JP2018147949A - ルテニウム配線の製造方法 - Google Patents
ルテニウム配線の製造方法 Download PDFInfo
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- 229910052707 ruthenium Inorganic materials 0.000 title claims abstract description 97
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 title claims abstract description 95
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 42
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 46
- 239000000758 substrate Substances 0.000 claims abstract description 22
- 238000011049 filling Methods 0.000 claims abstract description 15
- 239000007789 gas Substances 0.000 claims description 160
- 238000000034 method Methods 0.000 claims description 71
- 230000008569 process Effects 0.000 claims description 53
- 238000000137 annealing Methods 0.000 claims description 21
- 230000001965 increasing effect Effects 0.000 claims description 18
- 229910052739 hydrogen Inorganic materials 0.000 claims description 13
- 239000001257 hydrogen Substances 0.000 claims description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 11
- NQZFAUXPNWSLBI-UHFFFAOYSA-N carbon monoxide;ruthenium Chemical group [Ru].[Ru].[Ru].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-].[O+]#[C-] NQZFAUXPNWSLBI-UHFFFAOYSA-N 0.000 claims description 8
- 229910010282 TiON Inorganic materials 0.000 claims description 5
- 229910004491 TaAlN Inorganic materials 0.000 claims description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
- 239000002994 raw material Substances 0.000 abstract description 17
- 238000004904 shortening Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 53
- 238000005755 formation reaction Methods 0.000 description 38
- 239000010410 layer Substances 0.000 description 36
- 238000000151 deposition Methods 0.000 description 29
- 230000008021 deposition Effects 0.000 description 28
- 230000007246 mechanism Effects 0.000 description 24
- 239000012159 carrier gas Substances 0.000 description 23
- 239000000463 material Substances 0.000 description 16
- 238000005229 chemical vapour deposition Methods 0.000 description 15
- 239000010949 copper Substances 0.000 description 14
- 239000011261 inert gas Substances 0.000 description 14
- 239000012535 impurity Substances 0.000 description 13
- 230000000694 effects Effects 0.000 description 12
- 238000001816 cooling Methods 0.000 description 9
- 239000011229 interlayer Substances 0.000 description 8
- 238000000231 atomic layer deposition Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 238000003860 storage Methods 0.000 description 7
- 229910052799 carbon Inorganic materials 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- 238000011068 loading method Methods 0.000 description 5
- 230000032258 transport Effects 0.000 description 5
- 230000007723 transport mechanism Effects 0.000 description 5
- 238000009825 accumulation Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- -1 ruthenium pentadienyl compounds Chemical class 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000000859 sublimation Methods 0.000 description 2
- 230000008022 sublimation Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 2
- HDWDVUXQIOWBEP-UHFFFAOYSA-N C(C)C1(C=CC=C1)[Ru] Chemical compound C(C)C1(C=CC=C1)[Ru] HDWDVUXQIOWBEP-UHFFFAOYSA-N 0.000 description 1
- LGJJVJDDNWYROS-UHFFFAOYSA-N C1(C=CC=C1)[Ru]C=C(C=C(C)C)C Chemical compound C1(C=CC=C1)[Ru]C=C(C=C(C)C)C LGJJVJDDNWYROS-UHFFFAOYSA-N 0.000 description 1
- XOSBQSGUNCVAIL-UHFFFAOYSA-N CC(=C[Ru]C1(C=CC=C1)CC)C=C(C)C Chemical compound CC(=C[Ru]C1(C=CC=C1)CC)C=C(C)C XOSBQSGUNCVAIL-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 125000000058 cyclopentadienyl group Chemical group C1(=CC=CC1)* 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- ZSWFCLXCOIISFI-UHFFFAOYSA-N endo-cyclopentadiene Natural products C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Abstract
Description
最初に、本発明の一実施形態に係るRu配線の製造方法について説明する。図1は本発明の一実施形態に係るRu配線の製造方法を概略的に示すフローチャート、図2はその工程断面図である。
次に、Ru膜206埋め込み工程および積み増し層207形成工程について詳細に説明する。
埋め込みのためのRu膜206は、ルテニウムカルボニル(Ru3(CO)12)を成膜原料として用い、これをウエハW上で熱分解する熱CVDにより成膜することが好ましい。これにより、高純度で薄いRu膜を高ステップカバレッジで成膜することができ、10nm程度の狭いトレンチを埋め込むことができる。このときの成膜反応は、以下の(1)式に示す通りである。
Ru3(CO)12(s)+Heat→3Ru(s)+12CO↑ …(1)
このときの成膜条件は、例えば処理容器内の圧力が0.013〜133.3Pa(0.1mTorr〜1Torr)、好ましくは1.3〜66.5Pa(10〜500mTorr)の範囲であり、成膜温度(ウエハ温度)が120〜300℃、好ましくは、130〜250℃の範囲である。
次に、以上のRu配線の製造方法を実施するために用いられる成膜システムの一例について説明する。
成膜システム1は、下地膜成膜装置11と、冷却装置12と、埋め込み用Ru膜成膜装置13a、積み増し用Ru膜成膜装置13bとを有する。これらは、平面形状が七角形をなす真空搬送室10の4つの壁部にそれぞれゲートバルブGを介して接続されている。真空搬送室10内は、真空ポンプにより排気されて所定の真空度に保持される。
次に、上記成膜システム1の埋め込み用Ru膜成膜装置13aについて説明する。
図7は埋め込み用Ru膜成膜装置13aの一例を概略的に示す断面図である。
次に、上記成膜システム1の積み増し用Ru膜成膜装置13bについて説明する。
次に、実験例について説明する。
ここでは、幅10nmのトレンチに埋め込み分の5nmと積み増し分の15nmの合計20nmのRu膜を、埋め込みの際の条件(条件1)のままで連続して埋め込んだ場合(プロセスA)と、埋め込み条件(条件1)で5nm埋め込んだ後、成膜条件を成膜速度が大きくなる積み増し条件(条件2)に変えて積み増し分の15nmを埋め込んだ場合(プロセスB)についてプロセス時間を比較した。
・条件1
成膜温度(ウエハ温度):150℃
チャンバー内圧力:10mTorr
キャリアガス(COガス)流量:100sccm(Ru3(CO)12流量1sccmに相当)
・条件2
成膜温度(ウエハ温度):195℃
チャンバー内圧力:100mTorr
キャリアガス(COガス)流量:200sccm(Ru3(CO)12流量2sccmに相当)
H2ガス流量:100sccm
以上、本発明の実施形態について説明したが、本発明は、上記実施形態に限定されることなく、本発明の技術思想の範囲内で種々変形可能である。例えば、上記実施形態で説明した成膜システム、埋め込み用Ru膜成膜装置、積み増し用Ru成膜装置は、あくまで例示であって、本実施形態に限るものではない。また、一つのRu膜成膜装置で条件を変えてRu膜の埋め込みと積み増し層の形成とを行ってもよい。ただし、条件設定の変更に時間がかかる場合は、上記実施形態のように埋め込み用Ru膜成膜装置と積み増し用Ru膜成膜装置とを分けることが好ましい。
10;真空搬送室
11;下地膜成膜装置
12;冷却装置
13a;埋め込み用Ru膜成膜装置
13b;積み増し用Ru膜成膜装置
14;ロードロック室
101;チャンバー
102;サセプタ
105;ヒーター
110;シャワーヘッド
130;ガス供給機構
131;成膜原料容器
134;キャリアガス供給源
154;H2ガス供給源
201;基体
202;層間絶縁膜
203;トレンチ
204;ビアホール
205;下地膜
206;Ru膜(埋め込みRu膜)
207;積み増し層(積み増しRu膜)
208;Ru配線
W;半導体ウエハ
Claims (15)
- 表面に凹部が形成された所定の膜を有する基板に対し、前記凹部を埋めてルテニウム配線を製造するルテニウム配線の製造方法であって、
ルテニウム原料ガスを用いたCVDにより第1のルテニウム膜を成膜して前記凹部を埋め込む工程と、
前記凹部内に埋め込んだ前記第1のルテニウム膜の上に、ルテニウム原料ガスを用いたCVDにより埋め込みの際よりも大きな成膜速度で第2のルテニウム膜を成膜し、積み増し層を形成する工程と、
基板表面の前記第2のルテニウム膜および前記第1のルテニウム膜をCMPにより除去して平坦化する工程と
を有することを特徴とするルテニウム配線の製造方法。 - 前記積み増し層を形成する際の前記第2のルテニウム膜の成膜は、前記第1のルテニウム膜を成膜する際のプロセスパラメータの値を調整することにより、成膜速度を前記第1のルテニウム膜の成膜速度よりも大きくすることを特徴とする請求項1に記載のルテニウム配線の製造方法。
- 前記積み増し層を形成する際の前記第2のルテニウム膜の成膜は、プロセスパラメータの値の調整として、成膜温度を高くすること、原料ガス供給量を大きくすること、処理圧力を低くすること、および、基板とガス吐出面との間のギャップを広くすることの少なくとも1種により成膜速度を大きくすることを特徴とする請求項2に記載のルテニウム配線の製造方法。
- 前記平坦化する工程よりも前に、水素含有雰囲気でアニール処理する工程をさらに有することを特徴とする請求項1から請求項3のいずれか1項に記載のルテニウム配線の製造方法。
- 前記積み増し層を形成する際の前記第2のルテニウム膜の成膜は、水素含有還元ガスを添加することにより、成膜速度を前記第1のルテニウム膜の成膜速度よりも大きくすることを特徴とする請求項1から請求項4のいずれか1項に記載のルテニウム配線の製造方法。
- 前記水素含有還元ガスは、H2ガス、NH3ガス、およびSiH4ガスの少なくとも1種であることを特徴とする請求項5に記載のルテニウム配線の製造方法。
- 表面に凹部が形成された所定の膜を有する基板に対し、前記凹部を埋めてルテニウム配線を製造するルテニウム配線の製造方法であって、
ルテニウム原料ガスを用いたCVDにより第1のルテニウム膜を成膜して前記凹部を埋め込む工程と、
前記凹部内に埋め込んだ前記第1のルテニウム膜の上に、ルテニウム原料ガスに水素含有還元ガスを添加したCVDにより第2のルテニウム膜を成膜し、積み増し層を形成する工程と、
基板表面の前記第2のルテニウム膜および前記第1のルテニウム膜をCMPにより除去して平坦化する工程と
を有することを特徴とするルテニウム配線の製造方法。 - 前記水素含有還元ガスは、H2ガス、NH3ガス、およびSiH4ガスの少なくとも1種であることを特徴とする請求項7に記載のルテニウム配線の製造方法。
- 前記積み増し層を形成する際の前記第2のルテニウム膜の成膜は、前記第1のルテニウム膜を成膜する際のプロセスパラメータの値を調整することにより、成膜速度を前記第1のルテニウム膜の成膜速度よりも大きくすることを特徴とする請求項7または請求項8に記載のルテニウム配線の製造方法。
- 前記積み増し層を形成する際の前記第2のルテニウム膜の成膜は、プロセスパラメータの値の調整として、成膜温度を高くすること、原料ガス供給量を大きくすること、処理圧力を低くすること、および、基板とガス吐出面との間のギャップを広くすることの少なくとも1種により成膜速度を大きくすることを特徴とする請求項9に記載のルテニウム配線の製造方法。
- 前記第1のルテニウムの成膜に先立って、前記凹部内に下地膜を形成する工程をさらに有することを特徴とする請求項1から請求項10のいずれか1項に記載のルテニウム配線の製造方法。
- 前記下地膜は、TiN膜、Ta膜、TaN膜、TaAlN膜、およびTiON膜のいずれかであることを特徴とする請求項1から請求項11のいずれか1項に記載のルテニウム配線の製造方法。
- 前記第1のルテニウム膜および前記第2のルテニウム膜は、ルテニウム原料ガスとしてルテニウムカルボニルを用いて成膜することを特徴とする請求項1から請求項12のいずれか1項に記載のルテニウム配線の製造方法。
- 前記第1のルテニウム膜および前記第2のルテニウム膜を形成する際の処理温度は、120〜300℃の範囲であることを特徴とする請求項13に記載のルテニウム配線の製造方法。
- 前記第1のルテニウム膜および前記第2のルテニウム膜を形成する際の圧力は、0.013〜133.33Paの範囲であることを特徴とする請求項13または請求項14に記載のルテニウム配線の製造方法。
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