200927625 九、發明說明： - 【發明所屬之技術領域】 本發明是有關於一種輪送裝置，且特別是有關於可進 行非接觸式輸送的輸送裝置r 【先前技術】 現今工業上所使用之輸送裝置的種類眾多，例如：皮 帶式輸送機、滾輪式輸送機或鋼索式輸送機等。 © 以皮帶式輸送機來舉何說明’皮帶式輸送機係藉由皮 帶來傳動輸送物件，由於皮帶式輸送機無距離上的限制， 且可吸收傳輸過程中的振動，而無需潤滑來幫助傳動，並 可進多軸傳動。另外，皮帶式輸送機的構造簡單，應用範 _圍_廣泛._。 又’以滚輪式輸送機來舉例說明，滚輪式輸送機係藉 由複數個滾輪來傳動輸送物件，其具有低摩擦的特性，可 快速地傳送物件至特定地點。 Ο 然而，皮帶式輸送機和滚輪式輸送機僅藉由皮帶與物 件之間的摩擦力來進行傳動，因而物件在傳輸過程中可能 發生偏移或滑動的情形，故不適合需高度準確定位的傳輸 應用上。且由於物件在傳輸過程中係直接與輸送機接觸， 因而容易刮傷物件（例如：晶圓或玻璃基板）的表面。再者， 皮帶式輸送機和滾輪式輸送機容易在傳輸過程中產生粉塵 粒子因而不適於在例如無塵室等高潔淨度的空間來輸送 200927625 【發明内容】 因此本發明之一方面係在於提供一種輸送裝置，藉以 進行非接觸式的輸送過程’以避免物件在輪送過程中發生 刮傷或損害的情形。 • 本發明之又一方面係在於提供一種輸送裝置，藉以減 少在輸送過程中的落塵或微粒，以維持良好的物件或空間 潔淨度。 工 本發明之又一方面係在於提供一種輸送裝置· ，藉以平 © 穩且精確地進行輸送’因而方便在輸送過程中對物件進行 其他作業。 根據本發明之實施例，本發明之輸送裝置係用以輸送 物件，輸送裝置至少包括有輸送基板、複數個電極及複數 個喷氣孔。此些電極係排列設置於輸送基板上，其中此些 電極係分別以一預定週期地來進行一電性導通動作，以對 應產生一靜電吸引力來吸引物件朝一預定方向移動。此些 噴軋孔係開設於輸送基板上，用以對物件進行一喷氣動 〇 作’以使物件與輸送基板之間保持一預定距離。 又’根據本發明之.實施例’上述之此些電極具有複數 個第一電極、複數個第二電極及複數個第三電極，其相互 父錯地排_列設置於該輸送基板上β 因此，本發明之輸送裝置可進行非接觸式的物件輸 送，以避免物件在輸送過程中發生刮傷或損害的情形，並 可減少產生落塵或微粒。另外，由於本發明之輸送裝置可 同時具有靜電吸力和氣浮推力，因而可大幅提升輸送穩定 度、精確度及定位性，藉以方便在輸送過程中對物件進行 200927625 其他作業。 【實施方式】 請參照第1圖和第2圖，第1圖係繪示依照本發明之 第一實施例之輸送裝置的俯視示意圖，第2圖係繪示依照 本發明第一實施例的輸送裝置的側視示意圖。本實施例之 輸送裝置100係用以輸送物件200，較佳為質輕、平薄型、 或大面積薄型的物件200,例如為：太陽能電池基板、半導 φ 體晶圓或玻璃基板等。本實施例之輸送裝置100包括有基 座110、輸送基板120、複數個第一電極130、複數個第二 電極140、複數個第三電極150、複數個喷氣孔160及側電 極組170。輸送基板120係設置於基座110上，第一電極 130、第二電極140、第三電極150、喷氣孔160及側電極 組170係設置於輸送基板120上，第一電極130、第二電極 140及第三電極150係分別交錯排列設置於輸送基板120 上，用以產生一靜電吸引力來吸引物件200在輸送基板120 ❹ 朝一預定方向移動，因而可用以輸送物件200。喷氣孔160 係用以對物件200進行喷氣，藉以對物件200作用一氣壓 推力，使物件200與輸送基板120之間可保持一預定距離 d，側電極組170係設置於輸送基板120的兩側，用以穩定 物件200在基板120上的輸送。因此，本實施例之输送裝 置100可對物件200進行非接觸式的輸送，以避免物件200 的表面在輸送過程中發生刮傷的情形。 如第1圖和第2圖所示，本實施例之輸送基板120可 設計為長距離或短距離，其可根據實際的輸送需求而做變 200927625 120可以係直接以絕緣材質所製成，或者可 更。輸送基板 例如係以金屬材料所製成’再形成絕緣材料於輸送基板12〇 的表面上。本實施例之第一電極13〇、第二電極14〇及第三 電極150減交錯地排歹,j設置於輸送基板12〇上，並係分 別以一預定週期地來進行一電性導通動作。在本實施例 中’此些電極130、140及15〇例如係藉由塗佈導電材料（例 如金屬材料）來形成於輸送基板12〇上。本實施例之第一電 極130、第二電極140及第三電極15〇係分別電性連接週期200927625 IX. Description of the Invention: - Technical Field of the Invention The present invention relates to a wheel transfer device, and more particularly to a conveyor device that can perform non-contact conveyance. [Prior Art] Transportation used in the industry today There are many types of devices, such as belt conveyors, roller conveyors or steel cable conveyors. © What is the description of the belt conveyor? The belt conveyor conveys the object by means of the belt conveyor. Since the belt conveyor has no distance limitation, it can absorb the vibration during transmission without lubrication to help the transmission. And can enter multi-axis transmission. In addition, the construction of the belt conveyor is simple, and the application range is _ extensive. Further, by way of a roller conveyor, the roller conveyor transmits and transports articles by a plurality of rollers, which have low friction characteristics and can quickly transfer articles to specific locations. Ο However, the belt conveyor and the roller conveyor are only driven by the friction between the belt and the object, so the object may be displaced or slipped during the transmission, so it is not suitable for transmission with high accuracy. Application. And since the object is directly in contact with the conveyor during transportation, it is easy to scratch the surface of the object (for example, a wafer or a glass substrate). Furthermore, belt conveyors and roller conveyors are prone to generate dust particles during transportation and are therefore unsuitable for transporting in high cleanliness spaces such as clean rooms. 200927625 [Invention] It is therefore an aspect of the present invention to provide A conveying device for performing a non-contact conveying process 'to avoid scratching or damage of articles during the rolling process. • Yet another aspect of the present invention is to provide a delivery device that reduces dust or particulates during transport to maintain good object or space cleanliness. Yet another aspect of the present invention is to provide a delivery device that allows for smooth and precise delivery of the article' thereby facilitating other operations on the article during transport. According to an embodiment of the present invention, the transport apparatus of the present invention is for transporting an object, and the transport apparatus includes at least a transport substrate, a plurality of electrodes, and a plurality of gas jet holes. The electrodes are arranged on the transport substrate, wherein the electrodes are electrically turned on for a predetermined period of time to generate an electrostatic attraction to attract the object to move in a predetermined direction. The spray holes are formed on the transport substrate for performing a jet motion on the object to maintain a predetermined distance between the object and the transport substrate. Further, in the embodiment of the present invention, the electrodes have a plurality of first electrodes, a plurality of second electrodes, and a plurality of third electrodes, which are arranged in a row on the transport substrate. The conveying device of the present invention can perform non-contact conveying of articles to avoid scratching or damage of the articles during transportation, and can reduce the generation of dust or particles. In addition, since the conveying device of the present invention can simultaneously have electrostatic suction force and air-floating thrust, the conveying stability, accuracy and positioning can be greatly improved, thereby facilitating other operations of the article 200927625 during the conveying process. [Embodiment] Please refer to FIG. 1 and FIG. 2, FIG. 1 is a schematic plan view of a conveying apparatus according to a first embodiment of the present invention, and FIG. 2 is a diagram showing conveying according to a first embodiment of the present invention. A side view of the device. The transport device 100 of the present embodiment is for transporting the object 200, preferably a lightweight, flat, or large-area article 200, such as a solar cell substrate, a semi-conducting φ body wafer, or a glass substrate. The transport device 100 of the present embodiment includes a base 110, a transport substrate 120, a plurality of first electrodes 130, a plurality of second electrodes 140, a plurality of third electrodes 150, a plurality of gas jet holes 160, and a side electrode group 170. The first substrate 130, the second electrode 140, the third electrode 150, the gas jet hole 160 and the side electrode group 170 are disposed on the transport substrate 120, and the first electrode 130 and the second electrode are disposed on the susceptor 110. The 140 and the third electrode 150 are respectively arranged on the transport substrate 120 in a staggered manner to generate an electrostatic attraction force to attract the object 200 to move in a predetermined direction on the transport substrate 120, and thus can be used to transport the object 200. The air vent 160 is used to eject the object 200 to apply a pneumatic thrust to the object 200 to maintain a predetermined distance d between the object 200 and the transport substrate 120. The side electrode assembly 170 is disposed on both sides of the transport substrate 120. For stabilizing the transport of the object 200 on the substrate 120. Therefore, the conveying device 100 of the present embodiment can perform non-contact conveyance of the article 200 to prevent the surface of the article 200 from being scratched during conveyance. As shown in FIG. 1 and FIG. 2, the transport substrate 120 of the present embodiment can be designed as a long distance or a short distance, which can be changed according to the actual transport demand. 200927625 120 can be directly made of insulating material, or Can be more. The transport substrate is made, for example, of a metal material, and the insulating material is formed on the surface of the transport substrate 12A. The first electrode 13A, the second electrode 14A, and the third electrode 150 of the embodiment are arranged in a staggered manner, and are disposed on the transport substrate 12A, and respectively perform an electrical conduction operation for a predetermined period. . In the present embodiment, the electrodes 130, 140 and 15 are formed on the transport substrate 12 by, for example, coating a conductive material such as a metal material. The first electrode 130, the second electrode 140, and the third electrode 15 of the embodiment are respectively electrically connected to each other.
❹ 不同的操作電壓，以進行電性導通動作。第一電極13〇、第 一電極140及第二電極150可分別依序地呈現不同的電壓 位準（正位準、零位準及負位準），藉以形成三相電壓，以感 應出極性相反的靜電，因而產生靜電吸引力。在本實施例 中此些電極130、140及15〇的電壓波形週期的相位例如係 相互相差120度，而形成三相電壓。舉例而言，當此些電 極130、140及150位於區間a時，第一電極13〇係呈正電 壓，第二電極140係呈負電壓，第三電極15〇係呈零位準； 而當此些電極130、140及150位於區間b時，第一電極 130係呈正電壓，第二電極14〇係呈零位準，第三電極15〇 係呈負電壓。因此，當此些電極丨3〇、140及150進行電性 導通動作，此些電極130、140及150可朝一預定方向來依 序變化電壓的位準藉以形成朝此預定方向的靜電吸引力。 如第1圖和第2圖所示，此些電極13〇、140及150上 可形成絕緣層180,而絕緣層180例如係黏貼薄絕緣板或鍍 一絕緣膜於此些電極130、140及150上，以避免物件200 直接暴露於此些電極130、140.及.150上，減少靜電對物件 200927625 200造成傷害。當第一電極130、第二電極140及第三電極 150進行電性導通（接上電壓）時，此些電極130、140及150 的表面上即依序交錯地形成極性相反的電場，進而產生靜 電吸引力，使物件200吸附於輸送基板120上。再者，第 一電極130、第二電極140及第三電極150係電性連接於一 控制單元（例如係一電腦系統或可程式控制晶片），以控制此 些電極130、140及150分別依序地電性導通，因而可使靜 電吸引力逐漸地朝預定方向來形成輸送基板120上，進而 ® 吸引物件200朝預定方向來行進。 值得注意的是，在本實施例中，此些電極130、140及 150係形成三相電壓變化來產生靜電吸引力，然不限於此， 熟悉該項技術領域者可選擇使二相或多相電壓變化來產生 靜電吸引力。 如第1圖和第2圖所示，本實施例之喷氣孔160係開 設於輸送基板120上，噴氣孔160係例如連接於一電動打 氣泵浦（未繪示），以使喷氣孔160可朝物件200噴出氣體 φ (例如為惰性氣體），因而對物件200作用一氣壓推力，故當 物件200在輸送基板120上進行輸送時，物件200可藉由 第一電極130、第二電極140及第三電極150所產生的靜電 吸引力來吸附於輸送基板120上，同時，並藉由喷氣孔160 所作用的氣壓推力來使物件200與輸送基板120之間保持 預定距離d。此些噴氣孔160設有缓衝空間161，用以使氣 體先通入緩衝空間161中，再由喷氣孔160來喷出，藉以 緩和氣體的壓力，避免氣壓過大而損壞輸送基板120或物 件 200 〇 9 200927625 本實施例之侧電極組170係設置於輸送基板120的兩 侧，用以在輸送基板120的兩侧進一步形成靜電吸附力， 藉以確保物件200在預定的軌道上移動，而不致脫離輸送 基板120,並可提升物件200在輸送基板120上之輸送過程 中的穩定度。 值得注意的是，可根據物件200的重量來對應調整靜 電吸引力和氣壓推力的大小，藉以使物件200可在垂直方 向上形成合力平衡，並可與輸送基板120之間保持預定距 © 離d。 請參照第3A圖和第3B圖，其繪示依照本發明之第一 實施例之輸送裝置的側視示意圖。當本實施例之輸送裝置 100輸送物件200時，物件200係靜電吸附於輸送基板120, 並藉由喷氣孔160的氣壓推力，而與輸送基板120之間保 持預定距離d，因而形成非接觸式的輸送。當物件200在輸 送基板120上進行輸送時，此時，對應於物件200下方的 第一電極130、第二電極140及第三電極150可靜電吸引物 ❹ 件200朝預定方向移動。 因此，本實施例之輸送裝置100可藉由靜電吸引力和 氣壓推力來進行形成非接觸式的物件輸送，以避免物件200 在輸送過程中發生物件200之表面遭刮傷的情形，且可減 少產生落塵或微粒，因而方便保持物件200潔淨度。另外， 由於物件200係靜電吸附於輸送基板120上，故可平穩地 進行輸送物件200,以避免發生物件擾動和搖晃的情形，因 而可方便在輸送過程中對物件200進行其他作業。再者， 由於物件200係藉由靜電吸力來致動，因而可藉由控制此 200927625 些電極130、140及150的電性導通動作來致動物件200的 行進，而具有高度的輸送精確度和定位性。 請參照第4圖，其繪示依照本發明之第二實施例之輸 送裝置的側視示意圖。以下僅就本實施例與第一實施例之 相異處進行說明，關於相似處在此不再贅述。相較於第一 實施例，第二實施例之輸送裝置1〇〇之喷氣孔36〇係對應 於物件200來進行局部喷氣動作，意即僅位於物件2〇〇之 正下方的喷氣孔360才具有喷氣動作，以使物件2〇〇與輸 © 送基板120之間保持預定距離d，其中噴氣孔360可藉由控 制單元（例如係一電腦系統或可程式控制晶片）來控制喷氣 動作。因此，第二實施例之輸送裝置10〇可進一步節省氣 體的使用量’並減少輸送基板12〇上不必要的氣流擾動。 請參照第5圖’其繪示依照本發明之第三實施例之輸 送裝置的側視示意圖。以下僅就本實施例與第一實施例之 相異處進行說明，關於相似處在此不再贅述。相較於第一 實施例’第三實施例之輸送基板420係以透氣陶瓷材料製 〇 成’藉以形成透氣陶竟輸送基板，由於透氣陶瓷材料具有 透氣性’因而自然地在輸送基板420的表面上形成微小的 噴氣孔460 »因此，當輸送物件200時，可同時藉由靜電吸 引力和氣壓推力來進行非接觸式的物件輸送。 由上述本發明的實施例可知，本發明之輸送裝置可進 行非接觸式的物件輸送，以避免物件在輸送過程中發生刮 傷或損害的情形’並可減少落塵或微粒，以維持良好的潔 淨度°另外’本發明之輸送裝置可平穩地進行輸送物件， 因而方便在輸送過程中對物件進行其他作業β 11 200927625 雖然本發明已以一較佳實施例揭露如上，然其並非用 •以限定本發明，任何熟習此技藝者，在不脫離本發明之精 神和範圍内，當可作各種之更動與潤飾，因此本發明之保 護範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 為讓本發明之上述和其他目的、特徵、優點與實施例 月b更明顯易懂，所附圖式之詳細說明如下： ® 第1圖係繪示依照本發明之第一實施例之輸送裝置的 俯視不意圖。 第2圖係繪示依照本發明之第一實施例之輸送裝置的 侧視示意圖。 第3圖係繪不依照本發明之第一實施例之输送裝置的 側視示意圖。 第4圖係繪示依照本發明之第二實施例之輸送裝置的 側視示意圖。 〇 第5圖係繪示依照本發明之第三實施例之輸送裝置的 侧視示意圖。 A、B :區間 110 :基座 130 :第一電極 150 :第三電極 161 :緩衝空間 【主要元件符號說明】 d:預定距離 100 :輸送裝置 120 :輸送基板 140 :第二電極 160 :喷氣孔 12 200927625 ❹ 170 :側電極組 180 :絕緣層 200 :物件 360 :喷氣孔 420 :輸送基板 460 :喷氣孔 13❹ Different operating voltages for electrical conduction. The first electrode 13A, the first electrode 140 and the second electrode 150 can respectively present different voltage levels (positive level, zero level and negative level), respectively, thereby forming a three-phase voltage to induce polarity The opposite is static, thus creating an electrostatic attraction. In the present embodiment, the phases of the voltage waveform periods of the electrodes 130, 140, and 15 are, for example, 120 degrees out of phase with each other to form a three-phase voltage. For example, when the electrodes 130, 140, and 150 are located in the interval a, the first electrode 13 is a positive voltage, the second electrode 140 is a negative voltage, and the third electrode 15 is at a zero level; When the electrodes 130, 140, and 150 are located in the interval b, the first electrode 130 has a positive voltage, the second electrode 14 has a zero level, and the third electrode 15 has a negative voltage. Therefore, when the electrodes 〇3, 140, and 150 are electrically turned on, the electrodes 130, 140, and 150 can sequentially change the level of the voltage toward a predetermined direction to form an electrostatic attraction toward the predetermined direction. As shown in FIG. 1 and FIG. 2, the insulating layers 180 may be formed on the electrodes 13A, 140, and 150, and the insulating layer 180 may be adhered to the electrodes 130, 140, for example, by bonding a thin insulating plate or an insulating film. 150, to prevent the object 200 from being directly exposed to the electrodes 130, 140. and .150, reducing static damage to the object 200927625 200. When the first electrode 130, the second electrode 140, and the third electrode 150 are electrically connected (voltage is connected), the surfaces of the electrodes 130, 140, and 150 are sequentially alternately formed with electric fields of opposite polarities, thereby generating The electrostatic attraction causes the article 200 to be adsorbed on the transport substrate 120. Furthermore, the first electrode 130, the second electrode 140, and the third electrode 150 are electrically connected to a control unit (for example, a computer system or a programmable control chip) to control the electrodes 130, 140, and 150, respectively. The electrical conduction is sequentially conducted, so that the electrostatic attractive force is gradually formed on the transport substrate 120 in a predetermined direction, and further, the attracting object 200 travels in a predetermined direction. It should be noted that, in this embodiment, the electrodes 130, 140, and 150 form a three-phase voltage change to generate electrostatic attraction, but are not limited thereto, and those skilled in the art may choose to make two-phase or multi-phase. The voltage changes to create an electrostatic attraction. As shown in FIG. 1 and FIG. 2, the air injection hole 160 of the embodiment is formed on the transport substrate 120, and the air injection hole 160 is connected to, for example, an electric air pump (not shown), so that the air injection hole 160 can be The gas φ (for example, an inert gas) is ejected toward the object 200, and thus the air pressure is applied to the object 200. Therefore, when the object 200 is transported on the transport substrate 120, the object 200 can pass through the first electrode 130 and the second electrode 140. The electrostatic attraction force generated by the third electrode 150 is adsorbed on the transport substrate 120 while maintaining a predetermined distance d between the object 200 and the transport substrate 120 by the air pressure thrust acting by the gas jet hole 160. The air vents 160 are provided with a buffer space 161 for allowing gas to pass into the buffer space 161 and then ejected by the gas vent 160 to relieve the pressure of the gas and prevent the air pressure from being excessively damaged to damage the transport substrate 120 or the object 200. 〇9 200927625 The side electrode group 170 of the present embodiment is disposed on both sides of the transport substrate 120 for further forming electrostatic adsorption force on both sides of the transport substrate 120, thereby ensuring that the object 200 moves on a predetermined track without being detached. The substrate 120 is transported, and the stability of the article 200 during transport on the transport substrate 120 can be improved. It should be noted that the electrostatic attraction force and the air pressure thrust can be adjusted according to the weight of the object 200, so that the object 200 can form a resultant force balance in the vertical direction and can maintain a predetermined distance from the transport substrate 120. . Referring to Figures 3A and 3B, a side view of a delivery device in accordance with a first embodiment of the present invention is shown. When the transport device 100 of the present embodiment transports the object 200, the object 200 is electrostatically adsorbed on the transport substrate 120, and is maintained at a predetermined distance d from the transport substrate 120 by the air pressure thrust of the air vent 160, thereby forming a non-contact type. Delivery. When the object 200 is transported on the transport substrate 120, at this time, the first electrode 130, the second electrode 140, and the third electrode 150 corresponding to the lower portion of the object 200 can move the electrostatic attracting member 200 in a predetermined direction. Therefore, the conveying device 100 of the embodiment can perform the non-contact object conveying by the electrostatic attraction force and the air pressure thrust, so as to prevent the object 200 from being scratched on the surface of the object 200 during the conveying process, and can be reduced. Dust or particles are generated, thereby facilitating the maintenance of the cleanliness of the article 200. In addition, since the object 200 is electrostatically adsorbed on the transport substrate 120, the object 200 can be smoothly transported to avoid the occurrence of object disturbance and shaking, so that it is convenient to perform other operations on the object 200 during transport. Moreover, since the object 200 is actuated by electrostatic attraction, the movement of the animal member 200 can be controlled by controlling the electrical conduction of the electrodes 121, 140 and 150 of the 200927625, and the delivery accuracy is high. Positioning. Referring to Figure 4, there is shown a side view of a delivery device in accordance with a second embodiment of the present invention. Only the differences between the embodiment and the first embodiment will be described below, and the details are not described herein again. Compared with the first embodiment, the air injection hole 36 of the conveying device 1 of the second embodiment corresponds to the object 200 for performing a partial jet action, that is, only the gas injection hole 360 directly below the object 2 is There is a jet action to maintain a predetermined distance d between the object 2 and the substrate 120, wherein the gas jet 360 can control the jet action by a control unit, such as a computer system or a programmable wafer. Therefore, the conveying device 10 of the second embodiment can further save the amount of use of the gas 'and reduce unnecessary airflow disturbance on the conveying substrate 12'. Referring to Figure 5, there is shown a side view of a delivery device in accordance with a third embodiment of the present invention. Only the differences between the embodiment and the first embodiment will be described below, and the details are not described herein again. Compared with the first embodiment, the transport substrate 420 of the third embodiment is formed of a gas permeable ceramic material to form a permeable ceramic substrate, and the gas permeable ceramic material has a gas permeability, so that the surface of the substrate 420 is naturally transported. A minute air vent 460 is formed thereon. Therefore, when the object 200 is transported, non-contact object transport can be performed by both electrostatic attraction and air pressure thrust. It can be seen from the above embodiments of the present invention that the conveying device of the present invention can perform non-contact conveying of articles to avoid scratching or damage of the articles during transportation, and can reduce dust or particles to maintain good cleanliness. In addition, the conveying device of the present invention can smoothly transport the articles, thereby facilitating other operations on the articles during the transportation process. [beta] 11 200927625 Although the present invention has been disclosed above in a preferred embodiment, it is not limited to In the present invention, it is to be understood that the scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS In order to make the above and other objects, features, advantages and embodiments of the present invention more obvious, the detailed description of the drawings is as follows: ® Figure 1 shows the first aspect of the present invention. The top view of the delivery device of an embodiment is not intended. Fig. 2 is a side elevational view showing the conveying apparatus in accordance with the first embodiment of the present invention. Fig. 3 is a side elevational view showing the conveying apparatus not according to the first embodiment of the present invention. Figure 4 is a side elevational view showing the delivery device in accordance with a second embodiment of the present invention. Figure 5 is a side elevational view showing a conveying apparatus in accordance with a third embodiment of the present invention. A, B: section 110: pedestal 130: first electrode 150: third electrode 161: buffer space [main element symbol description] d: predetermined distance 100: conveying device 120: conveying substrate 140: second electrode 160: fumarole 12 200927625 ❹ 170 : side electrode group 180 : insulating layer 200 : object 360 : air vent 420 : transport substrate 460 : air vent 13