JP2018142600A - 圧電組成物及び圧電素子 - Google Patents
圧電組成物及び圧電素子 Download PDFInfo
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Abstract
Description
x[BimFeO3]−y[BamTiO3]−z[BimAlO3] (1)
[式(1)中、0.5≦x≦0.7995、0.2≦y≦0.4、0.0005≦z≦0.1、x+y+z=1、0.96≦m≦1.04。]
x[BimFeO3]−y[BamTiO3]−z[BimAlO3] (1)
[式(1)中、0.5≦x≦0.7995、0.2≦y≦0.4、0.0005≦z≦0.1、x+y+z=1、0.96≦m≦1.04。]
(Bi(x+z)Bay)m(FexTiyAlz)O3 (2)
[式(2)中、0.5≦x≦0.7995、0.2≦y≦0.4、0.0005≦z≦0.1、x+y+z=1、0.96≦m≦1.04。]
以下に示す方法により、圧電素子を作製した。圧電組成物の原料として、酸化ビスマス(Bi2O3)、酸化鉄(Fe2O3)、炭酸バリウム(BaCO3)、酸化チタン(TiO2)、酸化アルミニウム(Al2O3)の各粉末原料を準備した。本焼成後の焼結体が下記化学式(3)で表される圧電組成物となるように、これら各粉末原料を秤量して配合して、混合原料を調製した。
x[BimFeO3]−y[BamTiO3]−z[BimAlO3] (3)
上記化学式(3)において、x=0.5995、y=0.4、z=0.0005、m=1.02である。
実施例1の焼結体の組成を蛍光X線分析法(XRF法)法によって分析した。その結果、実施例1の焼結体の組成は、上記化学式(3)で表されることが確認された。
d33メータを用いて、仮電極を形成する前の実施例1の焼結体(圧電組成物)のd33(単位:pC/N)を測定した。上記d33メータは、JIS R 1696に準拠したベルリンコート法により、d33を測定する。ベルリンコート法では、圧電組成物に振動を与えたときの圧電正効果を利用してd33を測定する。そのため、ベルリンコート法では、圧電組成物に電界を印加したときの圧電逆効果を利用する測定方法とは異なり、電歪の影響がなく、圧電組成物の本来のd33が得られる。実施例1のd33を表2に示す。d33が150pC/N以上である場合、良好である。
実施例1の圧電素子における電極4aと電極4bとの間に直流電圧を印加して、電極4aと電極4bとの間の比抵抗(単位:Ω・cm)を測定した。直流電圧は、40Vであった。実施例1の比抵抗を表2に示す。比抵抗が1.0×109Ω・cm以上である場合、良好である。
上記化学式(3)におけるx、y、z及びmが下記表1〜8に示す値となるように、粉末原料の配合比を変えて混合原料を調製したこと以外は、実施例1と同様の方法により、実施例2〜29及び比較例1〜26の圧電素子をそれぞれ個別に作製した。実施例2〜29及び比較例1〜26それぞれの焼結体の組成を、実施例1と同様の方法により分析した。その結果、実施例2〜29及び比較例1〜26それぞれの焼結体の組成は、表1〜8に示される組成であることが確認された。実施例1と同様の方法により、実施例2〜29及び比較例1〜26のd33をそれぞれ個別に測定した。実施例2〜29及び比較例1〜26のd33を表1〜8に示す。実施例1と同様の方法により、実施例2〜29及び比較例1〜26の比抵抗をそれぞれ個別に測定した。実施例2〜29及び比較例1〜26の比抵抗を表1〜8に示す。
Claims (2)
- 下記化学式(1)で表される圧電組成物。
x[BimFeO3]−y[BamTiO3]−z[BimAlO3] (1)
[式(1)中、0.5≦x≦0.7995、0.2≦y≦0.4、0.0005≦z≦0.1、x+y+z=1、0.96≦m≦1.04。] - 請求項1に記載の圧電組成物を備える圧電素子。
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JP2017035354A JP6822214B2 (ja) | 2017-02-27 | 2017-02-27 | 圧電組成物及び圧電素子 |
CN201810161974.6A CN108511599B (zh) | 2017-02-27 | 2018-02-26 | 压电组合物以及压电元件 |
EP18158981.3A EP3370271B1 (en) | 2017-02-27 | 2018-02-27 | Piezoelectric composition and piezoelectric device |
US15/906,292 US10937943B2 (en) | 2017-02-27 | 2018-02-27 | Piezoelectric composition and piezoelectric device |
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CN111362690A (zh) * | 2020-03-17 | 2020-07-03 | 东北大学秦皇岛分校 | 一种铁酸铋-钛酸钡复合压电陶瓷的制备方法 |
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JP6683029B2 (ja) * | 2016-06-20 | 2020-04-15 | コニカミノルタ株式会社 | 圧電素子、超音波探触子および超音波撮像装置 |
JP6919237B2 (ja) * | 2017-03-09 | 2021-08-18 | Tdk株式会社 | 圧電組成物及び圧電素子 |
JP6919236B2 (ja) | 2017-03-09 | 2021-08-18 | Tdk株式会社 | 圧電組成物及び圧電素子 |
JP7206941B2 (ja) * | 2019-01-22 | 2023-01-18 | Tdk株式会社 | 圧電組成物及び圧電素子 |
CN111342177B (zh) * | 2020-03-06 | 2022-05-03 | 广东国华新材料科技股份有限公司 | 一种介质波导陶瓷滤波器及其制备方法 |
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