JP2018078215A - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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Abstract
Description
以下、図面を参照しながら本実施の形態の半導体装置の構造について説明する。
図1〜図5は、本実施の形態の半導体装置の構成を示す断面図または平面図である。図1〜図3および図5は、断面図であり、図4は、平面図である。
次いで、図8〜図22を参照しながら、本実施の形態の半導体装置の製造方法を説明するとともに、その構成を明確にする。図8〜図22は、本実施の形態の半導体装置の製造工程を示す断面図である。
上記実施の形態1においては、プラグPSUB、P1を、CVD−W膜/CVD−TiN膜/CVD−Ti膜/PVD−Ti膜よりなる積層膜で構成したが、CVD−W膜/CVD−TiN膜/PVD−Ti膜で構成してもよい。
図23は、本実施の形態の半導体装置の構成を示す断面図である。なお、プラグPSUB、P1以外の構成は、実施の形態1(図1、図4、図5)と同様であるため、その説明を省略する。
本実施の形態の半導体装置の形成工程について、プラグPSUB、P1の形成工程以外の工程は、実施の形態1(図8〜図22参照)と同様であるため、その説明を省略する。
上記実施の形態1においては、プラグPSUB、P1を、CVD−W膜/CVD−TiN膜/CVD−Ti膜/PVD−Ti膜よりなる積層膜で構成したが、CVD−W膜/CVD−TiN膜/CVD−Ti膜/PVD−Co膜よりなる積層膜で構成してもよい。
図24は、本実施の形態の半導体装置の構成を示す断面図である。なお、プラグPSUB、P1以外の構成は、実施の形態1(図1、図4、図5)と同様であるため、その説明を省略する。
本実施の形態の半導体装置の形成工程について、プラグPSUB、P1の形成工程以外の工程は、実施の形態1(図8〜図22参照)と同様であるため、その説明を省略する。
2A 第2素子形成領域
3A 給電領域
BC ボディコンタクト領域
BM1 第1バリアメタル膜
BM2 第2バリアメタル膜
BM3 第3バリアメタル膜
BOX 絶縁層
C1 コンタクトホール
DR ドレイン領域
DT 深溝
DT2 深溝
EP エピタキシャル層
GE ゲート電極
GI ゲート絶縁膜
IL1 層間絶縁膜
IL1a 絶縁膜
IL1b 絶縁膜
IL2 層間絶縁膜
IL3 層間絶縁膜
M 金属膜
M1 配線
M2 配線
NBL n型エピタキシャル膜
NM 低濃度n型半導体領域
NR 高濃度n型半導体領域
NW n型ウエル領域
P1 プラグ
P2 プラグ
PA p型の不純物領域
PDR p型ドリフト領域
PEP1 p型のエピタキシャル層
PEP2 p型のエピタキシャル層
PM 低濃度p型半導体領域
PR 高濃度p型半導体領域
PSUB プラグ
PW p型ウエル領域
S 支持基板
SIL 金属シリサイド層
SP 空隙
SR ソース領域
STI 絶縁領域
STId ドレイン絶縁領域
SW 側壁絶縁膜
Claims (20)
- 第1領域、第2領域、第3領域を有する基板と、
前記第1領域に形成された第1素子と、
前記第2領域に形成された第2素子と、
前記第3領域に設けられた第1接続部と、
前記第2領域に設けられた第2接続部と、を有し、
前記第1接続部は、前記基板まで到達する第1溝内の第1導電体よりなり、
前記第2接続部は、前記第2素子の構成部まで到達する第2溝内の第2導電体よりなり、
前記第1溝のアスペクト比は、前記第2溝のアスペクト比より大きく、
前記第1導電体は、前記第1溝の底面および側壁に形成された第1導電性膜と、前記第1導電性膜上に形成された第2導電性膜と、前記第2導電性膜上に形成された第3導電性膜と、前記第3導電性膜上に、前記第1溝の内部を埋め込むように形成された第4導電性膜とを有し、
前記第2導電体は、前記第2溝の底面および側壁に形成された前記第1導電性膜と、前記第1導電性膜上に形成された前記第2導電性膜と、前記第2導電性膜上に形成された前記第3導電性膜と、前記第3導電性膜上に、前記第2溝の内部を埋め込むように形成された前記第4導電性膜とを有し、
前記第1導電性膜は、物理気相成長法により形成された第1金属よりなる膜である、半導体装置。 - 請求項1記載の半導体装置において、
前記第2導電性膜は、化学気相成長法により形成された前記第1金属よりなる膜である、半導体装置。 - 請求項2記載の半導体装置において、
前記第3導電性膜は、化学気相成長法により形成された前記第1金属の化合物膜である、半導体装置。 - 請求項1記載の半導体装置において、
前記第1溝の底面には、前記基板と前記第1金属との化合物膜が形成されている、半導体装置。 - 請求項1記載の半導体装置において、
前記第1溝のアスペクト比は、15以上である、半導体装置。 - 請求項5記載の半導体装置において、
前記第1溝の深さは、12μm以上である、半導体装置。 - 請求項6記載の半導体装置において、
前記第1溝の幅は、0.8μm以下である、半導体装置。 - 請求項1記載の半導体装置において、
前記第1溝の平面形状は、ライン状であり、前記第2溝の平面形状は、略円形である、半導体装置。 - 請求項1記載の半導体装置において、
前記第1導電性膜は、前記第2導電性膜より、Cl(塩素)の含有割合が小さい、半導体装置。 - 請求項1記載の半導体装置において、
前記第1導電性膜は、前記第2導電性膜より、C(炭素)の含有割合が小さい、半導体装置。 - 請求項1記載の半導体装置において、
前記基板は、支持基板と、前記支持基板上に形成されたエピタキシャル層とを有する、半導体装置。 - 請求項11記載の半導体装置において、
前記基板は、前記第1素子の下部において、前記エピタキシャル層中に、埋め込み拡散層を有する、半導体装置。 - (a)基板の第1領域に、第1素子を形成し、前記基板の第2領域に第2素子を形成する工程、
(b)前記基板の第3領域および前記基板の第2領域の外周領域に、第1溝を形成する工程、
(c)前記第1素子および前記第2素子上に、層間絶縁膜を形成する工程、
(d)前記第3領域の前記第1溝上および前記第1溝内部の前記層間絶縁膜を除去することにより、前記基板まで到達する第2溝を形成する工程、
(e)前記第2領域の内部領域に、前記第2素子の構成部まで到達する第3溝を形成する工程、
(f)前記第2溝および前記第3溝の内部に、導電体を形成する工程、
を有し、
前記(f)工程は、
(f1)前記第2溝および前記第3溝の底面および側壁に、第1導電性膜を形成する工程、
(f2)前記第1導電性膜上に、第2導電性膜を形成する工程、
(f3)前記第2導電性膜上に、第3導電性膜を形成する工程、
(f4)前記第3導電性膜上に、前記第2溝および前記第3溝の内部を埋め込むように、第4導電性膜を形成する工程、
を有し、
前記(f2)工程は、物理気相成長法を用いて、第1金属よりなる前記第1導電性膜を形成する工程である、半導体装置の製造方法。 - 請求項13記載の半導体装置の製造方法において、
前記(b)工程の後、前記第1溝の底部の前記基板に、不純物イオンを注入する工程を有する、半導体装置の製造方法。 - 請求項13記載の半導体装置の製造方法において、
前記(c)工程において、前記第1溝の内部に空隙を有する前記層間絶縁膜が埋め込まれる、半導体装置の製造方法。 - 請求項13記載の半導体装置の製造方法において、
前記第2導電性膜は、化学気相成長法により形成された前記第1金属よりなる膜であり、
前記第3導電性膜は、化学気相成長法により形成された前記第1金属の化合物膜であり、
前記第2溝の底面には、前記基板と前記第1金属との化合物膜が形成される、半導体装置の製造方法。 - 請求項13記載の半導体装置の製造方法において、
前記第2溝のアスペクト比は、15以上であり、前記第2溝の深さは、12μm以上であり、前記第2溝の幅は、0.8μm以下である、半導体装置の製造方法。 - 請求項13記載の半導体装置の製造方法において、
前記第2溝の平面形状は、ライン状であり、前記第3溝の平面形状は、略円形である、半導体装置の製造方法。 - 請求項13記載の半導体装置の製造方法において、
前記基板は、支持基板と、前記支持基板上に形成されたエピタキシャル層とを有する、半導体装置の製造方法。 - 第1領域、第2領域、第3領域を有する基板と、
前記第1領域に形成された第1素子と、
前記第2領域に形成された第2素子と、
前記第3領域に設けられた第1接続部と、
前記第2領域に設けられた第2接続部と、を有し、
前記第1接続部は、前記基板まで到達する第1溝内の第1導電体よりなり、
前記第2接続部は、前記第2素子の構成部まで到達する第2溝内の第2導電体よりなり、
前記第1溝のアスペクト比は、前記第2溝のアスペクト比より大きく、
前記第1導電体は、前記第1溝の底面および側壁に形成された第1導電性膜と、前記第1導電性膜上に形成された第2導電性膜と、前記第2導電性膜上に、前記第1溝の内部を埋め込むように形成された第3導電性膜とを有し、
前記第2導電体は、前記第2溝の底面および側壁に形成された前記第1導電性膜と、前記第1導電性膜上に形成された前記第2導電性膜と、前記第2導電性膜上に、前記第2溝の内部を埋め込むように形成された前記第3導電性膜とを有し、
前記第1導電性膜は、物理気相成長法により形成された第1金属よりなる膜である、半導体装置。
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