JP2017220618A - 基板液処理装置、基板液処理方法および記憶媒体 - Google Patents
基板液処理装置、基板液処理方法および記憶媒体 Download PDFInfo
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- 239000007788 liquid Substances 0.000 title claims abstract description 240
- 239000000758 substrate Substances 0.000 title claims abstract description 146
- 238000003672 processing method Methods 0.000 title claims description 14
- 238000003860 storage Methods 0.000 title claims description 13
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims abstract description 80
- 238000009835 boiling Methods 0.000 claims abstract description 62
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims abstract description 40
- 238000001514 detection method Methods 0.000 claims abstract description 22
- 239000007864 aqueous solution Substances 0.000 claims description 30
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 24
- 239000000243 solution Substances 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 14
- 230000008569 process Effects 0.000 claims description 12
- 238000005530 etching Methods 0.000 abstract description 36
- 238000004140 cleaning Methods 0.000 description 25
- 230000007246 mechanism Effects 0.000 description 25
- 230000032258 transport Effects 0.000 description 16
- 239000007789 gas Substances 0.000 description 14
- 230000007723 transport mechanism Effects 0.000 description 14
- 239000012530 fluid Substances 0.000 description 11
- 238000001035 drying Methods 0.000 description 9
- 239000011261 inert gas Substances 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000011144 upstream manufacturing Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 230000008020 evaporation Effects 0.000 description 5
- 239000000969 carrier Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000010129 solution processing Methods 0.000 description 1
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- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
- H01L21/67086—Apparatus for fluid treatment for etching for wet etching with the semiconductor substrates being dipped in baths or vessels
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Abstract
Description
1A 基板液処理システム
7 制御部
8 基板
34 処理槽
39 液処理部
40 リン酸水溶液供給部
41 純水供給部
42 処理液循環ライン
44 外槽
51 供給ポンプ
52 フィルタ
53 ヒータ
70 沸騰状態検出部
71 ガス吐出管
72 ガス供給部
73 背圧指示計
Claims (9)
- リン酸水溶液からなる処理液および基板を収納するとともに、当該処理液を用いて前記基板を処理する液処理部と、
前記液処理部に対して前記処理液を供給する供給ポンプを含む処理液供給部と、
前記液処理部に設置され、前記処理液の沸騰状態を検出する沸騰状態検出部と、
前記沸騰状態検出部からの信号に基づいて前記供給ポンプを制御して前記処理液供給部から前記液処理部へ供給される流路内の処理液の圧力を調整する制御部とを備えたことを特徴とする基板液処理装置。 - 前記制御部は前記沸騰状態検出部からの信号に基づいて、前記処理液の沸騰状態が激しい場合に、前記供給ポンプからの前記処理液の圧力を大きくして流路内の前記処理液の沸騰状態を抑え、
前記処理液の沸騰状態が穏やかな場合に、前記供給ポンプからの前記処理液の圧力を小さくして流路内の前記処理液の沸騰状態を促進することを特徴とする請求項1記載の基板液処理装置。 - 前記処理液供給部は前記液処理部に接続された処理液循環ラインを含み、
前記供給ポンプはこの処理液循環ラインに設置されていることを特徴とする請求項1または2記載の基板液処理装置。 - 前記処理液供給部に、リン酸水溶液を供給するリン酸水溶液供給部と、純水を供給する純水供給部とが接続されていることを特徴とする請求項1乃至3のいずれか記載の基板液処理装置。
- リン酸水溶液からなる処理液および基板を収納する液処理部において、当該処理液を用いて前記基板を処理する工程と、
前記液処理部に対して供給ポンプを含む処理液供給部により処理液を供給する工程と、
前記液処理部に設置され、前記処理液の沸騰状態を沸騰状態検出部により検出する工程と、
前記沸騰状態検出部からの信号に基づいて前記供給ポンプを制御部により制御して前記処理液供給部から前記液処理部へ供給される流路内の処理液の圧力を調整する工程とを備えたことを特徴とする基板液処理方法。 - 前記制御部は前記沸騰状態検出部からの信号に基づいて、前記処理液の沸騰状態が激しい場合に、前記供給ポンプからの流路内の前記処理液の圧力を大きくして前記処理液の沸騰状態を抑え、
前記処理液の沸騰状態が穏やかな場合に、前記供給ポンプからの流路内の前記処理液の圧力を小さくして前記処理液の沸騰状態を促進することを特徴とする請求項5記載の基板液処理方法。 - 前記処理液供給部は前記液処理部に接続された処理液循環ラインを含み、
前記供給ポンプはこの処理液循環ラインに設置されていることを特徴とする請求項5または6記載の基板液処理方法。 - 前記処理液供給部に、リン酸水溶液を供給するリン酸水溶液供給部と、純水を供給する純水供給部とが接続されていることを特徴とする請求項5乃至7のいずれか記載の基板液処理方法。
- コンピュータに基板液処理方法を実行させるための記憶媒体において、
前記基板液処理方法は、
リン酸水溶液からなる処理液および基板を収納する液処理部において、当該処理液を用いて前記基板を処理する工程と、
前記液処理部に対して供給ポンプを含む処理液供給部により処理液を供給する工程と、
前記液処理部に設置され、前記処理液の沸騰状態を沸騰状態検出部により検出する工程と、
前記沸騰状態検出部からの信号に基づいて前記供給ポンプを制御部により制御して前記処理液供給部から前記液処理部へ供給される流路内の処理液の圧力を調整する工程とを備えたことを特徴とする基板液処理方法。
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JP2016115601A JP6732546B2 (ja) | 2016-06-09 | 2016-06-09 | 基板液処理装置、基板液処理方法および記憶媒体 |
KR1020170069578A KR102414348B1 (ko) | 2016-06-09 | 2017-06-05 | 기판 액처리 장치, 기판 액처리 방법 및 기억 매체 |
CN201710414430.1A CN107492511B (zh) | 2016-06-09 | 2017-06-05 | 基板液处理装置、基板液处理方法以及存储介质 |
US15/617,134 US10643874B2 (en) | 2016-06-09 | 2017-06-08 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium |
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CN110556294A (zh) * | 2018-05-31 | 2019-12-10 | 东京毅力科创株式会社 | 基板液处理方法、基板液处理装置以及存储介质 |
WO2021192990A1 (ja) * | 2020-03-23 | 2021-09-30 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
KR20230158616A (ko) | 2021-04-01 | 2023-11-20 | 도쿄엘렉트론가부시키가이샤 | 기판 액 처리 장치 |
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CN108511368B (zh) * | 2017-02-28 | 2023-09-01 | 东京毅力科创株式会社 | 基板液处理装置 |
JP7072453B2 (ja) * | 2018-06-29 | 2022-05-20 | 東京エレクトロン株式会社 | 基板処理装置、および基板処理方法 |
JP7466372B2 (ja) * | 2020-05-13 | 2024-04-12 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
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US20080142208A1 (en) * | 2006-12-15 | 2008-06-19 | Applied Materials, Inc. | Method and apparatus for heating a substrate |
JP5383979B2 (ja) * | 2007-02-01 | 2014-01-08 | 東京エレクトロン株式会社 | 処理システム |
JP5715546B2 (ja) | 2011-10-27 | 2015-05-07 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法並びに基板処理プログラムを記憶したコンピュータ読み取り可能な記憶媒体 |
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Patent Citations (5)
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JPH0296334A (ja) * | 1988-10-01 | 1990-04-09 | Nisso Eng Kk | 高温エッチング液の循環方法 |
JP2004153164A (ja) * | 2002-10-31 | 2004-05-27 | M Fsi Kk | 沸騰薬液の管理方法 |
JP2006269616A (ja) * | 2005-03-23 | 2006-10-05 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
JP2014510417A (ja) * | 2011-03-30 | 2014-04-24 | 東京エレクトロン株式会社 | マスク層のエッチング速度と選択性の増大 |
JP2016513887A (ja) * | 2013-03-15 | 2016-05-16 | ティーイーエル エフエスアイ,インコーポレイティド | 加熱されたエッチング液を提供するためのプロセシングシステムおよび方法 |
Cited By (4)
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CN110556294A (zh) * | 2018-05-31 | 2019-12-10 | 东京毅力科创株式会社 | 基板液处理方法、基板液处理装置以及存储介质 |
WO2021192990A1 (ja) * | 2020-03-23 | 2021-09-30 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
JP7378578B2 (ja) | 2020-03-23 | 2023-11-13 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法 |
KR20230158616A (ko) | 2021-04-01 | 2023-11-20 | 도쿄엘렉트론가부시키가이샤 | 기판 액 처리 장치 |
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