JP2017514718A5 - - Google Patents
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- Publication number
- JP2017514718A5 JP2017514718A5 JP2017511151A JP2017511151A JP2017514718A5 JP 2017514718 A5 JP2017514718 A5 JP 2017514718A5 JP 2017511151 A JP2017511151 A JP 2017511151A JP 2017511151 A JP2017511151 A JP 2017511151A JP 2017514718 A5 JP2017514718 A5 JP 2017514718A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- polishing pad
- intermediate layer
- polishing
- softening point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010410 layer Substances 0.000 claims description 76
- 238000005498 polishing Methods 0.000 claims description 48
- 238000000034 method Methods 0.000 claims description 24
- 239000002952 polymeric resin Substances 0.000 claims description 16
- -1 polytetrafluoroethylene Polymers 0.000 claims description 15
- 229920003002 synthetic resin Polymers 0.000 claims description 15
- 239000004433 Thermoplastic polyurethane Substances 0.000 claims description 14
- 239000002344 surface layer Substances 0.000 claims description 14
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims description 14
- 229920000515 polycarbonate Polymers 0.000 claims description 9
- 239000004417 polycarbonate Substances 0.000 claims description 9
- 229920000058 polyacrylate Polymers 0.000 claims description 8
- 229920000642 polymer Polymers 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 6
- 239000004793 Polystyrene Substances 0.000 claims description 5
- 239000004372 Polyvinyl alcohol Substances 0.000 claims description 5
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 5
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 5
- 229920002223 polystyrene Polymers 0.000 claims description 5
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 5
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 5
- 229920002451 polyvinyl alcohol Polymers 0.000 claims description 5
- 239000004677 Nylon Substances 0.000 claims description 4
- 239000004642 Polyimide Substances 0.000 claims description 4
- 229920001577 copolymer Polymers 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 229920001778 nylon Polymers 0.000 claims description 4
- 229920000412 polyarylene Polymers 0.000 claims description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 4
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 4
- 229920000098 polyolefin Polymers 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 2
- 238000011065 in-situ storage Methods 0.000 claims description 2
- 238000005304 joining Methods 0.000 claims description 2
- 238000003475 lamination Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000000853 adhesive Substances 0.000 claims 1
- 230000001070 adhesive effect Effects 0.000 claims 1
- 238000007517 polishing process Methods 0.000 claims 1
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000002209 hydrophobic effect Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229920002292 Nylon 6 Polymers 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229920000891 common polymer Polymers 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002401 polyacrylamide Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461989669P | 2014-05-07 | 2014-05-07 | |
| US61/989,669 | 2014-05-07 | ||
| US201462022770P | 2014-07-10 | 2014-07-10 | |
| US62/022,770 | 2014-07-10 | ||
| PCT/US2015/028503 WO2015171419A1 (en) | 2014-05-07 | 2015-04-30 | Multi-layer polishing pad for cmp |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017514718A JP2017514718A (ja) | 2017-06-08 |
| JP2017514718A5 true JP2017514718A5 (https=) | 2018-05-24 |
| JP6574244B2 JP6574244B2 (ja) | 2019-09-11 |
Family
ID=54368476
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017511151A Expired - Fee Related JP6574244B2 (ja) | 2014-05-07 | 2015-04-30 | Ｃｍｐ用の多層研磨パッド |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9818618B2 (https=) |
| EP (1) | EP3140852B1 (https=) |
| JP (1) | JP6574244B2 (https=) |
| KR (1) | KR102440303B1 (https=) |
| CN (1) | CN106575613B (https=) |
| TW (1) | TWI626118B (https=) |
| WO (1) | WO2015171419A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20220023991A1 (en) * | 2018-11-27 | 2022-01-27 | 3M Innovative Properties Company | Polishing pads and systems and methods of making and using the same |
| CN112238670B (zh) * | 2020-10-16 | 2022-11-15 | 上海江丰平芯电子科技有限公司 | 一种研磨垫的制备方法 |
| EP4267342A4 (en) * | 2020-12-22 | 2024-10-30 | CMC Materials LLC | Chemical-mechanical polishing subpad having porogens with polymeric shells |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5257478A (en) | 1990-03-22 | 1993-11-02 | Rodel, Inc. | Apparatus for interlayer planarization of semiconductor material |
| US5196353A (en) | 1992-01-03 | 1993-03-23 | Micron Technology, Inc. | Method for controlling a semiconductor (CMP) process by measuring a surface temperature and developing a thermal image of the wafer |
| US6614529B1 (en) | 1992-12-28 | 2003-09-02 | Applied Materials, Inc. | In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization |
| US5658183A (en) | 1993-08-25 | 1997-08-19 | Micron Technology, Inc. | System for real-time control of semiconductor wafer polishing including optical monitoring |
| US5433651A (en) | 1993-12-22 | 1995-07-18 | International Business Machines Corporation | In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing |
| JP3270282B2 (ja) | 1994-02-21 | 2002-04-02 | 株式会社東芝 | 半導体製造装置及び半導体装置の製造方法 |
| JP3313505B2 (ja) | 1994-04-14 | 2002-08-12 | 株式会社日立製作所 | 研磨加工法 |
| US5964643A (en) | 1995-03-28 | 1999-10-12 | Applied Materials, Inc. | Apparatus and method for in-situ monitoring of chemical mechanical polishing operations |
| US5893796A (en) | 1995-03-28 | 1999-04-13 | Applied Materials, Inc. | Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus |
| US5838447A (en) | 1995-07-20 | 1998-11-17 | Ebara Corporation | Polishing apparatus including thickness or flatness detector |
| US5872633A (en) | 1996-07-26 | 1999-02-16 | Speedfam Corporation | Methods and apparatus for detecting removal of thin film layers during planarization |
| JP2002303727A (ja) * | 2001-04-06 | 2002-10-18 | Nitto Denko Corp | 偏光フィルムの製造方法 |
| US20050276967A1 (en) * | 2002-05-23 | 2005-12-15 | Cabot Microelectronics Corporation | Surface textured microporous polishing pads |
| US6884156B2 (en) * | 2003-06-17 | 2005-04-26 | Cabot Microelectronics Corporation | Multi-layer polishing pad material for CMP |
| US20070015448A1 (en) * | 2003-08-07 | 2007-01-18 | Ppg Industries Ohio, Inc. | Polishing pad having edge surface treatment |
| WO2005035194A2 (en) * | 2003-10-09 | 2005-04-21 | Thomas West, Inc. | Stacked pad and method of use |
| EP2136994B1 (en) * | 2007-04-03 | 2018-08-22 | Dow Global Technologies LLC | Hot film lamination (vacuum assisted) for carpet backing applications |
| US20080274674A1 (en) * | 2007-05-03 | 2008-11-06 | Cabot Microelectronics Corporation | Stacked polishing pad for high temperature applications |
| US20110045753A1 (en) * | 2008-05-16 | 2011-02-24 | Toray Industries, Inc. | Polishing pad |
| KR20110120893A (ko) * | 2009-01-16 | 2011-11-04 | 어플라이드 머티어리얼스, 인코포레이티드 | 윈도우 지지부를 가지는 폴리싱 패드 및 시스템 |
| US20130102231A1 (en) * | 2009-12-30 | 2013-04-25 | 3M Innovative Properties Company | Organic particulate loaded polishing pads and method of making and using the same |
| CN102686362A (zh) * | 2009-12-30 | 2012-09-19 | 3M创新有限公司 | 包括分相共混聚合物的抛光垫及其制备和使用方法 |
| US9067297B2 (en) * | 2011-11-29 | 2015-06-30 | Nexplanar Corporation | Polishing pad with foundation layer and polishing surface layer |
| JP5893413B2 (ja) * | 2012-01-17 | 2016-03-23 | 東洋ゴム工業株式会社 | 積層研磨パッドの製造方法 |
| US9597769B2 (en) * | 2012-06-04 | 2017-03-21 | Nexplanar Corporation | Polishing pad with polishing surface layer having an aperture or opening above a transparent foundation layer |
-
2015
- 2015-04-30 WO PCT/US2015/028503 patent/WO2015171419A1/en not_active Ceased
- 2015-04-30 TW TW104113878A patent/TWI626118B/zh active
- 2015-04-30 CN CN201580023882.6A patent/CN106575613B/zh active Active
- 2015-04-30 EP EP15788762.1A patent/EP3140852B1/en active Active
- 2015-04-30 US US14/700,580 patent/US9818618B2/en active Active
- 2015-04-30 KR KR1020167033896A patent/KR102440303B1/ko active Active
- 2015-04-30 JP JP2017511151A patent/JP6574244B2/ja not_active Expired - Fee Related
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