JP2018164082A5 - - Google Patents
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- Publication number
- JP2018164082A5 JP2018164082A5 JP2018054214A JP2018054214A JP2018164082A5 JP 2018164082 A5 JP2018164082 A5 JP 2018164082A5 JP 2018054214 A JP2018054214 A JP 2018054214A JP 2018054214 A JP2018054214 A JP 2018054214A JP 2018164082 A5 JP2018164082 A5 JP 2018164082A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- photoelectric conversion
- hole injection
- injection blocking
- blocking layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000903 blocking effect Effects 0.000 claims 7
- 238000006243 chemical reaction Methods 0.000 claims 7
- 238000002347 injection Methods 0.000 claims 7
- 239000007924 injection Substances 0.000 claims 7
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 5
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims 4
- 229910052711 selenium Inorganic materials 0.000 claims 4
- 239000011669 selenium Substances 0.000 claims 4
- 229910052718 tin Inorganic materials 0.000 claims 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 2
- 229910052797 bismuth Inorganic materials 0.000 claims 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 claims 2
- 229910052733 gallium Inorganic materials 0.000 claims 2
- 229910052738 indium Inorganic materials 0.000 claims 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 229910052760 oxygen Inorganic materials 0.000 claims 2
- 239000001301 oxygen Substances 0.000 claims 2
- 229910052709 silver Inorganic materials 0.000 claims 2
- 239000004332 silver Substances 0.000 claims 2
- 229910052714 tellurium Inorganic materials 0.000 claims 2
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017059878 | 2017-03-24 | ||
| JP2017059878 | 2017-03-24 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018164082A JP2018164082A (ja) | 2018-10-18 |
| JP2018164082A5 true JP2018164082A5 (enrdf_load_stackoverflow) | 2021-05-06 |
| JP7114291B2 JP7114291B2 (ja) | 2022-08-08 |
Family
ID=63586414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018054214A Active JP7114291B2 (ja) | 2017-03-24 | 2018-03-22 | 光電変換素子の作製方法 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7114291B2 (enrdf_load_stackoverflow) |
| WO (1) | WO2018172880A1 (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7402635B2 (ja) * | 2019-08-05 | 2023-12-21 | 日本放送協会 | 固体撮像素子および撮像装置、ならびに白キズ抑制方法 |
| JP7344086B2 (ja) * | 2019-10-24 | 2023-09-13 | 日本放送協会 | 光電変換素子及びその製造方法並びに積層型撮像素子 |
| JP7479231B2 (ja) * | 2020-07-16 | 2024-05-08 | 日本放送協会 | 光電変換膜、光電変換膜の製造方法、光電変換素子 |
| CN113228282B (zh) * | 2021-03-29 | 2023-12-05 | 长江存储科技有限责任公司 | 用于增大半导体器件中的多晶硅晶粒尺寸的阶梯式退火工艺 |
| JP2023023515A (ja) * | 2021-08-05 | 2023-02-16 | 日本放送協会 | 光電変換素子および光電変換素子の製造方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008072090A (ja) * | 2006-08-14 | 2008-03-27 | Fujifilm Corp | 光電変換素子及び固体撮像素子 |
| JP2010192690A (ja) * | 2009-02-18 | 2010-09-02 | Tdk Corp | 太陽電池の製造方法 |
| JP2011086770A (ja) * | 2009-10-15 | 2011-04-28 | Idemitsu Kosan Co Ltd | 光電変換素子及びその製造方法 |
| KR20120076439A (ko) | 2010-12-29 | 2012-07-09 | 삼성모바일디스플레이주식회사 | 엑스선 검출 장치 |
| CN104823280B (zh) * | 2012-12-10 | 2018-04-03 | 富士胶片株式会社 | 放射线检测装置 |
| JP6463937B2 (ja) * | 2013-10-18 | 2019-02-06 | 日本放送協会 | 光電変換素子、及び、光電変換素子の製造方法 |
| JP6482185B2 (ja) | 2014-05-12 | 2019-03-13 | 日本放送協会 | 固体撮像素子 |
| JP2015225886A (ja) | 2014-05-26 | 2015-12-14 | 日本放送協会 | 光電変換素子、光電変換素子の製造方法、積層型固体撮像素子および太陽電池 |
| JP2016082011A (ja) * | 2014-10-15 | 2016-05-16 | 日東電工株式会社 | Ｃｉｇｓ膜の品質評価方法およびそれを用いたｃｉｇｓ膜の製法、並びに当該製法によって得られたｃｉｇｓ膜を用いた太陽電池 |
| US11728356B2 (en) * | 2015-05-14 | 2023-08-15 | Semiconductor Energy Laboratory Co., Ltd. | Photoelectric conversion element and imaging device |
| JP6570173B2 (ja) * | 2015-07-01 | 2019-09-04 | 日本放送協会 | 光電変換素子、光電変換素子の製造方法、固体撮像素子 |
| JP6575997B2 (ja) | 2015-07-30 | 2019-09-18 | 日本放送協会 | 光電変換素子、光電変換素子の製造方法、固体撮像素子 |
| JP2017045933A (ja) * | 2015-08-28 | 2017-03-02 | 株式会社半導体エネルギー研究所 | 光電変換素子の製造方法 |
-
2018
- 2018-03-12 WO PCT/IB2018/051594 patent/WO2018172880A1/en active Application Filing
- 2018-03-22 JP JP2018054214A patent/JP7114291B2/ja active Active
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