JP2018108892A5 - - Google Patents

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Publication number
JP2018108892A5
JP2018108892A5 JP2017227757A JP2017227757A JP2018108892A5 JP 2018108892 A5 JP2018108892 A5 JP 2018108892A5 JP 2017227757 A JP2017227757 A JP 2017227757A JP 2017227757 A JP2017227757 A JP 2017227757A JP 2018108892 A5 JP2018108892 A5 JP 2018108892A5
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JP
Japan
Prior art keywords
levitation
substrate
blocks
gap
levitation device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017227757A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018108892A (ja
Filing date
Publication date
Application filed filed Critical
Priority to TW106143470A priority Critical patent/TWI668173B/zh
Priority to KR1020170178373A priority patent/KR101990219B1/ko
Priority to CN201711444785.1A priority patent/CN108249159B/zh
Priority to US15/856,665 priority patent/US10421622B2/en
Publication of JP2018108892A publication Critical patent/JP2018108892A/ja
Publication of JP2018108892A5 publication Critical patent/JP2018108892A5/ja
Pending legal-status Critical Current

Links

JP2017227757A 2016-12-28 2017-11-28 浮上搬送装置および基板処理装置 Pending JP2018108892A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
TW106143470A TWI668173B (zh) 2016-12-28 2017-12-12 浮上搬送裝置及基板處理裝置
KR1020170178373A KR101990219B1 (ko) 2016-12-28 2017-12-22 부상 반송 장치 및 기판 처리 장치
CN201711444785.1A CN108249159B (zh) 2016-12-28 2017-12-27 浮起搬运装置以及基板处理装置
US15/856,665 US10421622B2 (en) 2016-12-28 2017-12-28 Floating conveyor and substrate processing apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016254564 2016-12-28
JP2016254564 2016-12-28

Publications (2)

Publication Number Publication Date
JP2018108892A JP2018108892A (ja) 2018-07-12
JP2018108892A5 true JP2018108892A5 (ko) 2019-10-10

Family

ID=62845087

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017227757A Pending JP2018108892A (ja) 2016-12-28 2017-11-28 浮上搬送装置および基板処理装置

Country Status (3)

Country Link
JP (1) JP2018108892A (ko)
KR (1) KR101990219B1 (ko)
TW (1) TWI668173B (ko)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101195628B1 (ko) * 2004-04-14 2012-10-30 코레플로우 사이언티픽 솔루션스 리미티드 편평한 물체의 대향면상에 광학 장치를 포커싱하는 방법
KR20100123196A (ko) * 2009-05-14 2010-11-24 엘지디스플레이 주식회사 기판 표면 처리장치 및 그 처리방법
JP2011084352A (ja) 2009-10-14 2011-04-28 Myotoku Ltd ワーク浮上装置
JP2012096920A (ja) * 2010-11-05 2012-05-24 Hitachi High-Technologies Corp ガラス基板欠陥検査装置及びガラス基板欠陥検査方法並びにガラス基板欠陥検査システム
JP2014047020A (ja) 2012-08-31 2014-03-17 Tanken Seal Seiko Co Ltd 浮上装置
JP6315547B2 (ja) * 2013-12-17 2018-04-25 芝浦メカトロニクス株式会社 基板処理装置
JP6258892B2 (ja) * 2014-05-13 2018-01-10 芝浦メカトロニクス株式会社 基板処理装置及び基板処理方法
JP2016161007A (ja) * 2015-02-27 2016-09-05 株式会社日本製鋼所 ガス浮上ワーク支持装置および非接触ワーク支持方法

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