JP2017173297A - Substrate inspection jig - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate inspection jig in which contactors for substrate inspection are tilted and easily bendable for efficient substrate inspection.SOLUTION: The present invention relates to a substrate inspection jig, which has a simple tilt forming structure of contactors for substrate inspection and is able to efficiently perform substrate inspection, the jig comprising: a plurality of contactors each having a tip end for inspecting a wire pattern of an inspection substrate and a rear end connected to a measurement device through an electrode part; a base plate located on the electrode part and including a contactor hole to guide and fix the rear end for connection to the electrode part; and an upper plate including an upper plate contactor hole to guide and fix the tip end, wherein the tip end of the contactor is fixed to upper plate contactor holes of a first upper plate and a second upper plate of the upper plate, and the rear end of the contactor moves a second base plate of the base plate so as to bend the contactor located in a space part to tilt through a simple structure, while being fixed to the contactor hole of a first base plate of the base plate.SELECTED DRAWING: Figure 4

Description

The present invention relates to a jig, and more particularly to a substrate inspection jig that can easily form an inclined contact structure for substrate inspection and can efficiently perform the substrate inspection.

Generally, a semiconductor such as an IC or an electric / electronic component such as a resistor is mounted on a wiring pattern on a circuit board. Such electrical / electronic components must accurately transmit electrical signals. For this reason, the resistance value between the contact portions of the wiring pattern is measured before mounting the electrical / electronic component, and the electrical characteristics and the quality are judged.

Specifically, the determination of pass / fail is made by contacting each contact portion with a current supply terminal or voltage measurement terminal, supplying a measurement current from the current supply terminal to the contact portion, and measuring the voltage in contact with the contact portion. The voltage generated between the terminals is measured, and the resistance value between the predetermined contact portions is calculated from the supplied current and the measured voltage.

In order to perform such inspection efficiently and accurately, a plurality of contacts are supported in order to perform inspection by bringing the contact portion on the wiring pattern and the contact portion on the measuring device into contact with each other on the inspection target substrate. Inspection jig is used.

Substrate inspection is performed in a state in which the contact is inclined so that the contact portion on the wiring pattern and the contact portion on the measuring device are in stable contact with each other.

In the existing method, the support layer of the contact of the inspection jig is moved or deformed to form the contact inclination, the electrode part of the measuring apparatus is moved, or the support base that supports the electrode part of the measuring apparatus The contact is tilted by moving.

In addition, a technique for tilting the substrate contact by forming a hole for accommodating the substrate contact in the tilt direction or arranging a plurality of holes to tilt is also disclosed.

However, the structure for tilting the contact is complicated, and there is a problem that it is difficult for the contact to bend in the tilted state.

Korean Registered Patent No. 10-102744 Korean Registered Patent No. 10-0975808

It is an object of the present invention to form a contact for inspecting a substrate so that the structure is simple, the contact is in an inclined state, and further, it is easy for the contact to be bent. It is an object of the present invention to provide a substrate inspection jig with high efficiency.

In order to achieve the above-described object, the present invention provides a front end portion 110 for inspecting the wiring pattern 12 in contact with the wiring pattern 12 of the inspection substrate 10 and a rear end portion connected to the measuring device through the electrode portion 400. In a substrate inspection jig supporting a plurality of contacts 100 including 120, a fixing hole 210 for fixing the electrode unit 400, which is positioned above the electrode unit 400, and the rear end part 120 are the electrode unit. A contact hole 220 for guiding and fixing so as to be connected to 400, a movement hole 230 for changing the position, an alignment hole 240 for aligning the position to the original position, and an alignment hole for mutual alignment. 250, and a first base plate 270 having a coupling hole 260 for mutual coupling, a second base plate 280, and a third base plate 290 are sequentially stacked. A space 30 is formed between the base plate 200 and the base plate 200 so as to be spaced apart from each other by the support 20, and an upper plate alignment for alignment with the base plate 200 is formed. A hole 310, an upper plate fixing hole 320 for fixing the support base 20, an upper plate contactor hole 330 for guiding and fixing the tip 110, and an upper plate coupling hole 340 for mutual coupling are formed. The first upper plate 350 and the upper plate 300 in which the second upper plate 360 are sequentially stacked, and the diameter of the alignment hole 250b of the second base plate 280 is the first base plate 270 and the third base plate. The diameters of the alignment holes 250a and 250c of the plate 290 are larger than the diameters of the coupling holes 260b of the second base plate 280, and the diameters of the first base plate 270 and the third base plate 290 are the same. The center of the moving hole 230b of the second base plate 280 is shifted from the center of the moving holes 230a and 230c of the first base plate 270 and the third base plate 290. Placed in.

If the movement alignment pin 40 is inserted into the moving hole 230, the first base plate 270, the second base plate 280, and the third base plate 280 move while the second base plate 280 moves to either the left or right. The movement holes 230a, 230b and 230c of the plate 290 are concentric, and the alignment hole 240b of the second base plate 280 is mutually aligned with the centers of the alignment holes 240a and 240c of the first base plate 270 and the third base plate 290. It arrange | positions so that it may slip | deviate and the said contactor 100 in the said space part 30 will incline to either one of right and left.

When the alignment pin 50 is inserted into the alignment hole 240, the first base plate 270, the second base plate 280, and the third base plate 280 move while moving the second base plate 280 to the left or right. The alignment holes 240a, 240b, 240c of the base plate 290 are concentric, and the center of the moving hole 230b of the second base plate 280 is the center of the moving holes 230a, 230c of the first base plate 270 and the third base plate 290. Arranged so as to be offset from the center.

In addition, the diameter of the coupling hole 260b of the second base plate 280 is larger than the diameter of the coupling screw 202 inserted into the coupling hole 260, and the difference in diameter is greater than or equal to the moving distance of the second base plate 280. Provided.

The difference between the diameter of the alignment hole 250b of the second base plate 280 and the diameter of the alignment holes 250a and 250c of the first base plate 270 and the third base plate 290 is greater than or equal to the moving distance of the second base plate 280. Is done.

The contact holes 220a and 220b of the first base plate 270 and the second base plate 280 are formed such that the lower end side of the contact holes 220a and 220b has a diameter smaller than the diameter of the rear end portion 120 of the contact. The upper sides of the contact holes 220a and 220b are formed to have a diameter larger than the diameter of the rear end portion 120 of the contact, and the contact holes 220c of the third base plate 290 have a diameter larger than the diameter of the rear end portion 120. The upper plate contact holes 330a and 330b of the first upper plate 350 and the second upper plate 360 are formed through the upper terminal side of the upper plate contact holes 330a and 330b from the diameter of the tip 110 of the contact. The upper plate contactor holes 330a and 330b are formed to have a smaller diameter, and the lower side of the upper plate contactor holes 330a and 330b is formed to have a diameter larger than the diameter of the tip 110 of the contactor. End of the tip portion 110 of the contact element protrudes above the second upper plate 360.
The diameter of the moving hole 230b of the second base plate 280 is the same as the diameter of the moving holes 230a and 230c of the first base plate 270 and the third base plate 290.

In the present invention, the front end 110 of the contact 100 is fixed to the upper contact holes 330a and 330b of the first upper plate 350 and the second upper plate 360 of the upper plate 300, and the rear end 120 of the contact 100 is the base. The second base plate 280 is moved in a state of being fixed to the contact hole 220a of the first base plate 270 of the plate 200, and the contact 100 positioned in the space 30 is formed to be inclined with a simple structure. is there.

In addition, according to the present invention, if the end of the tip portion 110 of the contactor 100 is pressed by the wiring pattern 12 of the inspection board 10, the contactor 100 inside the space portion 30 is inclined. Even if a little force is applied to the contact point, the inclination is easily generated, and it is possible to easily confirm whether the end of the tip end portion 110 of the contactor 100 is pushed by the occurrence of the bending.

1 is a side view of a substrate inspection jig according to an embodiment of the present invention. It is an enlarged view of A (two-dot chain line area | region) of FIG. It is an enlarged view of B (two-dot chain line area | region) of FIG. It is the side view which showed the movement of the 2nd base board 280 with the board | substrate inspection jig which concerns on embodiment of this invention. It is an enlarged view of C (two-dot chain line area | region) of FIG. It is an enlarged view of D (two-dot chain line area | region) of FIG. FIG. 6 is an enlarged view showing a state in which the wiring pattern 12 of the inspection board 10 is press-contacted to the terminal end 110 of the contact 100 in FIG. 5.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention.

The inspection target in this specification is not only a printed wiring board but also an electric wiring on various substrates such as a flexible substrate, a multilayer wiring substrate, an electrode plate for a liquid crystal display and a plasma display, a package substrate for a semiconductor package, and a film carrier. In the present specification, these are collectively referred to as “inspection substrate”.

1 is a side view of a substrate inspection jig according to an embodiment of the present invention, FIG. 2 is an enlarged view of A (two-dot chain line region) in FIG. 1, and FIG. 3 is an enlarged view of B (two-dot chain line region) in FIG. FIG.

As shown in FIGS. 1 to 3, the substrate inspection jig according to the embodiment of the present invention is connected to the measuring device through the tip portion 110 and the electrode portion 400 for inspecting the wiring pattern 12 of the inspection substrate 10. A jig for inspecting a substrate that supports a plurality of contacts 100 including end portions 120, which is positioned above the electrode portion 300 and has a fixing hole 210 for fixing an object to be fixed, and a rear end portion 120 that is connected to the electrode portion. A contact hole 220 for guiding and fixing so as to be connected to 400, a moving hole 230 for changing the position, an alignment hole 240 for aligning the position to the original position, an alignment hole 250 for mutual alignment, and A first base plate 270 in which a coupling hole 260 for mutual coupling is formed, a base plate 200 in which a second base plate 280 and a third base plate 290 are sequentially stacked; The space 30 is formed between the base plate 200 and the upper plate alignment hole 310 for alignment with the base plate 200, and for fixing the support plate 20. The upper plate fixing hole 320, the upper plate contact hole 330 for guiding and fixing the tip 110, and the first upper plate 350 and the second upper plate 360 formed with the upper plate coupling hole 340 for mutual coupling are sequentially formed. Further, the upper plate 300 is stacked.

The contact 100 is made of a material such as stainless steel, tungsten, beryllium, or copper having flexibility and conductivity, and is formed into a thin and long bar shape. In the contact 100, the end of the tip portion 110 is pressed against the inspection point of the wiring pattern 12 of the inspection substrate 10, and the end of the lower end portion 120 is brought into contact with the measuring device. The contact 100 can transmit an electric signal from the measuring device to the inspection point and can transmit an electric signal from the inspection point to the measuring device.

Since the contact 100 has flexibility, the contact 100 bends in a direction perpendicular to the major axis direction in the space 30 formed between the base plate 200 and the upper plate 300. For this reason, the load is bent by the inspection points of the wiring pattern 12 of the inspection substrate 10 and the electrode part 400, and pressure is generated for each contact portion by this bending.

The surface of the contact 100 can be covered with an insulating coating except for the end of the tip 110 and the end of the lower end 120. The end of the tip 110 and the end of the lower end 120 are formed in a sharp shape or a spherical shape. The length and thickness of the contact 100 vary depending on the pitch of the wiring pattern 12 formed on the inspection substrate 10 and the size of the inspection substrate.

The tip 110 of the contact 100 is sandwiched between upper plate contact holes 330 formed on the upper plate 300. At this time, the end of the tip 110 protrudes from the second upper plate 360.

The rear end 120 of the contact 100 is sandwiched between contact holes 220 formed in the base plate 200. Since the contact hole 220 of the base plate 200 and the upper plate contact hole 330 of the upper plate 300 are arranged on a straight line so that their centers coincide with each other, the contact 100 maintains a shape close to vertical.

The base plate 200 includes a first base plate 270, a second base plate 280, and a third base plate 290 that are sequentially stacked. The base plate 200 fixes and supports the rear end 120 of the contact 100 and moves the rear end 120 to the right so that the contact 100 can be inclined. An outer pinhole 204 is formed in the outermost shell of the base plate 200, and an outer matching pin 80 is sandwiched in the outer pinhole 204. The outer alignment pin 80 serves to block the hand and other objects from approaching the inspection substrate 10 to the upper plate 300 positioned above the base plate 200. The outer pin 80 is fixed only to the third base plate 290 so as not to disturb the flow of the second base plate 280. A plurality of outer pinholes 204 can be formed around the base plate 200, whereby a plurality of outer alignment pins 80 can be inserted.

In the base plate 200, an alignment hole 240 is formed adjacent to the inside of the outer pin hole 204. The alignment hole 240 is for inserting the alignment pin 50, and the alignment hole 240 has the same center of the alignment holes 240a, 240b, 240c of the first base plate 270, the second base plate 280, and the third base plate 290. It is for matching with the original place so as to have. A plurality of alignment holes 240 may be provided, and the alignment pins 50 may be inserted to correspond to the number of alignment holes 240. The alignment pin 50 is coupled to the alignment hole 240 by an interference fit method and can move up and down.

A fixing hole 210 for fixing the base plate 200 to the electrode part 400 is formed adjacent to the alignment hole 240 in the base plate 200. A fixing bolt 70 is inserted into the fixing hole 210. The fixing bolt 70 is screwed to a fixing nut 72 installed on the electrode support base 500. The fixing bolt 70 serves to fix the first base plate 270, the second base plate 280, and the third base plate 290 to the electrode unit support base 500.

In addition, a screw hole 206 is formed adjacent to the fixing hole 210. The support table 20 is positioned above the screw hole 206, and the first upper plate 350 of the upper plate 300 is coupled to the upper end of the support table 20 by the support table screw 22. The support base screw 22 is also located inside the screw hole 206 to couple the third base plate 290 and the rear end of the support base 20. Although one screw hole 206 is shown in the drawing, there are a plurality of screw holes 206 depending on the sizes of the base plate 200 and the upper plate 300, and the support base 20 and the support base screws 22 correspond to the number corresponding to the screw holes 206. Provided.

Further, an alignment hole 250 is formed adjacent to the screw hole 206 of the base plate 200. An alignment pin 60 is inserted into the alignment hole 250. The alignment pins 60 serve to align the first base plate 270, the second base plate 280, and the third base plate 290 in a line, and the upper plate alignment hole 310 of the upper plate 300 is disposed above the alignment pins 60. Is sandwiched. A plurality of alignment holes 250 are formed according to the sizes of the base plate 200 and the upper plate 300, and the alignment holes 60 are provided to correspond to the number of the alignment holes 250.

A contact hole 220 for guiding and fixing the rear end 120 of the contact 100 to be connected to the electrode 400 is formed inside the alignment hole 250 of the base plate 200. The number of contact holes 220 corresponding to the number of contacts 100 is formed.

A moving hole 230 for changing the position of the base plate 200 is provided on the right side of the contact hole 220 of the base plate 200. The movement alignment pin 40 is inserted into the movement hole 230. The movement alignment pin 40 serves to move the second base plate 280 to the right. The movement alignment pin 40 is coupled to the movement hole 230 by an interference fit method and can move up and down. A plurality of movement holes 230 can be formed, and a plurality of movement alignment pins 40 are also provided thereby.

A coupling hole 260 is formed on the right side of the movement hole 230 of the base plate 200. A coupling screw 202 is coupled to the coupling hole 260. The first base plate 270, the second base plate 280, and the third base plate 290 are fixed together through the coupling screw 202. A plurality of coupling holes 260 may be formed according to the size of the base plate 200, and the number of coupling screws 202 corresponding to the number of coupling holes 202 is provided.

The first base plate 270 is fixed to the upper part of the electrode part 400 by a fixing bolt 70 inserted into the fixing hole 210. The contact hole 220a formed in the first base plate 270 has a lower end side formed with a diameter smaller than the diameter of the rear end portion 120 of the contact 100, and an upper side formed with a diameter larger than the diameter of the rear end portion 120. . In a state where the rear end portion 120 is fitted and fixed to the contact hole 220a, the end of the rear end portion 120 is brought into contact with the surface of the electrode portion 400. By forming the upper part side of the contact hole 220a larger than the diameter of the rear end part 120, the rear end part 120 can be easily bent in a state of being fitted and fixed to the contact hole 220a.

The second base plate 280 is laminated on the upper portion of the first base plate 270, and the fixing bolt 70 is inserted into the fixing hole 210 and fixed. After that, the connecting screw 202 is fastened to the connecting hole 260 and the first base plate 280 is fixed. 270 and the third base plate 290 are combined. The contact hole 220b formed in the second base plate 280 is formed in a straight line with the contact hole 220a of the first base plate 270. The contact hole 220b formed in the second base plate 280 is also formed such that the lower end side has a diameter smaller than the diameter of the rear end portion 120 of the contact 100, and the upper side has a diameter larger than the diameter of the rear end portion 120. . The rear end 120 is fitted and fixed to the contact hole 220b. By forming the upper side of the contact hole 220b to be larger than the diameter of the rear end portion 120, the rear end portion 120 can be easily bent in a state of being fitted and fixed to the contact hole 220b.

The diameter of the alignment holes 250b of the second base plate 280 is larger than the diameters of the alignment holes 250a and 250c of the first base plate 270 and the third base plate 290.

The diameters of the movement holes 230a, 230b, and 230c of the first base plate 270, the second base plate 280, and the third base plate 290 are the same, but the center of the movement hole 230b of the second base plate 280 is the first base. The plates 270 and the third base plate 290 are disposed so as to be displaced from the centers of the movement holes 230a and 230c. The moving hole 230b can be arranged so that the center is deviated to the left (or right), for example. If the movement alignment pin 40 is inserted into the movement hole 230, the second base plate 280 moves to the right side while the centers of the movement holes 230a, 230b, and 230c coincide (see FIG. 4).

The third base plate 290 is stacked on the upper portion of the second base plate 280, and the fixing bolt 70 is inserted into the fixing hole 210 and fixed. After that, the connecting screw 202 is fastened to the connecting hole 260 and the first base plate 290 is fixed. 270 and the second base plate 280. The contact hole 220c formed in the third base plate 280 is formed in a straight line with the contact hole 220b of the second base plate 270. The contact hole 220 c formed in the third base plate 290 is formed to penetrate to a diameter larger than the diameter of the rear end portion 120.

With the centers of the contact holes 220a, 220b, and 220c of the first base plate 270, the second base plate 280, and the third base plate 290 being aligned, the rear end 120 of the contact 100 is the contact hole 220a, It passes through the contact hole 220c in a state of being sequentially fixed to 220b.

Meanwhile, in the third base plate 290, the coupling screw 202 is screw-coupled to the coupling hole 260c, but the coupling holes 260a and 260b of the first base plate 270 and the second base plate 280 are provided larger than the diameter of the coupling screw 202. Thus, the screw is not helically coupled to the coupling screw 202 and is fixed by the helical coupling force of the third base plate 290 and the coupling screw 202. Accordingly, the second base plate 280 is not affected by the coupling screw 202 when the second base plate 280 is moved to the side surface by the moving alignment pin 40.

In addition, the alignment holes 250b of the second base plate 280 are formed larger in diameter than the alignment holes 250b of the first base plate 270 and the third base plate 290. Accordingly, when the second base plate 280 is moved to the right by the moving alignment pin 40, the alignment pin 60 is prevented from being applied.

The upper plate 300 is separated upward from the base plate 200 by the support base 20. A space 30 is formed between the separated spaces. The upper plate 300 guides and fixes the upper plate alignment hole 310 for aligning with the base plate 200, the upper plate fixing hole 320 for fixing to the support base 20, and the tip portion 110 of the contact 100. Therefore, an upper plate contact hole 330 and an upper plate coupling hole 340 for mutual coupling of the first upper plate 350 and the second upper plate 360 are formed.

The first upper plate 350 is formed with an upper plate fixing hole 320 at a position corresponding to the support base 20, and is fixed to the support base 20 by the support base screws 22. The upper plate fixing hole 320 is formed at a position corresponding to the screw hole 206 of the base plate 200. The support base 20 is fixed by the support base screws 22 in a state where the support base 20 is positioned at the upper part of the third base plate 290 and the lower part of the first upper plate 350.

The upper plate alignment hole 310 is formed through the first upper plate 350 and the second upper plate 360 at the same position, and the alignment pins 60 are inserted therein.

An upper plate contact hole 330 is formed at a position corresponding to the contact hole 220 in a state where the upper plate 300 is separated from the base plate 200 by the support base 20.

The upper plate contactor hole 330 a formed in the first upper plate 350 is formed such that the upper terminal side has a diameter smaller than the diameter of the tip part 110 of the contactor 100 and the lower side has a diameter larger than the diameter of the tip part 110. The The front end portion 110 is fitted and fixed to the upper plate contact hole 330a. By forming the lower side of the upper plate contactor hole 330a to be larger than the diameter of the front end part 110, the front end part 110 can be easily bent in a state in which the upper end contactor hole 330a is fitted and fixed.

The upper plate contact hole 330b formed in the second upper plate 360 is also formed such that the upper end side has a diameter smaller than the diameter of the tip portion 110 of the contact 100, and the lower side has a diameter larger than the diameter of the tip portion 110. . The front end portion 110 is fitted and fixed in the upper plate contact hole 330b.

The front end portion 110 of the contactor 100 is primarily fixed by the upper plate contactor hole 330 a of the first upper plate 350 and secondarily fixed by the upper plate contactor hole 330 b of the second upper plate 360, and the front end portion of the contactor 100. 110 does not come off easily and is firmly fixed.

On the other hand, the end of the tip 110 of the contact 100 protrudes above the upper plate contact hole 330b of the second upper plate 360 so that the wiring pattern 12 of the inspection board 10 can easily contact.

Hereinafter, the movement of the second base plate 280 and the inspection of the inspection substrate 10 will be described with reference to FIGS.

1 is a side view of a substrate inspection jig according to an embodiment of the present invention, FIG. 2 is an enlarged view of A (two-dot chain line region) in FIG. 1, and FIG. 3 is an enlarged view of B (two-dot chain line region) in FIG. FIG.

FIGS. 1 to 3 show a state before the inspection of the inspection substrate 10, and specifically illustrate a state before the second base plate 280 of the base plate 200 moves.

When the first fixing bolt 70 is inserted into the fixing hole 210 of the base plate 200, the first base plate 270, the second base plate 280, and the third base plate 290 are in a state in which their centers are aligned with each other. . At this time, a plurality of fixing bolts 70 may exist.

The center of the base plate 200 is aligned, but the movement holes 230a and 230c of the first base plate 270 and the third base plate 290 and the movement hole 230b of the second base plate 280 are shifted from each other. To position. Although the centers of the movement holes 230a and 230c of the first base plate 270 and the third base plate 290 are the same, the movement hole 230b of the second base plate 280 is shown on the right side (in the drawing, it can be moved to the right side, but also on the left side. Applied to the same). That is, when viewed from above the moving hole 230, the moving hole 230b of the second base plate 280 partially protrudes.

In this state, the coupling screw 202 of the coupling hole 260 is loosened below the first base plate 270 as shown in FIG. FIG. 3 illustrates a state in which the coupling screw 202 is loosened. Since the coupling screw head is not in contact with the coupling hole 260 as shown in the drawing, only a small force is applied to the first base plate 270 and the second base plate 280. But it can be moved. On the other hand, in a state where the coupling screw 202 is strongly tightened with the third coupling plate 290, the first base plate 270, the second base plate 280, and the third base plate 290 are firmly fixed to each other, and the first, second, third, and third plates are fixed. The base plate cannot move.

The diameter of the coupling hole 260b of the second base plate 280 is formed to be larger than the diameter of the coupling screw 202, and the difference in diameter is the second base plate 280 movement interval (ie, the second base plate when viewed from the top of the movement hole 230). The second base plate 280 does not engage the coupling screw 202 and can move smoothly.

In addition, the diameter of the alignment hole 250b of the second base plate 280 is formed to be larger than the diameters of the first base plate 270 and the third base plate 290, and the difference in diameter is greater than or equal to the movement interval of the second base plate 280. Therefore, the second base plate 280 can be smoothly moved without being caught by the alignment pins 60.

4 is a side view showing the movement of the second base plate 280 in the substrate inspection jig according to the embodiment of the present invention, FIG. 5 is an enlarged view of C (two-dot chain line region) in FIG. 4, and FIG. It is an enlarged view of D (two-dot chain line area).

4 to 6 show a state before the inspection of the inspection substrate 10, and specifically illustrate a state after the second base plate 280 of the base plate 200 is moved.

As described above, when the fixing bolt 70 is removed from the fixing hole 210 in a state where the connecting screw 202 is loosened in the connecting hole 260 of the base plate 200, the second base plate 280 is allowed to flow.

If the movement alignment pin 40 is inserted into the movement hole 230 of the base plate 200 in this state, the second base is arranged while being arranged in a line so that the centers of the movement holes 230a, 230b, 230c formed so as to be displaced from each other are aligned. The plate 280 moves to the right between the first base plate 270 and the third base plate 290. At this time, the movement interval can be moved to, for example, 0.4 mm, but varies depending on the design of the substrate inspection jig.

As the second base plate 280 moves, the rear end portion 120 of the contact 100 fixed to the contact hole 220b also moves. At this time, the front end portion 110 of the contact 100 is fixed to the upper plate contact hole 330 a formed in the first upper plate 350, and the rear end 120 of the contact 100 is fixed to the contact hole 220 a of the first base plate 270. In a fixed state, the contact 100 located in the space 30 is inclined rightward.

If the coupling screw 202 of the coupling hole 260 of the base plate 200 is tightened in this state, the first base plate 270, the second base plate 280, and the third base plate 290 are firmly fixed to each other.

FIG. 7 is an enlarged view showing that the wiring pattern 12 of the inspection board 10 is pressed against the terminal end 110 of the contact 100 in FIG.

As shown in FIG. 7, when the terminal end 110 of the contact 100 is pressed against the wiring pattern 12 of the test substrate 10, the contact 100 inside the space 30 is bent. In this state, the quality of the inspection substrate 10 is determined through the inspection result of the measuring device connected to the electrode unit 400.

When the wiring pattern 12 is brought into pressure contact with the end of the front end portion 110 of the contact 100, the contact 100 inside the space 30 is bent, and the end of the front end 110 of the contact 100 due to the occurrence of the bending. Can be checked.

At this time, since the contact 100 inside the space 30 is inclined, the inclination is easily generated even if a slight force is applied to the end of the tip 110.

On the other hand, when it is necessary to replace the contact 100 or to disassemble the substrate inspection jig, the moving alignment pin 40 is removed from the moving hole 230 of the base plate 200 and the connecting screw 202 is connected to the connecting hole 260. Loosen from.

Thereafter, the alignment pin 50 is inserted into the alignment hole 240 of the base plate 200 or the fixing bolt 70 is inserted into the fixing hole 210.

Then, the second base plate 280 moves to the left as shown in FIG.

As a result, the original state before the contact 100 in the space 30 is tilted is restored.

An unexplained symbol 500 is an electrode part support, which is coupled to the lower part of the electrode part 400, and the fixing nut 72 is positioned at the lower part, and the fixing bolt 70 is screwed to the fixing nut 72. Thus, the base plate 200 and the electrode unit 400 are fixed.

The electrode support 500 can also be divided into multiple layers and are coupled to each other by a fixing screw 502.

The electrode unit 400 and the electrode unit support 500 are separable, and are joined after the base plate 200 and the upper plate 300 are assembled.

DESCRIPTION OF SYMBOLS 10 Inspection board 12 Wiring pattern 20 Support stand 22 Support stand screw 30 Space part 40 Moving alignment pin 50 Alignment pin 60 Alignment pin 70 Fixing bolt 72 Fixing nut 80 Outer alignment pin 100 Contactor 110 Tip part 120 Back end part 200 Base Plate 202 Coupling screw 204 Outer pin hole 206 Screw hole 210 Fixing hole 220, 220a, 220b, 220c Contact hole 230, 230a, 230b, 230c Moving hole 240, 240a, 240b, 240c Alignment hole 250, 250a, 250b, 250c Alignment Holes 260, 260a, 260b, 260c Coupling hole 270 First base plate 280 Second base plate 290 Third base plate 300 Upper plate 302 Coupling screw 310 Upper plate alignment hole 320 Upper plate fixing holes 330, 330a, 330b Upper plate contact hole 340 Upper plate coupling hole 350 First upper plate 360 Second upper plate 400 Electrode unit 500 Electrode unit support base 502 Fixing screw

Claims (7)

A rear end portion (120) connected to the measuring device through the front end portion (110) and the electrode portion (400) for inspecting the wiring pattern (12) by contacting the wiring pattern (12) of the inspection substrate (10). In a substrate inspection jig for supporting a plurality of contacts (100) comprising:
A fixing hole (210) for fixing to the electrode part (400) and the rear end part (120) are positioned on the electrode part (400) and connected to the electrode part (400). A contact hole (220) for guiding and fixing to the substrate, a movement hole (230) for changing the position, an alignment hole (240) for aligning the position change to the original position, and an alignment hole for mutual alignment. (250) and a first base plate (270) in which a coupling hole (260) for mutual coupling is formed, a base plate in which a second base plate (280) and a third base plate (290) are sequentially stacked. 200),
A space (30) is formed between the base plate (200) and the base plate (200). The space (30) is formed between the base plate (200) and the base plate (200). And an upper plate contact hole (330) for guiding and fixing the tip (110). ) And an upper plate (300) in which a first upper plate (350) formed with an upper plate coupling hole (340) for mutual coupling and a second upper plate (360) are sequentially stacked,
The diameter of the alignment hole (250b) of the second base plate (280) is larger than the diameter of the alignment holes (250a, 250c) of the first base plate (270) and the third base plate (290),
The diameter of the coupling hole (260b) of the second base plate (280) is larger than the diameter of the coupling hole (260a, 260c) of the first base plate (270) and the third base plate (290),
The movement holes (230b) of the second base plate (280) are disposed so as to be shifted from the centers of the movement holes (230a, 230c) of the first base plate (270) and the third base plate (290). , Jig for board inspection. When a movement alignment pin (40) is inserted into the movement hole (230), the second base plate (280) moves to either the left or right side while moving the first base plate (270) and the second base. The movement holes (230a, 230b, 230c) of the plate (280) and the third base plate (290) are concentric, and the alignment hole (240b) of the second base plate (280) is the first base plate ( 270) and the center of the alignment hole (240a, 240c) of the third base plate (290), and the contact (100) in the space (30) is positioned on either the left or right side. The jig | tool for a board | substrate inspection of Claim 1 which comes to incline. If the alignment pin (50) is inserted into the alignment hole (240), the second base plate (280) moves to either the left or right side while moving the first base plate (270) and the second base plate (280). The alignment holes (240a, 240b, 240c) of the base plate (280) and the third base plate (290) are concentric, and the moving hole (230b) of the second base plate (280) is the first base plate. (270) and the center of the movement hole (230a, 230c) of the third base plate (290) are arranged so as to be shifted from each other, and the contact (100) in the space (30) is in a vertical state. The substrate inspection jig according to claim 2. The diameter of the coupling hole (260b) of the second base plate (280) is larger than the diameter of the coupling screw (202) inserted into the coupling hole (260), and the difference in diameter is the second base plate (280). The substrate inspection jig according to claim 2, wherein the jig is provided so as to be larger than or equal to the movement distance. The difference between the diameter of the alignment hole (250b) of the second base plate (280) and the diameter of the alignment holes (250a, 250c) of the first base plate (270) and the third base plate (290) is the second base plate ( 280). The substrate inspection jig according to claim 4, wherein the jig is formed to be larger than or equal to a moving distance of 280). The contact holes (220a, 220b) of the first base plate (270) and the second base plate (280) are located at the lower end side of the contact holes (220a, 220b), and the rear end (120) of the contact. The contact hole (220a, 220b) has a diameter larger than the diameter of the rear end (120) of the contact, and the contact of the third base plate (290). The hole (220c) is formed to have a diameter larger than that of the rear end (120),
The upper plate contactor holes (330a, 330b) of the first upper plate (350) and the second upper plate (360) are located at the upper end side of the upper plate contactor holes (330a, 330b) and the tip of the contactor. (110) having a diameter smaller than that of the upper plate contact hole (330a, 330b) and having a diameter larger than the diameter of the tip (110) of the contact,
The jig for substrate inspection according to claim 1, wherein a terminal end of the contact (110) protrudes from an upper portion of the second upper plate (360). The diameter of the moving hole (230b) of the second base plate (280) is the same as the diameter of the moving holes (230a, 230c) of the first base plate (270) and the third base plate (290). 1. A jig for board inspection according to 1.