JP2017063034A - 導電体、その製造方法、およびこれを含む素子 - Google Patents
導電体、その製造方法、およびこれを含む素子 Download PDFInfo
- Publication number
- JP2017063034A JP2017063034A JP2016187490A JP2016187490A JP2017063034A JP 2017063034 A JP2017063034 A JP 2017063034A JP 2016187490 A JP2016187490 A JP 2016187490A JP 2016187490 A JP2016187490 A JP 2016187490A JP 2017063034 A JP2017063034 A JP 2017063034A
- Authority
- JP
- Japan
- Prior art keywords
- metal
- conductive layer
- ruthenium oxide
- conductor
- nanosheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004020 conductor Substances 0.000 title claims abstract description 117
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000002135 nanosheet Substances 0.000 claims abstract description 140
- 229910052751 metal Inorganic materials 0.000 claims abstract description 134
- 239000002184 metal Substances 0.000 claims abstract description 130
- 229910001925 ruthenium oxide Inorganic materials 0.000 claims abstract description 120
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 claims abstract description 118
- 238000000034 method Methods 0.000 claims description 38
- 238000002834 transmittance Methods 0.000 claims description 26
- 239000007864 aqueous solution Substances 0.000 claims description 25
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 24
- 239000002070 nanowire Substances 0.000 claims description 22
- 150000003839 salts Chemical class 0.000 claims description 22
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 21
- 229910052709 silver Inorganic materials 0.000 claims description 21
- 239000010931 gold Substances 0.000 claims description 16
- 239000004332 silver Substances 0.000 claims description 15
- 229910052783 alkali metal Inorganic materials 0.000 claims description 13
- 239000011248 coating agent Substances 0.000 claims description 13
- 238000000576 coating method Methods 0.000 claims description 13
- 229910052707 ruthenium Inorganic materials 0.000 claims description 13
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 11
- 229910052737 gold Inorganic materials 0.000 claims description 11
- 239000002904 solvent Substances 0.000 claims description 11
- 150000001340 alkali metals Chemical class 0.000 claims description 10
- 239000011230 binding agent Substances 0.000 claims description 10
- 229910052763 palladium Inorganic materials 0.000 claims description 10
- 239000011347 resin Substances 0.000 claims description 10
- 229920005989 resin Polymers 0.000 claims description 10
- 239000010949 copper Substances 0.000 claims description 9
- 229910052723 transition metal Inorganic materials 0.000 claims description 9
- 150000003624 transition metals Chemical class 0.000 claims description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 7
- 229910000510 noble metal Inorganic materials 0.000 claims description 7
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 7
- 150000002910 rare earth metals Chemical class 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- 229920001187 thermosetting polymer Polymers 0.000 claims description 5
- 229910052792 caesium Inorganic materials 0.000 claims description 4
- 238000007598 dipping method Methods 0.000 claims description 4
- 229910052741 iridium Inorganic materials 0.000 claims description 4
- 229910052700 potassium Inorganic materials 0.000 claims description 4
- 229910052701 rubidium Inorganic materials 0.000 claims description 4
- 229910052706 scandium Inorganic materials 0.000 claims description 4
- 229910052708 sodium Inorganic materials 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims description 4
- 229910052727 yttrium Inorganic materials 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052693 Europium Inorganic materials 0.000 claims description 3
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910017052 cobalt Inorganic materials 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052748 manganese Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 229910052702 rhenium Inorganic materials 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 229910052720 vanadium Inorganic materials 0.000 claims description 3
- 229910052726 zirconium Inorganic materials 0.000 claims description 3
- 229910052790 beryllium Inorganic materials 0.000 claims description 2
- 229910052791 calcium Inorganic materials 0.000 claims description 2
- 229910052746 lanthanum Inorganic materials 0.000 claims description 2
- 229910052712 strontium Inorganic materials 0.000 claims description 2
- 230000035699 permeability Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 116
- 239000000758 substrate Substances 0.000 description 27
- VDZOOKBUILJEDG-UHFFFAOYSA-M tetrabutylammonium hydroxide Chemical compound [OH-].CCCC[N+](CCCC)(CCCC)CCCC VDZOOKBUILJEDG-UHFFFAOYSA-M 0.000 description 22
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 22
- 239000010408 film Substances 0.000 description 15
- 239000000203 mixture Substances 0.000 description 15
- 239000000523 sample Substances 0.000 description 15
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 14
- 238000005259 measurement Methods 0.000 description 14
- -1 alkali metal ruthenium oxide Chemical class 0.000 description 12
- 150000001875 compounds Chemical class 0.000 description 12
- 239000000463 material Substances 0.000 description 12
- 239000001866 hydroxypropyl methyl cellulose Substances 0.000 description 11
- 229920003088 hydroxypropyl methyl cellulose Polymers 0.000 description 11
- 235000010979 hydroxypropyl methyl cellulose Nutrition 0.000 description 11
- UFVKGYZPFZQRLF-UHFFFAOYSA-N hydroxypropyl methyl cellulose Chemical compound OC1C(O)C(OC)OC(CO)C1OC1C(O)C(O)C(OC2C(C(O)C(OC3C(C(O)C(O)C(CO)O3)O)C(CO)O2)O)C(CO)O1 UFVKGYZPFZQRLF-UHFFFAOYSA-N 0.000 description 11
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 11
- 239000000243 solution Substances 0.000 description 10
- 238000004088 simulation Methods 0.000 description 9
- 238000001179 sorption measurement Methods 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 101710134784 Agnoprotein Proteins 0.000 description 8
- 239000002042 Silver nanowire Substances 0.000 description 8
- 238000002441 X-ray diffraction Methods 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- CQLFBEKRDQMJLZ-UHFFFAOYSA-M silver acetate Chemical compound [Ag+].CC([O-])=O CQLFBEKRDQMJLZ-UHFFFAOYSA-M 0.000 description 8
- 229940071536 silver acetate Drugs 0.000 description 8
- 239000012298 atmosphere Substances 0.000 description 7
- 230000008859 change Effects 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 239000012790 adhesive layer Substances 0.000 description 6
- 125000004429 atom Chemical group 0.000 description 6
- 229910044991 metal oxide Inorganic materials 0.000 description 6
- 150000004706 metal oxides Chemical class 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 5
- 239000002243 precursor Substances 0.000 description 5
- 150000003378 silver Chemical class 0.000 description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000007772 electrode material Substances 0.000 description 4
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000008188 pellet Substances 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 238000003775 Density Functional Theory Methods 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 229910021389 graphene Inorganic materials 0.000 description 3
- 238000009830 intercalation Methods 0.000 description 3
- 230000002687 intercalation Effects 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 238000001000 micrograph Methods 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 3
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 3
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000001878 scanning electron micrograph Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910001961 silver nitrate Inorganic materials 0.000 description 3
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 description 3
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 description 3
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 description 2
- BFSPCOPPXSGRMY-UHFFFAOYSA-N 2-phenylethylazanium;hydroxide Chemical compound O.NCCC1=CC=CC=C1 BFSPCOPPXSGRMY-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- 229920002153 Hydroxypropyl cellulose Polymers 0.000 description 2
- 229910002651 NO3 Inorganic materials 0.000 description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 238000002835 absorbance Methods 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 239000008199 coating composition Substances 0.000 description 2
- 239000002270 dispersing agent Substances 0.000 description 2
- 238000000921 elemental analysis Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000000445 field-emission scanning electron microscopy Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000001863 hydroxypropyl cellulose Substances 0.000 description 2
- 235000010977 hydroxypropyl cellulose Nutrition 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- 239000012266 salt solution Substances 0.000 description 2
- 238000004626 scanning electron microscopy Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- DZLFLBLQUQXARW-UHFFFAOYSA-N tetrabutylammonium Chemical compound CCCC[N+](CCCC)(CCCC)CCCC DZLFLBLQUQXARW-UHFFFAOYSA-N 0.000 description 2
- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 description 2
- LNAZSHAWQACDHT-XIYTZBAFSA-N (2r,3r,4s,5r,6s)-4,5-dimethoxy-2-(methoxymethyl)-3-[(2s,3r,4s,5r,6r)-3,4,5-trimethoxy-6-(methoxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6r)-4,5,6-trimethoxy-2-(methoxymethyl)oxan-3-yl]oxyoxane Chemical compound CO[C@@H]1[C@@H](OC)[C@H](OC)[C@@H](COC)O[C@H]1O[C@H]1[C@H](OC)[C@@H](OC)[C@H](O[C@H]2[C@@H]([C@@H](OC)[C@H](OC)O[C@@H]2COC)OC)O[C@@H]1COC LNAZSHAWQACDHT-XIYTZBAFSA-N 0.000 description 1
- 125000003837 (C1-C20) alkyl group Chemical group 0.000 description 1
- 125000004178 (C1-C4) alkyl group Chemical group 0.000 description 1
- 125000004209 (C1-C8) alkyl group Chemical group 0.000 description 1
- KLFRPGNCEJNEKU-FDGPNNRMSA-L (z)-4-oxopent-2-en-2-olate;platinum(2+) Chemical compound [Pt+2].C\C([O-])=C\C(C)=O.C\C([O-])=C\C(C)=O KLFRPGNCEJNEKU-FDGPNNRMSA-L 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229920000663 Hydroxyethyl cellulose Polymers 0.000 description 1
- 239000004354 Hydroxyethyl cellulose Substances 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910021607 Silver chloride Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- CTUFHBVSYAEMLM-UHFFFAOYSA-N acetic acid;platinum Chemical compound [Pt].CC(O)=O.CC(O)=O CTUFHBVSYAEMLM-UHFFFAOYSA-N 0.000 description 1
- 239000003929 acidic solution Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910000288 alkali metal carbonate Inorganic materials 0.000 description 1
- 150000008041 alkali metal carbonates Chemical class 0.000 description 1
- 150000001339 alkali metal compounds Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000007611 bar coating method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000001768 carboxy methyl cellulose Substances 0.000 description 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000012461 cellulose resin Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 238000004299 exfoliation Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 229910052730 francium Inorganic materials 0.000 description 1
- FDWREHZXQUYJFJ-UHFFFAOYSA-M gold monochloride Chemical compound [Cl-].[Au+] FDWREHZXQUYJFJ-UHFFFAOYSA-M 0.000 description 1
- OTCKNHQTLOBDDD-UHFFFAOYSA-K gold(3+);triacetate Chemical compound [Au+3].CC([O-])=O.CC([O-])=O.CC([O-])=O OTCKNHQTLOBDDD-UHFFFAOYSA-K 0.000 description 1
- ZVUZTTDXWACDHD-UHFFFAOYSA-N gold(3+);trinitrate Chemical compound [Au+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O ZVUZTTDXWACDHD-UHFFFAOYSA-N 0.000 description 1
- 238000007756 gravure coating Methods 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 235000019447 hydroxyethyl cellulose Nutrition 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000004123 n-propyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- 239000000075 oxide glass Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- PIBWKRNGBLPSSY-UHFFFAOYSA-L palladium(II) chloride Chemical compound Cl[Pd]Cl PIBWKRNGBLPSSY-UHFFFAOYSA-L 0.000 description 1
- YJVFFLUZDVXJQI-UHFFFAOYSA-L palladium(ii) acetate Chemical compound [Pd+2].CC([O-])=O.CC([O-])=O YJVFFLUZDVXJQI-UHFFFAOYSA-L 0.000 description 1
- JKDRQYIYVJVOPF-FDGPNNRMSA-L palladium(ii) acetylacetonate Chemical compound [Pd+2].C\C([O-])=C\C(C)=O.C\C([O-])=C\C(C)=O JKDRQYIYVJVOPF-FDGPNNRMSA-L 0.000 description 1
- GPNDARIEYHPYAY-UHFFFAOYSA-N palladium(ii) nitrate Chemical compound [Pd+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O GPNDARIEYHPYAY-UHFFFAOYSA-N 0.000 description 1
- 229920005548 perfluoropolymer Polymers 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- CLSUSRZJUQMOHH-UHFFFAOYSA-L platinum dichloride Chemical compound Cl[Pt]Cl CLSUSRZJUQMOHH-UHFFFAOYSA-L 0.000 description 1
- NWAHZABTSDUXMJ-UHFFFAOYSA-N platinum(2+);dinitrate Chemical compound [Pt+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O NWAHZABTSDUXMJ-UHFFFAOYSA-N 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 1
- CHACQUSVOVNARW-LNKPDPKZSA-M silver;(z)-4-oxopent-2-en-2-olate Chemical compound [Ag+].C\C([O-])=C\C(C)=O CHACQUSVOVNARW-LNKPDPKZSA-M 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000007764 slot die coating Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 229910052713 technetium Inorganic materials 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 150000005622 tetraalkylammonium hydroxides Chemical class 0.000 description 1
- CBXCPBUEXACCNR-UHFFFAOYSA-N tetraethylammonium Chemical class CC[N+](CC)(CC)CC CBXCPBUEXACCNR-UHFFFAOYSA-N 0.000 description 1
- QEMXHQIAXOOASZ-UHFFFAOYSA-N tetramethylammonium Chemical class C[N+](C)(C)C QEMXHQIAXOOASZ-UHFFFAOYSA-N 0.000 description 1
- OSBSFAARYOCBHB-UHFFFAOYSA-N tetrapropylammonium Chemical compound CCC[N+](CCC)(CCC)CCC OSBSFAARYOCBHB-UHFFFAOYSA-N 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 230000005428 wave function Effects 0.000 description 1
- 239000000230 xanthan gum Substances 0.000 description 1
- 229920001285 xanthan gum Polymers 0.000 description 1
- 235000010493 xanthan gum Nutrition 0.000 description 1
- 229940082509 xanthan gum Drugs 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
- H01B1/08—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/14—Conductive material dispersed in non-conductive inorganic material
- H01B1/16—Conductive material dispersed in non-conductive inorganic material the conductive material comprising metals or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
- H01B13/0026—Apparatus for manufacturing conducting or semi-conducting layers, e.g. deposition of metal
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
- H01B13/0036—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B3/00—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties
- H01B3/18—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances
- H01B3/30—Insulators or insulating bodies characterised by the insulating materials; Selection of materials for their insulating or dielectric properties mainly consisting of organic substances plastics; resins; waxes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04102—Flexible digitiser, i.e. constructional details for allowing the whole digitising part of a device to be flexed or rolled like a sheet of paper
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Theoretical Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Dispersion Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Human Computer Interaction (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Non-Insulated Conductors (AREA)
- Laminated Bodies (AREA)
- Conductive Materials (AREA)
- Manufacturing Of Electric Cables (AREA)
Abstract
Description
ルテニウム酸化物ナノシートを含む第1導電層を形成する段階と、
金属塩(金属クラスター前駆体)水溶液を前記第1導電層表面と所定の時間接触させて前記第1導電層表面に金属クラスターを形成する段階とを含むことが好ましい。
[1]面抵抗測定(4探針法)
面抵抗の測定は下記のように行った:
測定機器:Mitsubishi loresta−GP(MCP−T610)、ESP type probes(MCP−TP08P)
サンプル大きさ:横20cm×縦30cm
測定:少なくとも9回測定した後の平均値。
光透過率の測定は下記のように行った:
測定機器:日本電色工業株式会社製NDH−7000 SP
測定波長:550nmまたは全体可視光の波長
サンプルサイズ:横20cm×縦30cm
サンプル測定:少なくとも9回測定した後の平均値。
ヘイズの測定は下記のように行った:
測定機器:日本電色工業株式会社製NDH−7000 SP
サンプルサイズ:横20cm×縦30cm
サンプル測定:少なくとも9回測定した後の平均値。
下記の機器を用いて走査電子顕微鏡分析、X線回折分析および原子間力顕微鏡(Atomic Force Microscope)分析を行い、ナノシートの平均横方向サイズ、層間距離および厚さ、導電層の厚さなどを測定した:
走査電子顕微鏡:FE−SEM(Field Emission Scanning Electron Microscopy)株式会社日立ハイテクノロジーズ製SU−8030
X線回折分析(XRD):bruker製D8 Advance
原子間力顕微鏡(AFM):Bruker社製Icon。
K2CO3およびRuO2を5:8(モル比)で混合してペレットに成形する。得られたペレット4gをアルミナ坩堝に入れて、これをチューブファーネス(tube furnace)で850℃で12時間窒素雰囲気で熱処理した。ペレット総重量は1〜20g範囲で必要によって調節することができる。その次に、ファーネスを常温に冷却し、処理されたペレットを取り出して粉砕して微細粉末を得た。
製造例1で得られたルテニウム酸化物ナノシートを含む下記組成のコーティング液を製造した:
ルテニウム酸化物ナノシート水分散液(1g/L) 3g
HPMC水溶液(0.3重量%) 0.5g
イソプロパノール 3g
水 1g。
製造例2で得られたルテニウム酸化物ナノシートを有する導電層上にAgクラスターを吸着させるために、0.05M濃度のAgNO3水溶液を製造した。製造例2で得られた導電層を室温(25℃)でAgNO3水溶液に浸漬した後、約12時間後に取り出した。前記導電層表面をエタノールで洗浄してAgNO3水溶液を除去し、表面に銀クラスターを有するルテニウム酸化物ナノシートを含む導電体を得た。なお、銀クラスター吸着による導電層の厚さの変化は無かった。
実施例1で得られた導電体の導電層上に、製造例2の方法でルテニウム酸化物ナノシートを含む導電層をさらに形成し、前記導電層上に実施例1と同様の方法で銀クラスターを形成し、ナノシート表面だけでなくナノシート間にも銀クラスターを有する導電体を得た。すなわち、得られた導電体において、銀クラスターは、2回目に形成された導電層上だけでなく、1回目に形成された導電層と2回目に形成された導電層との間にも存在する。
製造例2と類似した方法で、ポリカーボネート基板上にルテニウム酸化物ナノシートを含む導電層を形成した。これを用いて、以下の方法により、導電体1、2および3をそれぞれ作製した。
導電層上にAgクラスターを吸着させるために、0.2Mの硝酸銀(AgNO3)水溶液を製造した。上記の導電層を有するサンプルを室温(25℃)でAgNO3水溶液に浸漬した後、約12時間後に取り出した。前記導電層表面をエタノールで洗浄してAgNO3水溶液を除去し、表面に銀クラスターを有するルテニウム酸化物ナノシートを含む導電体1を得た。なお、銀クラスター吸着による導電層の厚さの変化は無かった。
導電層上にAgクラスターを吸着させるために、0.05Mの酢酸銀(CH3CO2Ag)水溶液を製造した。製造例2で得られた導電層を有するサンプルを室温(25℃)で酢酸銀水溶液に浸漬した後、約12時間後に取り出した。前記導電層表面をエタノールで洗浄して酢酸銀(CH3CO2Ag)水溶液を除去し、表面に銀クラスターを有するルテニウム酸化物ナノシートを含む導電体2を得た。なお、銀クラスター吸着による導電層の厚さの変化は無かった。
導電層上にAgクラスターを吸着させるために、0.05Mの酢酸銀(CH3CO2Ag)水溶液を製造した。製造例2で得られた導電層を有するサンプルを、室温(25℃)で酢酸銀水溶液に浸漬した後、約72時間後に取り出した。前記導電層表面をエタノールで洗浄して酢酸銀(CH3CO2Ag)水溶液を除去し、表面に銀クラスターを有するルテニウム酸化物ナノシートを含む導電体3を得た。なお、銀クラスター吸着による導電層の厚さの変化は無かった。
[1]製造例1で得られたRuO2.1ナノシートを含む下記組成のコーティング液を製造した:
得られたRuO2.1ナノシートの水分散液 3g
HPMC水溶液(0.3wt%) 0.5g
イソプロパノール 3g
水 1g
得られたRuO2.1ナノシートコーティング液は、少量のTBAOHおよびTMAOHを含んでいるが、これらはRuO2.1ナノシートの製造のための剥離時に使用されたインターカラントと考えられる。RuO2.1ナノシートコーティング液をポリカーボネート基板の上にバーコーティングし、大気中で85℃で乾燥した。このような過程を3回繰り返して第1導電層を得た。バーコーティング方式で得られた第1導電層は厚さが1〜5nmであることを確認した。得られた第1導電層の面抵抗を4点プローブ測定法で測定した(試片の大きさ:横3.5cm×縦3.5cm、測定装備:Mitsubishi chemical analytech社製造、モデル名:MCP T610)、透過度は基板の光吸収度を除いて素材の吸収度のみを考慮してNippon Denshoku社のNDH 7000SPで測定した。測定結果、面抵抗は1.20×105Ω/sqであり、透過度は92.4%であった。(例えば、ヒドロキシプロピルメチルセルロース(HPMC))をさらに含むことができる。
銀ナノワイヤーの水溶液(濃度:0.5wt%、銀ナノワイヤーの平均直径30nm)3g
溶媒:水7g及びエタノール3g
バインダー:ヒドロキシプロピルメチルセルロース水溶液(濃度:0.3wt%)0.5g
上記銀ナノワイヤー含有の組成物を上記第1導電層上にバーコーティングし、大気中で85℃で1分間乾燥した。
20:第1導電層
30:基板
40:ルテニウム酸化物ナノシート
41:銀ナノワイヤー
42:ルテニウム酸化物ナノシート
43:基板
44:オーバーコーティング
50:金属クラスター
60:Ag原子
70:ルテニウム原子
80:酸素原子
100:表示装置用パネル
200:第1透明導電膜
300:第1透明接着層
400:第2透明伝導膜
500:第2透明接着層
600:表示装置用ウィンドウ
Claims (24)
- 複数のルテニウム酸化物ナノシートを含む第1導電層を有する導電体であって、
前記複数のルテニウム酸化物ナノシートのうちの少なくとも2枚のナノシートが互いに接触して電気的連結を形成し、前記複数のルテニウム酸化物ナノシートのうちの1枚以上のナノシートは、表面に金属クラスターを有する、導電体。 - 前記金属クラスターは前記ルテニウム酸化物ナノシートの表面に吸着している、請求項1に記載の導電体。
- 前記金属クラスターは、前記ルテニウム酸化物ナノシートの上面(top surface)もしくは2つのルテニウム酸化物ナノシートの間またはその両方に存在する、請求項1または2に記載の導電体。
- 前記金属クラスターは、前記ルテニウム酸化物の仕事関数より低い仕事関数を有する金属元素を含む、請求項1〜3のいずれか1項に記載の導電体。
- 前記金属元素は、貴金属、遷移金属、アルカリ金属および希土類金属からなる群より選択される少なくとも1種を含む、請求項4に記載の導電体。
- 前記金属元素は、Cs、Rb、Ba、Ra、K、Sr、Eu、Yb、Na、Ca、Y、Li、Lu、Sc、La、Mg、Hf、Zr、Mn、Ta、V、Nb、Ti、Cu、Cr、Fe、Ag、Al、W、Mo、Ru、Os、Rh、Co、Au、Ni、Pd、Be、Ir、PtおよびReからなる群より選択される少なくとも1種を含む、請求項4または5に記載の導電体。
- 前記金属クラスターの大きさは1Å〜1000nmである、請求項1〜6のいずれか1項に記載の導電体。
- 前記金属クラスターを構成する金属元素が、ルテニウム元素100at%に対して1at%以上含まれる、請求項1〜7のいずれか1項に記載の導電体。
- 前記第1導電層の一方の面に導電性金属ナノワイヤーを含む第2導電層をさらに有する、請求項1〜8のいずれか1項に記載の導電体。
- 前記導電性金属は、銀(Ag)、銅(Cu)、金(Au)、アルミニウム(Al)、コバルト(Co)およびパラジウム(Pd)からなる群より選択される少なくとも1種を含む、請求項9に記載の導電体。
- 透明導電膜である、請求項1〜10のいずれか1項に記載の導電体。
- 前記ルテニウム酸化物ナノシートは、平均横方向サイズ(lateral size)が0.5μm以上100μm以下であり、平均厚さが1nm以上3nm以下である、請求項1〜11のいずれか1項に記載の導電体。
- 前記第1導電層は、前記複数のルテニウム酸化物ナノシートの間に開放された空間(open space)を含む不連続層であり、前記第1導電層の総面積に対する開放空間の面積比率が50%以下である、請求項1〜12のいずれか1項に記載の導電体。
- 波長550nmの光の透過率が85%以上であり、面抵抗が2.0×105Ω/sq以下である、請求項1〜13のいずれか1項に記載の導電体。
- 前記第1導電層はバインダーをさらに含む、請求項1〜14のいずれか1項に記載の導電体。
- 前記第1導電層の上に、熱硬化性樹脂、紫外線硬化性樹脂、またはこれらの組み合わせを含むオーバーコーティング層をさらに含む、請求項1〜15のいずれか1項に記載の導電体。
- ルテニウム酸化物ナノシートを含む第1導電層を形成する段階と、
金属塩水溶液を前記第1導電層の表面と所定の時間接触させて、前記第1導電層表面に金属クラスターを形成する段階と、
を含む、請求項1〜16のいずれか1項に記載の導電体の製造方法。 - 前記金属塩は、前記ルテニウム酸化物の仕事関数より低い仕事関数を有する金属元素を含む、請求項17に記載の方法。
- 前記金属塩は、貴金属、遷移金属、アルカリ金属および希土類金属からなる群より選択される少なくとも1種の金属元素を含む、請求項17または18に記載の方法。
- 前記金属塩水溶液は、金属元素を0.001モル/L以上2モル/L以下含む、請求項17〜19のいずれか1項に記載の方法。
- 前記接触は、浸漬、噴射、コーティング、またはこれらの組み合わせを含む、請求項17〜20のいずれか1項に記載の方法。
- 前記金属クラスターを含む前記第1導電層の表面を溶媒で洗浄し、前記第1導電層表面に存在する前記金属塩を除去する段階をさらに含む、請求項17〜21のいずれか1項に記載の方法。
- 請求項1〜16のいずれか1項に記載の導電体を含む電子素子。
- フラットパネルディスプレイ、タッチスクリーンパネル、太陽電池、e−ウィンドウ、エレクトロクロミックミラー、ヒートミラー、透明トランジスタ、センサー、またはフレキシブルディスプレイである、請求項23に記載の電子素子。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20150136925 | 2015-09-25 | ||
KR10-2015-0136925 | 2015-09-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017063034A true JP2017063034A (ja) | 2017-03-30 |
JP6777486B2 JP6777486B2 (ja) | 2020-10-28 |
Family
ID=57103820
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016187490A Active JP6777486B2 (ja) | 2015-09-25 | 2016-09-26 | 導電体、その製造方法、およびこれを含む素子 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9892815B2 (ja) |
EP (1) | EP3147912B1 (ja) |
JP (1) | JP6777486B2 (ja) |
KR (2) | KR20170037572A (ja) |
CN (1) | CN107025951B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7450254B2 (ja) | 2019-06-28 | 2024-03-15 | 国立研究開発法人産業技術総合研究所 | 神経伝達物質の計測方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3147316A1 (en) * | 2015-09-25 | 2017-03-29 | Samsung Electronics Co., Ltd. | Electrical conductors, electrically conductive structures, and electronic devices including the same |
KR101996544B1 (ko) * | 2017-10-31 | 2019-10-01 | 한국기초과학지원연구원 | 불연속적 크기 분포를 가지는 금속 클러스터 이온의 제조 방법 및 그를 이용하여 제조된 금속 클러스터 이온 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06350218A (ja) * | 1993-06-08 | 1994-12-22 | Tdk Corp | 配線基板およびその製造方法 |
JPH1045427A (ja) * | 1996-07-29 | 1998-02-17 | Sumitomo Metal Mining Co Ltd | 暗色系透明導電膜形成用塗布液、及びこれを用いた暗色系透明導電膜 |
JPH10312902A (ja) * | 1997-05-13 | 1998-11-24 | Oki Electric Ind Co Ltd | 記録素子 |
JP2001223132A (ja) * | 1999-11-29 | 2001-08-17 | Tdk Corp | 電子部品およびその製造方法 |
JP2004315347A (ja) * | 2003-03-28 | 2004-11-11 | Wataru Sugimoto | ルテニウム酸ナノシートおよびその製造方法 |
JP2005173551A (ja) * | 2003-08-15 | 2005-06-30 | E I Du Pont De Nemours & Co | 光透過性電磁シールドを形成するための感光性厚膜ペースト材料、および同材料を使用して形成した光透過性電磁シールド、およびその製造方法 |
JP2006339139A (ja) * | 2005-03-09 | 2006-12-14 | E I Du Pont De Nemours & Co | 黒色導電性厚膜組成物、黒色電極、およびこれらの形成方法 |
JP2010188549A (ja) * | 2009-02-16 | 2010-09-02 | Shinshu Univ | ナノシートとポリマーとの複合薄膜の製造方法、およびナノシートとポリマーとの複合薄膜 |
JP2010280977A (ja) * | 2009-06-08 | 2010-12-16 | Shinshu Univ | 金属ナノシートの製造方法、および金属ナノシート |
US20120247524A1 (en) * | 2011-03-29 | 2012-10-04 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Thermoelectric materials |
JP2013058429A (ja) * | 2011-09-09 | 2013-03-28 | Shinshu Univ | 酸素還元能を有する電極触媒 |
JP2013251220A (ja) * | 2012-06-04 | 2013-12-12 | Shin Etsu Polymer Co Ltd | 導電パターン形成基板の製造方法および導電パターン形成基板 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3607789A (en) * | 1968-05-02 | 1971-09-21 | Precision Electronic Component | Electroconductive glaze and method for preparation |
DE4421007A1 (de) | 1994-06-18 | 1995-12-21 | Philips Patentverwaltung | Elektronisches Bauteil und Verfahren zu seiner Herstellung |
US7585349B2 (en) | 2002-12-09 | 2009-09-08 | The University Of Washington | Methods of nanostructure formation and shape selection |
KR100600412B1 (ko) | 2003-03-28 | 2006-07-13 | 스기모토 와타루 | 루테늄산 나노시트 및 그 제조방법, 루테늄산 화합물 및전기화학소자 |
DE102006045514B4 (de) | 2006-08-16 | 2012-04-05 | Saint-Gobain Sekurit Deutschland Gmbh & Co. Kg | Transparente Flächenelektrode |
US8277694B2 (en) | 2007-07-13 | 2012-10-02 | Jx Nippon Mining & Metals Corporation | Sintered compact of composite oxide, amorphous film of composite oxide, process for producing said film, crystalline film of composite oxide and process for producing said film |
WO2009065180A1 (en) | 2007-11-23 | 2009-05-28 | The University Of Queensland | Non-metal doped metal oxide nanosheets and method of production thereof |
JP5294246B2 (ja) | 2008-01-25 | 2013-09-18 | 独立行政法人物質・材料研究機構 | 酸化物層状発光体と酸化物ナノシート発光体 |
JP5319227B2 (ja) | 2008-10-02 | 2013-10-16 | 花王株式会社 | 異種金属元素ドープチタン酸ナノシート分散液 |
JP4592829B1 (ja) | 2009-04-15 | 2010-12-08 | 昭和電工株式会社 | 透明導電性材料の製造方法 |
EP2454069B1 (en) | 2009-07-15 | 2017-08-23 | The University of Akron | Manufacturing of multifunctional electrically conductive/transparent/flexible films |
US20120300168A1 (en) | 2011-05-23 | 2012-11-29 | Raytheon Company | Optically transparent conductors |
JP5984089B2 (ja) | 2011-10-25 | 2016-09-06 | 国立研究開発法人物質・材料研究機構 | スピンコート法によりナノシート単層膜からなる薄膜を製造する方法、それによる超親水化材料、酸化物薄膜用基板、および、誘電体材料 |
KR101338215B1 (ko) | 2012-03-07 | 2013-12-05 | 부산대학교 산학협력단 | NiO 나노시트의 제조방법 및 그 방법에 의하여 제조된 NiO 나노시트 |
KR20130107460A (ko) | 2012-03-22 | 2013-10-02 | 동우 화인켐 주식회사 | 도전성 적층 필름, 이를 포함하는 터치패널 및 표시장치 |
CN104909352B (zh) * | 2015-06-02 | 2017-03-01 | 中国科学院过程工程研究所 | 一种空心结构的过渡金属和钌复合氧化物纳米材料及其制备方法 |
-
2016
- 2016-09-26 KR KR1020160123458A patent/KR20170037572A/ko not_active Application Discontinuation
- 2016-09-26 CN CN201610851003.5A patent/CN107025951B/zh active Active
- 2016-09-26 US US15/275,538 patent/US9892815B2/en active Active
- 2016-09-26 EP EP16190652.4A patent/EP3147912B1/en active Active
- 2016-09-26 JP JP2016187490A patent/JP6777486B2/ja active Active
-
2024
- 2024-04-23 KR KR1020240054056A patent/KR20240060767A/ko active IP Right Grant
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06350218A (ja) * | 1993-06-08 | 1994-12-22 | Tdk Corp | 配線基板およびその製造方法 |
JPH1045427A (ja) * | 1996-07-29 | 1998-02-17 | Sumitomo Metal Mining Co Ltd | 暗色系透明導電膜形成用塗布液、及びこれを用いた暗色系透明導電膜 |
JPH10312902A (ja) * | 1997-05-13 | 1998-11-24 | Oki Electric Ind Co Ltd | 記録素子 |
JP2001223132A (ja) * | 1999-11-29 | 2001-08-17 | Tdk Corp | 電子部品およびその製造方法 |
JP2004315347A (ja) * | 2003-03-28 | 2004-11-11 | Wataru Sugimoto | ルテニウム酸ナノシートおよびその製造方法 |
JP2005173551A (ja) * | 2003-08-15 | 2005-06-30 | E I Du Pont De Nemours & Co | 光透過性電磁シールドを形成するための感光性厚膜ペースト材料、および同材料を使用して形成した光透過性電磁シールド、およびその製造方法 |
JP2006339139A (ja) * | 2005-03-09 | 2006-12-14 | E I Du Pont De Nemours & Co | 黒色導電性厚膜組成物、黒色電極、およびこれらの形成方法 |
JP2010188549A (ja) * | 2009-02-16 | 2010-09-02 | Shinshu Univ | ナノシートとポリマーとの複合薄膜の製造方法、およびナノシートとポリマーとの複合薄膜 |
JP2010280977A (ja) * | 2009-06-08 | 2010-12-16 | Shinshu Univ | 金属ナノシートの製造方法、および金属ナノシート |
US20120247524A1 (en) * | 2011-03-29 | 2012-10-04 | The Government Of The United States Of America, As Represented By The Secretary Of The Navy | Thermoelectric materials |
JP2013058429A (ja) * | 2011-09-09 | 2013-03-28 | Shinshu Univ | 酸素還元能を有する電極触媒 |
JP2013251220A (ja) * | 2012-06-04 | 2013-12-12 | Shin Etsu Polymer Co Ltd | 導電パターン形成基板の製造方法および導電パターン形成基板 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7450254B2 (ja) | 2019-06-28 | 2024-03-15 | 国立研究開発法人産業技術総合研究所 | 神経伝達物質の計測方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20240060767A (ko) | 2024-05-08 |
US9892815B2 (en) | 2018-02-13 |
CN107025951B (zh) | 2020-02-18 |
CN107025951A (zh) | 2017-08-08 |
EP3147912A1 (en) | 2017-03-29 |
US20170092387A1 (en) | 2017-03-30 |
EP3147912B1 (en) | 2019-05-15 |
KR20170037572A (ko) | 2017-04-04 |
JP6777486B2 (ja) | 2020-10-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10575370B2 (en) | Electrical conductors, electrically conductive structures, and electronic devices including the same | |
KR101207363B1 (ko) | 나노미터 두께의 금속 마이크로판을 함유하는 전도성 페이스트용 조성물 | |
KR20240060767A (ko) | 도전체, 그 제조 방법, 및 이를 포함하는 전자 소자 | |
US11052644B2 (en) | Electrical conductors, production methods thereof, and electronic devices including the same | |
US10993320B2 (en) | Population of metal oxide nanosheets, preparation method thereof, and electrical conductor and electronic device including the same | |
JP2017092031A (ja) | 透明電極およびこれを含む素子 | |
Wang et al. | Facile synthesis of ultralong and thin copper nanowires and its application to high-performance flexible transparent conductive electrodes | |
Chang et al. | Highly foldable transparent conductive films composed of silver nanowire junctions prepared by chemical metal reduction | |
US20170040089A1 (en) | Methods of preparing conductors, conductors prepared therefrom, and electronic devices including the same | |
WO2010095546A1 (ja) | 透明導電性フィルム及び透明電極 | |
Sun et al. | Synchronously improved reliability, figure of merit and adhesion of flexible copper nanowire networks by chitosan transition | |
WO2015044881A1 (en) | Catalytic transparent electrode consisting of graphene film and application on metal nanoparticles and a method for preparation and respective usages | |
KR20150075173A (ko) | 투명 전도성 산화물과 은 나노 와이어를 포함하는 투명 전극 및 그 제조방법 | |
KR101581664B1 (ko) | 금속산화물이 코팅된 금속 나노와이어를 포함하는 투명전도막의 제조방법 | |
US9648738B2 (en) | Electrical conductors, production methods thereof, and electronic devices including the same | |
JP5432486B2 (ja) | 多孔質膜及びこれを用いた透明電極 | |
Ao et al. | Synthesis of Ag nanowires with an aspect ratio higher than 2000 for the fabrication of transparent conductive film |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190919 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200417 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200602 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200831 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200915 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20201008 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6777486 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |