JP2017535821A5 - - Google Patents

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Publication number
JP2017535821A5
JP2017535821A5 JP2017528794A JP2017528794A JP2017535821A5 JP 2017535821 A5 JP2017535821 A5 JP 2017535821A5 JP 2017528794 A JP2017528794 A JP 2017528794A JP 2017528794 A JP2017528794 A JP 2017528794A JP 2017535821 A5 JP2017535821 A5 JP 2017535821A5
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JP
Japan
Prior art keywords
light
scanning
substrate wafer
light spot
write head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017528794A
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English (en)
Japanese (ja)
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JP2017535821A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/EP2015/059143 external-priority patent/WO2016082941A1/en
Publication of JP2017535821A publication Critical patent/JP2017535821A/ja
Publication of JP2017535821A5 publication Critical patent/JP2017535821A5/ja
Priority to JP2021110224A priority Critical patent/JP7235808B2/ja
Pending legal-status Critical Current

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JP2017528794A 2014-11-27 2015-04-28 複数の個々に制御可能な書込ヘッドを含むリソグラフィ装置 Pending JP2017535821A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021110224A JP7235808B2 (ja) 2014-11-27 2021-07-01 複数の個々に制御可能な書込ヘッドを含むリソグラフィ装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102014224314.9 2014-11-27
DE102014224314 2014-11-27
PCT/EP2015/059143 WO2016082941A1 (en) 2014-11-27 2015-04-28 Lithography apparatus comprising a plurality of individually controllable write heads

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2021110224A Division JP7235808B2 (ja) 2014-11-27 2021-07-01 複数の個々に制御可能な書込ヘッドを含むリソグラフィ装置

Publications (2)

Publication Number Publication Date
JP2017535821A JP2017535821A (ja) 2017-11-30
JP2017535821A5 true JP2017535821A5 (enExample) 2019-11-21

Family

ID=53039409

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2017528794A Pending JP2017535821A (ja) 2014-11-27 2015-04-28 複数の個々に制御可能な書込ヘッドを含むリソグラフィ装置
JP2021110224A Active JP7235808B2 (ja) 2014-11-27 2021-07-01 複数の個々に制御可能な書込ヘッドを含むリソグラフィ装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2021110224A Active JP7235808B2 (ja) 2014-11-27 2021-07-01 複数の個々に制御可能な書込ヘッドを含むリソグラフィ装置

Country Status (7)

Country Link
US (2) US20170255110A1 (enExample)
EP (1) EP3224675A1 (enExample)
JP (2) JP2017535821A (enExample)
KR (2) KR102595081B1 (enExample)
CN (1) CN107003616B (enExample)
TW (2) TWI707207B (enExample)
WO (1) WO2016082941A1 (enExample)

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EP4180871A1 (en) * 2021-11-16 2023-05-17 Mycronic Ab Multi head scanning lithographic laser writer
CN117192913B (zh) * 2023-09-11 2025-05-16 安徽工程大学 一种基于三维移动曝光提高光刻分辨率的系统及方法

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