JP2018514647A - 窒化クロムコーティングを有する金属ストリップ又はシート、バイポーラプレート及び関連する製造方法 - Google Patents
窒化クロムコーティングを有する金属ストリップ又はシート、バイポーラプレート及び関連する製造方法 Download PDFInfo
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- JP2018514647A JP2018514647A JP2017549182A JP2017549182A JP2018514647A JP 2018514647 A JP2018514647 A JP 2018514647A JP 2017549182 A JP2017549182 A JP 2017549182A JP 2017549182 A JP2017549182 A JP 2017549182A JP 2018514647 A JP2018514647 A JP 2018514647A
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 73
- 239000002184 metal Substances 0.000 title claims abstract description 73
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 title claims abstract description 47
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000000576 coating method Methods 0.000 title description 13
- 239000011248 coating agent Substances 0.000 title description 12
- 239000011247 coating layer Substances 0.000 claims abstract description 156
- 239000000758 substrate Substances 0.000 claims abstract description 149
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 33
- 239000010935 stainless steel Substances 0.000 claims abstract description 32
- 238000000151 deposition Methods 0.000 claims description 93
- 230000008021 deposition Effects 0.000 claims description 89
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 46
- 239000010410 layer Substances 0.000 claims description 44
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 42
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 37
- 239000011651 chromium Substances 0.000 claims description 24
- 238000005240 physical vapour deposition Methods 0.000 claims description 19
- 229910052804 chromium Inorganic materials 0.000 claims description 17
- 239000000446 fuel Substances 0.000 claims description 12
- 239000001301 oxygen Substances 0.000 claims description 10
- 229910052760 oxygen Inorganic materials 0.000 claims description 10
- 230000003647 oxidation Effects 0.000 claims description 8
- 238000007254 oxidation reaction Methods 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 6
- 238000002161 passivation Methods 0.000 claims description 6
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 description 17
- 239000013078 crystal Substances 0.000 description 14
- 239000012535 impurity Substances 0.000 description 11
- 229910052757 nitrogen Inorganic materials 0.000 description 11
- 239000007789 gas Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 7
- 238000001000 micrograph Methods 0.000 description 7
- 238000005520 cutting process Methods 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 5
- 238000005137 deposition process Methods 0.000 description 5
- 239000011261 inert gas Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 238000011109 contamination Methods 0.000 description 4
- 238000007872 degassing Methods 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 3
- 230000002411 adverse Effects 0.000 description 3
- 229910000423 chromium oxide Inorganic materials 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000003792 electrolyte Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 239000003345 natural gas Substances 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000005098 hot rolling Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000009628 steelmaking Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 238000003917 TEM image Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 229910000963 austenitic stainless steel Inorganic materials 0.000 description 1
- 229910052729 chemical element Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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Abstract
Description
基材のステンレス鋼の自然酸化により形成された不動態層を表面上に含むステンレス鋼の基材を提供する工程と、
基材の少なくとも特定の領域において、不動態層を完全に剥離する剥離工程と、
不動態層が剥離された基材の領域上に窒化クロムを堆積して、不動態層の介在なく、ステンレス鋼の基材上に窒化クロムコーティング層を直接形成する工程であって、こうして形成されたコーティング層がテクスチャ加工されている工程と
を含む、金属ストリップ又はシートを製造するための方法に関する。
こうして形成されたコーティング層が、基材とエピタキシャル関係を有する。
剥離工程が物理的剥離である。
窒化クロムコーティング層が、物理気相堆積法を使用して、特にカソードスパッタリングによって堆積される。
堆積チャンバーと、堆積チャンバー内に配置されたクロムターゲットとを含む堆積設備において窒化クロムが基材上に堆積され、基材が、長手方向において堆積チャンバーを通過し、堆積チャンバーが、長手方向に沿って考えた場合に、堆積チャンバーの長さより短い長さを持つ堆積領域と、少なくとも、長手方向において堆積領域と隣接している第1禁止領域とを含み、堆積中に、堆積領域においてのみ窒化クロムが基材上に堆積され、第1禁止領域において窒化クロムが基材上に堆積されない。
上で説明したように、少なくとも1つのクロム系コーティング層5でコーティングされたステンレス鋼の基材3を含むプレート13を提供する工程と、
このプレート13を、別のプレート、有利には別の同様のプレート13に固定して、バイポーラプレート11を形成する工程と
を含む、金属ストリップ1からバイポーラプレート11を製造するための方法に関する。
金属ストリップ1を切断して、少なくとも1つのブランクを形成することと、
このブランクを、特にスタンピングによって変形して、プレート13を形成することとを含む。
Claims (19)
- 少なくとも1つの窒化クロム系コーティング層(5;5’)で被覆されたステンレス鋼から作られた基材(3;3’)を含む金属ストリップ(1;1’)又はシートであって、前記窒化クロム系コーティング層(5;5’)がテクスチャ加工されていることを特徴とする、金属ストリップ(1;1’)又はシート。
- 前記コーティング層(5;5’)が、前記基材(3;3’)とエピタキシャル関係を有する、請求項1に記載の金属ストリップ(1;1’)又はシート。
- 前記窒化クロム系コーティング層(5;5’)が、物理気相堆積法を使用して、特にカソードスパッタリングによって得られた、請求項1又は2に記載の金属ストリップ(1;1’)又はシート。
- 前記窒化クロム系コーティング層(5;5’)が、不動態層(10)の介在なく、ステンレス鋼の前記基材(3;3’)上に直接形成されている、請求項1〜3のいずれか1項に記載の金属ストリップ(1;1’)又はシート。
- 前記基材(3;3’)が、75〜200マイクロメートルに含まれる厚さ、特に100マイクロメートル以下の厚さを有する、請求項1〜4のいずれか1項に記載の金属ストリップ(1;1’)又はシート。
- 前記基材(3;3’)の粒子が、50マイクロメートル未満のサイズ、特に10〜30マイクロメートルに含まれるサイズを有する、請求項1〜5のいずれか1項に記載の金属ストリップ(1;1’)又はシート。
- 前記コーティング層(5;5’)がカラム構造を有し、前記カラムの幅が、好ましくは、前記コーティング層(5;5’)の厚さの10〜20%に含まれる、請求項1〜6のいずれか1項に記載の金属ストリップ(1;1’)又はシート。
- 前記コーティング層(5’)が、任意選択で酸素を含み、かつ、物理気相堆積(PVD)により得られた金属ストリップ(1;1’)又はシートであって、前記コーティング層(5’)が、表面上に、原子窒素含有量より少ない原子酸素含有量を含む表面領域(8)を有することを特徴とする、請求項1〜7のいずれか1項に記載の金属ストリップ(1;1’)又はシート。
- 前記表面領域(8)が、前記コーティング層(5’)の全体厚さの15%以下の高さを有する、請求項8に記載の金属ストリップ(1;1’)又はシート。
- 前記コーティング層(5’)が、前記基材(3’)との界面に、原子窒素含有量より少ない原子酸素含有量を含む界面領域(6)を含む、請求項8又は9に記載の金属ストリップ(1’)又はシート。
- 前記界面領域(6)が、前記コーティング層(5;5’)の全体厚さの15%以下の高さを有する、請求項10に記載の金属ストリップ(1’)又はシート。
- 前記基材(3’)から出発して前記コーティング層(5’)の表面に向けて移動した場合に、前記界面領域(6)と、コア領域(7)と、前記表面領域(8)とからなり、かつ、前記領域(6、7、8)が、前記基材(3’)の平均平面と垂直な方向に沿って重ねられている、請求項10と組み合わせた請求項8〜11のいずれか1項に記載の金属ストリップ(1’)又はシート。
- 請求項1〜12のいずれか1項に記載のストリップ(1;1’)又はシートを変形することによって得られたプレート(13)。
- 請求項13に記載の少なくとも1つのプレート(13)を含む、燃料電池のためのバイポーラプレート(11)。
- 以下の工程:
基材(3;3’)のステンレス鋼の自然酸化により形成された不動態層(10)を表面上に含むステンレス鋼の基材(3;3’)を提供する工程と、
前記基材(3;3’)の少なくとも特定の領域において、前記不動態層(10)を完全に剥離する剥離工程と、
前記不動態層(10)が剥離された前記基材(3;3’)の前記領域上に窒化クロムを堆積して、不動態層(10)の介在なく、ステンレス鋼の前記基材(3;3’)上に窒化クロム系コーティング層(5;5’)を直接形成する工程であって、形成された前記コーティング層(5;5)がテクスチャ加工されている工程と
を含む、金属ストリップ(1;1’)又はシートを製造するための方法。 - 得られた前記コーティング層(5;5’)が、前記基材(3;3’)とエピタキシャル関係を有する、請求項15に記載の方法。
- 前記剥離工程が物理的な剥離である、請求項15又は16に記載の方法。
- 前記窒化クロム系コーティング層(5;5’)が、物理気相堆積法を使用して、特にカソードスパッタリングによって堆積される、請求項15〜17のいずれか1項に記載の方法。
- 堆積チャンバー(20)と、前記堆積チャンバー(20)内に配置されたクロムターゲット(22)とを含む堆積設備において、窒化クロムが前記基材(3’)上に堆積され、前記基材(3’)が長手方向において前記堆積チャンバー(20)を通過し、
前記堆積チャンバー(20)が、長手方向に沿って考えた場合に、前記堆積チャンバー(20)の長さより短い長さを持つ堆積領域(30;30’)と、少なくとも、長手方向において前記堆積領域(30;30’)と隣接している第1禁止領域(32)とを含み、
堆積中に、前記堆積領域(30;30’)においてのみ窒化クロムが前記基材(3’)上に堆積され、前記第1禁止領域(32)において窒化クロムが前記基材(3’)上に堆積されない、請求項18に記載の方法。
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R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |