JP2018121000A - 発光装置の製造方法 - Google Patents
発光装置の製造方法 Download PDFInfo
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- JP2018121000A JP2018121000A JP2017012620A JP2017012620A JP2018121000A JP 2018121000 A JP2018121000 A JP 2018121000A JP 2017012620 A JP2017012620 A JP 2017012620A JP 2017012620 A JP2017012620 A JP 2017012620A JP 2018121000 A JP2018121000 A JP 2018121000A
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- 238000000034 method Methods 0.000 title claims abstract description 53
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 36
- 238000007789 sealing Methods 0.000 claims description 18
- 238000005452 bending Methods 0.000 description 16
- 239000000463 material Substances 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 7
- 229920005989 resin Polymers 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 239000011342 resin composition Substances 0.000 description 3
- 229920002050 silicone resin Polymers 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 2
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910020440 K2SiF6 Inorganic materials 0.000 description 1
- 229910003564 SiAlON Inorganic materials 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- -1 nitride compound Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 239000010948 rhodium Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
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Abstract
Description
基板上に載置された発光素子上の第1接続点と、第1接続点から+X方向に位置する基板上の第2接続点とをワイヤで接続する工程を含む発光装置の製造方法であって、発光素子が載置された前記基板を準備する工程と、キャピラリに挿通されたワイヤにイニシャルボールを形成し、イニシャルボールを発光素子上の第1接続点に当接してボール部を接続する第1接続工程と、キャピラリを、第1接続点の上方の+Z方向に位置する第1点まで移動させる第1移動工程と、キャピラリを、第1点から前記第2接続点と反対側の−X方向に位置する第2点まで移動させる第2移動工程と、キャピラリを、第2点から、基板上の第2接続点の上方を通り超えて+X方向であって、かつ、+Z方向に位置する第3点まで移動する第3移動工程と、キャピラリを、第3点から−X方向に位置する第2接続点まで移動して、ワイヤを第2接続点に接合する第2接続工程と、ワイヤを封止する封止部材を形成する封止部材形成工程と、を備える発光装置の製造方法。
図2に示すように、発光素子20が載置された基板10を準備する。尚、図2では、1つの発光装置となる基板10を例示しているが、工程内において、基板10は、複数の発光装置となる部分を複数備えた集合基板として用いられる。
第1接続工程は、ワイヤ30を第1接続点J1に接続させる工程である。そして、第1接続工程は、ワイヤ30のボール部32を形成する工程である。第1接続工程では、まず、図3Aに示すように、キャピラリ50に挿通されたワイヤ30にイニシャルボール31を形成する。詳細には、ワイヤ30の先端を電気放電等によって溶融させることでイニシャルボール31を形成する。電気放電等の条件は、ワイヤ30の組成、径、目的とするイニシャルボール31の大きさ等に応じて適宜選択することができる。
第1移動工程は、キャピラリ50を上方向に移動させる工程である。そして、第1移動工程は、ワイヤ30のネック部331を形成する工程である。第1移動工程は、詳細には、図4B、図5(b)に示すように、キャピラリ50を、第1接続点J1の上方の+Z方向に位置する第1点P1まで移動させる工程である。第1移動工程内において、ボール部32から延伸するワイヤ30は、キャピラリ50の貫通孔内に挿通されており、固定されていない。そのため、第1移動工程によって、キャピラリ50が移動するのに伴い、キャピラリ50の先端からワイヤ30が繰り出されることになる。後述の第2移動工程、及び第3移動工程においても、キャピラリ50は先端からワイヤ30を繰り出しながら移動する。
第2移動工程は、キャピラリ50を第1点P1から第2点P2まで移動させる工程である。そして、第2移動工程は、ワイヤ30の屈曲部332を形成する工程である。第2点P2は、図4Bに示すように、第1点P1からみて−X方向に位置する。この第2移動工程におけるキャピラリの動作は、いわゆるリバース動作と称される動きである。第2移動工程においてキャピラリ50を第2点P2まで移動させることで、図5(c)に示すように、ワイヤ30は、ボール部32から斜め方向に引っ張られる。
第3移動工程は、キャピラリ50を第2点P2から第3点P3まで移動させる工程である。そして、第3移動工程は、ワイヤ30の撓み部333を形成する工程である。第3点P3は、図4に示すように、第2点P2からみて+X方向に位置する。さらに、第3点P3は、基板10上の第2接続点J2の上方を通り超えて+X方向に位置している。詳細には、第3点P3は、第2接続点J2よりも距離D5だけ+X方向に位置した位置にある。つまり、第3点P3は、第2接続点J2よりも遠い位置にある。
第2接続工程は、ワイヤ30を第2接続点J2に接続させる工程である。そして、第2接続工程は、ワイヤ30の接続部34を形成する工程である。第2接続点J2は基板10上の導電部材12上に位置しており、この導電部材12とワイヤ30とを接続させる。第2接続点J2は、図4に示すように、第3点P3からみて−X方向に距離D5の位置に位置している。
尚、第1接続工程、第1移動工程、及び、第2接続工程については、図4A、図4B、図5の説明と重複するため必要な個所以外は省略する。
第2a移動工程は、第2移動工程のあとに行われる工程である。第2a移動工程は、キャピラリ50を第2点P2から第2a点P2aまで移動させる工程である。第2a点P2aは、図9Bに示すように、第2点P2からみて+Z方向に位置する。第2点Pa点の位置によって、第1屈曲部332aと第2屈曲部332bまでの距離が決められる。
キャピラリ50を上方向に移動させる工程である。
第2b移動工程は、キャピラリ50を第2a点P2aから第2b点P2bまで移動させる工程である。そして、第2b移動工程は、ワイヤ30Aの第2屈曲部332bを形成する工程である。第2b点P2bは、図9Bに示すように、第2a点P2aからみて−X方向に位置する。この第2b移動工程におけるキャピラリの動作は、いわゆるリバース動作と称される動きである。第2b移動工程においてキャピラリ50を第2b点P2bまで移動させることで、図10(e)に示すように、ワイヤ30Aは、斜め方向に引っ張られる。
次に、図7に示すように、発光素子20及びワイヤ30を封止する封止部材40を形成する。ここでは、基板10が凹部13を備えている例を示しており、封止部材40は、凹部13内に形成される。封止部材40は、液状又はペースト状の樹脂材料をディスペンスノズル等で供給し、その後、熱又は光で硬化させることで形成することができる。
10…基板
11…基材
12…導電部材
13…凹部
20…発光素子
30、30A…ワイヤ
31…イニシャルボール
32…ボール部
33…ループ部
331…ネック部
332…屈曲部(332a…第1屈曲部、332b…第2屈曲部)
333…撓み部
34…接続部
40…封止部材
50…キャピラリ
60…ノズル
J1…第1接続点
J2…第2接続点
P1…第1点
P2…第2点(P2a…第2a点、P2b…第2b点)
P3…第3点
L1、L2…最短仮想線
T、T‘、T2…移動軌跡
Claims (3)
- 基板上に載置された発光素子上の第1接続点と、前記第1接続点から+X方向に位置する前記基板上の第2接続点とをワイヤで接続する工程を含む発光装置の製造方法であって、
前記発光素子が載置された前記基板を準備する工程と、
キャピラリに挿通されたワイヤにイニシャルボールを形成し、前記イニシャルボールを前記発光素子上の前記第1接続点に当接してボール部を接続する第1接続工程と、
前記キャピラリを、前記第1接続点の上方の+Z方向に位置する第1点まで移動させる第1移動工程と、
前記キャピラリを、前記第1点から前記第2接続点と反対側の−X方向に位置する第2点まで移動させる第2移動工程と、
前記キャピラリを、前記第2点から、前記基板上の前記第2接続点の上方を通り超えて+X方向であって、かつ、+Z方向に位置する第3点まで移動する第3移動工程と、
前記キャピラリを、前記第3点から−X方向に位置する前記第2接続点まで移動して、前記ワイヤを前記第2接続点に接合する第2接続工程と、
前記ワイヤを封止する封止部材を形成する封止部材形成工程と、
を備える発光装置の製造方法。 - 前記第3点と前記第2接続点との上面視における距離は、30μm〜150μmである請求項1記載の発光装置の製造方法。
- 前記第2移動工程の後に、前記前記キャピラリを前記第2点の上方に位置する第2a点まで移動させる第2a移動工程と、
前記キャピラリを、前記第2a点から前記第2接続点と反対側の−X方向に位置する第2b点まで移動させる第2b移動工程と、
前記第3移動工程として、前記キャピラリを、前記第2b点から、前記基板上の前記第2接続点の上方を通り超えて+X方向に位置する第3点まで移動する第3移動工程と、
を備える、請求項1又は請求項2記載の発光装置の製造方法。
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