JP2017528006A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2017528006A5 JP2017528006A5 JP2017527190A JP2017527190A JP2017528006A5 JP 2017528006 A5 JP2017528006 A5 JP 2017528006A5 JP 2017527190 A JP2017527190 A JP 2017527190A JP 2017527190 A JP2017527190 A JP 2017527190A JP 2017528006 A5 JP2017528006 A5 JP 2017528006A5
- Authority
- JP
- Japan
- Prior art keywords
- discrete component
- handle
- ultra
- substrate
- release layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462033595P | 2014-08-05 | 2014-08-05 | |
| US62/033,595 | 2014-08-05 | ||
| US201462060928P | 2014-10-07 | 2014-10-07 | |
| US62/060,928 | 2014-10-07 | ||
| PCT/US2015/043550 WO2016022528A1 (en) | 2014-08-05 | 2015-08-04 | Setting up ultra-small or ultra-thin discrete components for easy assembly |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017528006A JP2017528006A (ja) | 2017-09-21 |
| JP2017528006A5 true JP2017528006A5 (enExample) | 2018-09-13 |
| JP6480583B2 JP6480583B2 (ja) | 2019-03-13 |
Family
ID=55264414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017527190A Active JP6480583B2 (ja) | 2014-08-05 | 2015-08-04 | 組み立てが容易な超小型または超薄型離散コンポーネントの構成 |
Country Status (6)
| Country | Link |
|---|---|
| US (4) | US10529614B2 (enExample) |
| EP (1) | EP3177463A4 (enExample) |
| JP (1) | JP6480583B2 (enExample) |
| KR (3) | KR102403580B1 (enExample) |
| CN (2) | CN113715458A (enExample) |
| WO (1) | WO2016022528A1 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3177463A4 (en) | 2014-08-05 | 2018-06-27 | Uniqarta, Inc. | Setting up ultra-small or ultra-thin discrete components for easy assembly |
| EP3207563A4 (en) * | 2014-10-17 | 2018-05-30 | Intel Corporation | Micro pick and bond assembly |
| TWI889995B (zh) * | 2016-01-15 | 2025-07-11 | 荷蘭商庫力克及索發荷蘭公司 | 放置超小或超薄之離散組件 |
| CN109478516B (zh) | 2016-04-29 | 2023-06-13 | 库利克和索夫工业公司 | 将电子组件连接至基板 |
| KR20240130146A (ko) | 2017-06-12 | 2024-08-28 | 쿨리케 & 소파 네덜란드 비.브이. | 개별 부품들의 기판 상으로의 병렬적 조립 |
| DE102018009472A1 (de) * | 2018-12-03 | 2020-06-04 | Giesecke+Devrient Currency Technology Gmbh | Aufbringung und Befestigung einer bestimmten Anzahl von Einzelelementen auf einer Substratbahn |
| EP3924999A4 (en) | 2019-02-15 | 2022-11-02 | Kulicke & Soffa Netherlands B.V. | DYNAMIC SEPARATOR TAPES FOR MOUNTING DISCRETE COMPONENTS |
| TWI877175B (zh) | 2019-06-11 | 2025-03-21 | 荷蘭商庫力克及索發荷蘭公司 | 在離散組件組裝中藉由光學系統特性之調整的位置誤差補償 |
| CN115443525A (zh) | 2019-12-17 | 2022-12-06 | 库力索法荷兰有限公司 | 用于接收分立部件的胶带 |
| EP3933902B1 (en) | 2020-06-29 | 2023-05-03 | IMEC vzw | A method for positioning components on a substrate |
| TW202501581A (zh) * | 2021-11-30 | 2025-01-01 | 群創光電股份有限公司 | 電子裝置的製造方法 |
| GB2633617A (en) * | 2023-09-15 | 2025-03-19 | Pragmatic Semiconductor Ltd | Methods and apparatus for facilitating manufacture of an integrated circuit |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3006866B2 (ja) * | 1990-10-18 | 2000-02-07 | 大日本印刷株式会社 | 転写箔 |
| JP3197788B2 (ja) | 1995-05-18 | 2001-08-13 | 株式会社日立製作所 | 半導体装置の製造方法 |
| EP1041620A3 (en) | 1999-04-02 | 2005-01-05 | Interuniversitair Microelektronica Centrum Vzw | Method of transferring ultrathin substrates and application of the method to the manufacture of a multi-layer thin film device |
| US6383833B1 (en) * | 2000-05-23 | 2002-05-07 | Silverbrook Research Pty Ltd. | Method of fabricating devices incorporating microelectromechanical systems using at least one UV curable tape |
| JP4597323B2 (ja) * | 2000-07-07 | 2010-12-15 | リンテック株式会社 | 紫外線硬化型粘着剤組成物および紫外線硬化性粘着シート |
| WO2002063678A1 (en) * | 2001-02-08 | 2002-08-15 | International Business Machines Corporation | Chip transfer method and apparatus |
| FR2823012B1 (fr) * | 2001-04-03 | 2004-05-21 | Commissariat Energie Atomique | Procede de transfert selectif d'au moins un element d'un support initial sur un support final |
| US6872635B2 (en) * | 2001-04-11 | 2005-03-29 | Sony Corporation | Device transferring method, and device arraying method and image display unit fabricating method using the same |
| WO2003014010A1 (en) * | 2001-08-08 | 2003-02-20 | Jsr Corporation | Three-dimensional opto-electronic micro-system |
| US7535100B2 (en) * | 2002-07-12 | 2009-05-19 | The United States Of America As Represented By The Secretary Of The Navy | Wafer bonding of thinned electronic materials and circuits to high performance substrates |
| WO2004061961A1 (en) * | 2002-12-31 | 2004-07-22 | Massachusetts Institute Of Technology | Multi-layer integrated semiconductor structure having an electrical shielding portion |
| US7091108B2 (en) * | 2003-09-11 | 2006-08-15 | Intel Corporation | Methods and apparatuses for manufacturing ultra thin device layers for integrated circuit devices |
| US7101620B1 (en) * | 2004-09-07 | 2006-09-05 | National Semiconductor Corporation | Thermal release wafer mount tape with B-stage adhesive |
| US9401298B2 (en) * | 2005-04-08 | 2016-07-26 | PAC Tech—Packaging Technologies GmbH | Method and device for transferring a chip to a contact substrate |
| US7300824B2 (en) * | 2005-08-18 | 2007-11-27 | James Sheats | Method of packaging and interconnection of integrated circuits |
| JP5129939B2 (ja) * | 2006-08-31 | 2013-01-30 | 沖電気工業株式会社 | 半導体装置の製造方法 |
| JP2008258412A (ja) | 2007-04-05 | 2008-10-23 | Shinko Electric Ind Co Ltd | シリコンウエハの個片化方法 |
| WO2008132852A1 (ja) * | 2007-04-19 | 2008-11-06 | Sekisui Chemical Co., Ltd. | ダイシング・ダイボンディングテープ及び半導体チップの製造方法 |
| US7802356B1 (en) * | 2008-02-21 | 2010-09-28 | Hrl Laboratories, Llc | Method of fabricating an ultra thin quartz resonator component |
| US8865489B2 (en) * | 2009-05-12 | 2014-10-21 | The Board Of Trustees Of The University Of Illinois | Printed assemblies of ultrathin, microscale inorganic light emitting diodes for deformable and semitransparent displays |
| US8912646B2 (en) * | 2009-07-15 | 2014-12-16 | Silanna Semiconductor U.S.A., Inc. | Integrated circuit assembly and method of making |
| US9064686B2 (en) * | 2010-04-15 | 2015-06-23 | Suss Microtec Lithography, Gmbh | Method and apparatus for temporary bonding of ultra thin wafers |
| EP2434528A1 (en) * | 2010-09-28 | 2012-03-28 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | An active carrier for carrying a wafer and method for release |
| KR101963421B1 (ko) * | 2011-04-11 | 2019-03-28 | 엔디에스유 리서치 파운데이션 | 별개의 구성요소의 선택적인 레이저 보조 전사 |
| JP5845775B2 (ja) * | 2011-09-26 | 2016-01-20 | 住友電気工業株式会社 | 薄膜個片の接合方法 |
| CA2881826C (en) * | 2012-08-17 | 2021-03-30 | Visual Physics, Llc | A process for transferring microstructures to a final substrate |
| US9136173B2 (en) * | 2012-11-07 | 2015-09-15 | Semiconductor Components Industries, Llc | Singulation method for semiconductor die having a layer of material along one major surface |
| EP3177463A4 (en) | 2014-08-05 | 2018-06-27 | Uniqarta, Inc. | Setting up ultra-small or ultra-thin discrete components for easy assembly |
| US9209142B1 (en) * | 2014-09-05 | 2015-12-08 | Skorpios Technologies, Inc. | Semiconductor bonding with compliant resin and utilizing hydrogen implantation for transfer-wafer removal |
| US20160133486A1 (en) * | 2014-11-07 | 2016-05-12 | International Business Machines Corporation | Double Layer Release Temporary Bond and Debond Processes and Systems |
| US9496165B1 (en) * | 2015-07-09 | 2016-11-15 | International Business Machines Corporation | Method of forming a flexible semiconductor layer and devices on a flexible carrier |
-
2015
- 2015-08-04 EP EP15830376.8A patent/EP3177463A4/en not_active Withdrawn
- 2015-08-04 KR KR1020217008078A patent/KR102403580B1/ko active Active
- 2015-08-04 CN CN202110824519.1A patent/CN113715458A/zh active Pending
- 2015-08-04 KR KR1020227017274A patent/KR102866272B1/ko active Active
- 2015-08-04 KR KR1020177006045A patent/KR102240810B1/ko active Active
- 2015-08-04 CN CN201580053887.3A patent/CN107107600B/zh active Active
- 2015-08-04 US US15/501,330 patent/US10529614B2/en active Active
- 2015-08-04 JP JP2017527190A patent/JP6480583B2/ja active Active
- 2015-08-04 WO PCT/US2015/043550 patent/WO2016022528A1/en not_active Ceased
-
2019
- 2019-12-24 US US16/726,474 patent/US10937680B2/en active Active
-
2021
- 2021-02-01 US US17/164,269 patent/US11728201B2/en active Active
-
2023
- 2023-07-31 US US18/228,233 patent/US12412772B2/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2017528006A5 (enExample) | ||
| JP2020518133A5 (enExample) | ||
| JP6480583B2 (ja) | 組み立てが容易な超小型または超薄型離散コンポーネントの構成 | |
| TW201104732A (en) | Thin wafer structure and method | |
| KR102203790B1 (ko) | 초소형 또는 초박형 개별 컴포넌트 배치 | |
| JP6140194B2 (ja) | 製品基板をキャリア基板に一時的に接合する方法 | |
| JP2015501356A5 (enExample) | ||
| US20190189497A1 (en) | Workpiece processing method | |
| WO2004027880A3 (en) | Camera device, method of manufacturing a camera device, wafer scale package | |
| JP2016171261A5 (enExample) | ||
| TWI706505B (zh) | 用於裝置加工之鑽石底半導體晶圓之安裝技術 | |
| JP2013524493A5 (enExample) | ||
| Phommahaxay et al. | Extremely low-force debonding of thinned CMOS substrate by laser release of a temporary bonding material | |
| Wuensch et al. | Temporary wafer bonding-key technology for MEMS devices | |
| TW201624549A (zh) | 用於塗覆一產品基板之方法與裝置 | |
| US11244971B2 (en) | Method of transferring a thin film from a substrate to a flexible support | |
| JP2016213282A (ja) | 保護テープの剥離方法 | |
| TH2001005361A (th) | การยึดประสานแม่แบบกับเวเฟอร์โดยใช้ประโยชน์จากการพิมพ์แบบถ่ายโอนขนาดไมโคร | |
| McCutcheon et al. | Advanced processes and materials for temporary wafer bonding | |
| Puligadda | Temporary Bonding Material Requirements |