JP2017078630A5 - - Google Patents
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- Publication number
- JP2017078630A5 JP2017078630A5 JP2015206534A JP2015206534A JP2017078630A5 JP 2017078630 A5 JP2017078630 A5 JP 2017078630A5 JP 2015206534 A JP2015206534 A JP 2015206534A JP 2015206534 A JP2015206534 A JP 2015206534A JP 2017078630 A5 JP2017078630 A5 JP 2017078630A5
- Authority
- JP
- Japan
- Prior art keywords
- detection signal
- physical quantity
- lead
- base
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 53
- 230000005484 gravity Effects 0.000 claims 1
- 230000002787 reinforcement Effects 0.000 claims 1
- 230000003014 reinforcing effect Effects 0.000 claims 1
- 235000014676 Phragmites communis Nutrition 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015206534A JP6641874B2 (ja) | 2015-10-20 | 2015-10-20 | 物理量検出装置、電子機器および移動体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015206534A JP6641874B2 (ja) | 2015-10-20 | 2015-10-20 | 物理量検出装置、電子機器および移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017078630A JP2017078630A (ja) | 2017-04-27 |
| JP2017078630A5 true JP2017078630A5 (enrdf_load_stackoverflow) | 2018-11-15 |
| JP6641874B2 JP6641874B2 (ja) | 2020-02-05 |
Family
ID=58666199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015206534A Expired - Fee Related JP6641874B2 (ja) | 2015-10-20 | 2015-10-20 | 物理量検出装置、電子機器および移動体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6641874B2 (enrdf_load_stackoverflow) |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001185578A (ja) * | 1999-12-24 | 2001-07-06 | Toshiba Corp | 半導体装置 |
| JP2005292079A (ja) * | 2004-04-05 | 2005-10-20 | Seiko Epson Corp | 圧電デバイス、及び圧電発振器 |
| JP4442526B2 (ja) * | 2005-07-20 | 2010-03-31 | セイコーエプソン株式会社 | 圧電振動ジャイロセンサ及び圧電振動ジャイロセンサを備えた電子機器 |
| CN101769784B (zh) * | 2008-12-27 | 2012-06-20 | 鸿富锦精密工业（深圳）有限公司 | 感测器组合 |
| JP2010190706A (ja) * | 2009-02-18 | 2010-09-02 | Panasonic Corp | 慣性力センサ |
| JP5652155B2 (ja) * | 2010-11-24 | 2015-01-14 | セイコーエプソン株式会社 | 振動片、センサーユニット、電子機器、振動片の製造方法、および、センサーユニットの製造方法 |
| JP6255903B2 (ja) * | 2013-10-31 | 2018-01-10 | セイコーエプソン株式会社 | 角速度センサー、電子機器および移動体 |
| JP6357758B2 (ja) * | 2013-11-25 | 2018-07-18 | セイコーエプソン株式会社 | 物理量センサー、電子機器および移動体 |
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2015
- 2015-10-20 JP JP2015206534A patent/JP6641874B2/ja not_active Expired - Fee Related