JP2017207755A5 - - Google Patents
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- JP2017207755A5 JP2017207755A5 JP2017100801A JP2017100801A JP2017207755A5 JP 2017207755 A5 JP2017207755 A5 JP 2017207755A5 JP 2017100801 A JP2017100801 A JP 2017100801A JP 2017100801 A JP2017100801 A JP 2017100801A JP 2017207755 A5 JP2017207755 A5 JP 2017207755A5
- Authority
- JP
- Japan
- Prior art keywords
- irradiation
- spm
- detector
- collector
- chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 claims description 33
- 239000000523 sample Substances 0.000 claims description 22
- 238000011084 recovery Methods 0.000 claims description 16
- 239000002245 particle Substances 0.000 claims description 14
- 230000005855 radiation Effects 0.000 claims description 12
- 238000001228 spectrum Methods 0.000 claims description 12
- 238000005286 illumination Methods 0.000 claims description 10
- 238000004891 communication Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 239000000356 contaminant Substances 0.000 claims description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/160,263 US10384238B2 (en) | 2007-09-17 | 2016-05-20 | Debris removal in high aspect structures |
| US15/160,263 | 2016-05-20 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017207755A JP2017207755A (ja) | 2017-11-24 |
| JP2017207755A5 true JP2017207755A5 (enExample) | 2020-08-13 |
| JP7042039B2 JP7042039B2 (ja) | 2022-03-25 |
Family
ID=58772394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017100801A Active JP7042039B2 (ja) | 2016-05-20 | 2017-05-22 | 高アスペクト構造からのデブリ除去 |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP3251760B1 (enExample) |
| JP (1) | JP7042039B2 (enExample) |
| KR (1) | KR102433627B1 (enExample) |
| TW (3) | TWI841110B (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3964841A1 (de) | 2020-09-02 | 2022-03-09 | Siltronic AG | Messapparatur und verfahren zum untersuchen eines bereichs einer oberfläche eines substrats mit hilfe einer kraft-messsonde |
| DE102021201669B4 (de) * | 2021-02-22 | 2023-08-17 | Carl Zeiss Smt Gmbh | Verfahren und vorrichtung zum bearbeiten einer probe |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05164512A (ja) * | 1991-12-13 | 1993-06-29 | Toshiba Corp | 表面測定装置 |
| TW285721B (enExample) * | 1994-12-27 | 1996-09-11 | Siemens Ag | |
| JP2005084582A (ja) * | 2003-09-11 | 2005-03-31 | Sii Nanotechnology Inc | フォトマスクのパーティクル除去方法 |
| CA2580115C (en) * | 2004-09-03 | 2011-04-05 | Honeywell International Inc. | Drawn gel-spun polyethylene yarns and process for drawing |
| JP2006339472A (ja) * | 2005-06-03 | 2006-12-14 | Matsushita Electric Ind Co Ltd | プローブカード触針のクリーニング装置およびクリーニング方法 |
| JP4820740B2 (ja) * | 2006-12-08 | 2011-11-24 | エスアイアイ・ナノテクノロジー株式会社 | 加工用ダイヤモンド探針の加工方法 |
| JP2008209544A (ja) * | 2007-02-26 | 2008-09-11 | Sii Nanotechnology Inc | フォトマスク上の異物の組成分析方法 |
| JP2009006378A (ja) * | 2007-06-29 | 2009-01-15 | Sii Nanotechnology Inc | 微細加工方法及び微細加工装置 |
| US8287653B2 (en) * | 2007-09-17 | 2012-10-16 | Rave, Llc | Debris removal in high aspect structures |
| JP5031509B2 (ja) * | 2007-10-23 | 2012-09-19 | キヤノン株式会社 | 近接場光散乱用プローブおよびその製造方法 |
| JP2009265176A (ja) * | 2008-04-22 | 2009-11-12 | Toshiba Corp | 異物除去方法、異物除去装置および半導体装置の作製方法 |
| JP2011133296A (ja) * | 2009-12-24 | 2011-07-07 | Yamaha Corp | クリーニング装置、及び、プローブ針のクリーニング方法 |
| CN102798735B (zh) * | 2012-08-14 | 2015-03-04 | 厦门大学 | 针尖增强暗场显微镜、电化学测试装置和调平系统 |
| JP6215677B2 (ja) * | 2013-12-05 | 2017-10-18 | 株式会社日立ハイテクマニファクチャ＆サービス | 顕微ラマン分光装置および顕微ラマン分光システム |
-
2017
- 2017-05-02 TW TW111147463A patent/TWI841110B/zh active
- 2017-05-02 TW TW106114454A patent/TWI787181B/zh active
- 2017-05-02 TW TW113113483A patent/TWI892579B/zh active
- 2017-05-18 KR KR1020170061709A patent/KR102433627B1/ko active Active
- 2017-05-22 EP EP17172132.7A patent/EP3251760B1/en active Active
- 2017-05-22 JP JP2017100801A patent/JP7042039B2/ja active Active
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