed circuit board. As can be derived from FIG.
  • the top surface 802 of the transparent plate 504 faces the top surface 804 of the supporting structure 800 ("flip chip bonded").
  • an area 806 has been cut out of the supporting structure 800 through which the incident light beam 700 and the reflected light beam 702 run.
  • the solder balls 506 function both as electrical connection electrically connecting the supporting structure 800 with the digital micro mirror packages 508 and as mechanical connections fixing the digital micro mirror packages 508 to the supporting structure 800.
  • FIG. 9 shows a second alternative how the digital micro mirror packages 508 may be mounted on a supporting structure 800.
  • the bottom surface 808 of the supporting substrate 504 faces the top surface 804 of the supporting structure 800.
  • an intermediate layer 810 like an adhesive layer is disposed between the supporting substrate 504 and the printed circuit board 800.
  • bonding wires 900 are used as electrical connections between the package contact pad layers 410 and the supporting structure 800.
  • the bonding wires 900 are protected by a modling mass 902.
  • the electrical connections between the package contact pad layers 410 and the supporting structure 800 do not serve as mechanical fixing means, in contrast to the embodiment shown in FIG. 8. It should be mentioned that, due to the cut out area 806, the embodiment shown in FIG. 8 is easier to cool than the embodiment shown in FIG. 9.
  • FIG. 10 shows a schematic top view of a digital micro mirror device package
  • a plurality of solder balls 506 are provided in order to electrically connect the digital micro mirror device package 1000 to a supporting structure.
  • FIG. 11 shows a perspective view of a plurality of cavities 402 formed within a support waver 400.
  • the support waver 400 is a glass wafer. This view may correspond to the manufacturing stage E shown in FIG. 4 B.
  • FIG. 12 shows a top view of an interface between the digital micro mirror device 306 and the surrounding area of the support wafer 400.
  • the wiring layer comprises conductive connections 1200 which are electrically connected to device contacting pads (not shown) at one end and to bonding wires 500 at the other end.
  • FIG. 13 shows a cross-sectional view of an embodiment of the interface shown in FIG. 12.
  • the height H of the digital mirror device 306 is about the same as the depth of the cavity 402.
  • One effect of this embodiment is that low loop wire bonding is possible (since the vertical level of the top surface of the digital mirror device 306 is the same as the vertical level of the top surface of the surrounding area of the support wafer 400, in contrast to the device shown in FIG. 1).
  • the digital mirror device 306 can be packed on a wafer level; a package assembly of the digital mirror device 306 is possible rather than a board assembly of the digital mirror device 306; it is possible to use a low temperature bonding process for bonding the digital mirror device 306 to the support waver 400; the front end process (fabrication of the digital mirror device 306) can be seperated form the back end process (processing of the support wafer 400), therefore the production yield (cumulative yield issues) can be increased (known good die packaging is possible); last, the package size can be reduced (e.g.

Abstract

The present invention relates to a micro electro mechanical device package, comprising: a composite structure comprising a substrate and at least one further layer provided on the substrate, wherein the composite structure comprises a cavity extending from the top surface of the composite structure into the substrate; a micro electro mechanical device provided within the cavity; a transparent plate covering the cavity such that the cavity is hermetically sealed; and package contact pads for electrically contacting the package, wherein the micro electro mechanical device is electrically connected to the package contact pads.

Description

MICRO ELECTRO MECHANICAL DEVICE PACKAGE AND METHOD OF MANUFACTURING A MICRO ELECTRO MECHANICAL DEVICE PACKAGE
[0001] The present invention relates generally to a micro electro mechanical device package and to a method of manufacturing a micro electro mechanical device package, hi particular, the present invention relates to a digital micro mirror device package and a method of manufacturing a digital micro mirror device package.
[0002] Micro electro mechanical devices (also known as "MEMS") are used in a wide range of technical fields. An example of a micro electro mechanical device is a digital micro mirror device (also known as "DMD™") which is one of the key components for Digital Light Processing ("DLP™") display systems. A micro mirror device package usually comprises a carrier substrate and a micro mirror device which is mounted on the carrier substrate. Since the micro mirror device is highly sensitive to environmental influences such as moisture and dust, the micro mirror device package may further comprise a shielding means which hermetically seals the micro mirror device against its environment. [0003] Figure 1 shows an embodiment of a micro mirror device package 100 comprising a carrier substrate 102 and a micro mirror device 104 mounted on the carrier substrate 102. The micro mirror device package 100 further comprises a shielding means 106 comprising a ring shaped element 108 which laterally shields the micro mirror device 104, and a plate element 110 provided on the ring shaped element 108 which shields the micro mirror device 104 from above. The carrier substrate 102 shields the micro mirror device 104 from below. The micro mirror device 104 is electrically contactable by bonding wires 112. The formation of the shielding means 106 usually is quite complicated. [0004] It is an object of the present invention to facilitate the formation of micro mirror device packages having a shielding means for shielding the micro mirror devices [0005] In order to solve the object, the present invention provides a micro mirror device package according to claim 1. Further, the present invention provides methods of manufacturing a micro mirror device packages according to claims 12 and 25. Further embodiments of the present invention are defined in the subclaims.
[0006] According to an embodiment of the present invention, a micro electro mechanical device package is provided, comprising: a composite structure comprising a substrate and at least one further layer provided on the substrate, wherein the composite structure comprises a cavity extending from the top surface of the composite structure into the substrate; a micro electro mechanical device provided within the cavity; a transparent plate covering the cavity such that the cavity is hermetically sealed; and package contact pads for electrically contacting the package, wherein the micro electro mechanical device is electrically connected to the package contact pads.
[0007] According to an embodiment of the present invention, the transparent plate is a glass plate.
[0008] According to an embodiment of the present invention, the glass plate is bonded to the composite structure by a bonding layer, wherein the bonding layer comprises or consists of frit glass material or solder material.
[0009] According to an embodiment of the present invention, the composite structure comprises a wiring layer provided on or above the substrate, wherein the wiring layer comprises conductive connections electrically connecting the micro electro mechanical device to the package contact pads.
[0010] According to an embodiment of the present invention, the composite structure comprises an isolation layer provided on or above the wiring layer.
[0011] According to an embodiment of the present invention, the bonding layer is provided on the isolation layer. [0012] According to an embodiment of the present invention, the micro electro mechanical device is electrically connected to the conductive connections by bonding wires. [0013] According to an embodiment of the present invention, the package is mounted on a circuit board such that the bottom surface of the substrate faces the top surface of the circuit board.
[0014] According to an embodiment of the present invention, the package is mounted on a circuit board such that the top surface of the transparent plate faces the top surface of the circuit board, wherein at least a part of the circuit board area located below the transparent plate is cut off such that light can impinge through the circuit board onto the transparent plate. [0015] According to an embodiment of the present invention, the package is mechanically bonded to the circuit board only by conductive material provided on the package contact pads, wherein the conductive material also electrically connects the package to the circuit board.
[0016] According to an embodiment of the present invention, the micro electro mechanical device is a digital micro mirror device comprising a mirror which faces the transparent plate.
[0017] According to an embodiment of the present invention, a method of manufacturing micro electro mechanical device packages is provided, comprising: forming a composite structure comprising a support wafer and at least one further layer provided on the support wafer such that a plurality of cavities are formed within the composite structure, each cavity extending from the top surface of the composite structure into the support wafer; placing a micro electro mechanical device provided into each cavity; covering the cavities with a transparent wafer such that all cavities are hermetically sealed; and singularizing the composite structure thus obtained into single micro electro mechanical packages. [0018] According to an embodiment of the present invention, the cavities are hermetically sealed by bonding the transparent wafer to the composite structure. [0019] According to an embodiment of the present invention, the transparent wafer is bonded to the composite structure using frit glass material or solder material as bonding material.
[0020] According to an embodiment of the present invention, the bonding is carried out at temperatures ranging form about 150 °C to about 400 0C.
[0021] According to an embodiment of the present invention, during the bonding process, the transparent wafer is pressed onto the composite structure using pressures ranging from about 1 MPa to about 10 MPa.
[0022] According to an embodiment of the present invention, the duration of the bonding process ranges from about 5 minutes to about 60 minutes.
[0023] According to an embodiment of the present invention, the formation of the composite structure comprises forming a wiring layer on or above the support wafer, wherein the wiring layer comprises conductive connections and package contact pads being electrically connected to the conductive connections, wherein the conductive connections electrically connect the micro electro mechanical devices to the package contact pads.
[0024] According to an embodiment of the present invention, the formation of the composite structure comprises forming an isolation layer on or above the wiring layer.
[0025] According to an embodiment of the present invention, the transparent wafer is formed on or above the isolation layer.
[0026] According to an embodiment of the present invention, after having covered the cavities with the transparent wafer, the transparent wafer is singularized.
[0027] According to an embodiment of the present invention, after having singularized the transparent wafer, solder material is provided on contacting pads which are electrically connected to the micro electro mechanical devices.
[0028] According to an embodiment of the present invention, after having provided solder material on the contacting pads, the support waver is singularized. [0029] According to an embodiment of the present invention, a method of manufacturing a micro electro mechanical device package is provided, comprising: forming a composite structure comprising a substrate and at least one further layer provided on the substrate; forming a cavity within the composite structure extending from the top surface of the composite structure into the substrate; placing a micro electro mechanical device into the cavity; and covering the cavity with a transparent plate such that the cavity is hermetically sealed.
[0030] hi the following description, making reference to the drawings, embodiments of the present invention will be explained, hi the drawings, like reference characters generally refer to the same parts throughout the different views. The drawings are not necessarily to scale, emphasis instead generally being placed upon illustrating the principles of the invention, hi the following description, various embodiments of the invention are described with reference to the following drawings, in which:
[0031] FIG. 1 shows a schematic cross-sectional view of an embodiment of a micro electro mechanical device package;
[0032] FIG. 2 shows a flow chart of a method of manufacturing micro electro mechanical device packages according to an embodiment of the present invention;
[0033] FIGS. 3 A to 3 C show schematic cross-sectional views of manufacturing stages of a method of manufacturing micro electro mechanical device packages according to an embodiment of the present invention;
[0034] FIGS. 4 A to 4E show schematic cross-sectional views of manufacturing stages of a method of manufacturing micro electro mechanical device packages according to an embodiment of the present invention;
[0035] FIGS. 5A to 5G show schematic cross-sectional views of manufacturing stages of a method of manufacturing micro electro mechanical device packages according to an embodiment of the present invention; [0036] FIGS. 6 A to 6D show schematic cross-sectional views of manufacturing stages of a method of manufacturing micro electro mechanical device packages according to an embodiment of the present invention;
[0037] FIG. 7 shows a schematic cross-sectional view of a micro electro mechanical device package according to an embodiment of the present invention;
[0038] FIG. 8 shows a schematic cross-sectional view of a micro electro mechanical device package according to an embodiment of the present invention;
[0039] FIG. 9 shows a schematic cross-sectional view of a micro electro mechanical device package according to an embodiment of the present invention;
[0040] FIG. 10 shows a schematic top view of a micro electro mechanical device package according to an embodiment of the present invention;
[0041] FIG. 11 shows a schematic perspective view of a wafer level process in a manufacturing stage of a method of manufacturing micro electro mechanical packages according to an embodiment of the present invention;
[0042] FIG. 12 shows a schematic top view of a part of a micro electro mechanical device package according to an embodiment of the present invention; and
[0043] FIG. 13 shows a schematic cross-sectional view of a micro electro mechanical device package according to an embodiment of the present invention.
[0044] FIG. 2 shows a method 200 of manufacturing a micro electro mechanical device packages according to an embodiment of the present invention. At 202, a composite structure is formed comprising a support wafer and at least one further layer provided on the support wafer such that a plurality of cavities are formed within the composite structure, each cavity extending from the top surface of the composite structure into the support wafer. At
204, a micro electro mechanical device is placed into each cavity. At 206, the cavities are covered with a transparent wafer such that all cavities are hermetically sealed. At 208, the composite structure thus obtained is singularized into single micro electro mechanical device packages.
[0045] hi the following description, making reference to FIGS. 3A to 3C, 4A to 4E, and 5 A to 5G, an example of the method 200 will be given.
[0046] FIG. 3 A shows a manufacturing stage A obtained after having formed a plurality of micro electro mechanical devices (indicated by layer 302) on/within a support wafer 300. Here, it is assumed that the micro electro mechanical devices are digital micro mirror devices (the layer 302 in this case includes micro mirrors).
[0047] FIG. 3 B shows a manufacturing stage B obtained after having thinned the wafer 300, and after having provided a metallization layer 304 on the back side of the wafer
300. The metallization layer 304 may for example comprise or consist of solder material.
[0048] FIG. 3 C shows a manufacturing stage C obtained after having singularized the composite structure thus obtained into single digital micro mirror devices 306 ("dies"), for example by carrying out a dicing process using a saw or an etching process.
[0049] FIG. 4A shows a manufacturing stage D obtained after having provided a support wafer 400. Here, it is assumed that the support wafer 400 comprises or consists of glass. However, the present invention is not restricted thereto; the support wafer 400 may also comprise or consist of other materials like silicon, ceramic material, etc..
[0050] FIG. 4B shows a manufacturing stage E obtained after having provided a plurality of cavities 402 within the support wafer 400. The cavities 402 may for example be formed using mechanical drilling devices or using etching processes. For sake of simplicity, only one cavity 402 is shown.
[0051] FIG. 4C shows a manufacturing stage F obtained after having provided a metallization layer 404 on the bottom surface of each cavity. Further, a wiring layer 406 has been provided on parts of the top surface 408 located outside the cavities 402. The wiring layer 406 comprises conductive connections (not shown) which are isolated against each other. The wiring layer may for example be formed by depositing a metal layer and patterning the same.
[0052] FIG. 4D shows a manufacturing stage G obtained after having formed a passivation layer 408 on parts of the wiring layer 406. The passivation layer 408 may for example comprise or consist of an isolation material like a dielectric material like SiO2 or
SiN.
[0053] FIG. 4E shows a manufacturing stage H obtained after having formed package contact pad layers 410 ("layers of under bump metallization" (UBM)) on parts of the wiring layer 406. The package contact pad layers 410 may for example comprise or consist of
Ti/ Au , Al, Cu and Ni etc.
[0054] FIG. 5A shows a manufacturing stage I obtained after having placed a digital micro mirror device 306 into each cavity 402 ("die attach"). The digital micro mirror devices 306 are fixed to the metallization layer 404 by stacking the metallization layer 304 on the metallization layer 404. The metallization layer 304 and the metallization layer 404 may for example comprise or consist of preformed solder material (e.g. In) or an evaporated thin solder film which is then heated by a heating process. The temperature of the heating process may for example be about 170 °C.
[0055] FIG. 5B shows a manufacturing stage K obtained after having released the composite structure obtained in manufacturing stage I and after having electrically connected the digital micro mirror device 306 to the wiring layer 406 using bonding wires 500. The bonding process may be a programmable wire bonding process.
[0056] FIG. 5C shows a manufacturing stage L obtained after having cleaned the composite structure obtained in manufacturing stage K using for example O2 plasma, Aceton etc.
[0057] FIG. 5D shows a manufacturing stage M obtained after having formed a bonding layer 502 on the passivation layer 500. Further, a transparent wafer 504 (which may for example have a thickness of 300μm) is formed on the bonding layer 502. The bonding process may be carried out such that the digital micro mirror devices 306 are hermetically sealed. According to an embodiment of the present invention, the bonding layer 502 comprises or consists of frit glass or solder material. According to an embodiment of the present invention, the transparent wafer 504 comprises or consists of glass.
[0058] FIG. 5E shows a manufacturing stage N obtained after having singularized the transparent wafer 504. The singularization of the transparent wafer 504 is carried out such that the package contact pad layers 410 are exposed.
[0059] FIG. 5F shows a manufacturing stage O obtained after having provided solder balls 506 on the package contact pad layers 410.
[0060] FIG. 5G shows a manufacturing stage P obtained after having singularized the composite structure shown in FIG. 5F into single digital micro mirror device packages
508.
[0061] FIGS. 5E to 5G show the case where the solder balls are formed on the package contact pad layers 410 before singularizing the composite structure into single digital micro mirror device packages 508. In the following description, making reference to FIGS.
6A to 6D, an alternative method will be described.
[0062] FIG. 6 A shows a manufacturing stage Q obtained after having singularized the composite structure obtained in manufacturing stage E into single digital micro mirror device packages 600. The single digital micro mirror device package 600 is inserted into a supporting structure 602 which may for example be a jig.
[0063] FIG. 6B shows a manufacturing stage R obtained using a jig tool 608 to bump solder balls, i.e. to provide solder ball material 606 .
[0064] FIG. 6C shows a manufacturing stage S obtained after having provided solder balls 506 on the package contact pad layers 410 using a solder ball placement stencil
604. [0065] FIG. 6D shows a manufacturing stage T obtained after having removed the digital micro mirror device package 600 from the supporting structure 602. [0066] FIG. 7 shows how the digital micro mirror devices 508 may be used. An incident light beam 700 traverses the transparent plate 504 and impinges onto the micro mirrors contained in layer 302. The incident light beam 700 is reflected by the micro mirrors, thereby generating a reflected light beam 702 which again traverses the transparent plate 504. [0067] FIG. 8 shows a first alternative how the digital micro mirror packages 508 may be mounted on a supporting structure 800 which may for example be a printed circuit board. As can be derived from FIG. 8, the top surface 802 of the transparent plate 504 faces the top surface 804 of the supporting structure 800 ("flip chip bonded"). In order to enable light to impinge on the micro mirrors contained in layer 302, an area 806 has been cut out of the supporting structure 800 through which the incident light beam 700 and the reflected light beam 702 run. Here, the solder balls 506 function both as electrical connection electrically connecting the supporting structure 800 with the digital micro mirror packages 508 and as mechanical connections fixing the digital micro mirror packages 508 to the supporting structure 800.
[0068] FIG. 9 shows a second alternative how the digital micro mirror packages 508 may be mounted on a supporting structure 800. As can be derived from FIG. 9, the bottom surface 808 of the supporting substrate 504 faces the top surface 804 of the supporting structure 800. Between the supporting substrate 504 and the printed circuit board 800, an intermediate layer 810 like an adhesive layer is disposed. In contrast to the embodiment shown in FIG. 8, bonding wires 900 are used as electrical connections between the package contact pad layers 410 and the supporting structure 800. The bonding wires 900 are protected by a modling mass 902. Thus, the electrical connections between the package contact pad layers 410 and the supporting structure 800 do not serve as mechanical fixing means, in contrast to the embodiment shown in FIG. 8. It should be mentioned that, due to the cut out area 806, the embodiment shown in FIG. 8 is easier to cool than the embodiment shown in FIG. 9.
[0069] FIG. 10 shows a schematic top view of a digital micro mirror device package
1000 having the same architecture as the alternative shown in FIG. 8. A plurality of solder balls 506 are provided in order to electrically connect the digital micro mirror device package 1000 to a supporting structure.
[0070] FIG. 11 shows a perspective view of a plurality of cavities 402 formed within a support waver 400. Here, the support waver 400 is a glass wafer. This view may correspond to the manufacturing stage E shown in FIG. 4 B.
[0071] FIG. 12 shows a top view of an interface between the digital micro mirror device 306 and the surrounding area of the support wafer 400. As can be derived from FIG. 12, the wiring layer comprises conductive connections 1200 which are electrically connected to device contacting pads (not shown) at one end and to bonding wires 500 at the other end. [0072] FIG. 13 shows a cross-sectional view of an embodiment of the interface shown in FIG. 12. Here, the height H of the digital mirror device 306 is about the same as the depth of the cavity 402. One effect of this embodiment is that low loop wire bonding is possible (since the vertical level of the top surface of the digital mirror device 306 is the same as the vertical level of the top surface of the surrounding area of the support wafer 400, in contrast to the device shown in FIG. 1).
[0073] As could be derived from the foregoing description, embodiments of the present invention provide the following advantages: the digital mirror device 306 can be packed on a wafer level; a package assembly of the digital mirror device 306 is possible rather than a board assembly of the digital mirror device 306; it is possible to use a low temperature bonding process for bonding the digital mirror device 306 to the support waver 400; the front end process (fabrication of the digital mirror device 306) can be seperated form the back end process (processing of the support wafer 400), therefore the production yield (cumulative yield issues) can be increased (known good die packaging is possible); last, the package size can be reduced (e.g. due to the use of cavities 402 and due to the fact that the ring shaped elements 108 (increases the height) shown in FIG. 1 are not necessary). [0074] While the invention has been particularly shown and described with reference to specific embodiments, it should be understood by those skilled in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. The scope of the invention is thus indicated by the appended claims and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced.

Claims

ClaimsWhat is claimed is:
1. A micro electro mechanical device package, comprising: a composite structure comprising a substrate and at least one further layer provided on the substrate, wherein the composite structure comprises a cavity extending from the top surface of the composite structure into the substrate, a micro electro mechanical device provided within the cavity, a transparent plate covering the cavity such that the cavity is hermetically sealed, and package contact pads for electrically contacting the package, wherein the micro electro mechanical device is electrically connected to the package contact pads.
2. The micro electro mechanical device package according to claim 1, wherein the transparent plate is a glass plate.
3. The micro electro mechanical device package according to claim 1 or claim 2, wherein the glass plate is bonded to the composite structure by a bonding layer, wherein the bonding layer comprises or consists of frit glass material or solder material.
4. The micro electro mechanical device package according to any one of the claims 1 to
3, wherein the composite structure comprises a wiring layer provided on or above the substrate, wherein the wiring layer comprises conductive connections electrically connecting the micro electro mechanical device to the package contact pads.
5. The micro electro mechanical device package according to claim 4, wherein the composite structure comprises an isolation layer provided on or above the wiring layer.
6. The micro electro mechanical device package according to claim 5, wherein the bonding layer is provided on the isolation layer.
7. The micro electro mechanical device package according to any one of the claims 4 to 6, wherein the micro electro mechanical device is electrically connected to the conductive connections by bonding wires.
8. The micro electro mechanical device package according to any one of the claims 1 to 7, wherein the package is mounted on a circuit board such that the bottom surface of the substrate faces the top surface of the circuit board.
9. The micro electro mechanical device package according to any one of the claims 1 to 7, wherein the package is mounted on a circuit board such that the top surface of the transparent plate faces the top surface of the circuit board, wherein at least a part of the circuit board area located below the transparent plate is cut off such that light can impinge through the circuit board onto the transparent plate.
10. The micro electro mechanical device package according to claim 9, wherein the package is mechanically bonded to the circuit board only by conductive material provided on the package contact pads, wherein the conductive material also electrically connects the package to the circuit board.
11. The micro electro mechanical device package according to any one of the claims 1 to 10, wherein the micro electro mechanical device is a digital micro mirror device comprising a mirror which faces the transparent plate.
12. A method of manufacturing micro electro mechanical device packages, comprising: forming a composite structure comprising a support wafer and at least one further layer provided on the support wafer such that a plurality of cavities are formed within the composite structure, each cavity extending from the top surface of the composite structure into the support wafer, placing a micro electro mechanical device into each cavity, covering the cavities with a transparent wafer such that all cavities are hermetically sealed, and singularizing the composite structure thus obtained into single micro electro mechanical device packages.
13. The method according to claim 12, wherein the cavities are hermetically sealed by bonding the transparent wafer to the composite structure.
14. The method according to claim 13, wherein the transparent wafer is bonded to the composite structure using frit glass material or solder material as bonding material.
15. The method according to claim 14, wherein the bonding is carried out at temperatures ranging form about 150 °C to about 400 "C.
16. The method according to claim 14 or 15, wherein, during the bonding process, the transparent wafer is pressed onto the composite structure using pressures ranging from about 1 MPa to about 10 MPa.
17. The method according to any one of the claims 14 to 16, wherein the duration of the bonding process ranges from about 5 minutes to about 60 minutes.
18. The method according to any one of the claims 12 to 17, wherein the formation of the composite structure comprises forming a wiring layer on or above the support wafer, wherein the wiring layer comprises conductive connections and package contact pads being electrically connected to the conductive connections, wherein the conductive connections electrically connect the micro electro mechanical devices to the package contact pads.
19. The device according to claim 18, wherein the formation of the composite structure comprises forming an isolation layer on or above the wiring layer.
20. The device according to claim 19, wherein the transparent wafer is formed on or above the isolation layer.
21. The method according to any one of the claims 12 to 20, wherein, after having covered the cavities with the transparent wafer, the transparent wafer is singularized.
22. The method according to claim 21 , wherein, after having singularized the transparent wafer, solder material is provided on contacting pads which are electrically connected to the micro electro mechanical devices.
23. The method according to claim 22, wherein, after having provided solder material on the contacting pads, the support waver is singularized.
24. The method according to claim 21 , wherein, after having singularized the transparent wafer, the support waver is singularized, after which solder material is provided on contacting pads which are electrically connected to the micro electro mechanical devices.
5. A method of manufacturing a micro electro mechanical device package, comprising: forming a composite structure comprising a substrate and at least one further layer provided on the substrate, forming a cavity within the composite structure extending from the top surface of the composite structure into the substrate, placing a micro electro mechanical device into the cavity, and covering the cavity with a transparent plate such that the cavity is hermetically sealed.
PCT/SG2008/000193 2008-05-27 2008-05-28 Micro electro mechanical device package and method of manufacturing a micro electro mechanical device package WO2009145726A1 (en)

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WO2015028450A1 (en) * 2013-08-28 2015-03-05 Carl Zeiss Smt Gmbh Optical component

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