JP2018151187A - 走査型プローブ顕微鏡 - Google Patents

走査型プローブ顕微鏡 Download PDF

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Publication number
JP2018151187A
JP2018151187A JP2017045904A JP2017045904A JP2018151187A JP 2018151187 A JP2018151187 A JP 2018151187A JP 2017045904 A JP2017045904 A JP 2017045904A JP 2017045904 A JP2017045904 A JP 2017045904A JP 2018151187 A JP2018151187 A JP 2018151187A
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Japan
Prior art keywords
screw shaft
laser light
light source
photodetector
adjustment amount
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Pending
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JP2017045904A
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English (en)
Japanese (ja)
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JP2018151187A5 (enExample
Inventor
寛治 小林
Kanji Kobayashi
寛治 小林
雅人 平出
Masato Hiraide
雅人 平出
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
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Shimadzu Corp
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Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2017045904A priority Critical patent/JP2018151187A/ja
Priority to US15/916,469 priority patent/US10254307B2/en
Priority to EP18161009.8A priority patent/EP3373016A1/en
Publication of JP2018151187A publication Critical patent/JP2018151187A/ja
Publication of JP2018151187A5 publication Critical patent/JP2018151187A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2017045904A 2017-03-10 2017-03-10 走査型プローブ顕微鏡 Pending JP2018151187A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017045904A JP2018151187A (ja) 2017-03-10 2017-03-10 走査型プローブ顕微鏡
US15/916,469 US10254307B2 (en) 2017-03-10 2018-03-09 Scanning probe microscope
EP18161009.8A EP3373016A1 (en) 2017-03-10 2018-03-09 Drive mechanism for optical lever detection in a scanning probe microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017045904A JP2018151187A (ja) 2017-03-10 2017-03-10 走査型プローブ顕微鏡

Publications (2)

Publication Number Publication Date
JP2018151187A true JP2018151187A (ja) 2018-09-27
JP2018151187A5 JP2018151187A5 (enExample) 2019-08-15

Family

ID=62067321

Family Applications (1)

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JP2017045904A Pending JP2018151187A (ja) 2017-03-10 2017-03-10 走査型プローブ顕微鏡

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US (1) US10254307B2 (enExample)
EP (1) EP3373016A1 (enExample)
JP (1) JP2018151187A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112729171A (zh) * 2020-12-15 2021-04-30 大连德迈仕精密科技股份有限公司 一种螺杆轴冷精挤加工的自动检测方法与装置
JP2021162314A (ja) * 2020-03-30 2021-10-11 株式会社島津製作所 走査型プローブ顕微鏡および走査型プローブ顕微鏡における光軸調整方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6830386B2 (ja) * 2017-03-27 2021-02-17 株式会社ミツトヨ 測定ヘッド
EP4019981A1 (en) * 2020-07-14 2022-06-29 Chungbuk National University Industry-Academic Cooperation Foundation Atomic-force microscope using artificial intelligence object recognition technology and method for operating same
CN114509000B (zh) * 2021-05-19 2022-10-11 深圳市聚鑫视科技有限公司 一种基于激光点云扫描的手机螺钉固定方法和装置

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63259492A (ja) * 1987-04-16 1988-10-26 富士通株式会社 縦型ｘ−ｙステ−ジ
JP2002162660A (ja) * 2000-11-28 2002-06-07 Honda Motor Co Ltd 光学部品の焦点検出方法および装置
JP2003014611A (ja) * 2001-06-29 2003-01-15 Olympus Optical Co Ltd 走査型プローブ顕微鏡
US20050023481A1 (en) * 2001-09-24 2005-02-03 Jorn Kamps Method of and an apparatus for measuring a specimen by means of a scanning probe microscope
JP2005225722A (ja) * 2004-02-13 2005-08-25 Denki Kagaku Kogyo Kk セメント組成物、空洞充填材、及びその使用方法
JP2008051690A (ja) * 2006-08-25 2008-03-06 Sii Nanotechnology Inc 光学式変位検出機構及びそれを用いた表面情報計測装置
JP2011038851A (ja) * 2009-08-07 2011-02-24 Sii Nanotechnology Inc 摩擦力測定方法および摩擦力測定装置
WO2016189575A1 (ja) * 2015-05-22 2016-12-01 株式会社島津製作所 走査型プローブ顕微鏡
JP2017049087A (ja) * 2015-09-01 2017-03-09 株式会社日立ハイテクサイエンス 走査プローブ顕微鏡および走査プローブ顕微鏡の光軸調整方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5408094A (en) * 1992-05-07 1995-04-18 Olympus Optical Co., Ltd. Atomic force microscope with light beam emission at predetermined angle
JP3388107B2 (ja) * 1996-09-25 2003-03-17 日本電子株式会社 走査プローブ顕微鏡におけるフォトセンサ位置調整装置
WO2009093284A1 (ja) * 2008-01-24 2009-07-30 Shimadzu Corporation 走査型プローブ顕微鏡

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63259492A (ja) * 1987-04-16 1988-10-26 富士通株式会社 縦型ｘ−ｙステ−ジ
JP2002162660A (ja) * 2000-11-28 2002-06-07 Honda Motor Co Ltd 光学部品の焦点検出方法および装置
JP2003014611A (ja) * 2001-06-29 2003-01-15 Olympus Optical Co Ltd 走査型プローブ顕微鏡
US20050023481A1 (en) * 2001-09-24 2005-02-03 Jorn Kamps Method of and an apparatus for measuring a specimen by means of a scanning probe microscope
JP2005225722A (ja) * 2004-02-13 2005-08-25 Denki Kagaku Kogyo Kk セメント組成物、空洞充填材、及びその使用方法
JP2008051690A (ja) * 2006-08-25 2008-03-06 Sii Nanotechnology Inc 光学式変位検出機構及びそれを用いた表面情報計測装置
JP2011038851A (ja) * 2009-08-07 2011-02-24 Sii Nanotechnology Inc 摩擦力測定方法および摩擦力測定装置
WO2016189575A1 (ja) * 2015-05-22 2016-12-01 株式会社島津製作所 走査型プローブ顕微鏡
JP2017049087A (ja) * 2015-09-01 2017-03-09 株式会社日立ハイテクサイエンス 走査プローブ顕微鏡および走査プローブ顕微鏡の光軸調整方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021162314A (ja) * 2020-03-30 2021-10-11 株式会社島津製作所 走査型プローブ顕微鏡および走査型プローブ顕微鏡における光軸調整方法
CN112729171A (zh) * 2020-12-15 2021-04-30 大连德迈仕精密科技股份有限公司 一种螺杆轴冷精挤加工的自动检测方法与装置

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Publication number Publication date
US20180259552A1 (en) 2018-09-13
EP3373016A1 (en) 2018-09-12
US10254307B2 (en) 2019-04-09

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