JP6480583B2 - 組み立てが容易な超小型または超薄型離散コンポーネントの構成 - Google Patents
組み立てが容易な超小型または超薄型離散コンポーネントの構成 Download PDFInfo
- Publication number
- JP6480583B2 JP6480583B2 JP2017527190A JP2017527190A JP6480583B2 JP 6480583 B2 JP6480583 B2 JP 6480583B2 JP 2017527190 A JP2017527190 A JP 2017527190A JP 2017527190 A JP2017527190 A JP 2017527190A JP 6480583 B2 JP6480583 B2 JP 6480583B2
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- JP
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- Prior art keywords
- discrete component
- handle
- substrate
- ultra
- discrete
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/26—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer which influences the bonding during the lamination process, e.g. release layers or pressure equalising layers
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- H10P72/7402—
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/02—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by a sequence of laminating steps, e.g. by adding new layers at consecutive laminating stations
- B32B37/025—Transfer laminating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/12—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by using adhesives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/0004—Cutting, tearing or severing, e.g. bursting; Cutter details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/10—Removing layers, or parts of layers, mechanically or chemically
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/18—Handling of layers or the laminate
- B32B38/1858—Handling of layers or the laminate using vacuum
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
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- H10P72/0446—
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- H10P72/10—
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- H10P72/74—
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- H10P72/7448—
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/14—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers
- B32B37/26—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the properties of the layers with at least one layer which influences the bonding during the lamination process, e.g. release layers or pressure equalising layers
- B32B2037/268—Release layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/0012—Mechanical treatment, e.g. roughening, deforming, stretching
- B32B2038/0016—Abrading
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B38/00—Ancillary operations in connection with laminating processes
- B32B38/04—Punching, slitting or perforating
- B32B2038/045—Slitting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2310/00—Treatment by energy or chemical effects
- B32B2310/08—Treatment by energy or chemical effects by wave energy or particle radiation
- B32B2310/0806—Treatment by energy or chemical effects by wave energy or particle radiation using electromagnetic radiation
- B32B2310/0831—Treatment by energy or chemical effects by wave energy or particle radiation using electromagnetic radiation using UV radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/14—Semiconductor wafers
-
- H10P72/7412—
-
- H10P72/7416—
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- H10P72/7428—
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- H10P72/7434—
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- H10P72/744—
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- H10W72/07141—
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- H10W72/073—
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- H10W72/07307—
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- H10W72/07332—
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- H10W72/07338—
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- H10W72/354—
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- H10W90/734—
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Dicing (AREA)
- Die Bonding (AREA)
- Adhesive Tapes (AREA)
- Adhesives Or Adhesive Processes (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462033595P | 2014-08-05 | 2014-08-05 | |
| US62/033,595 | 2014-08-05 | ||
| US201462060928P | 2014-10-07 | 2014-10-07 | |
| US62/060,928 | 2014-10-07 | ||
| PCT/US2015/043550 WO2016022528A1 (en) | 2014-08-05 | 2015-08-04 | Setting up ultra-small or ultra-thin discrete components for easy assembly |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017528006A JP2017528006A (ja) | 2017-09-21 |
| JP2017528006A5 JP2017528006A5 (enExample) | 2018-09-13 |
| JP6480583B2 true JP6480583B2 (ja) | 2019-03-13 |
Family
ID=55264414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017527190A Active JP6480583B2 (ja) | 2014-08-05 | 2015-08-04 | 組み立てが容易な超小型または超薄型離散コンポーネントの構成 |
Country Status (6)
| Country | Link |
|---|---|
| US (4) | US10529614B2 (enExample) |
| EP (1) | EP3177463A4 (enExample) |
| JP (1) | JP6480583B2 (enExample) |
| KR (3) | KR102240810B1 (enExample) |
| CN (2) | CN113715458A (enExample) |
| WO (1) | WO2016022528A1 (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113715458A (zh) | 2014-08-05 | 2021-11-30 | 库利克和索夫工业公司 | 用于传送分立元件的方法和装置 |
| JP6483246B2 (ja) | 2014-10-17 | 2019-03-13 | インテル・コーポレーション | 微小持ち上げ・接合組立法 |
| TWI889995B (zh) * | 2016-01-15 | 2025-07-11 | 荷蘭商庫力克及索發荷蘭公司 | 放置超小或超薄之離散組件 |
| CN117393441A (zh) | 2016-04-29 | 2024-01-12 | 库利克和索夫工业公司 | 将电子组件连接至基板 |
| KR102160225B1 (ko) | 2017-06-12 | 2020-09-28 | 유니카르타, 인크. | 개별 부품들의 기판 상으로의 병렬적 조립 |
| DE102018009472A1 (de) * | 2018-12-03 | 2020-06-04 | Giesecke+Devrient Currency Technology Gmbh | Aufbringung und Befestigung einer bestimmten Anzahl von Einzelelementen auf einer Substratbahn |
| KR20210145141A (ko) | 2019-02-15 | 2021-12-01 | 쿨리케 & 소파 네덜란드 비.브이. | 개별 구성 요소의 조립을 위한 동적 해제 테이프 |
| KR102858957B1 (ko) | 2019-06-11 | 2025-09-12 | 쿨리케 & 소파 네덜란드 비.브이. | 광학 시스템 특성의 조정에 의해 개별 콤포넌트의 어셈블레에서의 위치 오차 보상 |
| EP4078662A4 (en) | 2019-12-17 | 2024-05-29 | Kulicke & Soffa Netherlands B.V. | Adhesive tapes for receiving discrete components |
| EP3933902B1 (en) | 2020-06-29 | 2023-05-03 | IMEC vzw | A method for positioning components on a substrate |
| TWI859583B (zh) * | 2021-11-30 | 2024-10-21 | 群創光電股份有限公司 | 電子裝置的製造方法 |
| GB2633617A (en) * | 2023-09-15 | 2025-03-19 | Pragmatic Semiconductor Ltd | Methods and apparatus for facilitating manufacture of an integrated circuit |
| WO2026017271A1 (en) * | 2024-07-19 | 2026-01-22 | Nexperia B.V. | A method for mounting an electronics component at a particular placement location on a carrier as well as a pick-and-place apparatus for mounting an electronics component at a particular placement location on a carrier. |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3006866B2 (ja) * | 1990-10-18 | 2000-02-07 | 大日本印刷株式会社 | 転写箔 |
| JP3197788B2 (ja) * | 1995-05-18 | 2001-08-13 | 株式会社日立製作所 | 半導体装置の製造方法 |
| EP1041620A3 (en) * | 1999-04-02 | 2005-01-05 | Interuniversitair Microelektronica Centrum Vzw | Method of transferring ultrathin substrates and application of the method to the manufacture of a multi-layer thin film device |
| US6383833B1 (en) * | 2000-05-23 | 2002-05-07 | Silverbrook Research Pty Ltd. | Method of fabricating devices incorporating microelectromechanical systems using at least one UV curable tape |
| JP4597323B2 (ja) * | 2000-07-07 | 2010-12-15 | リンテック株式会社 | 紫外線硬化型粘着剤組成物および紫外線硬化性粘着シート |
| EP1358673A1 (en) * | 2001-02-08 | 2003-11-05 | International Business Machines Corporation | Chip transfer method and apparatus |
| FR2823012B1 (fr) * | 2001-04-03 | 2004-05-21 | Commissariat Energie Atomique | Procede de transfert selectif d'au moins un element d'un support initial sur un support final |
| KR100853410B1 (ko) * | 2001-04-11 | 2008-08-21 | 소니 가부시키가이샤 | 소자의 전사방법 및 이를 이용한 소자의 배열방법,화상표시장치의 제조방법 |
| US7387913B2 (en) * | 2001-08-08 | 2008-06-17 | Jsr Corporation | 3D optoelectronic micro system |
| US7535100B2 (en) | 2002-07-12 | 2009-05-19 | The United States Of America As Represented By The Secretary Of The Navy | Wafer bonding of thinned electronic materials and circuits to high performance substrates |
| AU2003300040A1 (en) * | 2002-12-31 | 2004-07-29 | Massachusetts Institute Of Technology | Multi-layer integrated semiconductor structure having an electrical shielding portion |
| US7091108B2 (en) * | 2003-09-11 | 2006-08-15 | Intel Corporation | Methods and apparatuses for manufacturing ultra thin device layers for integrated circuit devices |
| US7101620B1 (en) * | 2004-09-07 | 2006-09-05 | National Semiconductor Corporation | Thermal release wafer mount tape with B-stage adhesive |
| EP1869701B1 (de) * | 2005-04-08 | 2017-02-08 | Pac Tech - Packaging Technologies GmbH | Verfahren und vorrichtung zur übertragung eines chips auf ein kontaktsubstrat |
| US7300824B2 (en) * | 2005-08-18 | 2007-11-27 | James Sheats | Method of packaging and interconnection of integrated circuits |
| JP5129939B2 (ja) * | 2006-08-31 | 2013-01-30 | 沖電気工業株式会社 | 半導体装置の製造方法 |
| JP2008258412A (ja) * | 2007-04-05 | 2008-10-23 | Shinko Electric Ind Co Ltd | シリコンウエハの個片化方法 |
| KR101273871B1 (ko) * | 2007-04-19 | 2013-06-11 | 세키스이가가쿠 고교가부시키가이샤 | 다이싱ㆍ다이본딩 테이프 및 반도체칩의 제조 방법 |
| US7802356B1 (en) * | 2008-02-21 | 2010-09-28 | Hrl Laboratories, Llc | Method of fabricating an ultra thin quartz resonator component |
| WO2010132552A1 (en) * | 2009-05-12 | 2010-11-18 | The Board Of Trustees Of The University Of Illinois | Printed assemblies of ultrathin, microscale inorganic light emitting diodes for deformable and semitransparent displays |
| US8912646B2 (en) * | 2009-07-15 | 2014-12-16 | Silanna Semiconductor U.S.A., Inc. | Integrated circuit assembly and method of making |
| US9064686B2 (en) * | 2010-04-15 | 2015-06-23 | Suss Microtec Lithography, Gmbh | Method and apparatus for temporary bonding of ultra thin wafers |
| EP2434528A1 (en) * | 2010-09-28 | 2012-03-28 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | An active carrier for carrying a wafer and method for release |
| RU2582160C2 (ru) * | 2011-04-11 | 2016-04-20 | Ндсю Рисёрч Фаундейшн | Избирательный лазерно-стимулированный перенос дискретных компонентов |
| JP5845775B2 (ja) * | 2011-09-26 | 2016-01-20 | 住友電気工業株式会社 | 薄膜個片の接合方法 |
| MX375104B (es) * | 2012-08-17 | 2025-03-06 | Visual Physics Llc | Un procedimiento para la transferencia de microestructuras a un sustrato final. |
| US9136173B2 (en) * | 2012-11-07 | 2015-09-15 | Semiconductor Components Industries, Llc | Singulation method for semiconductor die having a layer of material along one major surface |
| CN113715458A (zh) | 2014-08-05 | 2021-11-30 | 库利克和索夫工业公司 | 用于传送分立元件的方法和装置 |
| US9209142B1 (en) * | 2014-09-05 | 2015-12-08 | Skorpios Technologies, Inc. | Semiconductor bonding with compliant resin and utilizing hydrogen implantation for transfer-wafer removal |
| US20160133486A1 (en) * | 2014-11-07 | 2016-05-12 | International Business Machines Corporation | Double Layer Release Temporary Bond and Debond Processes and Systems |
| US9496165B1 (en) * | 2015-07-09 | 2016-11-15 | International Business Machines Corporation | Method of forming a flexible semiconductor layer and devices on a flexible carrier |
-
2015
- 2015-08-04 CN CN202110824519.1A patent/CN113715458A/zh active Pending
- 2015-08-04 KR KR1020177006045A patent/KR102240810B1/ko active Active
- 2015-08-04 EP EP15830376.8A patent/EP3177463A4/en not_active Withdrawn
- 2015-08-04 CN CN201580053887.3A patent/CN107107600B/zh active Active
- 2015-08-04 WO PCT/US2015/043550 patent/WO2016022528A1/en not_active Ceased
- 2015-08-04 US US15/501,330 patent/US10529614B2/en active Active
- 2015-08-04 KR KR1020227017274A patent/KR102866272B1/ko active Active
- 2015-08-04 KR KR1020217008078A patent/KR102403580B1/ko active Active
- 2015-08-04 JP JP2017527190A patent/JP6480583B2/ja active Active
-
2019
- 2019-12-24 US US16/726,474 patent/US10937680B2/en active Active
-
2021
- 2021-02-01 US US17/164,269 patent/US11728201B2/en active Active
-
2023
- 2023-07-31 US US18/228,233 patent/US12412772B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20170039281A (ko) | 2017-04-10 |
| KR102240810B1 (ko) | 2021-04-15 |
| US11728201B2 (en) | 2023-08-15 |
| KR102403580B1 (ko) | 2022-05-30 |
| CN107107600A (zh) | 2017-08-29 |
| US20200135534A1 (en) | 2020-04-30 |
| US12412772B2 (en) | 2025-09-09 |
| US20230377936A1 (en) | 2023-11-23 |
| KR102866272B1 (ko) | 2025-10-02 |
| KR20210033071A (ko) | 2021-03-25 |
| WO2016022528A1 (en) | 2016-02-11 |
| JP2017528006A (ja) | 2017-09-21 |
| US20210265191A1 (en) | 2021-08-26 |
| US20170365499A1 (en) | 2017-12-21 |
| KR20220075241A (ko) | 2022-06-07 |
| CN107107600B (zh) | 2021-07-27 |
| US10529614B2 (en) | 2020-01-07 |
| EP3177463A4 (en) | 2018-06-27 |
| US10937680B2 (en) | 2021-03-02 |
| CN113715458A (zh) | 2021-11-30 |
| EP3177463A1 (en) | 2017-06-14 |
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