JP2017501270A5 - - Google Patents
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- JP2017501270A5 JP2017501270A5 JP2016539329A JP2016539329A JP2017501270A5 JP 2017501270 A5 JP2017501270 A5 JP 2017501270A5 JP 2016539329 A JP2016539329 A JP 2016539329A JP 2016539329 A JP2016539329 A JP 2016539329A JP 2017501270 A5 JP2017501270 A5 JP 2017501270A5
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- JP
- Japan
- Prior art keywords
- block
- block copolymer
- comonomer
- mixture
- comonomers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 229920001400 block copolymer Polymers 0.000 claims description 73
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 claims description 35
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 20
- 239000000203 mixture Substances 0.000 claims description 17
- 238000000137 annealing Methods 0.000 claims description 7
- 229920001577 copolymer Polymers 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 239000002904 solvent Substances 0.000 claims description 4
- 238000003786 synthesis reaction Methods 0.000 claims description 4
- 239000002086 nanomaterial Substances 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 claims description 2
- 239000000178 monomer Substances 0.000 claims 4
- 230000015572 biosynthetic process Effects 0.000 claims 2
- 238000010539 anionic addition polymerization reaction Methods 0.000 claims 1
- 238000010526 radical polymerization reaction Methods 0.000 claims 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 7
- 239000004926 polymethyl methacrylate Substances 0.000 description 7
- 230000003993 interaction Effects 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000008520 organization Effects 0.000 description 4
- 238000005191 phase separation Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 238000006116 polymerization reaction Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229920000390 Poly(styrene-block-methyl methacrylate) Polymers 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 125000003011 styrenyl group Chemical group [H]\C(*)=C(/[H])C1=C([H])C([H])=C([H])C([H])=C1[H] 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1362735A FR3014877B1 (fr) | 2013-12-17 | 2013-12-17 | Procede de nanostructuration d'un film de copolymere a blocs a partir d'un copolymere a blocs non structure a base de styrene et de methacrylate de methyle, et film de copolymere a blocs nanostructure |
| FR1362735 | 2013-12-17 | ||
| PCT/FR2014/053329 WO2015092241A1 (fr) | 2013-12-17 | 2014-12-15 | Procédé de nanostructuration d'un film de copolymère a blocs a partir d'un copolymère a blocs non structure a base de styrène et de methacrylate de méthyle, et film de copolymère a blocs nanostructure |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019091140A Division JP2019173019A (ja) | 2013-12-17 | 2019-05-14 | スチレン及びメタクリル酸メチルをベースとする非構造化ブロックコポリマーを用いるブロックコポリマーフィルムのナノ構造化のための方法、並びにナノ構造ブロックコポリマーフィルム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017501270A JP2017501270A (ja) | 2017-01-12 |
| JP2017501270A5 true JP2017501270A5 (enExample) | 2019-07-04 |
Family
ID=50289951
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016539329A Withdrawn JP2017501270A (ja) | 2013-12-17 | 2014-12-15 | スチレン及びメタクリル酸メチルをベースとする非構造化ブロックコポリマーを用いるブロックコポリマーフィルムのナノ構造化のための方法、並びにナノ構造ブロックコポリマーフィルム |
| JP2019091140A Pending JP2019173019A (ja) | 2013-12-17 | 2019-05-14 | スチレン及びメタクリル酸メチルをベースとする非構造化ブロックコポリマーを用いるブロックコポリマーフィルムのナノ構造化のための方法、並びにナノ構造ブロックコポリマーフィルム |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019091140A Pending JP2019173019A (ja) | 2013-12-17 | 2019-05-14 | スチレン及びメタクリル酸メチルをベースとする非構造化ブロックコポリマーを用いるブロックコポリマーフィルムのナノ構造化のための方法、並びにナノ構造ブロックコポリマーフィルム |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US10011675B2 (enExample) |
| EP (1) | EP3083488A1 (enExample) |
| JP (2) | JP2017501270A (enExample) |
| KR (1) | KR101840960B1 (enExample) |
| CN (1) | CN105829239A (enExample) |
| FR (1) | FR3014877B1 (enExample) |
| SG (1) | SG11201604475WA (enExample) |
| TW (1) | TWI548657B (enExample) |
| WO (1) | WO2015092241A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3029921B1 (fr) | 2014-12-16 | 2018-06-29 | Arkema France | Procede de controle de la synthese d'un copolymere a blocs contenant au moins un bloc apolaire et au moins un bloc polaire et utilisation d'un tel copolymere a blocs dans des applications de nano-lithographie par auto-assemblage direct. |
| FR3045644A1 (fr) * | 2015-12-18 | 2017-06-23 | Arkema France | Procede d'obtention de films ordonnes epais et de periodes elevees comprenant un copolymere a blocs |
| FR3045645B1 (fr) * | 2015-12-18 | 2019-07-05 | Arkema France | Procede de reduction des defauts dans un film ordonne de copolymeres a blocs |
| FR3045643A1 (fr) * | 2015-12-18 | 2017-06-23 | Arkema France | Procede d'amelioration de l'uniformite de dimension critique de films ordonnes de copolymere a blocs |
| FR3045642A1 (fr) * | 2015-12-18 | 2017-06-23 | Arkema France | Procede de reduction du temps de structuration de films ordonnes de copolymere a blocs |
| US11155666B2 (en) * | 2016-11-30 | 2021-10-26 | Lg Chem, Ltd. | Block copolymer |
| CN112358643B (zh) * | 2020-11-10 | 2022-09-30 | 浙江工业大学 | 一种基于嵌段共聚物本体聚合的均孔膜制备方法 |
| KR20230119186A (ko) * | 2020-12-17 | 2023-08-16 | 메르크 파텐트 게엠베하 | 지향성 자기 조립을 위한 교호 공중합체 세그먼트로이루어진 조정 가능한 하이 카이 디블록 공중합체 및 그의 적용 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2679237B1 (fr) | 1991-07-19 | 1994-07-22 | Atochem | Systeme d'amorcage pour la polymerisation anionique de monomeres (meth) acryliques. |
| FR2735480B1 (fr) | 1995-06-15 | 1997-07-18 | Atochem Elf Sa | Procede de polymerisation anionique en continu d'au moins un monomere (meth)acrylique pour l'obtention de polymeres a haut taux de solide |
| US6835778B2 (en) * | 1995-08-29 | 2004-12-28 | Chevron Phillips Chemical Company Lp | Conjugated diene/monovinylarene block copolymers blends |
| US7255920B2 (en) * | 2004-07-29 | 2007-08-14 | 3M Innovative Properties Company | (Meth)acrylate block copolymer pressure sensitive adhesives |
| WO2007132901A1 (ja) * | 2006-05-16 | 2007-11-22 | Nippon Soda Co., Ltd. | ブロックコポリマー |
| US7964107B2 (en) * | 2007-02-08 | 2011-06-21 | Micron Technology, Inc. | Methods using block copolymer self-assembly for sub-lithographic patterning |
| US8425982B2 (en) * | 2008-03-21 | 2013-04-23 | Micron Technology, Inc. | Methods of improving long range order in self-assembly of block copolymer films with ionic liquids |
| US8304493B2 (en) | 2010-08-20 | 2012-11-06 | Micron Technology, Inc. | Methods of forming block copolymers |
| FR2974094A1 (fr) | 2011-04-15 | 2012-10-19 | Arkema France | Procede de preparation de surfaces |
| KR101963924B1 (ko) | 2011-07-29 | 2019-03-29 | 위스콘신 얼럼나이 리서어치 화운데이션 | 박막의 유도 조립을 위한 블록 공중합체 재료 |
-
2013
- 2013-12-17 FR FR1362735A patent/FR3014877B1/fr active Active
-
2014
- 2014-12-11 TW TW103143326A patent/TWI548657B/zh not_active IP Right Cessation
- 2014-12-15 SG SG11201604475WA patent/SG11201604475WA/en unknown
- 2014-12-15 KR KR1020167019169A patent/KR101840960B1/ko active Active
- 2014-12-15 JP JP2016539329A patent/JP2017501270A/ja not_active Withdrawn
- 2014-12-15 WO PCT/FR2014/053329 patent/WO2015092241A1/fr not_active Ceased
- 2014-12-15 CN CN201480068975.6A patent/CN105829239A/zh active Pending
- 2014-12-15 EP EP14827509.2A patent/EP3083488A1/fr not_active Ceased
- 2014-12-15 US US15/105,245 patent/US10011675B2/en active Active
-
2019
- 2019-05-14 JP JP2019091140A patent/JP2019173019A/ja active Pending
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