JP2017020898A5 - - Google Patents

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Publication number
JP2017020898A5
JP2017020898A5 JP2015138779A JP2015138779A JP2017020898A5 JP 2017020898 A5 JP2017020898 A5 JP 2017020898A5 JP 2015138779 A JP2015138779 A JP 2015138779A JP 2015138779 A JP2015138779 A JP 2015138779A JP 2017020898 A5 JP2017020898 A5 JP 2017020898A5
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JP
Japan
Prior art keywords
electrode side
fixed
movable electrode
movable
physical quantity
Prior art date
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Granted
Application number
JP2015138779A
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English (en)
Japanese (ja)
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JP6558110B2 (ja
JP2017020898A (ja
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Publication date
Application filed filed Critical
Priority to JP2015138779A priority Critical patent/JP6558110B2/ja
Priority claimed from JP2015138779A external-priority patent/JP6558110B2/ja
Priority to US15/187,953 priority patent/US10324106B2/en
Priority to CN201610509140.0A priority patent/CN106338281B/zh
Publication of JP2017020898A publication Critical patent/JP2017020898A/ja
Publication of JP2017020898A5 publication Critical patent/JP2017020898A5/ja
Priority to US16/251,555 priority patent/US10656174B2/en
Application granted granted Critical
Publication of JP6558110B2 publication Critical patent/JP6558110B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015138779A 2015-07-10 2015-07-10 物理量センサー、電子機器および移動体 Expired - Fee Related JP6558110B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2015138779A JP6558110B2 (ja) 2015-07-10 2015-07-10 物理量センサー、電子機器および移動体
US15/187,953 US10324106B2 (en) 2015-07-10 2016-06-21 Physical quantity sensor, electronic device, and mobile body
CN201610509140.0A CN106338281B (zh) 2015-07-10 2016-06-30 物理量传感器、电子设备以及移动体
US16/251,555 US10656174B2 (en) 2015-07-10 2019-01-18 Physical quantity sensor, electronic device, and mobile body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015138779A JP6558110B2 (ja) 2015-07-10 2015-07-10 物理量センサー、電子機器および移動体

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2019131744A Division JP6763458B2 (ja) 2019-07-17 2019-07-17 物理量センサー、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2017020898A JP2017020898A (ja) 2017-01-26
JP2017020898A5 true JP2017020898A5 (enExample) 2018-07-26
JP6558110B2 JP6558110B2 (ja) 2019-08-14

Family

ID=57730873

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015138779A Expired - Fee Related JP6558110B2 (ja) 2015-07-10 2015-07-10 物理量センサー、電子機器および移動体

Country Status (3)

Country Link
US (2) US10324106B2 (enExample)
JP (1) JP6558110B2 (enExample)
CN (1) CN106338281B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6485260B2 (ja) * 2015-07-10 2019-03-20 セイコーエプソン株式会社 物理量センサー、物理量センサー装置、電子機器および移動体
JP2018179575A (ja) * 2017-04-05 2018-11-15 セイコーエプソン株式会社 物理量センサー、電子機器、および移動体
JP6922594B2 (ja) * 2017-09-22 2021-08-18 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器、携帯型電子機器および移動体
JP6939475B2 (ja) * 2017-11-28 2021-09-22 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、複合センサーデバイス、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体
JP7123881B2 (ja) * 2019-08-28 2022-08-23 株式会社東芝 センサ

Family Cites Families (20)

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Publication number Priority date Publication date Assignee Title
DE19639946B4 (de) 1996-09-27 2006-09-21 Robert Bosch Gmbh Mikromechanisches Bauelement
JPH11230986A (ja) * 1998-02-18 1999-08-27 Denso Corp 半導体力学量センサ
US6065341A (en) 1998-02-18 2000-05-23 Denso Corporation Semiconductor physical quantity sensor with stopper portion
EP1626283B1 (en) * 2004-08-13 2011-03-23 STMicroelectronics Srl Micro-electromechanical structure, in particular accelerometer, with improved insensitivity to thermomechanical stresses
DE102007047592B4 (de) * 2007-10-05 2022-01-05 Robert Bosch Gmbh Beschleunigungssensor
DE102008001863A1 (de) * 2008-05-19 2009-11-26 Robert Bosch Gmbh Beschleunigungssensor mit umgreifender seismischer Masse
DE102008002606B4 (de) * 2008-06-24 2020-03-12 Robert Bosch Gmbh Mikromechanischer Beschleunigungssensor mit offener seismischer Masse
US8371167B2 (en) * 2008-07-29 2013-02-12 Pixart Imaging Inc. In-plane sensor, out-of-plane sensor, and method for making same
JP5237733B2 (ja) 2008-09-22 2013-07-17 アルプス電気株式会社 Ｍｅｍｓセンサ
US8207586B2 (en) * 2008-09-22 2012-06-26 Alps Electric Co., Ltd. Substrate bonded MEMS sensor
JP2010237196A (ja) * 2009-03-12 2010-10-21 Seiko Epson Corp Ｍｅｍｓセンサー、ｍｅｍｓセンサーの製造方法、および電子機器
DE102009026476A1 (de) * 2009-05-26 2010-12-02 Robert Bosch Gmbh Mikromechanische Struktur
DE102009029202B4 (de) * 2009-09-04 2017-05-24 Robert Bosch Gmbh Verfahren zum Herstellen eines mikromechanischen Systems
US20120146452A1 (en) * 2010-12-10 2012-06-14 Miradia, Inc. Microelectromechanical system device and semi-manufacture and manufacturing method thereof
US8610222B2 (en) * 2011-04-18 2013-12-17 Freescale Semiconductor, Inc. MEMS device with central anchor for stress isolation
EP2802884B1 (en) 2012-01-12 2016-06-08 Murata Electronics Oy Accelerator sensor structure and use thereof
US9316666B2 (en) 2012-11-27 2016-04-19 Murata Manufacturing Co., Ltd. Acceleration sensor having a capacitor array located in the center of an inertial mass
JP5799942B2 (ja) * 2012-11-27 2015-10-28 株式会社村田製作所 加速度センサ
JP2014115080A (ja) 2012-12-06 2014-06-26 Alps Electric Co Ltd 物理量センサ
JP6020392B2 (ja) * 2013-09-03 2016-11-02 株式会社デンソー 加速度センサ

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