JP2018119923A - 力検出装置およびロボット - Google Patents

力検出装置およびロボット Download PDF

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Publication number
JP2018119923A
JP2018119923A JP2017013481A JP2017013481A JP2018119923A JP 2018119923 A JP2018119923 A JP 2018119923A JP 2017013481 A JP2017013481 A JP 2017013481A JP 2017013481 A JP2017013481 A JP 2017013481A JP 2018119923 A JP2018119923 A JP 2018119923A
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JP
Japan
Prior art keywords
force detection
detection device
force
axis
arm
Prior art date
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Pending
Application number
JP2017013481A
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English (en)
Japanese (ja)
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JP2018119923A5 (enExample
Inventor
河合　宏紀
Hiroki Kawai
宏紀 河合
義輝 西村
Yoshiteru Nishimura
義輝 西村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2017013481A priority Critical patent/JP2018119923A/ja
Priority to CN201810067000.1A priority patent/CN108362409A/zh
Priority to US15/879,935 priority patent/US10578500B2/en
Publication of JP2018119923A publication Critical patent/JP2018119923A/ja
Publication of JP2018119923A5 publication Critical patent/JP2018119923A5/ja
Priority to JP2021037081A priority patent/JP7022363B2/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J13/00—Controls for manipulators
    • B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
    • B25J13/085—Force or torque sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0061—Force sensors associated with industrial machines or actuators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
    • G01L5/166—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force using photoelectric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
    • G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/46—Sensing device

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Manipulator (AREA)
JP2017013481A 2017-01-27 2017-01-27 力検出装置およびロボット Pending JP2018119923A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2017013481A JP2018119923A (ja) 2017-01-27 2017-01-27 力検出装置およびロボット
CN201810067000.1A CN108362409A (zh) 2017-01-27 2018-01-23 力检测装置以及机器人
US15/879,935 US10578500B2 (en) 2017-01-27 2018-01-25 Force detecting device and robot
JP2021037081A JP7022363B2 (ja) 2017-01-27 2021-03-09 力検出装置およびロボットシステム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017013481A JP2018119923A (ja) 2017-01-27 2017-01-27 力検出装置およびロボット

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2021037081A Division JP7022363B2 (ja) 2017-01-27 2021-03-09 力検出装置およびロボットシステム

Publications (2)

Publication Number Publication Date
JP2018119923A true JP2018119923A (ja) 2018-08-02
JP2018119923A5 JP2018119923A5 (enExample) 2019-12-26

Family

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Family Applications (2)

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JP2017013481A Pending JP2018119923A (ja) 2017-01-27 2017-01-27 力検出装置およびロボット
JP2021037081A Active JP7022363B2 (ja) 2017-01-27 2021-03-09 力検出装置およびロボットシステム

Family Applications After (1)

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JP2021037081A Active JP7022363B2 (ja) 2017-01-27 2021-03-09 力検出装置およびロボットシステム

Country Status (3)

Country Link
US (1) US10578500B2 (enExample)
JP (2) JP2018119923A (enExample)
CN (1) CN108362409A (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6746517B2 (ja) * 2017-03-08 2020-08-26 日本電産コパル電子株式会社 力覚センサ
CN110274725A (zh) * 2019-01-17 2019-09-24 上海肇擎传感技术有限公司 一种基于石英振梁的六轴力传感器敏感结构
JP7207094B2 (ja) * 2019-03-29 2023-01-18 セイコーエプソン株式会社 水平多関節ロボット
JP2020163548A (ja) * 2019-03-29 2020-10-08 セイコーエプソン株式会社 水平多関節ロボットおよびロボットシステム
CN111129858A (zh) * 2019-12-28 2020-05-08 深圳市优必选科技股份有限公司 一种磁吸式连接系统、模型搭建方法及机器人
CN112077879B (zh) * 2020-08-29 2021-12-03 上海大学 一种基于仿人柔软指的转轴全工作域力学性能检测方法
CN112179553B (zh) * 2020-09-09 2021-06-22 西南交通大学 一种超声同步测量螺栓轴向力和剪切力的方法
CN114659697B (zh) * 2022-03-28 2023-06-23 浙江机电职业技术学院 一种基于电容传感器的柔性六维力传感器

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4640138A (en) * 1985-03-06 1987-02-03 Mts Systems Corporation Multiple axis load sensitive transducer
JPS6321530A (ja) * 1986-07-15 1988-01-29 Ricoh Co Ltd 力検出装置
JP2012137421A (ja) * 2010-12-27 2012-07-19 Fanuc Ltd ３軸力センサを用いて力制御をおこなうロボットの制御装置
JP2015090295A (ja) * 2013-11-05 2015-05-11 セイコーエプソン株式会社 力検出装置、ロボットおよび電子部品搬送装置
JP2016070824A (ja) * 2014-09-30 2016-05-09 ファナック株式会社 変位検出方式の６軸力センサ
JP2016161310A (ja) * 2015-02-27 2016-09-05 セイコーエプソン株式会社 力検出装置およびロボット

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1054824A (en) * 1975-09-23 1979-05-22 Bendix Corporation (The) Multi-axis load cell
US4138884A (en) * 1977-04-20 1979-02-13 The Bendix Corporation Multi-axis load cell
US4573362A (en) * 1984-07-09 1986-03-04 Eaton Corporation Multi-axis load transducer
US4836034A (en) * 1986-07-15 1989-06-06 Ricoh Company, Ltd. Force sensing apparatus
US4911023A (en) * 1986-07-15 1990-03-27 Ricoh Company, Ltd. Force sensing apparatus
US4821584A (en) * 1988-03-15 1989-04-18 The United States Of America As Represented By The United States Department Of Energy Piezoelectric film load cell robot collision detector
JPH0577151A (ja) * 1991-09-20 1993-03-30 Hitachi Ltd 多軸自由度装置
JPH07136904A (ja) * 1993-11-19 1995-05-30 Hitachi Metals Ltd バリ取りロボット制御方法
CH690865A5 (de) * 1996-05-09 2001-02-15 Kk Holding Ag Kraft- und Momentmessanordnung.
DE10034569B4 (de) * 2000-07-14 2004-02-12 Deutsches Zentrum für Luft- und Raumfahrt e.V. Einrichtung zum Erfassen von Relativbewegungen eines Objekts
WO2002057731A1 (en) * 2001-01-22 2002-07-25 K-Tech Devices Corp. Stress sensor
JP4203051B2 (ja) * 2005-06-28 2008-12-24 本田技研工業株式会社 力覚センサ
JP5875382B2 (ja) * 2011-02-15 2016-03-02 キヤノン株式会社 力覚センサ、ロボット装置、ロボットハンド及び検出装置
JP5821210B2 (ja) * 2011-02-22 2015-11-24 セイコーエプソン株式会社 水平多関節ロボット及び水平多関節ロボットの制御方法
JP2013101020A (ja) * 2011-11-08 2013-05-23 Seiko Epson Corp センサー素子、力検出装置およびロボット
JP5929271B2 (ja) * 2012-02-07 2016-06-01 セイコーエプソン株式会社 ロボットハンドおよびロボット
JP5895615B2 (ja) * 2012-03-09 2016-03-30 セイコーエプソン株式会社 センサーモジュール、力検出装置及びロボット
JP2015071214A (ja) 2013-10-04 2015-04-16 キヤノン株式会社 力覚センサ保護機構、エンドエフェクタ及びロボットアーム
US9705069B2 (en) * 2013-10-31 2017-07-11 Seiko Epson Corporation Sensor device, force detecting device, robot, electronic component conveying apparatus, electronic component inspecting apparatus, and component machining apparatus
CN104596675B (zh) * 2013-10-31 2019-05-14 精工爱普生株式会社 传感器元件、力检测装置、机器人、电子部件输送装置
CN110057484B (zh) * 2013-11-05 2021-05-04 精工爱普生株式会社 力检测装置、机器人以及电子部件输送装置
JP6252241B2 (ja) * 2014-02-27 2017-12-27 セイコーエプソン株式会社 力検出装置、およびロボット
JP2015184005A (ja) * 2014-03-20 2015-10-22 セイコーエプソン株式会社 力検出装置、およびロボット
JP6476730B2 (ja) * 2014-10-21 2019-03-06 セイコーエプソン株式会社 力検出装置及びロボット
CN105865670B (zh) * 2015-02-09 2020-09-25 精工爱普生株式会社 力检测装置以及机器人
JP6541449B2 (ja) * 2015-06-05 2019-07-10 キヤノン株式会社 振動型駆動装置及び医用システム
US9841329B2 (en) * 2015-06-08 2017-12-12 Pioner Engineering Company Strain gage based system and method for failure detection of a fluid film bearing
WO2017132696A1 (en) * 2016-01-28 2017-08-03 Transenterix Surgical, Inc. Force estimation using robotic manipulator force torque sensors

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4640138A (en) * 1985-03-06 1987-02-03 Mts Systems Corporation Multiple axis load sensitive transducer
JPS6321530A (ja) * 1986-07-15 1988-01-29 Ricoh Co Ltd 力検出装置
JP2012137421A (ja) * 2010-12-27 2012-07-19 Fanuc Ltd ３軸力センサを用いて力制御をおこなうロボットの制御装置
JP2015090295A (ja) * 2013-11-05 2015-05-11 セイコーエプソン株式会社 力検出装置、ロボットおよび電子部品搬送装置
JP2016070824A (ja) * 2014-09-30 2016-05-09 ファナック株式会社 変位検出方式の６軸力センサ
JP2016161310A (ja) * 2015-02-27 2016-09-05 セイコーエプソン株式会社 力検出装置およびロボット

Also Published As

Publication number Publication date
US20180217013A1 (en) 2018-08-02
CN108362409A (zh) 2018-08-03
JP7022363B2 (ja) 2022-02-18
US10578500B2 (en) 2020-03-03
JP2021096263A (ja) 2021-06-24

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