JP2016539250A - プラズマ火炎熱処理を用いたプラズマ溶射コーティングの強化 - Google Patents
プラズマ火炎熱処理を用いたプラズマ溶射コーティングの強化 Download PDFInfo
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- JP2016539250A JP2016539250A JP2016543976A JP2016543976A JP2016539250A JP 2016539250 A JP2016539250 A JP 2016539250A JP 2016543976 A JP2016543976 A JP 2016543976A JP 2016543976 A JP2016543976 A JP 2016543976A JP 2016539250 A JP2016539250 A JP 2016539250A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
- H01J37/32495—Means for protecting the vessel against plasma
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
- C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
- C23C4/11—Oxides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
- C23C4/134—Plasma spraying
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/18—After-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24967—Absolute thicknesses specified
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
- Y10T428/249981—Plural void-containing components
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- Plasma & Fusion (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Coating By Spraying Or Casting (AREA)
- Drying Of Semiconductors (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Ceramic Products (AREA)
Abstract
Description
Claims (15)
- セラミックス粉末をプラズマ溶射システム内へある粉末供給速度で供給する工程と、
プラズマ溶射システムによって、プラズマ溶射プロセス内で物品の少なくとも1つの表面上に、耐プラズマ性セラミックスコーティングを堆積させる工程と、
耐プラズマ性セラミックスコーティング上にクラストを形成するために、プラズマ溶射システムによって、耐プラズマ性セラミックスコーティングのインサイチュープラズマ火炎熱処理を実行する工程とを含む方法。 - インサイチュープラズマ火炎熱処理を実行する工程は、
プラズマ電力、銃の移動速度、又はプラズマ溶射システムの銃の距離のうちの少なくとも1つを調整する工程と、
セラミックス粉末の粉末供給速度をゼロまで低下させる工程とを含む、請求項1記載の方法。 - 物品は、プラズマエッチングリアクタ用のチャンバコンポーネントであり、物品は、金属または焼結セラミックスのうちの少なくとも1つを含む、請求項1記載の方法。
- 耐プラズマ性セラミックスコーティングは、Y3Al5O12、Y4Al2O9、Er2O3、Gd2O3、Y2O3、Er3Al5O12、Gd3Al5O12、YF3、又はNd2O3のうちの少なくとも1つを含む、請求項1記載の方法。
- 耐プラズマ性セラミックスコーティングは、Y4Al2O9と、Y2O3−ZrO2の固溶体とを含むセラミックス化合物を含む、請求項1記載の方法。
- 耐プラズマ性セラミックスコーティングは、1〜5%の空孔率を有し、クラストは、耐プラズマ性セラミックスコーティングよりも低い空孔率を有する、請求項1記載の方法。
- クラストは、約50ミクロン未満の厚さを有する、請求項1記載の方法。
- クラストは、約20ミクロン未満の厚さを有する、請求項1記載の方法。
- インサイチュープラズマ火炎熱処理は、約0.5〜20分間実行される、請求項1記載の方法。
- インサイチュープラズマ火炎熱処理は、約10〜15分間実行される、請求項1記載の方法。
- 耐プラズマ性セラミックスコーティングは、少なくとも100ミクロンの厚さを有する、請求項1記載の方法。
- プラズマ溶射システムは、大気圧プラズマ溶射システムを含む、請求項1記載の方法。
- 本体と、
本体の少なくとも1つの表面上の耐プラズマ性セラミックスコーティングであって、1〜5%の空孔率を有する耐プラズマ性セラミックスコーティングと、
耐プラズマ性セラミックスコーティングの表面上のクラストであって、クラストは、約50ミクロン未満の厚さと、耐プラズマ性セラミックスコーティングの空孔率よりも低い空孔率を有するスラストとを含む物品。 - 耐プラズマ性セラミックスコーティングは、Y3Al5O12、Y4Al2O9、Er2O3、Gd2O3、Y2O3、Er3Al5O12、Gd3Al5O12、YF3、又はNd2O3のうちの少なくとも1つを含む、請求項13記載の物品。
- 耐プラズマ性セラミックスコーティングは、Y4Al2O9と、Y2O3−ZrO2の固溶体とを含むセラミックス化合物を含む、請求項13記載の物品。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
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US201361879549P | 2013-09-18 | 2013-09-18 | |
US61/879,549 | 2013-09-18 | ||
US14/462,271 US10468235B2 (en) | 2013-09-18 | 2014-08-18 | Plasma spray coating enhancement using plasma flame heat treatment |
US14/462,271 | 2014-08-18 | ||
PCT/US2014/056169 WO2015042196A1 (en) | 2013-09-18 | 2014-09-17 | Plasma spray coating enhancement using plasma flame heat treatment |
Publications (2)
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JP2016539250A true JP2016539250A (ja) | 2016-12-15 |
JP6749238B2 JP6749238B2 (ja) | 2020-09-02 |
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JP2016543976A Active JP6749238B2 (ja) | 2013-09-18 | 2014-09-17 | プラズマ火炎熱処理を用いたプラズマ溶射コーティングの強化 |
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US (6) | US10468235B2 (ja) |
JP (1) | JP6749238B2 (ja) |
KR (1) | KR20160058749A (ja) |
CN (1) | CN105431232A (ja) |
TW (1) | TWI624869B (ja) |
WO (1) | WO2015042196A1 (ja) |
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TW201515087A (zh) | 2015-04-16 |
US20150079370A1 (en) | 2015-03-19 |
KR20160058749A (ko) | 2016-05-25 |
US20170301520A1 (en) | 2017-10-19 |
US20150075714A1 (en) | 2015-03-19 |
US20180108517A1 (en) | 2018-04-19 |
US20200035463A1 (en) | 2020-01-30 |
WO2015042196A1 (en) | 2015-03-26 |
US20180366302A1 (en) | 2018-12-20 |
TWI624869B (zh) | 2018-05-21 |
JP6749238B2 (ja) | 2020-09-02 |
US10468235B2 (en) | 2019-11-05 |
CN105431232A (zh) | 2016-03-23 |
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